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A Study of Vibration Characteristic for Semiconductor Chip Test Equipment  

Hong, Sung-Keun (인하대학교 기계공학과)
Lee, Chul-Hee (인하대학교 기계공학과)
Bak, Jeong-Hyun (인하대학교 기계공학과)
Lee, Kwang-Hee (인하대학교 기계공학과)
Publication Information
Journal of the Korean Society of Manufacturing Process Engineers / v.11, no.3, 2012 , pp. 182-186 More about this Journal
Abstract
This paper aims to analyze the vibration characteristics of the test equipment that inspects any defects in manufactured semiconductor chips and classifies defective chips. This type of equipment should be robust against any vibrations because such vibrations can cause disruption in the process that requires higher precision. 3D model of the structure of the equipment has been used to configure vibration simulation model. Model analysis have been carried out to analyze which part of the equipment is weak against vibration. To minimize the vibration effect of the equipment, the thickness of the plate consist of the equipment and weights are modified. The results show that thicker plate and higher weight in the equipment can decrease vibration effect.
Keywords
Structural Analysis; Natural Frequency; Finite Elemental Analysis; Vibration Analysis;
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