• 한국안전학회지
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• 제31권3호
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• pp.42-46
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• 2016

In LCD Display or semiconductor manufacturing processes, the anti-static technology of glass substrates and wafers becomes one of the most difficult issues which influence the yield of the semiconductor manufacturing. In order to overcome the problems of wafer surface contamination various issues such as ionization in decompressed vacuum and inactive gas(i.e. $N_2$ gas, Ar gas, etc.) environment should be considered. Soft X ray radiation is adequate in air and $O_2$ gas at atmospheric pressure while UV radiation is effective in $N_2$ gas Ar gas and at reduced pressure. At this point of view, the "vacuum ultraviolet ray ionization" is one of the most suitable methods for static elimination. The vacuum ultraviolet can be categorized according to a short wavelength whose value is from 100nm to 200nm. this is also called as an Extreme Ultraviolet. Most of these vacuum ultraviolet is absorbed in various substances including the air in the atmosphere. It is absorbed substances become to transit or expose the electrons, then the ionization is initially activated. In this study, static eliminator based on the vacuum ultraviolet ray under the above mentioned environment was tested and the results show how the ionization performance based on vacuum ultraviolet ray can be optimized. These vacuum ultraviolet ray performs better in extreme atmosphere than an ordinary atmospheric environment. Neutralization capability, therefore, shows its maximum value at $10^{-1}{\sim}10^{-3}$ Torr pressure level, and than starts degrading as pressure is gradually reduced. Neutralization capability at this peak point is higher than that at reduced pressure about $10^4$ times on the atmospheric pressure and by about $10^3$ times on the inactive gas. The introductions of these technology make it possible to perfectly overcome problems caused by static electricity and to manufacture ULSI devices and LCD with high reliability.

• 한국분말재료학회지
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• 제1권2호
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• pp.159-166
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• 1994

The variation of the microstructures and the mechanical properties with varying vacuum hot pressing temperature and pressure was investigated in PyM processed 20 vol%) SiCw/ 2124Al composites. As increasing the vacuum hot pressing temperature, the aspect ratio of whiskers and density of composites increased due to the softening of 2124Al matrix with the increased amount of liquid phase. The tensile strength of composite increased with increasing vacuum hot pressing temperature up to $570^{\circ}C$ and became saturated above $570^{\circ}C$, To attain the high densification of composites above 99%, the vacuum hot pressing pressure was needed to be above 70 MPa. However, the higher vacuum hot pressing pressure above 70 MPa was not effective to increase the tensile strength due to the reduced aspect ratio of SiC whiskers from damage of whiskers during vacuum hot pressing. A phenomenological equation to predict the tensile strength of $SiC_w$/2124AI composite was proposed as a function including two microstructural parameters, i.e. density of composites and aspect ratio of whiskers. The tensile strength of $SiC_w$/2124AI were found more sensitive to the porosity than other P/M materials due to the higher stress concentration and reduced load transfer efficiency by the pores locating at whisker/matrix interfaces.

• 한국주조공학회지
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• 제27권4호
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• pp.153-158
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• 2007

Molten metal flow in vacuum die casting was characterized by a numerical analysis. The VOF method was used to simulate the filling behaviors of molten metal during filling process. The various vacuum degrees of no vacuum(760 mmHg), 650, 500, 250 and 60mmHg were artificially applied in cavity. And the filling behaviors of molten metal with the applied vacuum conditions were simulated and compared with those of experiment. The results showed that molten metal was partially filled into cavity when vacuum was applied and the filling length of molten metal in cavity was increased with increasing applied reduced pressure in cavity. Also, the simulated filling behaviors of molten metal were apparently similar to those of experiment, indicating the numerical analysis developed in this study was highly effective. Through the result of fluid flow simulation, both relation equations of filling length and filling velocity with the variation of pressure conditions in cavity were calculated respectively and the internal gas contents of casting was significantly reduced by the modification of vacuum gate system.

• 한국정밀공학회지
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• 제30권12호
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• pp.1327-1333
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• 2013

Air bearings are widely used in precision stages because of low friction and high motion accuracy, however, they suffer from low stiffness in comparison with rolling bearings or hydrostatic bearings. So, several preloading methods using weight, magnet and vacuum force, and opposing pads have been used to increase the stiffness of the air bearings. In this paper, pressure distributions of the vacuum preloaded porous air bearings are calculated using the proposed method. And then, the load capacity and stiffness are analyzed. For the vacuum preloaded air bearings, the stiffness is increased owing to reduced bearing clearance by vacuum force. The simulation results indicate that variation of vacuum pressure with clearance in the vacuum pocket gives rise to low stiffness, so the vacuum pocket should be designed for pressure to be constantly maintained regardless of the bearing clearance by means of large effective pumping speed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.121.1-121.1
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• 2014

Recently, much attention has been given to plasma production under liquid and its applications [1]. However, most of plasma production techniques reported so far utilize high voltage dc, ac, rf or microwave power [2], where damage to discharge electrodes and small discharge volume are remained issues. As an alternative of plasma production method under liquid, we have proposed pulsed microwave excited plasma using slot antenna, where damage to the slot electrode can be minimized and plasma volume can be increased. We have also reported improvement of treatment efficiency with use of reduced-pressure condition during the discharge [3]. To realize low pressure conditions in liquid, various alternative technique can be considered. One possible technique is simultaneous injection of microwave power and ultrasonic wave. Ultrasonic wave induces pressure fluctuation with the wave propagation and is so far used for cavitation production in the water. We propose utilization of reduced pressure induced by ultrasonic cavitation for improvement of the plasma production. Correlation between the plasma production and the ultrasonic power will be discussed.

• 산업기술연구
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• 제21권A호
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• pp.293-301
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• 2001

This paper is experimental results of investigating the efficiency of horizontal vacuum drainage system. Effects of size and shape of drain on horizontal vacuum drainage were studied. Model tests in the laboratory with soft marine clay were carried out with drain pipe of having three different diameters and PBD (Plastic Board Drain) of strip shape so that consolidation settlement of soft clay due to applied vacuum pressure, amount of discharge, ground settlement and distributions of pore pressure and undrained shear strength were measured during testing. From results of model test, amount of discharge due to vacuum pressure was increased with the diameter of pipe drain whereas the drain efficiency of pipe in per unit area of drain surface was decreased with diameter of pipe. The rate of discharge per unit time was reduced very fast with diameter of pipe. Settlement of ground surface with time was increased with diameter of pipe as a result of increase of discharge to drain pipe.

• Membrane and Water Treatment
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• 제13권1호
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• pp.51-62
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• 2022

Vacuum-assisted air gap membrane distillation (V-AGMD) has the potential to achieve higher flux and productivity than conventional air gap membrane distillation (AGMD). Nevertheless, there is not much information on technical aspects of V-AGMD operation. Accordingly, this study aims to analyze the effect of membrane deformation on flux in V-AGMD operation. Experiments were carried out using a bench-scale V-AGMD system. Statistical models were applied to understand the flux behaviors. Statistical models based on MLR, GNN, and MLFNN techniques were developed to describe the experimental data. Results showed that the flux increased by up to 4 times with the application of vacuum in V-AGMD compared with conventional AGMD. The flux in both AGMD and V-AGMD is affected by the difference between the air gap pressure and the saturation pressure of water vapor, but their dependences were different. In V-AGMD, the membranes were found to be deformed due to the vacuum pressure because they were not fully supported by the spacer. As a result, the deformation reduced the effective air gap width. Nevertheless, the rejection and LEP were not changed even if the deformation occurred. The flux behaviors in V-AGMD were successfully interpreted by the GNN and MLFNN models. According to the model calculations, the relative impact of the membrane deformation ranges from 10.3% to 16.1%.

• Applied Science and Convergence Technology
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• 제24권4호
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• pp.84-89
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• 2015

The base pressure and outgassing rate of a mild steel chamber were measured and compared to those of a stainless steel chamber. A combined sputter-ion and non-evaporable getter pump with a nominal pumping speed of 490 l/s generated the base pressure of $2.7{\times}10^{-11}$ mbar in the mild steel chamber and $1.2{\times}10^{-10}$ mbar in the stainless steel chamber. The rate-of-rise measurements show that the mild steel has an extremely low outgassing rate of $2.6{\times}10^{-13}$ mbar $ls^{-1}cm^{-2}$, which is about one-order of magnitude smaller than the outgassing rate of the stainless steels. Vacuum annealing of the mild steel at $850^{\circ}C$ reduced the outgassing rate further to $8.8{\times}10^{-14}$ mbar $ls^{-1}cm^{-2}$, which was comparable to the outgassing rate of a heat treated stainless steel for extreme-high vacuum use.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.476-476
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• 2012

Although plasma is an efficient means of microbial sterilization, mechanism of plasma effect on microorganisms still needs to be clarified. In addition, a limited number of studies are available on eukaryotic microorganisms such as yeast and fungi in relation to plasma application. Thus, we investigated cellular and molecular aspects of plasma effects on a filamentous fungus, Neurospora crassa by making use of argon plasma jet at atmospheric pressure. The viability and cell morphology of N. crassa spores exposed to plasma were both significantly reduced depending on the exposure time when treated in water. The intracellular genomic DNA content was dramatically reduced in fungal tissues after a plasma treatment and the transcription factor tah-3 was found to be required for fungal tolerance to a harsh plasma environment.

• 대한금속재료학회지
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• 제48권3호
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• pp.241-247
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• 2010

In order to develop the vacuum distillation process of magnesium alloy scrap, a fundamental study on the evaporation behavior of magnesium alloy (AM50) scrap melt was carried out. Melt temperature, pressure, reaction time, and initial specific surface area of melt were considered as experimental variables. The evaporation rate of magnesium increased with the increase of melt temperature and initial specific surface area of melt, and with the decrease of the pressure. The activation energy of magnesium evaporation reaction calculated by an Arrhenius plot decreased with the decrease of the pressure and with the increase of the initial specific surface area of melt. An empirical equation was derived for the evaporation rate of magnesium from AM50 alloy melt.