• Journal of the Semiconductor & Display Technology
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• v.19 no.4
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• pp.18-21
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• 2020

Undetected wafer slip during the lift pin-down motion in semiconductor equipment may affect the center to edge variation, wafer warpage, and pattern misalignment in plasma equipment. Direct measuring of the amount of wafer slip inside the plasma process chamber is not feasible because of the hardware space limitation inside the plasma chamber. In this paper, we demonstrated a practice for the wafer lift pin-up and down motions with respect to the gear ratio, operating voltage, and pulse width modulation to maintain accurate wafer position using remote control linear servo motor with an experimentally designed chamber mockup. We noticed that the pin moving velocity and gear ratio are the most influencing parameters to be control, and the step-wised position control algorithm showed the most suitable for the reduction of wafer slip.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.68 no.4
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• pp.566-572
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• 2019

This paper proposes a new composite guidance law that can intercept moving targets and satisfy look angle rate constraint. In order to obtain the composite guidance law, we first develop a new look angle rate control guidance law which can maintain the maximum look angle rate limitation. And then, we propose the composite guidance scheme on the basis of the look angle rate control guidance and the proportional navigation guidance. To investigate the capturablity and characteristics of the proposed guidance, we also derive closed-form solutions and perform various numerical simulations. The proposed composite guidance only requires the line-of-sight rate, closing velocity, and missile's speed, thereby easily implementing in practical homing missiles.

• Journal of Auto-vehicle Safety Association
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• v.15 no.3
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• pp.17-26
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• 2023

This paper presents extended state feedback control based on impulse response for lane change of autonomous driving vehicle. The triple characteristic root of path tracking system and longitudinal velocity determine feedback gains. We suggest a resemblance of impulse response curve of the system and lane change trajectory of the vehicle. The root affects the duration of lane change and lateral acceleration. The effect of limited lateral acceleration and saturation of steering angle will be analyzed and discussed. Finally, simulation results will show the trajectory of lane change based on impulse response under limitation of lateral acceleration.

• Journal of Oral Medicine and Pain
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• v.23 no.1
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• pp.21-36
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• 1998

The purpose of this study was analyse the mandibular movements in patients with internal derangement of the temporomandibular joint according to diagnostic subgroups. The author classified patients with internal derangement of the temporomandibular joint into 4 diagnostic subgroups by means of the magnet resonance imagings, and evaluated the clinical signs and the mandibular movements with Mandibular Kinesiograph(MKG) in each subgroups. The mandibular movements, measured in this study, were the types of movement in frontal and sagittal plane, velocities in opening and closing movement, and the opening and closing movement, and the opening and closing velocity pattern. The data were compared between the 5 groups including the normal group. The results were as follows : 1. Pain was more frequently observed in the anterior disc displacement without reduction group than in the anterior disc displacement with reduction group. Sound of joint was more frequently observed in the anterior disc displacement with reduction group, and limitation of mandibular opening movement was more frequently observed in the anterior disc displacement without reduction group. Duration of the anterior disc displacement without reduction group was significantly short compared to that of the anterior disc displacement with reduction group, and duration of the unilateral anterior disc displacement without reduction group was shortest in the experimental group. The frequency of Angle's classifications had not significant correlations between the experimental groups. 2. Active and passive range of the opening movement, maximum protrusive movement, maximum lateral movement toward left side were significantly decreased in the experimental groups compared to the control group, but there was no significant difference in the range of the maximum lateral movement toward right side between the control and experiment groups. In unilateral anterior disc displacement without reduction group, the range of maximum lateral movement toward unaffected side was no significant difference in the range of the maximum lateral movement between toward affected side and toward unaffected side. 3. Maximum opening velocity, maximum closing velocity, average opening velocity, average closing velocity and maximum velocity of terminal tooth contact were significantly decreased in the experimental groups compared to control group. There was no significant difference in maximum opening velocity and maximum velocity of Terminal tooth contact between the subgroups of the experimental group each other, but there was significant difference in maximum closing velocity, average opening velocity and average closing velocity between the subgroups each other. 4. In the frontal plane of the MKG, the frequency of complex deviation type(F-2)pattern was significantly increased in the anterior disc displacement with out reduction group compared to the anterior disc displacement with reduction group and the control group. In the sagittal plane, the frequency of coincident type(S-1)was decreased in the same group. 5. In the maximum opening velocity pattern, the frequency of no-peak type (OV-3)in the unilateral anterior disc displacement with reduction group was significantly increased compared to the control group. The frequency of 1-peak type (OV-1) and 2-peak type (OV-2) was decreased in the anterior disc displacement with out reduction group, but the frequency of no-peak type (OV-3)was increased in the same group. In the maximum closing velocity pattern, the frequency of no-peak type (CV-3) was significantly increased in the anterior disc displacement without reduction group. Compared to the anterior disc displacement with reduction group and the control group. The frequency of 1-peak type (CV-1) and 2-peak type (CV-2) in the anterior disc displacement with reduction group was decreased than that in the control group.

• Proceedings of the Korean Geotechical Society Conference
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• 2010.03a
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• pp.208-212
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• 2010

The high-speed railway consists of tracks, gravel ballast and subgrade, and the dynamic load is passed to subgrade through track and gravel ballast. The relaxation condition of the gravel ballast is able to be evaluate relatively and to be repaired through a continuous management, but it is difficult to evaluate the condition of subgrade, which is final part of supporting dynamic load and to repair it when made a problem. The gravel ballast and subgrade are evaluated by determining shear wave velocity. To evaluate ballast and subgrade, a good method to determine shear wave velocity is a non-destructive experiment such as surface wave tests providing a prompt experiment because an experiment in railway has a lot of tests which are carried out following railway directions and needs to prevent damage of the system. In general, a railway has limitation of an experimental space by narrow width, sleeper and etc., and background noise by a reflector exists. The existing surface wave tests need a minimum space, and it is difficult to get a reliable test results on account of background noise effect. Therefore, it is difficult or impossible to apply to existing surface wave test of subgrade and ballast. In this study, the HWAW method is applied to determine a shear wave velocity profile of the underground. The HWAW method is the experiment which is able to be carried out on a narrow space, and it determines share wave velocity of a site by measuring the wave from surface sources on the same spot. In addition, it removes effects of background noise accordingly to a signal processing using harmonic wavelet transforms, so it is useful to evaluate subgrade of a high-speed railway in the narrow space and the situation of background noise. In order to check an application of the HWAW method, an experiment is carried out on a high-speed railway field and a test result is compared to boring results.

• Progress in Medical Physics
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• v.11 no.1
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• pp.59-71
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• 2000

It is possible to obtain a fast CT scan during breath holding with spiral technique. But the risk of radiation is increased due to detailed and repeated scans. However, the limitation of X-ray doses is not fully specified on CT, yet. Therefore, the purpose of the present study is to define the limitation of X-ray doses on CT The CT unit was somatom plus 4. Alderson Rando phantom, Solenoid water phantom, TLD, and reader were used. For determining adequate position and size of organs, the measurement of distance(${\pm}$2mm) from the midline of vertebral body was performed in 40 women(20~40 years). On the brain scan for 8:8(8mm slice thickness, 8mm/sec movement velocity of the table) and 10:10(10mm slice thickness, 10mm/sec movement velocity of the table) methods, the absorption doses of exposed area of the 10:10 were slightly higher than those of 8:8. The doses of unexposed uterus were negligible on the brain scan for both 8:8 and 10:10. On the chest scan for 8:8, 8:10(8mm slice thickness, 10mm/sec movement velocity of the table), 10:10, 10:12(10mm slice thickness, 12mm/sec movement velocity of the table) and 10:15(10mm slice thickness, 15mm/sec movement velocity of the table) methods, 8:8 method of the absorption doses of exposure area was the most highest and 10:15 method was the most lowest. The absorption doses of 8:10 method was relatively lower than those of the other methods. In conclusion, the 8:10 method is the most suitable to give a low radiation burden to patient without distorting image quality.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.9
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• pp.709-717
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• 2009

Heat transfer rate is a very important factor for the performance of a steam reformer because a steam reforming reaction is an endothermic reaction. Coaxial cylindrical reactor is the reactor design which can improve the heat transfer rate. Temperature, fuel conversion and heat flux in the coaxial cylindrical steam reformer are studied in this paper using numerical method under various operating conditions. Langmuir-Hinshelwood model and pseudo-homogeneous model are incorporated for the catalytic surface reaction. Dominant chemical reactions are assumed as a Steam Reforming (SR) reaction, a Water-Gas Shift (WGS) reaction, and a Direct Steam Reforming (DSR) reaction. Although coaxial cylindrical steam reformer uses 33% less amount of catalyst than cylindrical steam reformer, its fuel conversion is increased 10 % more and its temperature is also high as about 30 degree. There is no heat transfer limitation near the inlet area at coaxial-type reactor. However, pressure drop of the coaxial cylindrical reactor is 10 times higher than that of cylindrical reactor. Operating parameters of coaxial cylindrical steam reformer are the wall temperature, the inlet temperature, and the Gas Hourly Space Velocity (GHSV). When the wall temperature is high, the temperature and the fuel conversion are increased due to the high heat transfer rate. The fuel conversion rate is increased with the high inlet temperature. However, temperature drop clearly occurs near the inlet area since an endothermic reaction is active due to the high inlet temperature. When GHSV is increased, the fuel conversion is decreased because of the heat transfer limitation and short residence time.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.8
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• pp.3626-3635
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• 2011

The modular robots are a kind of system that was developed to overcome the limitation of the movement for the mobile robot with wheels or legs. In legs type mobile robot case, they are limited for velocity and balance during moving at the uneven terrain. In wheeled mobile robot case, they are also limited to overcome dump, stair and so on. The modular robots can overcome moving limitation because of their transforming ability. However, they are researched not only driving mechanism but also combination mechanism. In this paper we proposed four kinds of unique structure for the combination and separation and also its algorithm. The effectiveness of the structure is verified with building the real structure and taking experiments to the designed modular robot

• Journal of Korean Society for Geospatial Information Science
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• v.25 no.2
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• pp.21-29
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• 2017

For the efficient and stable operation of autonomous vehicles or advanced driver assistance systems being actively studied nowadays, it is important to determine the positions of the vehicle accurately and economically. A satellite based navigation system is mainly used for positioning, but it has a limitation in signal blockage areas. To overcome this limitation, sensor fusion methods including additional sensors such as an inertial navigation system have been mainly proposed but the high sensor cost has been a problem. In this work, we develop a vehicle position estimation algorithm using in-vehicle sensors and a low-cost imaging sensor without any expensive additional sensor. We determine the vehicle positions using the velocity and yaw-rate of a car from the in-vehicle sensors and the position and attitude of the camera based on the single photo resection process. For the evaluation, we built a prototype system, acquired test data using the system, and estimated the trajectory. The proposed algorithm shows the accuracy of about 40% higher than an in-vehicle sensor only method.

• 한국지구물리탐사학회:학술대회논문집
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• 2008.10a
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• pp.107-112
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• 2008

In the case of the deep reservoirs like the gas reservoirs in the East-sea, it is often difficult to observe AVO responses in CMP gathers. Because the reservoir becomes more consolidated as its depth deepens, P-wave velocity does not decrease significantly when the pore fluid is replaced by the gas. In this study, we analyzed the effects of Poisson's ratio difference on AVO response with a variety of Poisson's ratios for the upper and lower layers. The results show that, as the difference in Poisson's ratio between the upper and lower layers decreases, the change in the reflection amplitude with incidence angle decreases. To consider the limitation of AVO responses shown in the gas reservoir in East-sea, the velocity model was made by simulation Gorae V structure with seismic data and well logs. The results of comparing AVO responses observed from the synthetic data with theoretical AVO responses calculated by using material properties show that the amount of the change in reflection amplitude with increasing incident angle is very small when the difference in Poisson's ratio between the upper and lower layers is small. In addition, the characteristics of AVO responses were concealed by noise or amplitude distortion arisen during preprocessing. To overcome such limitations of AVO analysis of the data from deep reservoirs, we need to acquire precisely reflection amplitudes in data acquisition stage and use processing tools which preserve reflection amplitude in data processing stage.