• Journal of the Microelectronics and Packaging Society
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• v.18 no.1
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• pp.49-53
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• 2011

Diamond-like carbon (DLC) films is a metastable form of amorphous carbon containing a significant fraction of Sp3 bond. DLC films have been characterized by a range of attractive mechanical, chemical, tribological, as well as optical and electrical properties. In this study DLC films were prepared by the RF magnetron sputter system on $SiO_2$ substrates using graphite target. The effects of the post annealing temperature on the Property variation of the DLC films were examined. The DLC films were annealed at temperatures ranging from 300 to $500^{\circ}C$ using rapid thermal process equipment in vacuum. The variation of electrical property and surface morphology as a function of annealing treatment was investigated by using a Hall Effect measurement and atomic force microscopy. Raman and X-ray photoelectron spectroscopy analyses revealed a structural change in the DLC films.

• Applied Microscopy
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• v.46 no.1
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• pp.27-31
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• 2016

It has been investigated what kind of characteristic X-ray in electron probe micro-analyzer (EPMA) is effective for the determination of compounds of Si series materials. After comparing the characteristic X-rays among the primary and secondary lines in $K_{\alpha}$ and $K_{\beta}$ obtained from the Si series standard samples, it was found that the secondary line of $K_{\alpha}$ exhibited the most informative spectrum although the intensity was considerably weak. As a result of analyzing the spectrum shapes of the Si series standard samples, the spectrum shape of the secondary line of $K_{\alpha}$ for SiC was different from those for other Si compounds. To grasp the characteristics of the shape, a line was perpendicularly drawn from the peak top to base line in order to divide a spectrum into two areas. The area ratio of right to left was defined to call as the asymmetry index here. As a result, the asymmetry index value of the SiC was greater than one, while those of other Si compounds were less than one. It was found from the EPMA analysis that identification of SiC became successful to distinguish from other Si compounds and this method was applicable for micro-sized compounds in a practical composite material.

• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.320-327
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• 1998

The chemical aspects of nitridated surface of sapphire(0001) have been studied by X-ray photoelectron spectroscopy. Nitridated layer was formed by remote plasma enhanced-ultrahigh vacuum deposition at a low temperature range. It was confirmed that this nitridated surface was mainly consists of AIN layer. The relative amounts of nitrogen reacted with AL on the sapphire surface and their surface morphology were investigated with X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) as a function of radio-frequency power, reaction temperature, and reaction time. The amounts of atomic nitrogen activated by plasma which was subsequently incorporated into sapphire were increased with RF power. But the amounts of nitrogen reacted with AI in sapphire was initially increased and then remained constant. However, the relative amounts of AIN were nearly constant with irrespective of nitridation temperature and time. Furthermore, a depth porfile of nitridated layer with XPS showed that the nitridated surface consisted of three layers with different stoichiometry.

• ALGAE
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• v.27 no.2
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• pp.135-137
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• 2012

The stalks of the eustigmatophyte $Pseudocharaciopsis$ $minuta$ were examined by light and scanning electron microscopy. Light microscopy revealed orange-red granules at the base of the stalk. Energy dispersive X-ray microanalysis of the bases indicated that they were mainly composed of manganese. Manganese has not been previously reported from eustigmatophytes. This study indicates that the Eustigmatophyceae needs further study into many aspects of the biology.

• Journal of the Korean Vacuum Society
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• v.4 no.S1
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• pp.28-33
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• 1995

TiN 박막은 저온(<$500^{\circ}C$), 저압(1Torr)에서 Tetrakis(diethylamido)titanium[TDEAT, Ti(NEt2)4]single precursor를 사용하여 증착하였다. 증차고딘 박막은 SEM(Scanning Electron Microscopy)으로 surface morphology와 step coverage를 측정하였고, TEM(Transmission Electron Microscopy)분석결과 microcrystalline의 TiN을 확인하였다. XPS(X-ray Photoelectron Spectroscopy)분석결과에 따르면 $200-500^{\circ}C$구간에서는 $\beta$-hydogen elimination에 의한 반응이 일어나고 $600-700^{\circ}C$구간에서는 thermal decomposition에 의한 반응이 일어나고 있음을 알 수 있다. Carbon과 oxygen의 농도는 AES(Auger Electron Spectroscopy)를 사용하여 측정하였으며 온도가 감소할수록 carbon의 농도가 감소하는 경향을 보여주고 있다.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.52 no.3
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• pp.107-112
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• 2003

Amorphous carbon nitride thin films have been deposited on silicon (100) by reactive magnetron sputtering method. The basic depositon parameters varied were the r.f. power(up to 250 W), the deposition pressure in the reactor(up to 100 mtorr) and Ar:$N_2$ gas ratio. FT-IR and X-ray photoelectron spectra showed the presence of different carbon-nitrogen bonds in the films. The surface topography of the films was studied by scanning electron microscopy(SEM) and atomic force microscopy(AFM).

• Journal of Adhesion and Interface
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• v.1 no.1
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• pp.47-55
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• 2000

In this article, the characterization of the interface of hybrid composites was discussed. Interfacial interaction in organic/inorganic hybrid composites, especially silica-containing hybrids can be characterized by fluorescence spectroscopy, small angle X-ray scattering (SAXS), scanning electron microscopy (SEM), atomic force microscopy (AFM), and $^{29}Si$ NMR spectroscopy measurements.

• Journal of the Korean Vacuum Society
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• v.5 no.2
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• pp.107-112
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• 1996

Thin films of $Pb(Zr_xTi_{1-x})O_3$)PZT) were grown on $Pt/SiO_2/Si(100)$ at various temperatures by RF magnetron sputtering method. Surface morphology of these films were studied by using Atomic Force Microscopy(AFM). These films were also analyzed by using Atomic Force Microscopy(AFM). These films were also analyzed by using X-ray photoemission spectroscopy(XPS) for determining their chemical composition and their depth profile. It was found that the films grown at the substrated temperature of $300^{\circ}C$ have much more smooth surface characteristics in comparison to those films grown at room temperature, which may be explained in terms of surface mobility of ad-atoms such as Pb. It was also found that Pb enrichment in the near surface region enhanced for the films grown at higher substate temperature.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.424.2-424.2
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• 2014

Ag-modified BiOX (X=Cl, Br and I) nanoplates were synthesized by an ion-exchange reaction. We examined the fundamental properties by scanning electron microscopy (SEM), electron transmission microscopy (TEM), X-ray diffraction, UV-visible absorption, Fourier-transform infrared and photoluminescence spectroscopy. The adsorption and photocatalytic performances of the catalysts were tested with dyes under UV and visible light. A chemical scavenger method was employed to test the roles of active species (${\cdot}OH$, ${\cdot}O2-$ and h+) and understand photodegradation mechanism. Photoluminescence spectroscopy was used to examine ${\cdot}OH$ radical formation using terephthalic acid during photoirradiation.

• Applied Microscopy
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• v.33 no.4
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• pp.251-259
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• 2003

In this review, the sources and the characteristics of X-rays and electrons and their interactions with matters were described in terms of the atomic scattering factors. The geometrical diffraction conditions were taken into account in terms of Ewald spheres in reciprocal lattice spaces. The effects of the finite size of sources and detectors on diffractions were also considered.