• Journal of the Korean Vacuum Society
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• v.20 no.6
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• pp.403-408
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• 2011

To develop the MFX (Micro-Focus X-ray) tube, the trajectories of electrons emitted from the field emission cathode was simulated using SIMION program. Regardless of starting position of the electron in emitter, we found out the fact that there is the optimum extractor voltage Ve, which can focus the electron beam on one place. Extractor voltage Ve varies depending on the source voltage Vs, but the ratio of two voltages (Ve/Vs) is always constant, its value was 99.4%. When the ratio of two voltages (Ve/Vs) was 99.4%, the beam diameter in the cross-over point was $1.2{\mu}m$. Because the focal spot size in MFXG (Micro-Focus X-ray Generator) can not be less than the cross-over diameter within MFX tube, it is important to find out the conditions that can make a smaller beam diameter. Therefore, the above results is considered to be a very important ones in the development of the MFXG.

• Journal of Chest Surgery
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• v.51 no.6
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• pp.390-394
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• 2018

Background: The nonsurgical treatment of chest wall deformity by a vacuum bell or external brace is gradual, with correction taking place over months. Monitoring the progress of nonsurgical treatment of chest wall deformity has relied on the ancient methods of measuring the depth of the excavatum and the protrusion of the carinatum. Patients, who are often adolescent, may become discouraged and abandon treatment. Methods: Optical scanning was utilized before and after the intervention to assess the effectiveness of treatment. The device measured the change in chest shape at each visit. In this pilot study, patients were included if they were willing to undergo scanning before and after treatment. Both surgical and nonsurgical treatment results were assessed. Results: Scanning was successful in 7 patients. Optical scanning allowed a visually clear, precise assessment of treatment, whether by operation, vacuum bell (for pectus excavatum), or external compression brace (for pectus carinatum). Millimeter-scale differences were identified and presented graphically to patients and families. Conclusion: Optical scanning with the digital subtraction of images obtained months apart allows a comparison of chest shape before and after treatment. For nonsurgical, gradual methods, this allows the patient to more easily appreciate progress. We speculate that this will increase adherence to these methods in adolescent patients.

• Journal of Korea Foundry Society
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• v.42 no.6
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• pp.331-336
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• 2022

In this study, we investigated the casting designs for fuel tank valves for LPG automobiles. The valves we studied have two cavities inside the part. There is inevitable air entrapment inside the cavities. In order to reduce this kind of casting defect, we carried out computer simulations of molten metal flow during the diecasting process of the target products. The main process parameters were the ingate position, product direction, and injection velocity. We also examined the possible use of vacuum diecasting. The position of the air entrapment was almost identical for all the ingate positions and product directions. We found that the change of the injection velocity affects the position of the air entrapment. In case of vacuum diecasting, the position of the air entrapment was similar to the previous cases, but it is expected that the air entrapment will be highly reduced in a real situation due to the vacuumed space.

• Applied Science and Convergence Technology
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• v.24 no.5
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• pp.125-131
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• 2015

We investigated the thermal characteristics of rotating anode X-ray tube to develop it for digital radiography by using computer simulation. The target which is the area of the anode struck by electrons is the most important component to get a long life of X-ray tube. So we analyze the thermal characteristics of the target and rotor assembly according to their emissivity by using ANSYS transient thermal simulation and then compare with the measured data of the target temperature operating in aging process of X-ray tube. Especially, keeping the lead coated layer as the role of metal lubricant on ball bearing enables to prevent the noise in rotating anode. The simulation result showed that its temperature was under the melting point of the lead in X-ray tube for digital radiography with 1.2 mm large focal spot 0.6 mm small focal spot and 150 kV tube voltage. We also investigated the relationship between the diameter of the anode shaft and the temperature of the anode and rotor assembly. It has been confirmed that the smaller anode shaft could be good for the rotor thermal characteristics.

• Proceedings of the Korean Geotechical Society Conference
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• 2010.09a
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• pp.979-990
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• 2010

Although a centrifuge model test is performed with scaled models, it has a lot of advantages compared with usual scale model tests, for the reproduction of stress levels equal to a full scale test is possible. At the beginning of the Daewoo Institute of Construction Technology, a servo-motor-driven single axis actuator was introduced and has been in use with a geo-centrifuge. However, for variety of experiments and construction stage simulation, various apparatuses have been developed, such as a vacuum generator, a lateral actuator for tidal power simulation, a gravel hopper and a sand drainer for filled-up ground, and a water level controller. The apparatuses have been manufactured with enough strength and durability to be operated under specific g levels. This paper presents the properties of the apparatuses and the results of the tests performed with those.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.80-81
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• 2012

Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.493-493
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• 2014

The manufacturing cost of thin-film photovoltics can potentially be lowered by minimizing the amount of a semiconductor material used to fabricate devices. Thin-film solar cells are typically only a few micrometers thick, whereas crystalline silicon (c-Si) wafer solar cells are $180{\sim}300\mu}m$ thick. As such, thin-film layers do not fully absorb incident light and their energy conversion efficiency is lower compared with that of c-Si wafer solar cells. Therefore, effective light trapping is required to realize commercially viable thin-film cells, particularly for indirect-band-gap semiconductors such as c-Si. An emerging method for light trapping in thin film solar cells is the use of metallic nanostructures that support surface plasmons. Plasmon-enhanced light absorption is shown to increase the cell photocurrent in many types of solar cells, specifically, in c-Si thin-film solar cells and in poly-Si thin film solar cell. By proper engineering of these structures, light can be concentrated and coupled into a thin semiconductor layer to increase light absorption. In many cases, silver (Ag) nanoparticles (NP) are formed either on the front surface or on the rear surface on the cells. In case of poly-Si thin film solar cells, Ag NPs are formed on the rear surface of the cells due to longer wavelengths are not perfectly absorbed in the active layer on the first path. In our cells, shorter wavelengths typically 300~500 nm are also not effectively absorbed. For this reason, a new concept of plasmonic nanostructure which is NPs formed both the front - and the rear - surface is worth testing. In this simulation Al NPs were located onto glass because Al has much lower parasitic absorption than other metal NPs. In case of Ag NP, it features parasitic absorption in the optical frequency range. On the other hand, Al NP, which is non-resonant metal NP, is characterized with a higher density of conduction electrons, resulting in highly negative dielectric permittivity. It makes them more suitable for the forward scattering configuration. In addition to this, Ag NP is located on the rear surface of the cell. Ag NPs showed good performance enhancement when they are located on the rear surface of our cells. In this simulation, Al NPs are located on glass and Ag NP is located on the rear Si surface. The structure for the simulation is shown in figure 1. Figure 2 shows FDTD-simulated absorption graphs of the proposed and reference structures. In the simulation, the front of the cell has Al NPs with 70 nm radius and 12.5% coverage; and the rear of the cell has Ag NPs with 157 nm in radius and 41.5% coverage. Such a structure shows better light absorption in 300~550 nm than that of the reference cell without any NPs and the structure with Ag NP on rear only. Therefore, it can be expected that enhanced light absorption of the structure with Al NP on front at 300~550 nm can contribute to the photocurrent enhancement.

• Journal of the Korean Society for Railway
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• v.17 no.3
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• pp.186-192
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• 2014

In this paper, a reliability analysis is performed where the pressure change inside a concrete tube is probabilistically estimated considering the uncertainties inherent in the material and the system discontinuity. A set of uncertain quantities related to the equivalent system air permeability and the atmospheric pressure, are defined as random variables with specific distribution. The pressure change inside a concrete tube is then probabilistically described using both analytical and simulation approaches. The reliability analysis confirms that the geometric configuration of a concrete tube needs to be changed from the initial configuration obtained from the deterministic analysis.

• 한국연소학회:학술대회논문집
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• 2004.11a
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• pp.231-237
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• 2004

Vacuum carburizing continues to gain acceptance as an alternative to atmosphere carburizing particularly in the car industry. The advantages of low-pressure carburization over atmospheric gas carburization is not only the creation of a surface entirely free of oxide and the environmentally friendly nature of these methods but also an improvement in deformation behaviour achieved by combining carburization with gas quenching, a reduction in batch times by increasing the carburization temperature, low gas and energy consumption and the prevention of soot to a large extent. In present study, an improved vacuum carburizing method is provided which is effective to deposit carbon in the surface of materials and to reduce cycle time. Also LPC process simulator was made to optimize to process controls parameters such as pulse/pause cycles of pressure pattern, temperature, carburizing time, diffusion time. The carburizing process was simulated by a diffusion calculation program, where as the model parameters are proposed with help the experimental results and allows the control of the carburizing process with good accordance to the practical results. Thus it can be concluded that LPC process control method based on the theoretical simulation and experimental datas appears to provide a reasonable tool for prototype LPC system.