• 한국재료학회지
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• 제10권10호
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• pp.691-697
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• 2000

자외선 검출소자로 응용될 수 있는 우수한 특성을 지진 $Al_xGa_{1-x}N$ 박막을 MOCVD 법으로 성장시킨 후 박막의 구조적인 특성을 조사하였다. 사파이어 기판 위에 성장된 $Al_xGa_{1-x}N$의 물리적인 특성을 평가하기 위해 Synchrotron Radiation XRD를 사용하였다. $Al_xGa_{1-x}N$의 두께가 커질수록 박막의 결정성은 증가하였으며 아래층은 Undoped GaN의 결정성과 성장된 $Al_xGa_{1-x}N$의 결정성이 서로 비례적인 상관관계를 가지고 있음을 알아내었다. Al 조성비는 막질에 크게 영향을 주었으며 조성비가 높아질수록 표면 형상은 매우 나빠졌다.

• Korean Chemical Engineering Research
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• 제45권2호
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• pp.117-123
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• 2007

농업용 필름을 제조하는데 사용되는 EVA 공중합체, LDPE, LLDPE 혼합물의 접촉 열분해 반응에 있어서 MCM-41 촉매에 aluminium을 첨가가 생성물의 수율, 탄소 수 분포 등에 미치는 영향을 조사하였다. Aluminium은 direct 및 post 방법으로 첨가하였고, 열분해 반응은 액상 접촉과 기상 접촉 반응 결과를 비교하였다. Direct 또는 post 방법으로 aluminium이 첨가된 MCM-41에서 aluminium 첨가량이 증가할수록 Lewis 산점이 증가하여 전체 산점의 양이 증가하였는데 post 방법으로 제조된 촉매에서 산점의 양이 더 많이 증가하였다. 액상 접촉 반응에서 aluminium의 양이 증가하면 가벼운 탄화수소가 많이 생기는데, $C_5-C_{12}$ 범위의 탄소화합물의 생성에 Al-MCM-41-P 촉매가 더 효과가 컸다. 기상 접촉 반응에서는 Al-MCM-41-D와 Al-MCM-41-P사이의 차이가 액상 접촉 반응시보다 상대적으로 적게 나타났으나, 액상접촉 반응에 비해 $C_{13}-C_{32}$ 범위의 탄화수소가 크게 감소했음을 알 수 있다.

• 한국진공학회지
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• 제7권3호
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• pp.242-247
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• 1998

DC saddle-field-plasma-enhanced chemical-vapor deposition(PECVD) 장치를 이용 하여 상온에서 p-type Si(100)기판위에 hydrogenated amorphous carbon nitride [a-C:H(N)] 박막을 증착하였다. 원료가스인 $CH_4$과 $N_2$의 전체압력은 90mTorr로 고정하고 $N_2/CH_4$비를 0 에서 4까지 변화하면서 제작한 a-C:H(N)박막의 미세구조의 변화를 연구하였다. 진공조의 도달 진공도는 $1\times10^{-6}$Torr이고, 본 실험시 $N_2+CH_4$가스의 유량은 5sccm으로 고정하고 배 기량을 조절하여 진공조의 가스 압력을 90mTorr로 고정하였으며 기판에 200V의 직류 bias 전압을 인가하였다. $\alpha$-step과 X-ray photoelectron spectroscopy(XPS)를 이용한 분석결과 $N_2/CH_4$비가 0에서 0.5로 증가함에 따라 박막 두께는 4840$\AA$에서 2600$\AA$으로 급격히 감소하 였으며, 박막내의 탄소에 대한 질소함유량(N/C비)는 N2/CH4비가 4일 때 최대 0.25로 증가하 는 것을 확인하였다. 또한 XPS 스펙트럼의 fitting 결과 $N_2/CH_4$비가 증가할수록 CN결합이 증가하였다. Fourier Transformation Infrared(FT-IR) 분석결과 $N_2/CH_4$비가 증가함에 따라 박막내의 C-H결합은 감소하고, N-H, C≡N결합은 증가하였다. Optical bandgap 측정 결과 $N_2/CH_4$비가 0에서 4로 증가함에 따라 a-C:H(N)박막의 bandgap 에너지는 2.53eV에서 2.3eV 로 감소하는 것을 확인하였다.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2004년도 제22회 춘계학술대회논문집
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• pp.216-227
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• 2004

A new cavitating model by using bubble size distribution based on bubbles-mass has been proposed. Both liquid and vapor phases are treated with Eulerian framework as a mixture containing minute cavitating bubbles. In addition vapor phase consists of various sizes of vapor bubbles, which are distributed to classes based on their mass. The bubble number-density for each class was solved by considering the change of the bubble-mass due to phase change as well as generation of new bubbles due to heterogeneous nucleation. In this method, the bubble-mass is treated as an independent variable, and the other dependent variables are solved in spatial coordinates and bubble-mass coordinate. Firstly, we employed this method to calculate bubble nucleation and growth in stationary super-heated liquid nitrogen, and bubble collapse in stationary sub-cooled one. In the case of bubble growth in super-heated liquid, bubble number-density of the smallest class based on its mass is increased due to the nucleation. These new bubbles grow with time, and the bubbles shift to larger class. Therefore void fraction of each class is increased due to the growth in the whole class. On the other hand, in the case of bubble collapse in sub-cooled liquid, the existing bubbles are contracted, and then they shift to smaller class. It finally becomes extinct at the smallest one. Secondly, the present method is applied to a cavitating flow around NACA00l5 foil. Liquid nitrogen and liquid oxygen are employed as working fluids. Cavitation number, $\sigma$, is fixed at 0.15, inlet velocities are changed at 5, 10, 20 and 50m/s. Inlet temperatures are 90K in case of liquid nitrogen, and 90K and 1l0K in case of liquid oxygen. 110K of oxygen is corresponding to the 90K of nitrogen because of the same relative temperature to the critical one, $T_{r}$=$T/T_c^{+}$. Cavitating flow around the NACA0015 foils was properly analyzed by using bubble size distribution. Finally, the method is applied to a cavitating flow in an inducer of the LE-7A hydrogen turbo-pump. This inducer has 3 spiral foils. However, for simplicity, 2D calculation was carried out in an unrolled channel at 0.9R cross-section. The channel moves against the fluid at a peripheral velocity corresponding to the inducer revolutions. Total inlet pressure, $Pt_{in}$, is set at l00KPa, because cavitation is not generated at a design point, $Pt_{in}$=260KPa. The bubbles occur upstream of the foils and collapse between them. Cavitating flow in the inducer was successfully predicted by using the bubble size distribution.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 D
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• pp.1928-1930
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• 1999

This paper describes on the growth of a ${\mu}c$-Si:H film on low cost substrate like glass by Hot Wire CVD method. The ${\mu}c$-Si:H film, prepared in 50mTorr pressure, $1800^{\circ}C$ wire temperature, and $H_2/SiH_4$ 10 showed three clear peaks. (111), (220), and (311) in X-ray spectroscopy. The crystallite size and crystalline volume fraction, calculated from Raman spectroscopy, was about 6nm and 70%, respectively. The FTIR transmission spectra of the film showed a different absorption peak with a-Si:H film around $2000-2100cm^{-1}$.

• 한국진공학회지
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• 제10권3호
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• pp.341-349
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• 2001

수평형 MOCVD (유기금속 화학기상법) 제조공정에서 유체유동, 열전달 및 화학종의 국소적 질량분율을 고찰하기 위한 수치계산을 수행하였다. 수송가스로 작용하는 수소가스와 TMG및 암모니아의 농도분포를 예측함으로서 혼합과정을 분석하고 필름성장의 균일성을 예측하였다. 농도분포에 미치는 입구크기, 위치, 질량유량 및 벽면의 경사각도의 영향이 검토되었다. 계산결과로서 무차원 대류 열전달 계수 Nu에 의해 반응물의 농도분포를 정성적으로 예측할 수 있었으며, 균일한 필름성장을 위한 최적 질량유량, 벽면 경사도 및 입구조건이 제시되었다.

• 한국전산유체공학회지
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• 제17권4호
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• pp.93-102
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• 2012

Once the condensation of water vapor in moist air around a thin airfoil occurs, liquid droplets nucleate. The condensation process releases heat to the surrounding gaseous components of moist air and significantly affects their thermodynamic and flow properties. As a results, variations in the aerodynamic performance of airfoils can be found. In the present work, the effects of upstream Mach number and thickness ratio of airfoil on the transonic flow of moist air around a thin airfoil are investigated by numerical analysis. The results shows that a significant condensation occurs as the upstream Mach number is increased at the fixed thickness ratio of airfoil($\epsilon$=0.12) and as the thickness ratio of airfoil is increased at the fixed upstream Mach number($M_{\infty}$=0.80). The condensate mass fraction is also increased and dispersed widely around an airfoil as the upstream Mach number and thickness ratio of airfoil are increased. The position of shock wave for moist air flow move toward the leading edge of airfoil when it is compared with the position of shock wave for dry air.

• 한국진공학회지
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• 제4권S1호
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• pp.168-173
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• 1995

$GaxIn{1_x}As$ epitaxial layers were grown by a simplified hydrode vapor phase epitaxy(VPE) method bsed on the utilization of Ga/In alloy as the source metal. The effects of a wide range of experimental variables(i.e.,inlet mole fraction of HCI, deposition temperature, Ga/In alloy composition) on the ternary composition and growth rate were investigated. Layers of $Ga_{0.47}In_{0.53}As$ lattice matched to InP were successfully grown from alloys containing 5 to 8 at.% Ga. These layers were used to produce state-of-the art p-i-n photodetectors having the following characteristics: dark current, $I_d$(-5V) = 10-20 nA: responsivity, R=0.84-0.86 A/W; dark current, Id(-5V)=10-20 nA; responsivity, R=0.84-0.86 A/W; capacitance, C=0.88-0.92 pF; breakdown voltage, $V_b$ >40V. This study demonstrated for the first time that a simplified hydride VPE process with a Ga/In alloy source is capable of producing device quality epitaxial layers.

• 설비공학논문집
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• 제15권2호
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• pp.144-151
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• 2003

An experimental study was carried out in a uniformly heated horizontal tube to examine heat transfer characteristics of pure refrigerants, R134a and R123, and their mixtures during flow boiling. The flow pattern was also observed through tubular sight glasses with an internal diameter of 10 mm located at the inlet and outlet of the test section. Tests were run at a pressure of 0.6 MPa and in the heat flux ranges of 5~100 kW/$m^2$, vapor Quality 0~100 percent and mass velocity of 150-600 kg/$m^2$s. The observed flow patterns were compared to the flow pattern map of Kattan et al., which predicted well the present data over the entire range of mass velocity employed in this study. Heat transfer coefficients of the mixture were less than the interpolated values between pure fluids both in the low quality region where the nucleate boiling is dominant and in the high quality region where the convective evaporation is dominant.

• 한국초전도ㆍ저온공학회논문지
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• 제3권2호
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• pp.15-20
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• 2001

This paper describes a model flux pump experiment recently performed at the MIT Francis Bitter Magnet Laboratory. The results of the model flux pump will be used in the development of a prototype flux pump that will be couple to a high-temperature superconductor (HTS) insert coil of a high-field NMR (Nuclear Magnetic Resonance) magnet, Such an HTS insert is unlikely to operate in persistent model because of the conductors low index(n) The flux pump can compensate fro field decay in the HTS insert coil and make the insert operate effectively in persistent mode . The flux pump, comprised essentially of a transformer an two switches. all made of superconductor, transfers into the insert coil a fraction of a magnetic energy that is first introduced in the secondary circuit of the transformer by a current supplied to the primary circuit. A model flux pump has been designed. fabricated, and operated to demonstrate that a flux pump can indeed supply a small metered current into a load superconducting magnet. A current increment in the range of microamperes has been measured in the magnet after each pumping action. The superconducting model flux pump is made of Nb$_3$ Sn tape, The pump is placed in a gaseous environment above the liquid helium level to keep its heat dissipation from directly discharged in the liquid: the effluent helium vapor maintains the thermal stability of the flux pump.