• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.435-435
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• 2011

The electronic structure and various physical properties of CeO2, Ce2O3, PrO2, and Pr2O3 have been studied from the framework of Ab-initio by the all-electron projector-augmented-wave (PAW) method, as implemented VASP (Vienna Ab-initio Simulation Package). The generalized gradient approximation (GGA) with effective U (Ueff) has been used to explain the strong on-site Coulomb repulsion among the localized Ce 4f electrons. The dependence of selected observables of these materials on the Ueff parameter has been scrutinized. The studied properties contain lattice constants, density of states, and reaction energies of CeO2, Ce2O3, PrO2, and Pr2O3. For CeO2 and PrO2, the GGA(PBE)+U results are in good agreement with experimental data whereas for the computational calculationally more demanding Ce2O3 and Pr2O3 both approaches give comparable accuracy. This results represent that by choosing an appropriate Ueff it is possible to reliably describe structural and electronic properties of CeO2, Ce2O3, PrO2, and Pr2O3, which enables modeling of oxygen reduction reaction processes involving ceria-based materials.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.346-351
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• 2017

A numerical study has been conducted to investigate flow characteristics of STED with ram structure shape. By increasing the attack angle of shock cone, vacuum pressure is increased because of oblique shock at ram structure and separation point moved to the downstream of the second throat. By increasing blockage ratio, expansion wave angle is increased at ram structure while vacuum pressure is constant.

• Journal of the Korean Vacuum Society
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• v.3 no.4
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• pp.466-481
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• 1994

차세대 집적회로 제조공정에 있어 핵심기술인 선택적 단결정 실리콘 성장공정에 대한 이동현상, 열역학, 미시적 전산모사를 수행하여 다각적인 분석과 이해를 시도하였다. 첫째, 실리콘 단결정 성장 공 정에 가장 많이 사용되는 배럴 반응기를 대상으로 유한 요소법을 이용하여 이동현상적 이론연구를 수행 하였다. 반응기내의 기체속도 분포, SiH2Cl2 농도분포를 각각 구하였으며 압력, 기판온도, 총유량 HCl 유 량변화 등의주요공정변수가 증착율과 균일도 지수에 미치는 영햐을 고찰하였다. 이러한 연구를 통하여 저온, 저압, 총유량이 많고 첨가되는 HCl 유량이 작은 경우가 균일도 확보를 위하여 적합한 조업조건임 을 알수 있었다. 둘째 Si-H-Cl 계에 대한 열역학적 기체의 Cl/H비가 낮은 경우가 선택적 실리콘 증착 에 적합함을 알수 있었다. 셋째, Monte Carlo법을 이용한 선택적 실리콘 미세박막 성장패턴에 관한 이 론 연구를 수행하여 종횡비, 재방출, 표면확산에 따른 박막증착 패턴의 변화를 고찰하였으며 표면확산이 선택도 상실 현상의 중요한 원인이 될 수 있음을 발견하였다. 또한 최상의 선택도 확보를위해서는 낮은 부착계수와 낮은 표면확산계수를 유지해야 됨을 알수 있었다.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.09a
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• pp.49-53
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• 2005

The objective of this research was to establish the size limitation of micro metal forming and analyze the formability of foil. Flat-rolled ultra thin metallic copper foil($3{\mu}m$ in thickness) was used as a forming material and foil was annealed to improve the formability at the temperature of $385^{\circ}C$. Forming die was fabricated by using etching technique of DRIE(deep reactive ion etching) and HNA isotropic etching. For the forming die and coupe. foil were vacuum packed and the forming was conducted as applying hydrostatic pressure of 250MPa to the vacuum packed unit. We successfully obtained the micro channels of $12\~14{\mu}m$ width and $9{\mu}m$ depth from micro forming process we designed. We also investigated the thickness strain distribution of foil from experiment and FE simulation result. Micro channels had a good formability of smooth surface and size accuracy. We expect that micro metal forming technology will be applied to production of micro parts.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.248-248
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• 2010

CMOS 축소화가 32nm node를 넘어서 지속적으로 진행되기 위하여 FinFET, Surround Gate and Tri-Gate와 같은 Fully Depleted 3-Dimensional 소자들이 SCE를 다루기 위해서 많이 제안되어 왔다. 하지만 소자의 축소화를 진행함에 있어서 좁고 균일한 patterning을 형성하는 것과 동시에 낮은 Extension Region과 Contact Region에서의 Series Resistance을 제공하여야 하고 Source/Drain Contact Formation을 확보하여야 한다. 그리고 소자의 축소화가 진행됨으로써 Silicide의 응집현상과 Source/Drain Junction의 누설전류에 대한 허용범위가 점점 엄격해지고 있다. ITRS 2005에 따르면 32nm CMOS에서는 Contact Resistivity가 대략 $2{\times}10-8{\Omega}cm2$이 요구되고 있다. 또한 Three Dimensional 소자에서는 Fin Corner Effect가 Channel Region뿐만 아니라 S/D Region에서도 중대한 영향을 미치게 된다. 따라서 본 논문에서 제시하는 Novel S/D Contact Formation 기술을 이용하여 Self-Aligned Dual/Single Metal Contact을 이루어Patterning에 대한 문제점 해결과 축소화에 따라 증가하는 Contact Resistivity 문제점을 해결책을 제시하고자 한다. 이를 검증하기3D MOSFET제작하고 본 기술을 적용하고 검증한다. 또한 Normal Doping 구조를 가진3D MOSFET뿐만 아니라 SCE를 해결하기 위해서 대안으로 제시되고 있는 SB-MOSFET을 3D 구조로 제작하고, 이 기술을 적용하여 검증한다. 그리고 Silvaco simulation tool을 이용하여 S/D에 Metal이 Contact을 이루는 구조가 Double type과 Triple type에 따라 Contact Resistivity에 미치는 영향을 미리 확인하였고 이를 실험으로 검증하여 소자의 축소화에 따라 대두되는 문제점들의 해결책을 제시하고자 한다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.183.1-183.1
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• 2013

70 MeV 사이클로트론의 인젝션 빔 라인은 Multi-CUSP 이온원에서 인출된 H- 빔을 펄스 또는 번칭하여 인플렉터를 통해 사이클로트론의 가속영역인 Dee로 전송하는 역할을 한다. 이 때, 빔을 번칭 시킴으로써 가속효율을 높이고, 손실을 줄여 높은 전류의 빔을 공급할 수 있도록 해야한다. 인젝션 시스템은 einzel lens, chopper, buncher, solenoid 등으로 구성된다. Einzel lens는 빔을 buncher의 중심으로 집속시켜 buncher의 번칭 효율을 높이고, buncher는 전기장을 이용하여 빔을 진행방향으로 집속시키는 기능을 갖는다. Chopper는 번칭된 빔을 일정 주기로 편향을 시켜 펄스 빔의 형태로 전송하는 역할을 한다. 솔레노이드는 적절한 자기장을 이용하여 빔을 집속시켜 인플렉터로 전송한다. 본 연구에서는 사이클로트론의 고전류 인젝션 시스템을 구축하고 각각의 구성요소에서 빔 envelope를 계산하고 비교하였다. SIMION code는 user가 지정한 특성을 가진 개별 입자의 궤도를 추적하는 프로그램으로 인젝션 시스템을 구성하는 각각의 컴포넌트에서의 입자의 진행모습과 buncher를 이용하여 빔의 전송 밀도가 향상됨을 확인하였다. 아울러 TRANSPORT 및 TURTLE 프로그램을 이용하여 SIMION을 통해 계산된 빔의 envelope과 비교하였다.

• Journal of the Korean Vacuum Society
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• v.6 no.S1
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• pp.70-74
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• 1997

The study of the thickness dependence of the electron energy structure of Fe, Ni, Ti and Zr sublayers in Ni/Ti and Fe/Zr multilayers by using the experimental and computer simulated optical spectroscopy has been performed. A series of Ni/Ti and Fe/Ze multiayered films (MLF) with a bilayer period of 0.5 - 30 nm and constant (Ni/Ti) / different (Fe/Zr) sublayer thickness ratios were prepared by using computer-controlled double-pair target face-to-face sputtering onto a glass substrate at room temperature (RT) Computer simulation of the resulting optical properties of these MLF was carried out by solving of multireflection problem with a matrix method assuming either "sharp" interfaces resulting in rectangular depth profiles of the components or "mixed" (alloy-like) interfaces of variable thickness between pure-metal sublayers. Optical constants of pure bulk metals as well as equiatomic alloy interfaces were employed in these simulations. It was shown that the difference between experimental and simulated optical properties of the investigated MLF increases with decrease in sublayer thickness. This result allows to conclude that the electronic structures of sublayers below 4-5 nm thickness in mlf differ from the corresponding bulk metals.ponding bulk metals.

• Journal of computational fluids engineering
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• v.21 no.2
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• pp.54-61
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• 2016

When spent fuel assemblies from the reactor of nuclear power plants(NPPs) are transported, the assemblies are exposed to short-term operations that can affect the peak cladding temperature of spent fuel assemblies. Therefore, it needs to perform the analysis of heat transfer on spent fuel dry cask during the operation. For 3 dimensional computational fluid dynamnics(CFD) simulation, it is proposed that the short-term operation is divided into three processes: Wet, dry, and vacuum drying condition. The three processes have different heat transfer mode and medium. Metal transportation cask, which is Korea Radioactive Waste Agency(KORAD)'s developing cask, is evaluated by the methods proposed in this work. During working hours, the boiling at wet process does not occur in the cask and the peak cladding temperatures of all processes remain below $400^{\circ}C$. The maximum peak cladding temperature is $173.8^{\circ}C$ at vacuum drying process and the temperature rise of dry, and vacuum drying process occurs steeply.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.9
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• pp.906-915
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• 2009

To study the plume effects in the vacuum area, the Direct Simulation Monte Carlo(DSMC) method is usually adopted because the plume field usually contains the entire range of flow regime from the near-continuum in the vicinity of nozzle exit through transitional state to free molecular at far field region from the nozzle. The objective of this study is to investigate the behaviors of a small monopropellant thruster plume in the vacuum area numerically using DSMC method. To deduce accurate results efficiently, the preconditioned scheme is introduced to calculate continuum flow fields inside thruster to predict nozzle exit properties used for inlet conditions of DSMC method. By combining these two methods, the vacuum flow characteristics of plume such as strong nonequilibrium near nozzle exit, large back flow area, etc, can be investigated.

• Journal of the Korean Society for Railway
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• v.14 no.2
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• pp.143-150
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• 2011

This paper presents a preliminary study for air-tightness evaluation of vacuum tube structures for super-speed tube railway systems. The formula for flow rate of the air caused by the pressure difference of the inside and outside of the tube structure is derived based on Darcy's law. A test is then performed to measure the air-permeability of concrete with various compressive strengths, the result of which is used for analytical simulation of the air intrusion for a tube structure with a preliminarily defined section. It has been shown that concrete with the compressive strength of at least more than 50MPa is recommended for effective operation and maintenance of the vacuum pump systems, as the air-permeability of concrete is inversely proportional to the exponent of its compressive strength.