Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.06a
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- Pages.196-196
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- 2002
High rate deposition of MgO films by reactive magnetron sputtering with additional electron emission
- Nam, Kyung-H. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Chung, Yun-M. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Han, Jeon-G. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2002.06.27
Abstract
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