Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1999.07d
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- Pages.1928-1930
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- 1999
Hot Wire Chemical Vapor Deposition of Hydrogenated Microcrystalline Silicon Films
열선 CVD법에 의한 수소화된 미세결정 실리콘 박막 증착
- Lee, Jeong-Chul (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Kang, Ki-Whan (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Kim, Seok-Ki (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Yoon, Kyung-Hoon (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Song, Jin-Soo (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Park, I-Jun (Photovoltaic Research Team, Korea Institute of Energy Research)
- 이정철 (한국에너지기술연구소 태양광발전연구팀) ;
- 강기환 (한국에너지기술연구소 태양광발전연구팀) ;
- 김석기 (한국에너지기술연구소 태양광발전연구팀) ;
- 윤경훈 (한국에너지기술연구소 태양광발전연구팀) ;
- 송진수 (한국에너지기술연구소 태양광발전연구팀) ;
- 박이준 (한국에너지기술연구소 태양광발전연구팀)
- Published : 1999.07.19
Abstract
This paper describes on the growth of a
Keywords