• 한국전기전자재료학회논문지
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• 제13권11호
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• pp.901-907
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• 2000

As the minimum feature size for making ULSI approaches the wavelength of light source in optical lithography, the aerial image is so hardly distorted because of the optical proximity effect that the accurate mask image reconstruction on wafer surface is almost impossible. We applied the Optical Proximity Correction(OPC) on isolated patterns assuming Attenuated Phase Shift Mask(APSM) as well as binary mask, to correct the widening of isolated patterns. In this study, we found that applying OPC to APSM shows much better improvement not only in enhancing the resolution and fidelity of t도 images but also in enhancing the process margin than applying OPC to the binary mask. Also, we propose the OPC method of APSM for isolated patterns, the size of which is less than the wavelength of the ArF excimer laser. Finally, we predicted the resolution limit of optical lithography through the aerial image simulation.

• International Journal of Computer Science & Network Security
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• 제22권12호
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• pp.178-184
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• 2022

Renewable energy sources based on solar radiation, wind energy, geothermal energy, and biomass energy have now reached the level of industrial application. A new way to generate electricity using low-potential heat is to install a hydro-steam turbine. In hydro-steam turbines, hot water is supplied directly to turbine rotor nozzles without prior separation into steam and water in separators, which significantly increases the efficiency of hot water energy use. Such turbines are suggested to be used as autonomous energy sources in geothermal heating systems, heating water boilers and cooling systems of chemical reactors, metallurgical furnaces, etc. The authors conclude that the installation of hydro-steam turbines in heating plants and process boiler plants can also be effective if the used exhaust steam-water mixture at the turbine outlet is used to heat the network water or as return water.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1573-1575
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• 2004

An alumina membrane with nano-sized pores was fabricated by anodic oxidation. The shape and structure of the pore on alumina membrane were changed according to the roughness of aluminum surface. The shape and structure of the nano-sized pre were investigated according to purity of aluminum substrate for the anodization process. The aluminum substrates with 99.5% and 99.999% purities were used. The aluminum substrate(99.5%) was anodized after the processes of pressing, mechanical polishing, chemical polishing, and electrochemical polishing. The nano-sized pores with the pore size of 50 - 100nm, the cell size of 20-50nm and the thickness of $10{\mu}m{\sim}45{\mu}m$ were obtained. Even though the electrochemical polishing was used for the aluminum substrate (99.999%), the same characteristics as the aluminum substrate (99.5%) was obtained. The alumina membrane prepared by anodization for 5 min using fixed voltage method shows the pore with irregular shape. The pore shape was changed to regular shape after pore widening process.

• 대한지리학회지
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• 제36권4호
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• pp.402-417
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• 2001

본 연구에서는 사업서비스 분야 한국내 외국인직접투자가 지역경제에 미치는 영향을 분석하였으며, 특히, 지역네트워크와 지식의 활용이라는 측면에서 파악하였다. 외국인직접투자기업은 한국내 시장확보라는 투자동기에 따라 고객과의 네트워크, 공급 네트워크는 높은 비중을 나타내고 있으나, 상대적으로 산학연계 및 협회, 조합, 정부기관과의 관계는 낮게 나타난다. 한국내 지식이전 및 상호작용도 투자모기업의 정책에 따라 제한적으로 이루어지고 있다. 그러나, 협력관계 및 인력이동 등 장기적으로 볼 때 긍정적인 측면과 가능성도 보이고 있어, 지식활용에 기반한 정책지원 및 활용안을 수립하여 실천한다면, 외국인기업이 충분히 지역내 뿌리내리며, 지역경제에 기여할 수 있을 것이다.

• 제어로봇시스템학회논문지
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• 제14권5호
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• pp.420-425
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• 2008

PMMA light guiding plate with nano-sized pattern was fabricated using anodized aluminum oxide membrane as a template for nano imprint lithography. Nano-sized pore arrays were prepared by the self-organization processes of the anodic oxidation using the aluminum plate with 99.999% purity. Since the aluminum plate has a rough surface, the aluminum plate with thickness of 1mm was anodized after the pre-treatments of chemical polishing, and electrochemical polishing. The surface morphology of the alumina obtained by the first anodization process was controlled by the concentration of electrochemical solution during the first anodization. The surface morphology of the alumina was also changed according to temperature of the solution during chemical polishing performed after first anodization. The pore widening process was employed for obtaining the one-channel with flat surface and height of the channel because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of two-channel with rough surface. It is shown from SPM results that the nano-sized pattern on PMMA light guiding plate fabricated by nano imprint lithography method was well transferred from that of anodized aluminum oxide template.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.1971-1973
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• 2005

We fabricated an alumina membrane with nano-sized pore array by anodic oxidation using the thin film aluminum deposited on silicon wafer. It is important that the sample prepared by metal deposition method has a flat aluminum surface and a good adhesion between the silicon wafer and the thin film aluminum. The oxidation time was controlled by observation of current variation. The nano-sized pores with diameter of $60{\sim}120nm$ was obtained by $40{\sim}80$ voltage. The pore widening process was employed for obtaining the flat surface because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of rough surface. Finally, the sample was immersed to the phosphoric acid with 0.1M concentration to etching the barrier layer. The sample will be applied to electronic sensors, field emission display, and template for nano- structure.

• Clinics in Shoulder and Elbow
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• 제10권1호
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• pp.124-130
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• 2007

견봉쇄골 관절 탈구는 흔한 손상으로 심한 경우 대개 오구쇄골 인대의 파열이 동반된다. 견봉쇄골 관절 탈구에 드물게 오구쇄골 인대의 파열 없이 오구돌기 골절이 동반될 수 있다. 지금까지 31례만이 보고된 상기 손상을 저자들은 두 증례에서 경험하였기에 문헌 고찰과 함께 보고하고자 한다. 오구돌기 골절은 일반적으로 시행하는 전후방 방사선 촬영에서는 발견하기 쉽지 않다. 고도의 견봉쇄골 관절 탈구가 있으면서 오구쇄골 간격이 늘어나지 않은 경우 오구돌기의 골절을 의심할 수 있다.

• 보존과학회지
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• 제27권1호
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• pp.49-59
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• 2011

손상된 도자기는 고대부터 여러 가지 방법과 재료를 사용하여 수리복원 되었다. 도자기 수리복원의 역사는 전통적인 수리방법을 이용해 실생활에서 활용 가능한 재료들을 사용하던 방식에서 새로운 재료의 도입과 다양한 처리기법의 시도 및 사용된 재료의 분석에 이르는 전문적인 분야로까지 그 영역을 넓히며 발전을 거듭하여 왔다. 우리나라의 도자기 수리복원 방법의 변천과정은 출토유물과 문헌자료, 분석 등을 통해 조사한 결과, 동물이나 식물에서 추출된 접착제, 석회와 같은 복원제 등을 사용하여 수리 복원하던 천연재료 사용 시기(고대~일제 강점기 이전)와, 주사비 등 천연재료와 합성수지가 혼합되어 사용되는 시기(일제 강점기~1970년대), 새로운 처리기법과 재료가 도입되고 보존규범에 입각하여 수리복원이 이루어진 합성수지 사용 시기(80년대 이후)로 구분 할 수 있었다.

• 한국인쇄학회지
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• 제30권3호
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• pp.45-56
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• 2012

Printing technology is accepted by appropriate technology that smart phones, tablet PC, display(LCD, OLED, etc.) precision recently in the electronics industry, the market grows, this process in the ongoing efforts to improve competitiveness through the development of innovative technologies. So printed electronics appeared by new concept. This technology development is applied on electronic components and circuits for the simplification of the production process and reduce processing costs. Low-temperature process making possible for widening, slimmer, lighter, and more flexible, plastic substrates, such as(flexible) easily by forming a thin film on a substrate has been studied. In the past, the formation of the electrode used a screen printing method. But the screen printing method is formation of fine patterns, high-speed printing, mass production is difficult. The roll-to-roll printing method as an alternative to screen printing to produce electronic devices by printing techniques that were used traditionally in the latest technology and processing techniques applied to precision control are very economical to implement fine-line printing equipment has been evaluated as. In order to function as electronic devices, especially the dozens of existing micro-level of non-dot print fine line printing is required, the line should not break at all, because according to the specifications required to fit the ink transfer conditions should be established. In this study of roll-to-roll printing conductive paste suitable for gravure offset printing by developing Ag paste for forming fine patterns to study the basic physical properties with the aim of this study were to.

• 대한치과교정학회지
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• 제10권1호
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• pp.29-36
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• 1980

Inclined plane, one of frequently used orthodontic appliances, may cause posterior displacement of mandible and injure the normal growth of temporomandibular joint. So author carried out the mandibular posterior displacement experimentally induced by inserting inclined plane in the rat incisors in order to investigate the histological reactions occuring in the temporomandibular joint of experimental animals. Following results were obtained. 1. The posterior displacement of condyle resulted in the widening of anterior synovial space with anterior condylar hyperplasia and posterior condylar atrophy. In addition, tissue changes were more severe in young rats than in adult rats. 2. The tissue reactions were localized only to condylar head ana there were no evidence of traumatic features in young rats. In adult rats, hemorrhage was an additional finding 1 week after experiment. 3. The remodelling processes were accompanied by the increasing or reduction of fibrous layer and subsequent replacement by cartilage layer occured massively and abruptly in young rats, it occured slightly and slowly in adult rats. 4. The remodelling process of injured condyle occured from 1 week to 4 weeks after experiment and completed between 8 weeks after experiment.