Study on Synthesis and Analysis of Organic-Inorganic Hybrid polymer Thin films by PECVD for Low-k materials

• Cho, S.J.;Bae, L.S.;Boo, J.H.
• • Proceedings of the Korean Vacuum Society Conference
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  • 2007.02a
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  • pp.124-124
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  • 2007
• PDF

Study on Application Tests of MEMS and Nano-devices using SiC Thin Films and Nano-wires Grown by MOCVD

• Nam, S.H.;Hyun, J.S.;Boo, J.H.
• • Proceedings of the Korean Vacuum Society Conference
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  • 2007.02a
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  • pp.131-131
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  • 2007
• PDF

A simulation study of the axially extracted vircator with ring type reflector in the waveguide

• Lim, Jeong-Eun;Jeon, Wook;Choi, Eun-Ha
• • Proceedings of the Korean Vacuum Society Conference
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  • 2005.02a
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  • pp.92-92
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  • 2005
• PDF

Characteristics of Organic-inorganic Hybrid low-k Thin Films

• Cho, S.J.;Bae, I.S.;Boo, J.H.
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.02a
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  • pp.278-278
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  • 2008
• PDF

Etching characteristics of Ta and TaN using Cl2/Ar inductively coupled plasma

• Shin, M.H.;Na, S.W.;Lee, N.E.;Ahn, J.H.
• • Proceedings of the Korean Vacuum Society Conference
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  • 2004.08a
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  • pp.228-228
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  • 2004
• PDF

Effect of high-frequency variation on ArF PR deformation and silicon nitride etching by dual frequency superimposed (DFS) rf capacitive coupled plasma

• Lee, N.E.;Kim, D.H.
• • Proceedings of the Korean Vacuum Society Conference
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  • 2004.08a
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  • pp.78-78
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  • 2004
• PDF

Ti thin film deposited by grid-assisted magnetron sputtering

• Jung, Min-J;Nam, Kyung-H;Han, Jeon-G;Shaginyan, Leonid R.
• • Proceedings of the Korean Vacuum Society Conference
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  • 2002.06a
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  • pp.154-154
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  • 2002
• PDF

High rate deposition of MgO films by reactive magnetron sputtering with additional electron emission

• Nam, Kyung-H.;Chung, Yun-M.;Han, Jeon-G.
• • Proceedings of the Korean Vacuum Society Conference
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  • 2002.06a
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  • pp.196-196
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  • 2002
• PDF

Hybrid-Polymer Thin Films by PECVDMethod and Characterization of Their Electrical and Mechanical Properties

• Bae I.S.;Cho S.J.;Boo J.H.
• • Proceedings of the Korean Vacuum Society Conference
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  • 2006.08a
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  • pp.171-171
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  • 2006
• PDF

Etching characteristics of DLC-hard mask using dual frequency superimposed capacitively coupled plasmas (DFS-CCP)

• Kim, H.T.;Kwon, B.S.;Lee, N.E.;Cho, H.J.;Hong, B.Y.
• • Proceedings of the Korean Vacuum Society Conference
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  • 2007.02a
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  • pp.88-88
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  • 2007
• PDF

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