• Title/Summary/Keyword: X-Ray diffraction measurement

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롤투롤 스퍼터 시스템을 이용하여 PES 기판에 성막한 플렉시블 GZO 단층 박막, GZO/Ag/GZO 다층 박막의 특성 연구

  • Park, Yong-Seok;Park, Ho-Gyun;Jeong, Jin-A;Choe, Gwang-Hyeok;Kim, Han-Gi
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.196-196
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    • 2010
  • 본 연구에서는 플렉시블 GZO 단일 박막과 GZO/Ag/GZO (GAG) 다층 박막을 연속 성막이 가능한 롤투롤 스퍼터링 시스템을 이용하여 상온 공정을 통해 성막하여 그 특성을 분석 하였다. 일반적으로 고품위의 GZO 박막을 제작하기 위해서는 고온 공정이 필수적인 것으로 알려져 있으나 본 실험에서는 플렉시블 PES 기판상에 상온 공정을 통해 후 열처리 없이 고품위의 GZO, GAG 박막을 얻을 수 있었다. 단일 GZO 박막은 공정 압력과 산소 유입량을 변화하여 제작하였고 GAG 다층 박막은 GZO-Ag-GZO로 이루어진 3개의 sputter gun을 이용하여 Ag 두께를 변수로 연속공정을 통해 제작하였다. 구조적, 표면석 특성 분석을 위해 XRD(X-ray diffraction), FE-SEM(Field emission scanning electron microscopy), HRTEM (High resolution electron microscopy)를 이용하였으며 광학적, 전기적 특성을 분석하기 위해 UV/Vis spectrometer, Hall effect measurement를 각각 이용하였다. 최적화된 GZO 단일 박막은 상온에서 열처리 없이 성막되었음에도 불구하고 38 ohm/sq의 낮은 저항과 86 %의 높은 투과도를 나타내었으며 GAG 다층 박막은 12 nm의 Ag 두께에서 6.4 ohm/sq의 낮은 저항과 88 %의 높은 투과율을 나타내었다. 특히 기계적 특성을 분석하기 위해 진행된 bending test에서 GAG 박막은 초기와 test 후에 저항과 표면에 변화가 없는 우수한 특성을 보였으며 이를 통해 플렉시블 태양전지와 디스플레이등 광학소자의 투명 전극으로서의 적용 가능성을 확인 할 수 있었다.

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Effect of NiO spin switching on the Fe film magnetic anisotropy in epitaxially grown Fe/NiO/Ag(001) and Fe/NiO/MgO(001) systems

  • Kim, Won-Dong;Park, Ju-Sang;Hwang, Chan-Yong;Wu, J.;Qiu, Z.Q.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.366-366
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    • 2010
  • Single crystalline Fe/NiO bilayers were epitaxially grown on Ag(001) and on MgO(001), and investigated by Low Energy Electron Diffraction (LEED), Magneto-Optic Kerr Effect (MOKE), and X-ray Magnetic Linear Dichorism (XMLD). We find that while the Fe film has an in-plane magnetization in both Fe/NiO/Ag(001) and Fe/NiO/MgO(001) systems, the NiO spins switch from out-of-plane direction in Fe/NiO/MgO(001) to in-plane direction in Fe/NiO/Ag(001). These two different NiO spin orientations generate remarkable different effects that the NiO induced magnetic anisotropy in the Fe film is much greater in Fe/NiO/Ag(001) than in Fe/NiO/MgO(001). XMLD measurement shows that the much greater magnetic anisotropy in Fe/NiO/Ag(001) is due to a 90o-coupling between the in-plane NiO spins and the in-plane Fe spins which causes a switching of the NiO spins during the Fe magnetization reversal.

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무반사 코팅을 위해 나노 구조체를 적용한 Al doped ZnO박막의 전기적, 광학적 특성

  • Park, Hyeon-U;Ji, Seung-Mok;Song, Gyeong-Jun;Im, Hyeon-Ui;Jeong, Gwon-Beom
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.201.2-201.2
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    • 2013
  • 원자층 증착법(ALD)을 통해 최적의 Al doped ZnO (AZO)박막을 얻기 위해 기판온도와 Al도핑농도 등의 공정변수를 조절하여 최적의 성막 조건 연구특성을 분석하였다. 증착당시 Zn와 Al의 precursors는 diethylzinc(DEZ), trimethylaluminum(TMA)을 각각 사용하였으며, reactants로는 Deionized water를 사용하였다. DEZ와 TMA의 증착비율을 통하여 1%에서 12%까지 Al의 도핑농도를 조절하였다. 이후 Hall effect measurement를 이용하여 기판온도와 Al도핑농도에 따른 AZO박막의 운반자 농도, 이동도, 저항을 분석했고, X-ray diffraction을 통하여 물리적 구조의 변화를 관측했다. 공정 최적화를 통하여 Al도핑농도의 변화가 AZO박막의 전기적 특성에 미치는 영향을 해석하였다. 또한, 공정의 최적화 이후 AZO박막을 나노 구조체 석영(quartz)기판위에 250도의 온도에서 Al ~3%의 농도로 10nm부터 150nm까지의 두께로 증착하였다. SEM 분석을 통해 나노 구조체 기판에 균일한 AZO 박막이 형성되었는지 확인하였고, AZO박막의 두께에 따른 전기적 특성 및 광 투과도를 측정한 결과 나노구조체 석영 기판위에 증착된 AZO박막은 가시광선 영역에서 80%이상의 광 투과도를 보였으며 ${\sim}10^{-3}{\Omega}cm$의 저항을 보였다.

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Preparation and Photoluminescent Properties of NaCaPO4 Activated by Divalent Europium (2가 유로피움으로 활성화된 NaCaPO4의 합성과 광 특성)

  • Kim, Dong-Jin;Park, In-Yong;Lee, Jong-Won;Kim, Kyu-Jin;Kim, Byoung-Gyu
    • Korean Journal of Materials Research
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    • v.16 no.10
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    • pp.624-628
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    • 2006
  • In this study, divalent europium-activated $NaCaPO_4$ green phosphor powders were prepared by the chemical synthetic method followed by heat treatment in reduced atmosphere, and the crystal structures, morphologies and photoluminescent properties of the powders were investigated by x-ray powder diffraction, scanning electron microscope and spectrometer for the first time. The effects of Ca/P and Na/Ca mole ratios on the final products were also investigated. The influences of input amount change of europium as the activator on the light emission intensity were studied, and the resulting concentration quenching phenomenon was observed. The optimized synthesis conditions obtained in this study were Ca/P mole ratio 1.2, Na/Ca mole ratio 3.0 and 4 mole%Eu. The peak wavelength was 505 nm for all the samples. The result of excitation spectrum measurement indicated that the excitation efficiency was high for the long-wavelength UV region. It was thus concluded that the samples prepared in this study can be successfully applied for the light-emitting devices such as LED excited with long-wavelength UV light sources.

The effect of antioxidants on the properties of regenerated cellulose (재생셀룰로오스 제조에 미치는 산화방지제의 영향에 관한 연구)

  • Lee, Soo;Lee, Sang-Won
    • Journal of the Korean Applied Science and Technology
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    • v.27 no.3
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    • pp.378-384
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    • 2010
  • Regenerated cellulose was prepared from Buckeye wood pulp V60 via dissolution in N-methylmorpholin N-oxide (NMMO) solvent system. The effect of antioxidants such as, n-propylgallate (PG), tris(nonylphenyl) phosphite (TRIS), ethylenediamine tetraacetic acid disodium salt (EDTA), and magnesium sulfate on the properties of regenerated cellulose was studied using X-ray diffraction, copper index calculation, and viscometry. Only addition of more than 0.01% of PG into NMMO solvent was effective to avoid the reduction of the degree of polymerization(DP) of regenerated cellulose during dissolution at $110^{\circ}C$. However, the early stage(within 0.5h of dissolution process) degradation of cellulose was not prevented eventhough up to 0.5% PG was appled to hot NMMO system. In addition, to recover the expensive NMMO after cellulose regenerating process, the washing filtrate was studied using simple techniques, such as refractive index, pH, and conductivity measurements. Through conductivity measurement result, 4-time of washing was enough to remove the NMMO completely from regenerated cellulose.

Dry etching properties of PZT thin films in $BCl_3/N_2$ plasma ($BCl_3/N_2$ 유도결합 플라즈마로 식각된 PZT 박막의 식각 특성)

  • Koo, Seong-Mo;Kim, Kyoung-Tae;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.183-186
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    • 2004
  • The dry etch behavior of PZT thin films was investigated in $BCl_3/N_2$ plasma. The experiments were carried out with measuring etch rates and selectivities of PZT to $SiO_2$ as a function of gas concentration and input rf power, chamber pressure. The maximum etch rate was 126 nm/min when 30% $N_2$ was added to $BCl_3$ chemistry. Also, as input rf power increases, the etch rate of PZT thin films was increased. Langmuir probe measurement showed the noticeable influence of $BCl_3/N_2$ mixing ratio on electron temperature and electron density as input rf power increased. The variation of Cl radical density as plasma parameters changed was examined by Optical Emission Spectroscopy (OES) analysis. According to X-ray diffraction (XRD) analysis, PZT thin films were damaged in plasma and an increase in (100), (200) and (111) phases showed the improvement in structure of the PZT thin films after the $O_2$ annealing process.

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A Study on the Deintercalation Reaction of Li-Graphite Intercalation Compounds

  • O, Won Cheon;Kim, Beom Su
    • Bulletin of the Korean Chemical Society
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    • v.21 no.1
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    • pp.101-104
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    • 2000
  • Li-graphite intercalation compounds (GICs), synthesized at elevated temperature and pressure, were allowed to decompose spontaneously in the atmosphere. The decomposition processes were analyzed by of X-ray diffraction, DSC analysis, FT-IR measurements, UV/VIS spectrophotometry. The deintercalation reaction of the Li-GICs ceased after 6 weeks and only the residual compounds could be observed. A strong exothermic reaction was observed at 300 $^{\circ}C$ in thermal decomposition, and relatively stable decomposition curves were formed. A few endothermic curves have been observed at 1000 $^{\circ}C.$ After 6 weeks deintercalation reaction time of GICs, many exothermic and endothermic reactions were accompanied at the same time. In addition the reactions of the functional groups such as aromatic rings, nitrogen, $-CH_3$, $-CH_2$ etc. of GDIC obtained by the above reaction were confirmed by FT-IR spectrum. UV/VIS spectrophotometric measurement clearly shows the formation of a minimum energy value ($R_{min}$) for the compounds between Li-GICs as a starting material and Li-GDICs obtained until after 3 weeks of the deintercalation reaction, while they were no clear energy curves from 4 weeks of reaction time, because of the formation of the graphite structure, of high stages and of the Li compounds surrounding the graphite in the deintercalation reaction.

Magnetic Properties of Fe-Ni-N/Cu Multilayered Films by DC Magnetron Sputtering Method

  • Kim, Jung-Gi;Kim, Hyun-Joong;Jang, Ji-Young;Han, Kyung-Hunn
    • Journal of Magnetics
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    • v.9 no.3
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    • pp.79-82
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    • 2004
  • The structure and magnetic properties of Fe-Ni-N/Cu multilayered films, prepared by the DC magnetron sputter, as a function of different thicknesses of Fe-Ni-N ($t_{FeNiN}$) and Cu ($t_Cu$) layers have been studied by the methods of x-ray diffraction and measurement of magnetic moment. It has been found that the enhancement of (200) orientation in Fe-Ni-N layers is observed at the ratio of layer thickness with about $t_{FeNiN}/t_{Cu}$ $\underline{\simeq}$ 3.75. The reduction of magnetization due to the formation of interdiffusion near the interface is explained by means of the dead layer model. The temperature dependence of magnetization exhibits the feature of Blochs $T^{\frac{2}{3}}$ law. The layer thickness dependence of Curie temperature has been discussed by critical temperature theory of Heisenberg model.

Structural and Electrical Properties of SrRuO3 thin Film Grown on SrTiO3 (110) Substrate

  • Kwon, O-Ung;Kwon, Namic;Lee, B.W.;Jung, C.U.
    • Journal of Magnetics
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    • v.18 no.1
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    • pp.39-42
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    • 2013
  • We studied the structural and electrical properties of $SrRuO_3$ thin films grown on $SrTiO_3$ (110) substrate. High resolution X-ray diffraction measurement of the grown film showed 1) very sharp peaks for $SrRuO_3$ film with a very narrow rocking curve with FWHM = $0.045^{\circ}$ and 2) coherent growth behavior having the same in-plane lattice constants of the film as those of the substrate. The resisitivity data showed good metallic behavior; ${\rho}$ = 63(205) ${\mu}{\Omega}{\cdot}cm$ at 5 (300) K with a residual resistivity ratio of ~3. The observed kink at ${\rho}(T)$ showed that the ferromagnetic transition temperature was ~10 K higher than that of $SrRuO_3$ thin film grown on $SrTiO_3$ (001) substrate. The observed rather lower RRR value could be partially due to a very small amount of Ru vacancy generally observed in $SrRuO_3$ thin films grown by PLD method and is evident in the larger unit-cell volume compared to that of stoichiometric thin film.

A Facile synthesis of CoS by Successive Ionic Layer Adsorption and Reaction (SILAR) Process for Supercapacitors (스테인리스강 기판에 연속 이온 층 흡착 및 반응 (SILAR) 공정을 통한 CoS 코팅 및 슈퍼캐패시터 전극 특성)

  • Kim, Jaeseung;Lee, Jaewon;Kumbhar, Vijay S.;Choi, Jinsub;Lee, Kiyoung
    • Journal of Surface Science and Engineering
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    • v.52 no.3
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    • pp.130-137
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    • 2019
  • In this study, the cobalt sulfide (CoS) nanosheet on stainless steel as a supercapacitor electrode is synthesized by using a facile successive ionic layer adsorption reaction (SILAR) method. The number of cycles for dipping and rinsing can control the nanosheet thickness of CoS on stainless steel. Field emission-scanning electron microscopy (FE-SEM) showed a layer structure of CoS particles coupled as agglomeration. And x-ray diffraction (XRD) showed the crystallinity of the CoS nanosheet. To investigate the characteristics of the CoS nanosheet electrode as the supercapacitor, analysis of electrochemical measurement was conducted. Finally, the CoS nanosheet of 70cycles on stainless steel shows the specific capacitance ($44.25mF/cm^2$ at $0.25mA/cm^2$) with electrochemical stability of 78.5% over during 2000cycles.