• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.124-124
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• 2010

Currently, extreme ultraviolet lithography (EUVL) is being investigated for next generation lithography. EUVL is one of competitive lithographic technologies for sub-22nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance due to the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore, new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.

• Journal of Chest Surgery
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• 제24권4호
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• pp.397-403
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• 1991

From June 1987 to January 1991, 24 patients with moderate or massive pericardial effusion underwent subxiphoid pericardial window procedures for diagnosis and therapy. The patients` ages were ranged from 28 years to 71 years. The underlying diseases were chronic renal failure with long term hemodialysis in 3 cases, malignant lung cancer in 7 cases, stomach cancer in 2 cases, tuberculous pericarditis in 5 cases, pyogenic pericarditis in 2 cases, myxedema in one case, one metastatic squamous cell carcinoma from unknown origin and three of undefined etiology. Preoperative diagnoses of pericardial effusions were confirmed by echocardiogram in all cases. Subxiphoid pericardial drainages were performed under general[n=19] or local anesthesia[n=5]. Histological diagnoses were made from the inferior pericardial tissue in all cases except one. In this one case[tuberculous pericarditis], the subxiphoid pericardial approach was failed from intraoperative bleeding. There were two postoperative death, one[in malignant lung cancer] had postoperative ventricular tachycardia which result in cardiac arrest, and the other[unknown origin metastatic malignant effusion] had persistent tachyarrhythmia postoperatively and died on postoperative 5th days. Twenty three patients were followed up from 3 days to 9 months; mean follow-up day was 43 days. The preoperative and postoperative mean cardiothoracic ratio in chest x-ray were 0.69 and 0.52 respectively. Subxiphoid pericardial drainage may provide definitive diagnosis and treatment for pericardial effusions. The approach through subxiphoid pericardium under general or local anesthesia avoids the complications of pericardiocentesis and is effective for malignant pericardial effusion.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.284-284
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• 2011

Recently, the increasing degree of device integration in the fabrication of Si semiconductor devices, etching processes of nano-scale materials and high aspect-ratio (HAR) structures become more important. Due to this reason, etch selectivity control during etching of HAR contact holes and trenches is very important. In this study, The etch selectivity and etch rate of TEOS oxide layer using ACL (amorphous carbon layer) mask are investigated various process parameters in CH2F2/C4F8/O2/Ar plasma during etching TEOS oxide layer using ArF/BARC/SiOx/ACL multilevel resist (MLR) structures. The deformation and etch characteristics of TEOS oxide layer using ACL hard mask was investigated in a dual-frequency superimposed capacitively coupled plasma (DFS-CCP) etcher by different fHF/ fLF combinations by varying the CH2F2/ C4F8 gas flow ratio plasmas. The etch characteristics were measured by on scanning electron microscopy (SEM) And X-ray photoelectron spectroscopy (XPS) analyses and Fourier transform infrared spectroscopy (FT-IR). A process window for very high selective etching of TEOS oxide using ACL mask could be determined by controlling the process parameters and in turn degree of polymerization. Mechanisms for high etch selectivity will discussed in detail.

• 한국방송∙미디어공학회:학술대회논문집
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• 한국방송공학회 2006년도 학술대회
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• pp.265-268
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• 2006

데스크탑 환경의 멀티미디어 디스플레이 시스템은 고해상도, 대화면의 영상을 제공해 줄 수 있는 반면 제약된 공간에서만 동작하므로 휴대할 수 없는 문체가 있다. PDA, PMP와 모바일 폰과 같은 휴대성을 가지는 멀티미디어 디스플레이 시스템은 해상도가 낮아 사용자에게 충분한 몰입감을 제공 해 주지 못한다. 본 논문에서는 기존의 데스크탑 환경에서 동작하는 프로젝션 기반의 증강현실 시스템을 모바일 플랫폼으로 확장한 프로젝션 기반의 휴대형 멀티미디어 디스플레이 시스템을 제안한다. 제안된 시스템은 PDA와 포켓 프로젝터를 결합한 것으로, PDA에서 전 처리된 멀티미디어 영상을 포켓 프로젝터를 이용하여 임의의 모양을 가지는 스크린에 왜곡 없이 영상을 표시해 줄 수 있다. 개발환경은 Window Mobile 5.0 기반의 ARM 플랫폼을 사용하는 PDA를 이용하였고, 시스템의 최적화를 위하여 x86 플랫폼에 최적화된 OpenCV 라이브러리를 모바일용으로 변환하였다. 또한 모바일 플랫폼에서는 부동소수점 연산으로 인한 시스템의 속도저하 문제가 발생하기 때문에 부동소수점 연산을 정수 연산으로 변환함으로써 처리 속도를 개선하였다. 프로젝션 기반의 디스플레이 시스템을 실현하기 위해서 필요한 기술적인 과제들을 모바일 환경에서 직접 처리해 봄으로써 휴대형 프로젝션 기반의 멀티미디어 시스템의 가능성을 제시한다.

• 한국표면공학회지
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• 제30권4호
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• pp.223-230
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• 1997

Tungsten oxide and nickel oxide thin films were deposited onto ITO(Indium Tin Oxide) transparent glass by the E-beam evaporation and were used as a cathode and an anode for the EC(Electrochromic) smart window, respectively. Stoichiometric structures of the deposited films were investigated by the implementation of XPS(X-ray Photoelectron Spectroscopy) analysis and the results were $WO_{2.42}$ and $NiO_{0.44}$. This oxygen deficincy might affect affect the transparency of the thin films. The electrolyte for the EC smart windows was PAN-$LiCIO_4$ conducting polymer. EC(Ethylene Carbonate)and PC(Propylene Carbonate) were added as plasticizer to enhance ion conductivity. When the weight ratio of the EC : PC was 3 : 1, transmission difference and cycle life performance were tested. Polymer EC windows showed 40% $\Delta$T at 1.5V operating volage for 3,200 cycles. Structural degradation was observed by the SIMS(Secondary Ion Mass Spectroscopy) analysis and it was confirmed that structural degradation of polymer caused by the solvent evaporation was the main cause to degrade EC smart windows.

• 대한조선학회논문집
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• 제29권2호
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• pp.18-29
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• 1992

컴퓨터 그래픽의 사용이 보편화 되어감에 따라 컴퓨터 그래픽에 대한 표준화가 필요하게 되었다. 국가적인 차원의 공용(共用) 시스템을 개발하려는 CSDP 사업을 위해서도 공통적으로 쓰일 그래픽 라이브러리의 선정이 필요하다. 이 글에서는 여러가지 그래픽 표준들에 대해 조사 및 정리하고, 전체적인 관점에서 그들의 상관관계를 살펴보았으며, 우리가 추진해 나가야할 방향에 대하여 검토해 보았다. 따라서 ISO 같은 국제적인 공공기관에서 채택된 표준들도 중요하지만, 산업계에서 널리 사용되므로서 표준이나 마찬가지인 그래픽 라이브러리들도 중요하다. De facto standard라고 부르는 이러한 그래픽 라이브러리들을 함께 다루어 보았다.

• 한국조리학회지
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• 제13권4호
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• pp.1-18
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• 2007

The purpose of this study is to investigate the properties of restaurant customer's choice and to present the desirable service of restaurants. The experimental data were collected from the questionnaire answered by 182 restaurant customers in Seoul. One-way ANOVA and $x^2$(Chi-square) verification analysis were performed with the SPSS WINDOW 10.0 program to investigate statistical significance of the data. As the results, it was revealed that the food factor was most important when the customers choose a restaurant. And then, the importance of the choice properties was in the following order, that is, the food factor, the hygiene and cleanness factor, the employee's service factor, the visiting convenience factor, the indoor mood factor, the menu factor, the amenity factor for children. In addition, it was confirmed that some choice properties of the customers are dependent on the general characteristics such as sex, age, occupation, income etc. Therefore, it is essential that restaurants should provide various services related with the choice properties by understanding the choice properties according to the customer's characteristics.

• 간호행정학회지
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• 제19권3호
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• pp.329-339
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• 2013

Purpose: This study was conducted to provide basic data on the nursing Happiness Index and identify factors influencing nurses by describing their perception of lifestyle, health behavior, nursing professionalism, Happiness Index, and turnover intention. Methods: On July 2012, 700 nurses from 10 general hospitals were surveyed, but 23 were omitted due to missing or incomplete data. The focus of this study was the Organization for Economic Co-operation and Development (OECD) Happiness Index, consisting of 11 OECD identified topics concerning living conditions and quality of life. Data were analyzed using $x^2$-tests, t-test, ANOVA, Pearson correlation coefficients and multiple regression with SPSS/WINdow 14.0. Results: Mean score for nurses' Happiness Index was 3.03 on a scale of 5. There were significant differences on the Happiness Index for the following: age, marriage, children, education, position, work experience, wages, number of beds, medical institution, health behavior, weight, and meal patterns. There was a positive correlation between the happiness index and nursing professionalism but a negative correlation between the happiness index and turnover intention. Conclusion: Results indicate that factors influencing happiness are autonomy, sense of calling and turnover intention suggesting the need to improve nursing professionalism for a life of happiness among hospital nurses.

• Journal of Radiation Protection and Research
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• 제31권3호
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• pp.149-153
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• 2006

An ionization chamber is still widely used in many fields by virtue of its' simple operational characteristics and the possibility of its' various shapes. A parallel type of an ionization chamber for a steel sheet thickness measurement was designed and fabricated. High pure xenon gas, which was pressurized up to 6 atm, was chosen as a filling gas to increase the current response and sensitivity for a radiation. A high pressure gas system was also constructed. The active volume and the incident window size of the fabricated ionization chamber were $30\;cm^3\;and\;12\;cm^2$, respectively. Preliminary tests with a 25 mCi $^{241}Am$ gamma-ray source and evaluation tests in a standard X-ray field were performed. The optimal operation voltage was set from the results of the collection efficiency calculation by using an experimental two-voltage method. Linearity for a variation of the steel sheet thickness, which is the most important factor for an application during a steel sheet thickness measurement, was 0.989 in this study.

• 가정과삶의질연구
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• 제29권3호
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• pp.71-83
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• 2011

The purpose of this study was to find out the nationwide general characteristics and housing environments of agricultural households and the differences of them by Eup-Myun Areas. The data were subsample of the 2008 survey on the rural living indicators collected by the rural development administration. Only agricultural households, 73.7% of the original nationwide data (1,461 households out of 1,983) sampled by multi-stage stratified clustering methods and face to face interview in Aug. 2008, were selected and the cross-tabulation(X2) was mainly used to find the difference by Eup Myun areas through spss 12.0 for window. The results showed that the general characteristics of agricultural households such as head of household, family, and economic characteristics were mainly differed by Eup Myun Areas. Agricultural households in Eup area were more likely low in the general characteristics than were those in Myun area. Housing environments were less likely than the general characteristics differed by Eup Myun areas. Improvements of drinking water system, housing alteration, oder, and garbage system were needed to increase the satisfaction with residential environments of agricultural households. This study suggests the use of annual survey on the rural living indicators data would be applicable to various research subjects of home economics.