• Journal of the Microelectronics and Packaging Society
• /
• v.28 no.3
• /
• pp.33-38
• /
• 2021

Recently, rollable and foldable displays are attracting great attention in the flexible display market due to their excellent form factor. To predict and prevent the mechanical failure of the display panels, it is essential to accurately understand the mechanical properties of brittle SiN_x thin films, which have been used as an insulating film in flexible displays. In this study, tensile properties of the ~130 nm- and ~320 nm-thick SiN_x thin films were successfully measured by coating a ~190 nm-thick organic nano-support-layer (PMMA, PS, P3HT) on the fragile SiN_x thin films and stretching the films as a bilayer state. Young's modulus values of the ~130 nm and ~320 nm SiN_x thin films fabricated through the controlled chamber pressure and deposition power (A: 1250 mTorr, 450 W/B: 1000 mTorr, 600 W/C: 750 mTorr, 700 W) were calculated as A: 76.6±3.5, B: 85.8±4.6, C: 117.4±6.5 GPa and A: 100.1±12.9, B: 117.9±9.7, C: 159.6 GPa, respectively. As a result, Young's modulus of ~320 nm SiN_x thin films fabricated through the same deposition condition increased compared to the ~130 nm SiN_x thin films. The tensile testing method using the organic nano-support-layer was effective in the precise measurement of the mechanical properties of the brittle thin films. The method developed in this study can contribute to the robust design of the rollable and foldable displays by enabling quantitative measurement of mechanical properties of fragile thin films for flexible displays.

• Korean Journal of Materials Research
• /
• v.4 no.6
• /
• pp.638-643
• /
• 1994

The Si(ll1) surface structures induced by deposition of Au atoms were investigated by RHEED system. When Au atoms were deposited on the Si(ll1) $7\times7$ surfade, the dependence of structures and phases on the substrate temperatures and coverages was drastic. For O.1ML to 0.4ML of coverage the $7\times7$ structure changes to $7\times7$ + $5\times2$ structure as temperature increases to $350^{\circ}C$-$750^{\circ}C$. Between 0.4M1 to 1.OML the phase changed to $5 \times 2,\alpha- \sqrt{3} \times \sqrt{3},\beta- \sqrt{3} \times \sqrt{3}$ structure according to the substrate temperature and coverages. When the coverages exceeds O.SML, the 6 x 6 structure appears at the substrate temperature range between $270^{\circ}C$-$370^{\circ}C$ and compeletely transforms to 6 x6 at 1,OML. The isothermal desorption of Au on Si(ll1) surface investigated by using AES in the $\alpha- \sqrt{3} \times \sqrt{3},5 \times 2$ structures shows that the desorption energys of $\alpha- \sqrt{3} \times \sqrt{3}$ and 5 x 2 were 79Kcal/mol and 82 Kcal/mol respectively.

• Journal of the Korean Ceramic Society
• /
• v.40 no.8
• /
• pp.746-750
• /
• 2003

Using the Czochralski method, Er$_2$O$_3$ doped near stoichiometric LiNbO$_3$ single crystals were grown 15~20 mm in diameter and 30-35 mm in length for Z-axis. Lattice constants were inspected by the X-Ray Diffractometer (XRD) and through Fourier Transform-Infrared Spectrophotometer (FT-IR), it observed absorption band. Also, the distributions of Er concentration were confirmed by the Electron Probe Micro Analysis (EPMA).

• Korean Journal of Crystallography
• /
• v.12 no.3
• /
• pp.145-149
• /
• 2001

The hydrothermal reaction between zinc(II) nitrate Zn₃(PO₄)₂(H₂O) and potassium phosphate dibasic (K₂HPO₄) in the presence of pyrazine gave a three-dimensional zinc-phosphate coordination polymer with an empirical formula of Zn₃(PO₄)₂(H₂O) (1). Compound 1 was characterized by IR spectroscopy, and X-ray diffraction. Crystallographic data for 1: monoclinic space group. P2₁/c, a=8.970(1)Å, b=4.901(1)Å, c=16.759(3)Å, β=94.98(2)°, Z=4, R(wR₂)=0.0332(0.0927).

• Korean Journal of Veterinary Research
• /
• v.42 no.2
• /
• pp.219-224
• /
• 2002

We report the seasonal prevalence of the mycoplasmal pneumoniae of swine (MPS) in slaughter pigs from July of 1999 to June of 2000. Gross finding of lung lesion observed and examined by dot-ELISA. In gross finding of lung lesion from 750 pig samples, 465 (62.0%) was MPS, and 129 (17.2%) was single or double infection with actinobacillosis and pasturellosis. However, 156 (20.8%) had no lesion. In seasonal detection, the prevalence was found to be winter (69.5%), autumn (63.5%), summer (60.0%) and spring (54.7%) in orderly frequency. In dot-ELISA, the result was showed the positive reaction (x16>titre) with 58.0% and negative (x4

• Journal of Advanced Marine Engineering and Technology
• /
• v.27 no.3
• /
• pp.447-452
• /
• 2003

Crevice corrosion is localized form of corrosion usually associated with a stagnant solution on the micro-environmental level. Such stagnant micro environments tend to occur in crevices (shielded areas) such as those formed under gaskets washers insulation material. fastener heads. surface deposits. disbonded coatings. threads. lap joints and clamps. Crevice corrosion is initiated by changes in located electrochemical reaction within the crevice such as a) depletion of inhibitor in the crevice b) depletion of oxygen in the crevice c) a shift to acid conditions in the crevice and d) build-up of aggressive ion species (e.g chloride) in the crevice. In this study. the mechanism of crevice corrosion for Type 430 stainless steel is investigated undercondition that the size of specimen is $15{\times}20\{times}3mm$, in 1N $H_2SO_4$ + 0.05N NaCl solution. and the artificial crevice gap size of 3 x 0.2 x 15 mm. Crevice corrosion is measured under applied potential -300mV(SCE) to the external surface. The obtained result of this study showed that 1) the induced time for initiation of crevice is 750 seconds. 2) potential of the crevice was about from -320mV to -399mV. which is lower than that of external surface potential of -300mV It is considered that potential drop in the crevice is one of mechanisms for the crevice corrosion

• Proceedings of the Korean Powder Metallurgy Institute Conference
• /
• 2006.09b
• /
• pp.1247-1248
• /
• 2006

We fabricated YBCO film using a TFA-MOD method. In order to enhance the reaction kinetics and to control the formation of the second phases, $Y_2Ba_1Cu_1O_x$ and $Ba_3Cu_5O_8$ powders were used as precursors (the so called "211 process"). The films were calcined at $460^{\circ}C$ and then fired at $750^{\circ}C-800^{\circ}C$ in a 12.1% humidified $Ar-O_2$ atmosphere. We found that the microstructure varied significantly with the firing temperature. The textures of all of the films were similar and mainly biaxial. For the film fired at $775^{\circ}C$, the critical current was obtained to be 39 A/cm-width (corresponding critical current density is 2.0 MA/$cm^2$).

• Korean Journal of Materials Research
• /
• v.1 no.2
• /
• pp.71-76
• /
• 1991

The superconducting powders in $YBa_2Cu_3O_{7-x}$ and Bi-Pb-Sr-Ca-Cu-O system were easily prepared from water in oil type emulsion by loading each cation into the aqueous phase. In $YBa_2Cu_3O_{7-x}$ system, the superconducting orthorhombic phase was formed by calcining at $750^{\circ}C$ for 10h in $O_2$. The size of the superconducting phase powders was submicron. The density of the sintered specimen using this powders was about 95% of the theoretical density and the resistance sharply decreases at about 90K, In Bi-Pb-Sr-Ca-Cu-O system the low Tc phase($(Bi, Pb)_2Sr_2Ca_1Cu_2O_y$) was formed by calcining at $800^{\circ}C$ for 10h in a low oxygen partial pressure of 1/20 atm The shape of clacined powder is thin plate of which size is about $2\mu\textrm{m}$ and thickness is smaller than $\mu\textrm{m}$. It was observed that the high Tc phase ($(Bi, Pb)_2Sr_2Ca_2Cu_3O_y$) was formed by sintering at $850^{\circ}C$ for 30h in oxygen pressure of 1/20 atm without intermediary grinding. The above sintered sample exhibited superconductivity with a Tc(zero)=105K.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.11a
• /
• pp.278-280
• /
• 2001

BSCCO thin films have been fabricated by co-deposition at an ultralow growth rate using ion beam sputtering(IBS) method. The growth rates of the films was set in the region from 0.17 to 0.27 nm/min. MgO(100) was used as a substrate. In order to appreciate stable existing region of Bi 2212 Phase with temperature and ozone pressure, the substrate temperature was varied between 655 and 820$^{\circ}C$ and the highly condensed ozone gas pressure(PO$_3$) in vacuum chamber was varied between 2.0x10$\^$-6/ and 2.3x10$\^$-5/ Torr. Bi 2212 Phase appeared in the temperature range of 750 and 795$^{\circ}C$ and single phase of Bi 2201 existed in the lower region than 785$^{\circ}C$. Whereas, PO$_3$ dependance on structural formation was scarcely observed regardless of the pressure variation. And high quality of c-axis oriented Bi 2212 thin film with T$\sub$c/(onset) of about 70 K and T$\sub$c/(zero) of about 45 K is obtained. Only a small amount of CuO in some films was observed as impurity, and no impurity phase such as CaCuO$_2$ was observed in all of the obtained films.

• Proceedings of the KIEE Conference
• /
• 2003.07c
• /
• pp.1589-1591
• /
• 2003

The microwave dielectric properties of $TiTe_3O_8-CaF_2$ ceramics were investigated. All sample of $TiTe_3O_8-CaF_2$ ceramics were prepared by the conventional mixed oxide method, and sintered in the temperature of $730^{\circ}C{\sim}750^{\circ}C$. The structural properties of $TiTe_3O_8-CaF_2$ ceramics were investigated by the X-ray diffractor meter. According to the X-ray diffraction patterns of $TiTe_3O_8-CaF_2$ ceramics, the major phase of the cubic $TiTe_3O_8$ were presented. In the case of $1molTiTe_3O_8-0.1molCaF_2$ ceramics sintered at $740^{\circ}C$ for 5hr., the bulk density, dielectric constant, quality factor were $2.8g/cm^3$, 39.1, 36.100GHz, respectively.