Characterization of BLT/insulator/Si structure using $ZrO_2$ and $CeO_2$ insulator
($ZrO_2$ 와 $CeO_2$ 절연체를 이용한 BLT/절연체/Si 구조의 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2003.05c
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- pp.186-189
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- 2003