• Title/Summary/Keyword: Vector analysis

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Quantitative Analysis for Plasma Etch Modeling Using Optical Emission Spectroscopy: Prediction of Plasma Etch Responses

  • Jeong, Young-Seon;Hwang, Sangheum;Ko, Young-Don
    • Industrial Engineering and Management Systems
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    • v.14 no.4
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    • pp.392-400
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    • 2015
  • Monitoring of plasma etch processes for fault detection is one of the hallmark procedures in semiconductor manufacturing. Optical emission spectroscopy (OES) has been considered as a gold standard for modeling plasma etching processes for on-line diagnosis and monitoring. However, statistical quantitative methods for processing the OES data are still lacking. There is an urgent need for a statistical quantitative method to deal with high-dimensional OES data for improving the quality of etched wafers. Therefore, we propose a robust relevance vector machine (RRVM) for regression with statistical quantitative features for modeling etch rate and uniformity in plasma etch processes by using OES data. For effectively dealing with the OES data complexity, we identify seven statistical features for extraction from raw OES data by reducing the data dimensionality. The experimental results demonstrate that the proposed approach is more suitable for high-accuracy monitoring of plasma etch responses obtained from OES.

7-Phase PMSM Motor Drive System Using Space Voltage Vector PWM (공기전압벡터 PWM을 이용한 7상 영구자석형 동기전동기의 구동 시스템)

  • Kim, H.G.;Choi, M.G.;Jeong, B.H.;Mok, H.S.;Choe, G.H.
    • Proceedings of the KIPE Conference
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    • 2005.07a
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    • pp.42-44
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    • 2005
  • The motor research of pre-existing attaches importance about one and three motor of reduce torque ripple and speed control. 3-Phase PMSM Motor, which is generally used, has limited usage in high speed, due to pulsation torque and variable speed. To solve this problem it is necessary to increase invariable, pole number or the number of slots. In this paper 7-Phase PMSM Motor of Steady state analysis of Torque and Output Voltage characteristic.7-Phase modulation method with Space Voltage Vector is studied for ideal operation of controller.

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Sensorless Vector Control of Induction Motor with HAI Controller (HAI 제어기에 의한 유도전동기의 센서리스 벡터제어)

  • Lee, Jung-Chul;Lee, Hong-Gyun;Chung, Dong-Hwa
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.54 no.2
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    • pp.73-79
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    • 2005
  • This paper is proposed hybrid artificial intelligent (HAI) controller based on the vector controlled induction motor drive system. The hybrid combination of fuzzy control and neural network will produce a powerful representation flexibility and numerical processing capability. Also, this paper is proposed speed estimation of induction motor using a closed-loop state observer. The rotor position is calculated through the stator flux position and an estimated flux value of rotation reference frame. A closed-loop state observer is implemented to compute the speed feedback signal. The results of analysis prove that the proposed control system has strong robustness to rotor parameter variation, and has good steady-state accuracy and transitory response.

A Study on the Novel Space Vector Based Harmonic Elimination Method of Inverter (인버터 고조파 저감을 위한 새로운 공간벡터 변조기법에 관한 연구)

  • Lee, Sang-Taik;Kim, Hee-Jun;Oh, Won-Seok;Shin, Tae-Hyun
    • Proceedings of the KIEE Conference
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    • 2000.07b
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    • pp.1236-1238
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    • 2000
  • This paper considers the problem of eliminating harmonics in the inverter output waveforms. The approach is based on the minimization of the current harmonics in the induction motor by space vector modulation method. Reference voltage is compensated with injection of controlled current harmonics which are calculated to reduce current harmonics through sampled current harmonic analyzing algorithm. The theoretical analysis is carried out using computer simulation. It is verified that proposed SVM technique could reduce current harmonic component and improve THD.

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HEISENBERG GROUPS - A UNIFYING STRUCTURE OF SIGNAL THEORY, HOLOGRAPHY AND QUANTUM INFORMATION THEORY

  • Binz, Ernst;Pods, Sonja;Schempp, Walter
    • Journal of applied mathematics & informatics
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    • v.11 no.1_2
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    • pp.1-57
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    • 2003
  • Vector fields in three-space admit bundles of internal variables such as a Heisenberg algebra bundle. Information transmission along field lines of vector fields is described by a wave linked to the Schrodinger representation in the realm of time-frequency analysis. The preservation of local information causes geometric optics and a quantization scheme. A natural circle bundle models quantum information visualized by holographic methods. Features of this setting are applied to magnetic resonance imaging.

Finite Element Study of Ferroresonance in single-phase Transformers Considering Magnetic Hysteresis

  • Beyranvand, Morteza Mikhak;Rezaeealam, Behrooz
    • Journal of Magnetics
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    • v.22 no.2
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    • pp.196-202
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    • 2017
  • The occurrence of ferroresonance in electrical systems including nonlinear inductors such as transformers will bring a lot of malicious damages. The intense ferromagnetic saturation of the iron core is the most influential factor in ferroresonance that makes nonsinusoidal current and voltage. So the nonlinear behavior modeling of the magnetic core is the most important challenge in the study of ferroresonance. In this paper, the ferroresonance phenomenon is investigated in a single phase transformer using the finite element method and considering the hysteresis loop. Jiles-Atherton (JA) inverse vector model is used for modeling the hysteresis loop, which provides the accurate nonlinear model of the transformer core. The steady-state analysis of ferroresonance is done while considering different capacitors in series with the no-load transformer. The accurate results from copper losses and iron losses are extracted as the most important specifications of transformers. The validity of the simulation results is confirmed by the corresponding experimental measurements.

Automatic Classification of Power System Harmonic Disturbances (전력시스템 고조파 외란의 자동식별)

  • Kim, Byoung-Chul;Kim, Hyun-Soo;Nam, Sang-Won
    • Journal of Institute of Control, Robotics and Systems
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    • v.6 no.7
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    • pp.551-558
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    • 2000
  • In this paper a systematic approach to automatic classificationi of power system harmonic disturbances is proposed where the proposed approach consists of the following three steps:(i) detecting and localizing each harmonic disturbance by applying discrete wavelet transform(DWT) (ii) extracting an efficient feature vector from each detected disturbance waveform by utilizing FFT and principal component analysis (PCA) along with Fisher's criterion and (iii) classifying the corresponding type of each harmonic disturbance by recognizing the pattern of each feature vector. To demonstrate the performance and applicability of the proposed classification procedure some simulation results obtained by analyzing 8-class power system harmonic disturbances being generated with Matlab power system blockset are also provided.

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Comparative Study of Field-Oriented Control in Different Coordinate Systems for DTP-PMSM

  • Zhang, Ping;Zhang, Wei;Shen, Xiaofeng
    • Journal of international Conference on Electrical Machines and Systems
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    • v.2 no.3
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    • pp.330-335
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    • 2013
  • This paper performs two kinds of Field-Oriented Control (FOC) for dual three phase permanent magnet synchronous motor (DTP-PMSM).The first is based on vector space decomposition to study the effect of current harmonics on electromechanical energy conversion. And the second presents the coupling relations between two sets of windings using two d-q transformation. And then this paper has deeply studied the differences between these two strategies, the different effect on the control of harmonic current and the reason for these differences. MATLAB-based Simulation studies of a 3KW DTP-PMSM are carried out to verify the analysis of differences between the two FOC strategies.

Verification and estimation of a posterior probability and probability density function using vector quantization and neural network (신경회로망과 벡터양자화에 의한 사후확률과 확률 밀도함수 추정 및 검증)

  • 고희석;김현덕;이광석
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.45 no.2
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    • pp.325-328
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    • 1996
  • In this paper, we proposed an estimation method of a posterior probability and PDF(Probability density function) using a feed forward neural network and code books of VQ(vector quantization). In this study, We estimates a posterior probability and probability density function, which compose a new parameter with well-known Mel cepstrum and verificate the performance for the five vowels taking from syllables by NN(neural network) and PNN(probabilistic neural network). In case of new parameter, showed the best result by probabilistic neural network and recognition rates are average 83.02%.

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Grouping Method of Loads to Verify the Aggregation of Component Load Models (개별부하 축약을 검증하기 위한 집단부하 구성방법에 관한 연구)

  • Ji, Pyeong-Shik;Lee, Jong-Pil;Lim, Jae-Yoon
    • The Transactions of the Korean Institute of Electrical Engineers A
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    • v.50 no.4
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    • pp.172-179
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    • 2001
  • A component based method out of load modeling is to aggregate component load model according to the composition rate of each component load at load bus based on the circuit theory. But the most of component loads respond complex nonlinear characteristics respect to voltage and frequency variation due to the control techniques and semiconductor elements applied to component load. It needs to verify this approach through actual experiment of the aggregation of component load even if it can be down. To identify this aggregation method well known, this paper is proposed the classifying method of component load characteristics for component loads to group by quantitative analysis. The component load characteristics were divided into several types by KSOM (kohonen self organizing map), which can classify multi-dimension vector, component load pattern, into two-dimension vector. Some ambiguous cases happened from KSOM were classified by the proposed closing degree.

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