• 제목/요약/키워드: Vapor-phase oxidation

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Improvement of uniformity in chemical vapor deposition of silicon carbide using CFD (탄화규소 화학기상증착 공정에서 CFD를 이용한 균일도 향상 연구)

  • Seo, Jin-Won;Kim, Jun-Woo;Hahn, Yoon-Soo;Choi, Kyoon;Lee, Jong-Heun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.24 no.6
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    • pp.242-245
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    • 2014
  • In order to increase the thickness uniformity in chemical vapor depositon of silicon carbide, we have carried out CFD studies for a CVD apparatus having a horizontally-rotated 3-stage susceptor. We deposited silicon carbide films of 3C-SiC phase showing quite uniform thickness between stages but not uniform one in the stage. The cause of this nonuniformity is thought to be originated from the high rotational speed. And the uniformity between stages can be further increased with the $120^{\circ}$ split type nozzles from CFD results. Through the formation of silicon carbide film on graphite substrates we can make oxidation-resistant and dust-free graphite components with high hardness for the semiconductor applications.

Molybdenum Oxides as Diffusion Barrier Layers against MoSe2 Formation in A Nonvacuum Process for CuInSe2 Solar Cells (비진공법 CuInSe2 태양전지에서 MoSe2의 생성을 억제하기 위한 산화 몰리브데늄 확산장벽 층)

  • Lee, Byung-Seok;Lee, Doh-Kwon
    • Current Photovoltaic Research
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    • v.3 no.3
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    • pp.85-90
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    • 2015
  • Two-step processes for preparing $Cu(In,Ga)Se_2$ absorber layers consist of precursor layer formation and subsequent annealing in a Se-containing atmosphere. Among the various deposition methods for precursor layer, the nonvacuum (wet) processes have been spotlighted as alternatives to vacuum-based methods due to their potential to realize low-cost, scalable PV devices. However, due to its porous nature, the precursor layer deposited on Mo substrate by nonvacuum methods often suffers from thick $MoSe_2$ formation during selenization under a high Se vapor pressure. On the contrary, selenization under a low Se pressure to avoid $MoSe_2$ formation typically leads to low crystal quality of absorber films. Although TiN has been reported as a diffusion barrier against Se, the additional sputtering to deposit TiN layer may induce the complexity of fabrication process and nullify the advantages of nonvacuum deposition of absorber film. In this work, Mo oxide layers via thermal oxidation of Mo substrate have been explored as an alternative diffusion barrier. The morphology and phase evolution was examined as a function of oxidation temperature. The resulting Mo/Mo oxides double layers were employed as a back contact electrode for $CuInSe_2$ solar cells and were found to effectively suppress the formation of $MoSe_2$ layer.

Gas Phase Oxidation of Toluene and Ethyl Acetate over Proton and Cobalt Exchanged ZSM-5 Nano Catalysts- Experimental Study and ANN Modeling

  • Hosseini, Seyed Ali;Niaei, Aligholi;Salari, Dariush;Jodaei, Azadeh
    • Bulletin of the Korean Chemical Society
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    • v.31 no.4
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    • pp.808-814
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    • 2010
  • Activities of nanostructure HZSM-5 and Co-ZSM-5 catalysts (with different Co-loading) for catalytic conversion of ethyl acetate and toluene were studied. The catalysts were prepared by wet impregnation method and were characterized by XRD, BET, SEM, TEM and ICP-AES techniques. Catalytic studies were carried out inside a U-shaped fixed bed reactor under atmospheric pressure and different temperatures. Toluene showed lower reactivity than ethyl acetate for conversion on Co-ZSM-5 catalysts. The effect of Co loading on conversion was prominent at temperatures below $400^{\circ}C$ and $450^{\circ}C$ for ethyl acetate and toluene respectively. In a binary mixture of organic compounds, toluene and ethyl acetate showed an inhibition and promotional behaviors respectively, in which the conversion of toluene was decreased at temperatures above $350^{\circ}C$. Inhibition effect of water vapor was negligible at temperatures above $400^{\circ}C$. An artificial neural networks model was developed to predict the conversion efficiency of ethyl acetate on Co-ZSM-5 catalysts based on experimental data. Predicted results showed a good agreement with experimental results. ANN modeling predicted the order of studied variable effects on ethyl acetate conversion, which was as follows: reaction temperature (50%) > ethyl acetate inlet concentration (25.085%) > content of Co loading (24.915%).

Hydroxyapatite-Zirconia Composite Thin Films Showing Improved Mechanical Properties and Bioactivity

  • Kim, Min-Seok;Ryu, Jae-Jun;Sung, Yun-Mo
    • Korean Journal of Materials Research
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    • v.19 no.2
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    • pp.85-89
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    • 2009
  • Nano-crystalline hydroxyapatite (HAp) films were formed at the Ti surface by a single-step microarc oxidation (MAO), and HAp-zirconia composite (HZC) films were obtained by subsequent chemical vapor deposition (CVD) of zirconia onto the HAp. Through the CVD process, zero- and one-dimensional zirconia nanostructures having tetragonal crystallinity (t-ZrO2) were uniformly distributed and well incorporated into the HAp crystal matrix to form nanoscale composites. In particular, (t-$ZrO_2$) was synthesized at a very low temperature. The HZC films did not show secondary phases such as tricalcium phosphate (TCP) and tetracalcium phosphate (TTCP) at relatively high temperatures. The most likely mechanism for the formation of the t-$ZrO_2$ and the pure HAp at the low processing temperature was proposed to be the diffusion of $Ca^{2+}$ ions. The HZC films showed increasing micro-Vickers hardness values with increases in the t-$ZrO_2$ content. The morphological features and phase compositions of the HZC films showed strong dependence on the time and temperature of the CVD process. Furthermore, they showed enhanced cell proliferation compared to the $TiO_2$ and HAp films most likely due to the surface structure change.

Oxidation of Ethanol in the Gas Phase with Alcohol Oxidase and Alcohol Dehydrogenase (Alcohol Oxidase와 Alcohol Dehydrogenase를 이용한 기상에서의 Ethanol의 산화반응)

  • 박현규;장호남김동옥
    • KSBB Journal
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    • v.9 no.3
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    • pp.239-245
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    • 1994
  • The effects of reaction temperature and the level of hydration(water activity) were studied for gas phase reactions of alcohol oxidase and alcohol dehydrogenase immobilized on DEAE-cellulose and controlled pore glass(CPG). Optimum reaction temperature zone of gas phase reaction was similar to that of aqueous phase reaction. The activity of alcohol oxidase increased dramatically and the stability decreased when the water activity was increased from 0.3 to 0.8. The apparent activation energies of the gas phase reaction decreased approaching the values obtained in the aqueous phase reaction as the water activity increased. In the both cases of alcohol oxidase and alcohol dehydrogenase, the rate constants of the gas phase reaction were lower than those of aqueous phase reaction by two orders of magnitude and these results could be correlated to the vapor-liquid equilibrium data of the substrate, ethanol.

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Benzyl Alcohol Oxidation over H5PMo10V2O40 Catalyst Chemically Immobilized on Sulfur-containing Mesoporous Carbon (황이 포함된 중형기공성 탄소에 화학적으로 고정화된 H5PMo10V2O40 촉매 상에서 Benzyl Alcohol 산화반응)

  • Gim, Min Yeong;Kang, Tae Hun;Choi, Jung Ho;Song, In Kyu
    • Korean Chemical Engineering Research
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    • v.54 no.3
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    • pp.419-424
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    • 2016
  • $H_5PMo_{10}V_2O_{40}$ ($PMo_{10}V_2$) catalyst chemically immobilized on sulfur-containing mesoporous carbon (S-MC) was prepared, and it was applied to the benzyl alcohol oxidation reaction. S-MC was synthesized by a templating method using SBA-15 and p-toluenesulfonic acid as a templating agent and a carbon precursor, respectively. S-MC was then modified to have a positive charge, and thus, to provide sites for the immobilization of $PMo_{10}V_2$. By taking advantage of the overall negative charge of $[PMo_{10}V_2O4_{40}]^{5-}$, $PMo_{10}V_2$ catalyst was immobilized on the S-MC support as a charge matching component. It was revealed that $PMo_{10}V_2$ species were finely and molecularly dispersed on the S-MC via chemical immobilization. In the vapor-phase oxidation of benzyl alcohol, $PMo_{10}V_2$/S-MC catalyst showed higher conversion of benzyl alcohol and higher yield for benzaldehyde and benzoic acid than unsupported $PMo_{10}V_2$ catalyst. The enhanced catalytic performance of $PMo_{10}V_2$/S-MC was due to fine dispersion of $PMo_{10}V_2$ species on the S-MC via chemical immobilization.

A Study on the Properties of $Al_2$ $O_3$ and $Al_2$ $O_3$/( $Ti_{0.5}$ $Al_{0.5}$)N Coatings Produced by Plasma Enhanced Chemical Vapor Deposition (플라즈마 화학 증착법에 의한 $Al_2$ $O_3$ 단층피막과 $Al_2$ $O_3$/( $Ti_{0.5}$ $Al_{0.5}$)N 이중피막의 제조 및 특성에 관한 연구)

  • 손경석;이승훈;이동각;임주완;이후철;이정중
    • Journal of the Korean institute of surface engineering
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    • v.34 no.2
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    • pp.105-114
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    • 2001
  • $Al_2$$O_3$ coatings were deposited on M2 high speed steels by the plasma enhanced chemical vapor deposition (PECVD) process, using a gas mixture of AlC1$_3$, $H_2$, $CO_2$ and Ar $Al_2$$O_3$ coatings had interference color and showed amorphous phase. $A1_2$X$A1_3$/($Ti_{0.5}$ /$Al_{0.5}$ )N double layer coatings were produced in the sequence of substrate $NH_3$ plasma pretreatment, ($Ti_{0.5}$$Al_{0.5}$)N depoition process, $Al_2$$O_3$ deposition process. $Al_2$ $O_3$/( $Ti_{0.5}$A $l_{0.5}$)N double layer coatings showed NaCl structure in ( $Ti_{0.5}$A $l_{0.5}$)N layer and amorphous phase in A1$_2$ $O_3$ layer. It was shown that $Al_2$ $O_3$ columns continuously grew onto ( $Ti_{0.5}$A $l_{0.5}$)N columns. ( $Ti_{0.5}$A $l_{0.5}$)N single coating and $Al_2$ $O_3$/( $Ti_{0.5}$A $l_{0.5}$)N double layer coating were oxidized at $700^{\circ}C$, 80$0^{\circ}C$, 90$0^{\circ}C$ for 1hr, 3hr in atmosphere. At 80$0^{\circ}C$, single layer coatings were oxidized, which were examined substrate oxide particle. But $Al_2$ $O_3$/ ( $Ti_{0.5}$A $l_{0.5}$)N double layer coatings maintained the asdeposited state. Therefore, $Al_2$ $O_3$/ ( $Ti_{0.5}$A $l_{0.5}$)N double layer coatings have moreexcellent oxidation resistance than ( $Ti_{0.5}$A $l_{0.5}$)N single layer coatings.X> 0.5/)N single layer coatings.s.

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Geochemistry of tourmalines in the Ilgwang Cu-W breccia-pipe deposit, Southeastern Gyeongsang Basin (경상남도 일광의 각력파이프형 구리(Cu)광상에서 산출되는 전기석의 지구화학)

  • 양경희;장주연
    • The Journal of the Petrological Society of Korea
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    • v.11 no.3_4
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    • pp.259-270
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    • 2002
  • A small granodiorite-quartz monzonitic stock containing sericitic and propylitic alteration assemblages hosts a Cu-W breccia-pipe deposit in the southeastern Cyeongsang basin. The mineralized breccia-pipe contains angular to subangular brecciated fragments of granitic rocks showing clast-supported textures. An assemblage of quartz, tourmalines, sulfide minerals (mainly chalcopyrite, arsenopyrite and pyrrhotite) and calcite was precipitated as a hydrothermal cement between the brecciated fragments. A tourmaline aureole surrounds the breccia pipe. Extensive tourmalinization of the granitic rocks near and within the pipe and no tourmalinization in the sedimentary and volcanic rocks. The tourmalines are marked by Fe-rich, black charcoal-like schorl (80 mol% schorl relative) nearer the schorl-dravite solid solution. The chemical changes in the hydrothermal fluid are reflected by variations in compositional Boning from cores to rims. They generally contain cores with low values of Fe/(Fe+Mg) and high values of Na/(Na+ca) relative to rims. This is because of an increase Fe and Ca contents toward rims. The main trend of these variations is a combination of the exchange vectors Ca(Fe, Mg) $(NaAl)_{- }$ $_1$ and $Fe^{3}^{+}$ $Al_{[-10]}$ $_1$ It is thought that boiling causes the loss of $H_2$ into the vapor phase resulting in the oxidation of Fe in the aqueous phase. pH of the melt would be one of important controlling factors for the tourmaline stability. The tourmalines could be precipitated when the system evolved to the acidic hydrothermal regime as most hydrothermal brines and acidic gases exsolved from the magma. The Ilgwang tourmaline crystallization is products of hypogene orthomagmatic hydrothermal processes that were strongly pipe-controlled.

Oxygen and Hydrogen Isotope Studies of the Hydrothermal Clay Deposits and Surrounded Rocks in the Haenam Area, Southwestern Part of the Korean Peninsula (한국 서남부, 해남지역의 열수 점토광상과 주변암에 대한 산소 및 수소동위원소 연구)

  • Kim, In Joon;Kusakabe, Minoru
    • Economic and Environmental Geology
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    • v.26 no.1
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    • pp.11-20
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    • 1993
  • In the present study, three representative hydrothermal clay deposits, named the Seongsan, Ogmaesan and Haenam deposits, were selected for oxygen and hydrogen isotope studies. Oxygen and hydrogen isotopic compositions of quartz, sericite, alunite and kaolin minerals from Seongsan, Ogmaesan, Haenam deposits and surrounded rocks of clay deposits have been measured. The ${\delta}^{18}O$ values of quartz, kaolin, sericite and alunite in the Seongsan mine are +8.4 to +11.1‰, +3.6 to 5.4‰, +4.8 to +5.8‰ and + 3.0 to +6.6‰, respectively. In the Ogmaesan mine, the ${\delta}^{18}O$ values of quartz, kaolin, sericite and alunite are +8.0 to +13.6‰, +2.8 to +6.7‰, +4.8 to +8.4‰ and +0.9 to +2.4‰, respectively. The ${\delta}^{18}O$ values of the Haenam mine range from +7.9 to +10.1‰ for quartz and from +4.5 to +6.5‰ for sericite. The ${\delta}^{18}O$ values of the whole-rocks range from + 3.0 to + 7.8‰ for the granitic rocks. The ${\delta}^{18}O$ values of the whole-rocks range from + 3.2 to + 10.7‰ for the volcanic rocks. The 8D values of kaolin, sericite and alunite in the Seongsan mine are -78 to -86‰, -71 to -90‰ and -43 to -77‰, respectively. In the Ogmaesan mine, the ${\delta}D$ values of kaolin, sericite and alunite are -73 to -80‰, -74 to -88‰ and -57 to -98‰, respectively. The ${\delta}D$ values of the Haenam mine range from -76 to -85‰ for sericite. The ${\delta}D$ values of the whole-rocks range from -77 to -105‰ for the granitic rocks. The ${\delta}D$ values of the wholerocks range from -76 to -100‰ for the volcanic rocks. The main result obtained oxygen and hydrogen isotope data can lead to the following interpretations on the origin of hydrothermal fluids in the clay deposits: Through the oxygen isotopic study, the formation temperature of the clay deposits was estimated from the coexisting minerals such as quartz-kaolin minerals and -sericite. Formation temperature of the acidic alteration zone is 165 to $280^{\circ}C$ in the Seongsan deposits, 175 to $250^{\circ}C$ in the Ogmaesan deposits and 250 to $350^{\circ}C$ in the Haenam deposits. Three clay deposits has been formed by magmatic water mixed with meteoric water. Furthermore, from this isotopic data, it is clarified that kaolin minerals and alunite are hypogene in origin, and has been formed by oxidation of hydrogen sulfide in the steam-heated environment, and that alunite has been produced in the spectacular solfataric alteration observed at the surface of some present-day hydrothermal systems. Oxidation of the $H_2S$ is thought to be generated when the vapor phase generated by boiling of the deep-seated water under the water table.

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