• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.11
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• pp.901-907
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• 2000

As the minimum feature size for making ULSI approaches the wavelength of light source in optical lithography, the aerial image is so hardly distorted because of the optical proximity effect that the accurate mask image reconstruction on wafer surface is almost impossible. We applied the Optical Proximity Correction(OPC) on isolated patterns assuming Attenuated Phase Shift Mask(APSM) as well as binary mask, to correct the widening of isolated patterns. In this study, we found that applying OPC to APSM shows much better improvement not only in enhancing the resolution and fidelity of t도 images but also in enhancing the process margin than applying OPC to the binary mask. Also, we propose the OPC method of APSM for isolated patterns, the size of which is less than the wavelength of the ArF excimer laser. Finally, we predicted the resolution limit of optical lithography through the aerial image simulation.

• International Journal of Computer Science & Network Security
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• v.22 no.12
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• pp.178-184
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• 2022

Renewable energy sources based on solar radiation, wind energy, geothermal energy, and biomass energy have now reached the level of industrial application. A new way to generate electricity using low-potential heat is to install a hydro-steam turbine. In hydro-steam turbines, hot water is supplied directly to turbine rotor nozzles without prior separation into steam and water in separators, which significantly increases the efficiency of hot water energy use. Such turbines are suggested to be used as autonomous energy sources in geothermal heating systems, heating water boilers and cooling systems of chemical reactors, metallurgical furnaces, etc. The authors conclude that the installation of hydro-steam turbines in heating plants and process boiler plants can also be effective if the used exhaust steam-water mixture at the turbine outlet is used to heat the network water or as return water.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1573-1575
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• 2004

An alumina membrane with nano-sized pores was fabricated by anodic oxidation. The shape and structure of the pore on alumina membrane were changed according to the roughness of aluminum surface. The shape and structure of the nano-sized pre were investigated according to purity of aluminum substrate for the anodization process. The aluminum substrates with 99.5% and 99.999% purities were used. The aluminum substrate(99.5%) was anodized after the processes of pressing, mechanical polishing, chemical polishing, and electrochemical polishing. The nano-sized pores with the pore size of 50 - 100nm, the cell size of 20-50nm and the thickness of $10{\mu}m{\sim}45{\mu}m$ were obtained. Even though the electrochemical polishing was used for the aluminum substrate (99.999%), the same characteristics as the aluminum substrate (99.5%) was obtained. The alumina membrane prepared by anodization for 5 min using fixed voltage method shows the pore with irregular shape. The pore shape was changed to regular shape after pore widening process.

• Journal of the Korean Geographical Society
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• v.36 no.4
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• pp.402-417
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• 2001

This study empahsized the nature of spatial patterns, characteristics and embeddeness of foreign business service firms in Korea utilizing questionnaire survey and interview data. Foreign business services firms are active in forming interfirm networks with clients and supply firms in Korea for widening the market share in Korea. But a low proportion of foreign firms is engaged in academies-industry linkages, government organizations, research institutes, and trade associations. Knowledge transfer and interaction also shows low level of network and the regional development of foreign firms is still in the process of developing, not quite embedded yet. Policy guidances and instituional supports are very essential to strenthen interfirm network and collective learning process of foreing firms in Korea lather than mechanical accumulation of investments. Thus, regional foreign direct investment policy should be targeted towards the incrementation of the potential of foreign firms as a knowledge-intensive industry.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.5
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• pp.420-425
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• 2008

PMMA light guiding plate with nano-sized pattern was fabricated using anodized aluminum oxide membrane as a template for nano imprint lithography. Nano-sized pore arrays were prepared by the self-organization processes of the anodic oxidation using the aluminum plate with 99.999% purity. Since the aluminum plate has a rough surface, the aluminum plate with thickness of 1mm was anodized after the pre-treatments of chemical polishing, and electrochemical polishing. The surface morphology of the alumina obtained by the first anodization process was controlled by the concentration of electrochemical solution during the first anodization. The surface morphology of the alumina was also changed according to temperature of the solution during chemical polishing performed after first anodization. The pore widening process was employed for obtaining the one-channel with flat surface and height of the channel because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of two-channel with rough surface. It is shown from SPM results that the nano-sized pattern on PMMA light guiding plate fabricated by nano imprint lithography method was well transferred from that of anodized aluminum oxide template.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.1971-1973
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• 2005

We fabricated an alumina membrane with nano-sized pore array by anodic oxidation using the thin film aluminum deposited on silicon wafer. It is important that the sample prepared by metal deposition method has a flat aluminum surface and a good adhesion between the silicon wafer and the thin film aluminum. The oxidation time was controlled by observation of current variation. The nano-sized pores with diameter of $60{\sim}120nm$ was obtained by $40{\sim}80$ voltage. The pore widening process was employed for obtaining the flat surface because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of rough surface. Finally, the sample was immersed to the phosphoric acid with 0.1M concentration to etching the barrier layer. The sample will be applied to electronic sensors, field emission display, and template for nano- structure.

• Clinics in Shoulder and Elbow
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• v.10 no.1
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• pp.124-130
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• 2007

The acromioclavicular separation (AC separation) is a common injury, which is often accompanied by the rupture of the coracoclavicular ligament (CC ligament) in severe occasions. In rare forms of AC separation, the fracture of the coracoid process would occur rather than the rupture of the CC ligament. Only 31 cases of such injury have been reported in the English literature. We present 2 additional cases with literature review. The fracture of the coracoid process is not readily seen on anteroposterior shoulder radiograms. Severe AC separation without widening of CC distance on anteroposterior shoulder radiogram heralds the fracture of the coracoid process.

• Journal of Conservation Science
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• v.27 no.1
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• pp.49-59
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• 2011

The damaged ceramics were repaired and restored thru various methods with various materials. The history of Ceramic repair and restoration has developed widening its areas from traditional stage utilizing applicable living material to the specified field that introduces new materials, new process methods and material analysis. Through investigations over the documents, artifacts and analysis, the period could be divided into natural material period in which uses the bonds extracted from the animals, plants and lime (prehistoric to Japanese domination period), Semi-artificial period in which mix natural material and synthetic resins such as "Jusabi"(Japanese domination period to 1970s.) and complete synthetic resin period in which introduces new materials and process methods in accordance with preservation standard (after 1980s).

• Journal of the Korean Graphic Arts Communication Society
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• v.30 no.3
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• pp.45-56
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• 2012

Printing technology is accepted by appropriate technology that smart phones, tablet PC, display(LCD, OLED, etc.) precision recently in the electronics industry, the market grows, this process in the ongoing efforts to improve competitiveness through the development of innovative technologies. So printed electronics appeared by new concept. This technology development is applied on electronic components and circuits for the simplification of the production process and reduce processing costs. Low-temperature process making possible for widening, slimmer, lighter, and more flexible, plastic substrates, such as(flexible) easily by forming a thin film on a substrate has been studied. In the past, the formation of the electrode used a screen printing method. But the screen printing method is formation of fine patterns, high-speed printing, mass production is difficult. The roll-to-roll printing method as an alternative to screen printing to produce electronic devices by printing techniques that were used traditionally in the latest technology and processing techniques applied to precision control are very economical to implement fine-line printing equipment has been evaluated as. In order to function as electronic devices, especially the dozens of existing micro-level of non-dot print fine line printing is required, the line should not break at all, because according to the specifications required to fit the ink transfer conditions should be established. In this study of roll-to-roll printing conductive paste suitable for gravure offset printing by developing Ag paste for forming fine patterns to study the basic physical properties with the aim of this study were to.

• The korean journal of orthodontics
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• v.10 no.1
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• pp.29-36
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• 1980

Inclined plane, one of frequently used orthodontic appliances, may cause posterior displacement of mandible and injure the normal growth of temporomandibular joint. So author carried out the mandibular posterior displacement experimentally induced by inserting inclined plane in the rat incisors in order to investigate the histological reactions occuring in the temporomandibular joint of experimental animals. Following results were obtained. 1. The posterior displacement of condyle resulted in the widening of anterior synovial space with anterior condylar hyperplasia and posterior condylar atrophy. In addition, tissue changes were more severe in young rats than in adult rats. 2. The tissue reactions were localized only to condylar head ana there were no evidence of traumatic features in young rats. In adult rats, hemorrhage was an additional finding 1 week after experiment. 3. The remodelling processes were accompanied by the increasing or reduction of fibrous layer and subsequent replacement by cartilage layer occured massively and abruptly in young rats, it occured slightly and slowly in adult rats. 4. The remodelling process of injured condyle occured from 1 week to 4 weeks after experiment and completed between 8 weeks after experiment.