• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.3
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• pp.182-186
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• 2012

This paper aims to analyze the vibration characteristics of the test equipment that inspects any defects in manufactured semiconductor chips and classifies defective chips. This type of equipment should be robust against any vibrations because such vibrations can cause disruption in the process that requires higher precision. 3D model of the structure of the equipment has been used to configure vibration simulation model. Model analysis have been carried out to analyze which part of the equipment is weak against vibration. To minimize the vibration effect of the equipment, the thickness of the plate consist of the equipment and weights are modified. The results show that thicker plate and higher weight in the equipment can decrease vibration effect.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.11 no.4
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• pp.31-36
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• 2001

A spin coater is a machine to coat wafer or LCD display with thin film. Vibration in the spin coater may be one of main troubles in the coating process. In this paper, we focus on the difference between two spin coaters. Vibration sources are identified by experimental approach and are compared to find the difference between the two spin coaters. Also, the particle concentration is observed by laser particle counter (LPC) for the two spin coaters, when the spin coaxers are working. It is also considered whether the defect rate is proportional to the particle concentration. The result shows that particle generation in the coating process is related to excessive vibration of the spin coater shaft and the particles influence the defect rate of the thin film product.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.269-274
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• 2003

Vibration table is required to obtain high packing density in expendable pattern casting process. Packing density, which is an important manufacture factor, depends on the vibration pattern induced by vibration table. Modal test is utilized to identify the dynamic characteristics of vibration table. And finite element method is used to modify flask by fixing the stiffener. The positions of stiffener to modify are found and the natural frequency could be easily shifted to the objective value by using sensitivity analysis.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11a
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• pp.322.2-322
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• 2002

Vibration table is required to obtain high packing density in lost form casting process. Packing density, which is important manufacture factor, depends on the vibration pattern induced by vibration table. In general, circular vibration pattern is recognized as the best pattern. The existing vibration table is investigated to identify current vibration pattern and consider a countermeasure. Modal test is utilized to identify the dynamic characteristics of vibration table, and finite element method is used to present the improved design

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.196-201
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• 2006

In general, the vertical vibration problems for strength of members and serviceability of building structures are not considered in structural design process, but the prediction of the vertical vibration is very important and essential to structural design process. This study aims to investigate the characteristics of vertical vibration in terms of the transfer of horizontal directions on the rahmen building structures and the shear wall building structures. In order to examine the characteristics of vertical vibration, the modal test and the heel-drop excitation experiments were conducted several times on the two type building structures. The results from the experiments are analyzed and compared with the results. The results of this study suggest that the characteristics of vortical vibration transfer in horizontal way are effected from the fundamental frequency of the slabs and excitation forces and are effected the shear wall on the path of the vibration transfer.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.1
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• pp.81-88
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• 2016

Recently, high-efficiency machining in the production of high-value products with complex shapes has constantly been required along with the need for hybrid machining. In this study, in addition to wire-cut Electric Discharge Machining (EDM) and vibration, we present the possibility of a hybrid process by carrying out an experiment with aluminum alloy, and the hybrid process determines the nature of the surface. The selected experimental parameters are waveform, amplitude, peak current, and two-dimensional (2D) vibration. The experimental results give the guideline for selecting reasonable machining parameters. The surface roughness was improved about 20% with increases in the amplitude of the vibration.

• Design & Manufacturing
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• v.17 no.4
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• pp.8-13
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• 2023

In this study, it was studied whether a new measurement factor "frictional vibration" that occurs due to the material flow of the die and sheet metal in the flange area during deep drawing process, could be measured using an vibration sensor. The blank holder force acting on the flange area during drawing processing acts as a friction force in the opposite direction into which the sheet material flows and causes friction vibration. As the blank holder force increases, the friction force increases, and as the blank holder force decreases, the friction force also decreases. Because of this, friction vibration also increases and decreases in proportion to the size of the blank holder force. According to this theory, whether frictional vibration occurs was measured using a flange simulator and a vibration sensor. The initial pressure was created using a torque wrench, and it was confirmed that the amplitude increased by about 4 times when torque 6 Nm was increased. When the forming velocity was rapidly changed to 300 mm/min, the amplitude increased approximately 4 times. It was confirmed that the amplitude of frictional vibration according to the measurement location was greater the further away from the specimen. It was verified that a new measurement factor "friction vibration" in the flange area can be measured and used for online monitoring.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.6
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• pp.421-425
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• 2016

Micro-EDM is one of the recent fine-machining technologies. Micro-EDM is widely used in precision processes because products manufactured via EDM are free from workpiece hardness. However, the debris produced during the process cause many problems such as reduced precision of the process. The first solution of this problem involves using the milling hole process. Micro-EDM hole process involves an electrode moving rapidly in the vertical direction via a servo system to disperse debris. However, this process can cause reduced work efficiency owing to contact between the electrode and workpiece. In this study, ultrasonic vibration is added to micro-EDM channel machining. Ultrasonic vibration removes the debris during machining and enables precision machining. Consequently, a clean work environment for the subsequent processes is maintained.

• Journal of the Korean Society for Precision Engineering
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• v.8 no.3
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• pp.73-81
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• 1991

There have been many studies on chatter vibration in machining but there seems to be no regulations to decide the commencing point of chatter objectively. The development of an objective method which can estimate and detect chatter commencement is very much in need for automatic manufacturing systems, dynamic performance tests for machine tools, so on. In this study, therefore, the estimation and the in-process detection of chatter have been experi- mentally investigated for the turning process. As a result, the commencing point of chatter can be decided from the behavior of the maximum amplitude of the dynamic component of cutting force, where the maximum amplitude is suddenly increasing with the chatter commencement. Then the commencing point of chatter can be estimated practically by this method before the occurrence of excessive vibration. Also, it is possible to detect the occurence of chatter vibration through the in-process measurement, by monitoring the maximum amplitude of the dynamic component of cutting force.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2006.04a
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• pp.29-34
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• 2006

In general, the vertical vibration problems for .strength of members and serviceability of building structures are not considered in structural design process, but the prediction of the vertical vibration is very important and essential to structural design process. This study aims to investigate the characteristics of vertical vibration in terms of the transfer of horizontal directions on the rahmen building structures. In order to examine the characteristics of vertical vibration, the modal test and the impact (heel-drop and hammer) excitation experiments were conducted several times on three building structures. The results from the experiments are analyzed and compared. with the results. The results of this study suggest that the characteristics of vertical vibration transfer in horizontal way are effected from the fundamental frequency of the slabs and excitation forces.