• Title/Summary/Keyword: Vacuum simulation

Search Result 535, Processing Time 0.021 seconds

Design of Natural Fiber Composites Chemical Container Using Resin Flow Simulation of VARTML Process

  • Lee, Haseung;Park, Gwanglim;Kong, Changduk;Park, Hyunbum
    • International Journal of Aerospace System Engineering
    • /
    • v.1 no.1
    • /
    • pp.21-28
    • /
    • 2014
  • In this study, an investigation on mechanical properties of flax natural fiber composite is performed as a precedent study on the design of eco-friendly structure using flax natural fiber composite. The Vacuum Assisted Resin Transfer Molding-Light (VARTML) manufacturing method is adopted for manufacturing the flax fiber composite panel. The VARTML is a manufacturing process that the resin is injected into the dry layered -up fibers enclosed by a rigid mold tool under vacuum. In this work, the resin flow analysis of VARTM manufacturing method is performed. A series of flax composite panels are manufactured, and several kinds of specimens cut out from the panels are tested to obtain mechanical performance data. Based on this, structural design of chemical storage tank for agricultural vehicle was performed using flax/vinyl ester. After structural design and analysis, the resin flow analysis of VARTM manufacturing method was performed.

용량 결합형 플라즈마의 유전체기판의 잔류전위 양상 관찰

  • Yun, Yong-Su;Wi, Seong-Seok;Kim, Dong-Hyeon;Lee, Ho-Jun
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2015.08a
    • /
    • pp.130-130
    • /
    • 2015
  • 플라즈마를 이용한 cleaning, etching, sputtering 공정에서 발생하는 마이크로아크방전이나 turn-off후의 잔류정전기는 공정대상물의 절연파괴나 전자소자에 전기적 손상을 유발함으로서 공정의 불량률을 증가시키는 중요한 요인이 된다. 본 연구에서는 잔류정전기를 관찰하기위하여 실린더형 챔버구조의 평행평판 전극구조를 지닌 용량결합형 플라즈마에서 powered electrode에 부착된 유전체 기판 표면의 잔류 정전기의 변화 양상을 planar type probe로 측정해보았다. 300mtorr 압력에서 아르곤가스로 발생시킨 플라즈마가 존재할 때 낮은 음전위 평균값을 가지던 기판표면 전위가 전력인가가 중지되었을때 20V 가량의 양전위를 가질 수 있음을 측정 하였고, 이것을 COMSOL MULTIPHYSICS TOOL을 활용한 시뮬레이션과 비교하였다. 이 현상이 파워인가 전극이 플라즈마 영역에 노출되느냐에 따라 발생할 수 있음을 알게 되었고, 그 크기와 지속시간은 입력전력 및 블로킹 커패시터와 유전체 기판의 정전용량에 의존함을 확인 하였다.

  • PDF

Floating electrode를 갖는 플라즈마 시스템의 수치 모델링

  • Ju, Jeong-Hun
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2015.08a
    • /
    • pp.129-129
    • /
    • 2015
  • Dry etcher, PECVD등의 플라즈마 공정 장비의 구조물에는 유전체로 절연된 금속판들이 사용된다. 플라즈마 이론을 보면 이들 표면의 전위는 양전하 플럭스와 음전하 플럭스가 같아서 순전류가 0이 되는 부유 전위를 갖는다. 금속과 같은 전도체의 표면은 모두 같은 전위를 가져야 한다. 일반적인 플라즈마 시뮬레이션 소프트웨어에는 이런 경계 조건이 선택 가능하지 않다. ESI사의 CFD-ACE+의 사용자 루틴 개발 기능을 이용하여 Fortran90문법으로 경계면 최인접 셀의 중심에서 구한 전자 온도와 경계면의 이온 입사 플럭스로 가중평균을 구한 이온 질량을 맥스웰분포를 가정한 부유 전위식에 대입하여 시뮬레이션을 CCP에서 구현하였다. 원형 챔버의 가장자리에 떠 있는 사각 링 전극을 가정하고 이 전극 표면이 접지 전위일때, 유전체 일때, 본 연구에서 개발한 루틴을 적용한 결과를 Ar CCP에 대해서 비교 분석하였다.

  • PDF

Characterization of linear microwave plasma based on N2/SiH4/NH3 gases using fluid simulation

  • Seo, Gwon-Sang;Han, Mun-Gi;Kim, Dong-Hyeon;Lee, Hae-Jun;Lee, Ho-Jun
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2015.08a
    • /
    • pp.131.2-131.2
    • /
    • 2015
  • 마이크로웨이브를 이용한 플라즈마는 효율적인 전자가열이 가능하며, 낮은 이온에너지를 가지는 고밀도 플라즈마를 생성시킬 수 있다는 장점이 있다. 최근 산화물 반도체 및 대화면 디스플레이 장치내 소자의 보호막 증착용으로 저온 PECVD (Plasma Enhanced Chemical Vapor Deposition) 공정 및 장치의 필요성에 따라 마이크로웨이브를 이용한 PECVD 장치가 주목 받고 있다. 본 연구에서는 실리콘 나이트라이드 공정 장치 개발을 위한 2차원 시뮬레이션 모델을 완성하였다. Global modeling을 이용하여 확보한 Chemical reaction data에 대한 검증을 하였다. Maxwell's equation, continuity equation, electromagnetic wave equation 등을 이용하여 Microwave의 파워 및 압력에 따른 전자 밀도, 전자 온도등의 플라즈마 변수의 변화를 관찰하였다. 또한 Navier Stokes equation을 추가하여 챔버 내의 Gas flow의 흐름을 고려한 시뮬레이션을 진행하여 분석하였다.

  • PDF

Hybrids of Au nanodishes and Au nanoparticles

  • Son, Jin Gyeong;Han, Sang Woo;Lee, Tae Geol;Wi, Jung-Sub
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2015.08a
    • /
    • pp.228.1-228.1
    • /
    • 2015
  • We demonstrate a simple route to hybridize two different nanomaterials by using three-dimensional nanodishes that can be used as small plasmonic containers to host guest nanoparticles. Our nanodishes were fabricated using nanoimprint lithography and oblique-angle film deposition, and the guest nanoparticles were drop-casted onto the host nanodishes. Based on the proposed method, colloidal Au nanoparticles were assembled inside Au nanodishes in the form of a labyrinth. These Au nanoparticle-nanodish hybrids excited a strong surface plasmon resonance, as verified by a numerical simulation of the local field enhancement and by direct observation of the enhanced Raman signals. Our results point to the potential of the nanodishes as a useful platform for combining diverse nanomaterials and their functionalities.

  • PDF

Analysis of arc driving force for 3 petal and 4petal of spiral type vacuum interrupter by FEM analysis (FEM 해석을 통한 Spiral type 진공인터럽터의 전극형상에 따른 아크구동력 비교)

  • Kim, Byoung-Chul;Yoon, Jae-Hun;Hoe, Jun;Kang, Seong-Hwa;Lim, Kee-Joe
    • Proceedings of the KIEE Conference
    • /
    • 2008.04c
    • /
    • pp.245-246
    • /
    • 2008
  • In this paper we calculated and compared the arc driving force of two spiral-tyre vacuum interrupter electrode models which have 3petals and 4petals respectively by means of commercial finite element method software Maxwell 3D. As a result we can find that the more petals the electrode has, the stronger arc driving force was generated. This simulation method can contribute to optimization of spiral-type electrode designs in a view of arc driving force.

  • PDF

Hydrogen adsorption properties of the large cryosorption pump (대용량 크라이오 펌프의 수소 흡착특성)

  • In S. R.;Kim T. S.
    • Journal of the Korean Vacuum Society
    • /
    • v.14 no.2
    • /
    • pp.69-77
    • /
    • 2005
  • Pumping performance of large cryosorption pumps of different types installed on the 60 $m^3$ test stand for developing and testing ion sources and beam line components of the NBI system was investigated. Hydrogen adsorption and desorption characteristics of the cryosorption panels were analyzed using the temporal change of the hydrogen spectrum obtained with short introduction of the hydrogen gas as cooling the panel, and simulations on the mutual influence between related parameters were also carried out.

A study on the Development of Automatic Bottle Air Rinser (Automatic Bottle Air Rinser 개발에 관한 연구)

  • 이춘만;김대성;김현진
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
    • /
    • 2004.04a
    • /
    • pp.258-262
    • /
    • 2004
  • This study has been focused on the development of automatic bottle air rinser. It is designed to rinse clean empty bottles prior to filling. The bottles are automatically indexed beneath an air nozzle that has both a clean airjet and vacuum source. The bottle is first given a burst of clean air to loosen any particles from the wall of the bottle. A vacuum sequence follows which removes all particulates into a self contained filter unit. In order to the provide the desired function, analysis is carried out by FEM simulation using FLUENT and CATIA software. The final results of analysis are applied to the design of automatic bottle rinser and the machine is successfully developed.

  • PDF

Design Method for Ultrasonic Transducer to Bonding with Dissimilar Materials (이종재료 접합을 위한 초음파 진동자 설계)

  • Jeong, An-Mok;Kim, Cheol-Ho
    • Transactions of the Korean Society for Noise and Vibration Engineering
    • /
    • v.22 no.1
    • /
    • pp.3-8
    • /
    • 2012
  • In an attempt to improve adhesion strength between glass and metal due to use of Pb-free solder as a sealant between glass and metal in the manufacturing process of vacuum insulation window glass to maintain the vacuum volume, ultrasonic energy is often applied during the process of Pb-free sealing. In this study, we propose an ultrasonic vibrator with a 4 mm end tip radius which performs resonance frequency of 60 kHz and 14 um or higher vibration displacement. A frequency variation due to applied pressure on piezo disks, which was excluded in the computer simulation, was verified experimentally, and we have demonstrated a 17 um vibration displacement at 50 V input through the performance test of a vibrator constructed with our specification.

The Study on CMA using field terminator (Field terminator를 이용한 CMA 제작에 관한 연구)

  • 이충만;성면창;권순남;정광호
    • Journal of the Korean Vacuum Society
    • /
    • v.5 no.4
    • /
    • pp.278-283
    • /
    • 1996
  • We constructed a single path cylindrical mirror analyser(CMA) using field terminator methods. With computer simulation, the best fit voltage ratio and position of the field terminaor was determined with maintain log-scale equipotential line near both end of the CMA. Then we construct field terminator with voltage divider of metal-oxide resisters which reduces the fringe field effect. The resolving power of the CMA was better than $\Delta$E/E=0.4%.

  • PDF