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Metal 첨가물질에 따른 비정질 IGZO 투명전극 특성 연구

  • Sin, Han-Jae;Hwang, Do-Yeon;Lee, Jeong-Hwan;Lee, Dong-Ik;Park, Seong-Eun;Park, Jae-Seong;Kim, Seong-Jin;Lee, Yeong-Ju;Seo, Chang-Taek
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.368-370
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    • 2013
  • 투명 전극은 전기전도도를 갖는 동시에 가시광선을 투과하는 소재를 말하며, 구체적으로는 빛의 파장이 400~700 nm 영역대의 가시광선을 80% 이상 투과하며 전기전도도가 비저항으로 $10^{-3}{\Omega}cm$이하이거나 면저항이 $10^3{\Omega}$/${\Box}$소재를 의미한다. 투명 전극은 전기전도도에 따라 사용되는 용도가 다양하다. LCD, PDP, OLED 와 같은 평판디스플레이 및 3D 디스플레이의 투명전극으로 사용되는 핵심재료일 뿐만 아니라 터치스크린, 투명필름, 대전방지막, 열반사막, EMI 방지막, 태양전지 분야에 광범위하게 이용되고 있다. 일반적으로, 투명전극 박막에 가장 많이 사용되고 있는 소재는 ITO (indium tin oxide)이나, 주성분인 In의 사용량 증가로 상용 ITO 타겟 가격이 급등하고 있음으며, 고가의 ITO 타겟을 대체하기 위한 저가의 투명전극 소재 개발이 절대적으로 요구되며, 신규 소재 개발을 통한 기술력 우위 선점이 필수적으로 요구되는 상황이다. 본 연구에서는 기존에 디스플레이 분야에서 널리 활용되는 고가의 ITO를 대체하기 위한 다성분 금속산화물 투명전극 스퍼터링 타겟 제조기술을 개발하기 위한 연구로서, Metal이 첨가된 In-Ga-Zn-O기반의 3성분계 투명도전성 소재를 조성설계, 고밀도 균질 타겟 제조 및 투명전극 박막을 형성하는 연구를 실시하였다. 고체산화물 산화인듐(In2O3)분말, 산화갈륨(Ga2O3) 분말그리고 산화아연(ZnO)분말과 Metal을 몰비로 칭량한 후 분말을 폴리에틸렌제 포트에 넣고 에탄올을 충분히 채운 후 지르코니아(ZrO2) 볼(ball)을 이용하여 24 h 동안 볼 밀링(ball milling) 방법으로 혼합한 뒤, $120^{\circ}C$의 플레이트위에서 마그네틱 바로 stirring하면서 건조하였다. 이 분말을 건조기에서 완전히 건조한 후 알루미나 유발을 이용해서 pulverizing한 후 sieving기를 이용하여 분말의 조립화를 하였다. 이 분말을 금형에 넣고 300 kg/$cm^2$의 압력으로 press하여 성형한 뒤 대기중에서 소결하였다 소결을 위한 승온 온도는 $10^{\circ}C$/min이었고 소결은 $1,450^{\circ}C$에서 6 h 동안 하였다. IGZO target의 조성 비율은 1:1:12 (mol%)를 사용하였으며, 첨가한 Metal은 Boron (B), Germanium (Ge), Barium (Ba)을 사용하여 타겟을 제작하였다. M-IGZO 박막은RF magnetron Sputter를 이용하여 증착하였으며, 앞선 실험에서 제작한 타겟을 사용하여 M-IGZO박막을 투명전극으로 사용하기 위한 각각의 특성을 파악하였다. 모든 박막은 상온에서 증착을 하였으며, 증착된 박막두께를 측정하기 위해 ${\alpha}$-step IQ를 사용하였고, 광학적 특성을 분석하기 위해 UV-Visible spectrophotometer 로 투과율을 측정하였다. 그리고 전기적 특성을 측정하기 위해 Hall effect measurement 및 4-probe를 사용하였으며, 결정성 분석을 위하여 XRD를 이용하여 분석하였다. 표1은 M-IGZO타겟을 사용하여 증착시간에 따른 면저항 특성을 나타내었다. Ge, B, Ba이 첨가된 IGZO 박막은 증착시간이 증가할수록 면저항이 낮아짐을 알 수 있었다. 또한, Ge이 첨가된 IGZO 박막이 다른 금속이 첨가된 IGZO 박막의 면저항보다 현저히 낮음을 알 수 있었다. Fig. 1(a), (b), (c)는 각 타겟을 동일한 조건으로 증착을 하여 광학적특성을 나타내는 그래프이다. GZO 박막의 광학적 특성을 보면 가시광 영역에서 평균 투과율은 모두 80% 이상으로 우수한 광투과 특성을 보여 투명전자소자로 사용가능하다. 특히, 자외선 영역을 모두 차단하는 UV cut 능력이 우수함을 알 수 있었다. 따라서, 금속이 첨가된 IGZO 박막을 태양전지용 투명전극으로 사용할 경우, 자외선에 의하여 수명이 단축되는 현상을 줄여줄 수 있음을 기대할 수 있으며 내구성 향상에 크게 기여할 것으로 보인다. Fig. 2는 Ge=0, 0.5, 5%인 IGZO 투명전극을 총 40회 반복하여 증착을 실시한 후 각각의 면저항을 측정한 결과이다. 실험결과에 따르면 Ge가 0%, 5%인 IGZO 투명전극은 증착을 거듭할수록 면저항이 증가하는 결과를 나타내었으며, 0.5%인 IGZO 투명전극은 점차 안정화되어가는 결과를 나타내었다. 따라서 안정화 되었을 때 평균 면저항은 26ohm/sq.로 나타났으며, 광투과율은 Fig. 3과 같이 가시광영역에서 평균 80%이상의 결과를 보였으며, 550 nm에서는 86.36%의 우수한 특성을 나타내었다. 본 연구에서는 Metal이 첨가된 In-Ga-Zn-O기반의 3성분계 투명도전성 소재 target을 제작하여 RF magnetron sputter로 박막을 형성한 후 특성을 비교하였다. M-IGZO target 중 Ge (0.5%)을 첨가한 IGZO 타겟을 사용한 투명전극이 가장 우수한 특성을 보였으며, 제작된 M-target의 In 비율이 30% 정도로 기존의 ITO (90%) 대비하여 투명전극 제작 단가를 절감할 수 있다.

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Effect of Blue Color-deficient Sunlight on the Productivity and Cold Tolerance of Crop Plants (청색파장(靑色波長)영역이 결여된 태양광이 작물(作物)의 생산성(生産性) 및 내냉성(耐冷性)의 향상에 미치는 효과 Ⅰ. 광합성(光合成) 및 호흡(呼吸)의 전자전달계 활성(活性)의 변화)

  • Jung, Jin;Kim, Jong-Bum;Min, Bong-Ki
    • Korean Journal of Environmental Agriculture
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    • v.5 no.2
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    • pp.141-148
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    • 1986
  • The blue-light effect on the grown as well as on the physiological activity of some major horticultural plants in Korea has been investigated. The light quality used for the work was obtained from sunlight filtered by an orangecolored polyethylene film which removed about 70% of visible light in the spectral region of $350㎚{\sim}500㎚$. The film was developed in this laboratory especially for the work and named BCR film meaning blue color-removing film. The light environment in the plastic house which was built with BCR film provided plants with the blue color-deficient sunlight. Thus, the photobiological effect of blue light could be examined conversely by comparing with the effect of white sunlight in a conventional plastic house built with colorless polyethylene film. In a sense of applicability to horticulture, two remarkable effects of the blue color-deficient sunlight on plant physiology were observed: First, it enhanced to a great extent the growth activity of plants-pepper, cucumber, zucchini, tomato, and leaf lettuce at the vegetative stage as well as at the reproductive stage, as demonstrated by their yield which were in average $40{\sim}50%$ increased compared with the control (under white sunlight). Second, it improved significantly the cold tolerance of plants, as exhibited with their resistance to chilling during treatment in a cold chamber maintained at a temperature which caused chilling injury to the plants of control. The visualized effects were reflected on the physiological activity of cells on organelle level. Chloroplast isolated from the plant leaves grown under BCR film showed considerably stronger photosynthetic activity, as judged by the increased electron transport rate of illuminated chloroplast, than that from leaves grown under white PE film. Mitochondria from leaves grown under BCR film maintained normal respiration activity until temperature decreased to a few degree($^{\circ}C$) lower than the temperature which caused respiratory inhibition to mitochondria obtained from leaves of the control.

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Study on the Screening of the $SO_2$ Resistant Species for Landscape in Air Polluted Area (대기오염지역(大氣汚染地域) 조경용(造景用) 수종(樹種)의 개발(開發)을 위(爲)한 $SO_2$에 대한 내연성(耐煙性) 비교(比較) 연구(硏究))

  • Lim, Soo-Kil;Lee, Joong-Bae
    • Korean Journal of Environmental Agriculture
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    • v.12 no.2
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    • pp.153-161
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    • 1993
  • This study was conducted to compare the resistance and sensitivity of trees with 6 native species exposing to 4 different levels of $SO_2$gas(0.4, 0.7, 1.5 and 3.0 ppm) respectively. The results are summarized as follows : 1. Visible injuries appeared as spots in the region of intervein on the leaves for all the species and the color of the spots changed from light green and/or brown to light brown, dark brown, and/or redish brown. 2. The sensitivity of the species to $SO_2$ was high in the descending order of Zizyphus jujuba, Cataegus pinnatifida, Viburnum sargentii, Weigela subsessilis, Euonymus japonica, and Acer ginnala. 3. The resistance of the species to $SO_2$ was high in the descending order of Acer ginnala, Eunymus japonica Viburnum sargentii, Weigela subsessilis, Zizyphus jujuba, and Crataegus pinnatifida. 4. When the trees were exposed to $SO_2$gas, the contents of chlorophyll a, b, and a+b were consostently lower than those of control, and water soluble sulfur contents in the leaves were higher than those of control. 5. There was no significant correlation between stomatal resistance and the sensitivity(or resistance) of the trees exposed to $SO_2$ gas. 6. In this study, it was concluded that Acer ginnala was more suitable species than the others for landscape in air polluted area because it showed high resistance, low sensitivity, and low stromal resistance to $SO_2$gas exposure.

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Development of simple tools for algal bloom diagnosis in agricultural lakes (농업용 호소의 조류 발생 진단을 위한 간편 도구의 개발)

  • Nam, Gui-Sook;Lee, Seung-Heon;Jo, Hyun-Jung;Park, Joo-Hyun;Cho, Young-Cheol
    • Korean Journal of Environmental Biology
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    • v.37 no.3
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    • pp.433-445
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    • 2019
  • This study was designed to develop simple tools to easily and efficiently predict the occurrence of algal bloom in agricultural lakes. Physicochemical water quality parameters were examined to reflect the phytoplankton productivity in 182 samples collected from 15 agricultural lakes from April to October 2018. Total phytoplankton abundance was significantly correlated with chlorophyll-a (Chl-a) (r=0.666) and Secchi depth (SD) (r= -0.351). The abundances of cyanobacteria and harmful cyanobacteria were also correlated with Chl-a (r=0.664, r=0.353) and SD (r= -0.340, r= -0.338), respectively, but not with total nitrogen (TN) and total phosphorus (TP). The Chl-a concentration was correlated with SD (r= -0.434), showing a higher similarity than phytoplankton abundance. Therefore, Chl-a and SD were selected as diagnostic factors for algal bloom prediction, instead of analyzing the standing crop of harmful cyanobacteria used in algae alarm systems. Specifically, accurate diagnoses were made using realtime SD measurements. The algal bloom diagnostic tool is an inverse cone-shaped container with an algal bloom diagnosis chart that modified SD and turbidity measurement methods. Lake water was collected to observe the number of rings visible in the container or the number indicated in each ring, depending on the degree of algal bloom,and to determine the final stage of algal blooming by comparison to the colorimetric level on the diagnosis chart. For an accurate diagnosis, we presented 4-step diagnostic criteria based on the concentration of Chl-a and the number of rings and a fan-shaped algal bloom diagnosis chart with Hexa code names. This tool eliminated the variables and errors of previous methods and the results were easily interpreted. This study is expected to facilitate the diagnosis of algal bloom in agricultural lakes and the establishment of an efficient algal bloom management plan.

Analysis and Design of half-mirror coating for sunglasses (썬글라스용 반미러(Half-Mirror) 코팅의 분석과 설계)

  • Park, Moon-Chan;Jung, Boo-Young;Hwangbo, Chang-Kwon
    • Journal of Korean Ophthalmic Optics Society
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    • v.8 no.2
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    • pp.111-117
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    • 2003
  • We collected the domestic and foreign half-mirror coating lens for sunglasses. Their reflectance is measured using Spectrophotometer in order to analysis their optical property and the result which is calculated using Macleod program was compared with measured reflectance. In addition, we designed the new half-mirror coating lens with gold color using TiN material and investigated the optical property of the new half-mirror coating lens. The results obtained from analysis of half-mirror coating lenses are as follow : Two-tone half-mirror coating with silver color is fabricated with [air|$SiO_2$(or $Al_2O_3$)|Cr|glass]. The role of $SiO_2$(or $Al_2O_3$) on Cr improve the hardness of the lens and the thickness of the $Al_2O_3$ with 10 nm is good to show the lens silver color. Incase of color half-mirror coating lens. Blue system is designed by [air|$SiO_2$(66.3)|$TiO_2$(129.0)|$SiO_2$(62.9)|$SiO_2$(26.0)|$TiO_2$(120.3)|$SiO_2$(9.1)|glass], gold system [air|$SiO_2$(60.6)|$TiO_2$(86.2)|$SiO_2$(13.5)|$TiO_2$(86.8)|$SiO_2$(214.38)|glass], green system[air|$SiO_2$(74.3)|$TiO_2$(75.8)|$SiO_2$(44.3)|$TiO_2$(11.6)|$SiO_2$(160.8)|$TiO_2$(12.9)|$SiO_2$(183.3)|$TiO_2$(143.8)|glass], silver system[air|$SiO_2$(21.2)|$TiO_2$(49.7)|$SiO_2$(149.3)|glass]. White half-mirror coating lens has [air|$SiO_2$(17 nm)|$TiO_2$(43 nm)(or $ZrO_2$)|$SiO_2$(87 nm)|polysiloxane($4.46{\mu}m$|glass or CR-19]. It has half-mirror coaling lens which has about 19% reflectance and about 80% transmittance in the range of visible light(400~700nm). we designed the new half-mirror coating lens with gold color, the (x, y) value of the CIE is almost similar to the CIE value of [air|$SiO_2$(170 nm)|TiN(15 nm)|glass].

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Polymerization of HEMA by Electron beam Irradiation and Fabrication of Soft contact lens (전자빔조사에 의한 HEMA의 중합과 소프트콘택트렌즈 제조)

  • Hwang, Kwang-Ha;Shin, Joong-Hyeok;Sung, Yu-Jin;Jeong, Keun-Seung;Jun, Jin
    • Journal of Korean Ophthalmic Optics Society
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    • v.17 no.2
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    • pp.135-141
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    • 2012
  • Purpose: Polymerization of HEMA(2-hydroxyethyl methacrylate) which can be used in the soft contact lens has been performed by using electron beam(EB) irradiation, and examined the best condition for the polymerization. Comparing the physical properties of the contact lenses to the one fabricated by thermal polymerization method, we check the use possibility of the EB irradiation to the fabrication of the soft contact lens. Methods: We investigated the degree of polymerization of the HEMA according to the composition of the monomer, the additive ratio and the dose of electron beam (0~120 kGy). The degree of polymerization was measured depending on the EB dose to research the best synthetic condition under the EB irradiation. The physical properties of the contact lens such as water content(%), oxygen transmissibility(Dk/t) and optical transmittance were analysed by using the FT-IR results with comparing the two different polymerization method (thermal and electron beam polymerization) with same additive ratio. Results: When the dose of electron beam was above 100 kGy, the degree of polymerization of HEMA was above 99% with regardless using cross-linker and initiator. The water content of the lens fabricated by EB method showed 10% higher than the one by the thermal method which was 40%. The lens fabricated by EB method also showed higher oxygen transmissibility(Dk/t) as same with the water content, and showed twice higher value in the lens fabricated by pure HEMA. According to the FT-IR results, hydrophilic property of the lens fabricated by EB method was increased due to increasing the intermolecular hydrogen bonding. It showed above 90% optical transmittance in the visible range of wavelength on the contact lenses fabricated by the both of two different polymerization method. Conclusions: The polymerization of HEMA without cross-linker and initiator was successful above 100 kGy of EB irradiation. Moreover the lens fabricated from the polymer synthesized by pure HEMA with 100 kGy of EB showed the highest water content and oxygen transmissibility. Therefore EB irradiation is another possible method to synthesize the polymer which can be used for the soft contact lens.

The Effect of Invisible Cue on Change Detection Performance: using Continuous Flash Suppression (시각적으로 자각되지 않는 단서자극이 변화 탐지 수행에 미치는 효과: 연속 플래시 억제를 사용하여)

  • Park, Hyeonggyu;Byoun, Shinchul;Kwak, Ho-Wan
    • Korean Journal of Cognitive Science
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    • v.27 no.1
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    • pp.1-25
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    • 2016
  • The present study investigated the effect size of attention and consciousness on change detection. We confirmed the effect size of consciousness by comparing the condition which combined attention and consciousness and the condition of attention without consciousness. Then, we confirmed the effect size of attention by comparing the condition of attention without consciousness and the control condition which excluded attention and consciousness. For this purpose, change detection task and continuous flash suppression (CFS) were used. CFS renders a highly visible image invisible. In CFS, one eye is presented with a static stimulus, while the other eye is presented with a series of rapidly changing stimuli, such as mondrian patterns. The result is that the static stimulus becomes suppressed from conscious awareness by the stimuli presented in the other eye. We used a customized device with smartphone and google cardboard instead of stereoscope to trigger CFS. In Experiment 1-1, we reenacted some study to validate our experimental setup. Our experimental setup produced the duration of stimulus suppression that were similar to those of preceding research. In Experiment 1-2, we reenacted a study for attention without consciousness using an customized device. The results showed that attention without consciousness more strongly work as a cue. We think that it is reasonable to use CFS treatment employing smartphone and google cardboard for a follow-up study. In Experiment 2, when performing the change detection task, we measured the effect size of consciousness and attention by manipulating the consciousness level of cue. We used the method in which everything but the variable of interest kept being fixed. That way, the difference this independent variable makes to the action of the entire system can be isolated. We found that there was significant difference of correct response rate on change detection performance among different consciousness level of cue. In this study, we investigated that not only the role of attention and consciousness were different also we were able to estimated the effect size.

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A Study for Drying of Sewage Sludge through Immersion Frying Using Used Oil (폐유를 이용한 하수슬러지 유중 건조 연구)

  • Shin, Mi-Soo;Kim, Hey-Suk;Hong, Ji-Eun;Jang, Dong-Soon;Ohm, Tae-In
    • Journal of Korean Society of Environmental Engineers
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    • v.30 no.7
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    • pp.694-699
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    • 2008
  • Considering the severe regulation associated with sludge treatment such as direct landfill and ocean dumping, there is no doubt in that an advanced study for the proper treatment of sludge is urgently needed in near feature. As one of viable method for sludge treatment, fry-drying of sludge by waste oil has been investigated in this study. The fundamental mechanism of this drying method lies in the phenomenon of rapid moisture escape in the sludge pore toward oil media. This is caused by the severe pressure gradient formed by the rapid oil heating between sludge and oil. As part of research effort of fry-drying using waste oil, a series of basic study has been made experimentally to obtain typical drying curves as function of important parameters such as drying temperature, drying time, oil type and geometrical shape of sludge formed. Based on this study, a number of useful conclusion can be drawn as following. The fry-drying method by oil immersion was found quite effective in the removal efficiency of sludge moisture, in general, the moisture content decreases significantly after 10 minutes and the whole moisture content was less than 5% after 14 minutes regardless of the drying temperature. The increase of oil temperature up to 140$^{\circ}C$ favors significantly for the removal of moisture but there was no visible difference above 140$^{\circ}C$. As expected, the decrease of diameter in sludge was efficient in drying due to the increased surface area per unit volume. Further, the effect of oil property by the change of oil type was noted. To be specific, for the case of engine oil the efficiency was found to be remarkably delayed in moisture evaporation compared with that of vegetable oil due to the increased viscosity of engine oil. It produced a result of increasing the evaporation of moisture largely relatively high in the drying temperature over 140$^{\circ}C$ compared with the drying temperature 120$^{\circ}C$ drying temperature as the drying time passed. Accordingly, the drying temperature is considered desirable as keeping over 140$^{\circ}C$ regardless of a sort of used oil.

Structural and optical properties of Ni-substituted spinel $LiMn_2O_4$ thin films (니켈 치환된 스피넬 LiMn2O4 박막의 구조적, 광학적 성질)

  • Lee, Jung-Han;Kim, Kwang-Joo
    • Journal of the Korean Vacuum Society
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    • v.15 no.5
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    • pp.527-533
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    • 2006
  • Spinel $LiNi_xMn_{2-x}O_4$ thin films were synthesized up to x = 0.9 by a sol-gel method employing spin-coating. The Ni-substituted films were found to maintain cubic structure at low x but to exhibit tetragonal structure for $x{\geq}0.6$. Such cubic-tetragonal phase transition indicates that $Ni^{3+}(d7)$ ions with low-spin $(t_{2g}^6,e_g^1)$ state occupy the octahedral sites of the compound, thus being subject to the Jahn-Teller distortion. By x-ray photoelectron spectroscopy both $Ni^{2+}$ and $Ni^{3+}$ ions were detected. Optical properties of the $LiNi_xMn_{2-x}O_4$ films were investigated by spectroscopic ellipsometry (SE) in the visible?ultraviolet range. The measured dielectric function spectra by SE mainly consist of broad absorption structures attributed to charge-transfer (CT) transitions, $O^{2-}(2p){\rightarrow}Mn^{4+}(3d)$ for 1.9 $(t_{2g})$ and $2.8{\sim}3.0$ eV $(e_g)$ structures and $O^{2-}(2p){\rightarrow}Mn^{3+}(3d)$ for 2.3 $(t_{2g})$ and $3.4{\sim}3.6$ eV $(e_g)$ structures. Also, sharp absorption structures were observed at about 1.6, 1.7, and 1.9 eV, interpreted as due to d-d crystal-field transitions within the octahedral $Mn^{3+}$ ion. The strengths of these absorption structures are reduced by the Ni substitution. Rapid reduction of the CT transition strength involving the eg states for x = 0.6 is attributed to the reduced wavefunction overlap between the $e_g$ and the $O^{2-}(2p)$ states due to the tetragonal extension of the lattice constant by the Jahn-Teller effect.

The Photovoltaic Effect of Iodine-Doped Metal Free Phthalocyanine/ZnO System (Ⅰ) (요오드가 도핑된 무금속 프탈로시아닌/산화아연계의 광기전력 효과(Ⅰ))

  • Heur, Soun-Ok;Kim, Young-Soon;Park, Yoon-Chang
    • Journal of the Korean Chemical Society
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    • v.39 no.3
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    • pp.163-175
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    • 1995
  • Metal free phthalocyanine($H_2Pc$) partially doped with iodine, $H_2Pc(I)x$, has been made to improve photosensitizing efficiency of ZnO/$H_2Pc$. The content of iodine dopant level(x) for $H_2Pc(I)x$ upon $H_2Pc$ polymorphs was characterized as ${\chi}-H_2Pc(I)_{0.92}$ and ${\beta}-H_2Pc(I)_{0.96}$ by elemental analysis. Characterization of iodine-oxidized $H_2Pc$ were investigated by TGA (thermogravimetric analysis), UV-Vis, FT-IR, Raman and ESR (electron spin resonance) spectrum, and the adsorption properties of $H_2Pc(I)x$ on ZnO were characterized by means of Raman and ESR studies. TGA for $H_2Pc(I)x$ showed a complete loss of iodine at approximately 265$^{\circ}C$ and the Raman spectrum of $H_2Pc(I)x$ and ZnO/$H_2Pc(I)x$ at 514.5 nm showed characteristic $I_3^-$ patterns in the frequency region 90∼550 $cm^{-1}$. ZnO/$H_2Pc(I)x$ exhibited a very intense and narrow ESR signal at $g=2.0025{\pm}0.0005$ compared to $H_2Pc$/ZnO. Iodine doped ZnO/$H_2Pc(I)x$ showed a better photosensitivity compared to iodine undoped ZnO/$H_2Pc$. That is, the surface photovoltage of ${\chi}-H_2Pc(I)_{0.92}$/ZnO was approximately 31 times greater than that of ZnO/${\chi}-H_2Pc$ and ZnO/${\beta}-H_2Pc(I)_{0.96}$ was 5 times more efficient than ZnO/${\beta}-H_2Pc$ at 670 nm. And the dependence of photosensitizing effect upon $H_2Pc$ polymorphs was exhibited that the surface photovoltage of ZnO/${\chi}-H_2Pc(I)_{0.92}$ was approximately 5 times greater than ZnO/${\beta}-H_2Pc(I)_{0.96}$ at 670 nm. Therefore Iodine doping of H_2Pc$ resulted in increase in photoconductivity of $H_2Pc$ and photovoltaic effect of ZnO/$H_2Pc$ in the visible region.

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