• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.25-30
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• 2003

In the case of a vibration sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. This high technology equipments require very strict environmental vibration criteria in proportion to the accuracy of the manufacturing. In this paper, the dynamic analysis and modal test were performed to evaluate the dynamic properties of the constructing clean room structure. Based on these results, a structural dynamic modification(SDM) were required to satisfiy the vibration allowable limit for pression machine. Therefore, in order to improve the dynamic stiffness of clean room structure, the VSD system which can control the force applied on structure, were adopted and its utility were proved from dynamic test results of the improved structure after a modification work.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.16 no.6 s.111
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• pp.574-581
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• 2006

Flat plate slab systems are more economical rather than reinforced concrete frame systems because flat plate slab system reduces story height. Furthermore flat plate systems are more popularly needed in construction practice due to flexibility of plan. Korean Concrete Provisions 2003 provide the minimum thickness of the slab that satisfies serviceability requirement to the static displacement. However, floor thickness in residence buildings may not satisfy the floor vibration criteria although the thickness satisfies the serviceability requirements in current design provisions. This study estimates the dynamic properties of floor vibration for existing flat plate slabs, and proposes the slab thickness satisfying the floor vibration criteria. The dynamic response analysis using finite element method and reliability analysis are carried out for this Purpose.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.04a
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• pp.423-423
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• 2009

미진동 제어라는 분야에 대한 연구는 반도체 산업이 초고도화 및 초정밀화가 진전되고 있는 최근에 들어와 학계보다는 전문 반도체와 TFT-LCD의 미진동제어 관련 엔지니어 그룹과 정밀 장비 제작사를 중심으로 이루어져왔다. 고집적 생산 제품을 가공 및 검사하기 위해서는 가공 선폭 이상의 분해 성능을 가진 고정밀도의 생산 및 검사 장비가 필요하다. 이런 고정밀도 생산 및 검사장비는 내외부로부터 입력되는 진동에 민감한 영향을 받는다. 초기 반도체 산업을 주도한 미국을 중심으로 일부 학자와 반도체 진동 제어를 수행하는 전문연구소에서 작성한 BBN-Criteria는 정밀장비의 용도나 분해능 별로 정리된 진동허용규제치를 지침서로 사용하여 왔다. 그러나 장비의 엄밀한 주파수 특성 및 정밀도 측면에서 불확실한 영역부분을 가지고 있기 때문에 미소한 진동을 제어하는 구조 설계자 관점에서는 불충분한 자료이다. 그리고 주파수 분해능을 가진 진동허용규제치를 제시하는 것이 바람직하지만 대부분의 제작사에서는 그렇지 못하고 있다. 그런 이유에는 장비 개개의 진동허용규제치가 다른 고가의 장비 전량에 대하여 시험을 수행해야 하는 점, 가진(加振)특성, 중량, 크기 등의 진동실험 자체에 어려움 때문이다. 또한 진동실험시 가진주파수의 분해능의 결려에 따른 장비의 동적 특성이 고려되지 않은 불확실한 영역 부분을 포함한 진동허용규제치를 제시함으로서 불확실한 영역부분의 진동 하한치를 진동허용규제치의 상한치로 결정하는 문제로 인하여 진동허용규제치가 더욱 가혹하게 제시되어 건물 구조 설계와 방진의 어려움을 가중시킬 여지가 있다. 본 논문에서는 이런 어려움 등을 회피하는 방법으로 주파수응답함수(Frequency Response Function, FRF)를 이용하여 정밀장비의 진동허용규제치를 결정하는 간편하면서도 더욱 정밀한 새로운 방법을 모색하였다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.05a
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• pp.811-818
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• 2001

ISO 11342 classifies flexible rotors in accordance with their balancing requirements and establishes methods of assessment of residual unbalance. This International Standard also shows how criteria for use in the balancing facility may be derived from either vibration limits specified for the assembled and installed machine or unbalance limits specified for the rotor. If such limits are not available, this standard shows how they may be derived from ISO 10816 and ISO 7919 if desired in terms of vibration, or from ISO 1940- 1 if desired in terms of permissible residual balance. This International Standard also presents methods for adapting the criteria of ISO 1940- 1 to flexible rotors.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.161-170
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• 2007

In general, deflection limit criteria of bridge design specifications would have been considered based on the static serviceability and structural stability. Dynamic serviceability induced from bridge vibration, as a comfort limit, actually has not been included in the criteria. Thus, it is necessary for dynamic serviceability to be considered in bridge vibration problems and for comfort limit on vibration to be needed for evaluating dynamic serviceability of bridges. In this paper, comfort limits of bridge structures considering the time duration exposed by vibration were examined with frequency and time dependent comfort limits, and they were evaluated by using the vibration signals measured from the existing bridges. Therefore, it is resulted that the time-dependent comfort limit considering the duration of vibration is an efficient estimate for evaluating dynamic serviceability of bridges.

• Journal of the Semiconductor & Display Technology
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• v.2 no.3
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• pp.37-43
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• 2003

It is necessary to design the anti-vibration system of precision machinery for a quality assurance. However, in general, the allowable vibration limit is not well known. In this paper, the vibration criteria for foundation of sensitive machinery is proposed and anti-vibration system is designed by using vibration measurement results of foundation. Also, the finite element analysis is performed to verify the effectiveness of the designed anti-vibration system and to determine the allowable dynamic loads of precision measuring system. The results of this study will be helpful for the future design of anti-vibration structures with nano scale measuring system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.10
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• pp.923-935
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• 2007

In general, deflection limit criteria of bridge design specifications would have been considered based on the static serviceability and structural stability. Dynamic serviceability induced from bridge vibration, as a comfort limit, actually has not been included in the criteria. Thus, it is necessary for dynamic serviceability to be considered in bridge vibration problems and for comfort limit on vibration to be needed for evaluating dynamic serviceability of bridges. In this paper, comfort limits of bridge structures considering the time duration exposed by vibration were examined with frequency and time dependent comfort limits, and they were evaluated by using the vibration signals measured from the existing bridges. Therefore, it is resulted that the time-dependent comfort limit considering the duration of vibration is an efficient estimate for evaluating dynamic serviceability of bridges.

• Proceedings of the KSR Conference
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• 2005.05a
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• pp.510-515
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• 2005

Subway lines often pass through the densely populated districts. As the social interest about environment is more and more increased, the need of countermeasure to the vibration generated by subway train is grossing nowadays. It will be effective to take a measure in the track part, specially at the track design stage. In this study, the vibration proof performances for the various types of the tracks adopted in domestic and foreign countries are evaluated. Based on the results, the criteria of vibration proof performance to meet the demands of the both of populated and normal areas are established.

• Proceedings of the KSR Conference
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• 2008.06a
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• pp.80-85
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• 2008

In general, deflection limit criteria of bridge design specifications have been considered based on static serviceability and structural stability. Dynamic serviceability induced from bridge vibration actually has not been included in the criteria. Thus, it is necessary for comfort limit to be considered in order to check dynamic serviceability on bridge vibration. In this study, the comfort limit of bridge structures based on the RMQ and VDV considering the signal fluctuation effectively and the time duration exposed has been constructed. The comfort limit developed in time domain was verified by using vibration signals directly measured from the existing bridges. Comparing the developed comfort limit with the conventional ones defined in frequency domain, it is shown that the comfort limit developed in time domain would be more feasible for evaluating quantitatively the serviceability due to bridge vibration. Using the Bridge-train interaction analysis program, dynamic response of the bridge by the stiffness change were obtained for several railway bridges. And, a stiffness limit satisfying the bridge vibration serviceability was estimated by compared with comport limit. From the results, a new deflection limit on bridge structures satisfying the vibration serviceability could be proposed by comparing with the conventional deflection limit criteria.

• Journal of the Korean Geotechnical Society
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• v.15 no.5
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• pp.57-64
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• 1999

In order to decide critical vibration level on structural damages induced by near blasting, deformation of existing cracks in structure was investigated and ground vibrations were measured. New criteria to evaluate blasting damage to structure are proposed considering daily deformation of cracks in structures. Results from 2 brick houses in fishing village show that new design criteria far more than current are required to cause structural damage for brick houses.