• Journal of the Korean Vacuum Society
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• v.15 no.1
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• pp.24-30
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• 2006

Integrated cavity output spectroscopy(ICOS) is a simple, non-intrusive absorption measurement technique that can detect and quantify trace-level gas species. The spectral absorbance of a gas is quantified from the integrated optical output of the modulated high-finesse cavity containing the sample which is irradiated by a wavelength-swept laser source. We constructed an experimental setup by using a tunable single mode external cavity diode laser operating at the wavelength near 765 nm and a Fabry-Perot cavity with length modulation achieved by a piezoelectric transducer where one of the cavity mirrors sat on. In the experiment performed on minute oxygen gas at the wave-length near 764.5nm, we demonstrated the minimum detectable absorption of $8.45\times10^{-8}cm^{-1}$.

• Applied Science and Convergence Technology
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• v.23 no.2
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• pp.83-89
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• 2014

Adsorption of residual gas molecules damped the emission current of a W (310) field electron emission (FE) emitter. The damping speed was linearly proportional to the pressure gauge readings at pressure ranging from ${\sim}10^{-8}Pa$ to ${\sim}10^{-9}Pa$, and the proportionality constant was employed to measure pressure in the $10^{-10}Pa$ range. A time plot of FE current revealed the existence of an "initial stable region" after the flash heating of W(310) FE, during which the FE current damps very slowly. The presence of non-hydrogen gas removed this region from the plot, supplying a means of qualitatively analysing the gas species.

• Journal of the Korean Vacuum Society
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• v.16 no.4
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• pp.244-249
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• 2007

Deadweight piston gauge have been widely used as a fundamental instrument of precise pressure measurement because they are robust, accurate, potable, convenient to use and are able to realize the definition of pressure as farce per unit area. Basically, a deadweight piston gauge consists of a piston mounted vertically in a close-fitting cylinder filled with a gas and weights of known mass values. The pressure to be measured is applied to the base of the piston generating an upward vertical force, and is balanced by the downward gravitational force generated by weights. These instruments can be used to measure pressures above 10 kPa because of tare weights including piston. However, using a variable bell-jar pressure method and a newly developed weight loading device we can extend the application range of deadweight piston gauge to lower pressures. In this paper, we present the practical calibration results for two CDGs(Capacitance diaphragm gauge, MKS) with full-scale ranges of 1.33 kPa and 13.3 kPa, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.397-397
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• 2010

Bone is considered as hierarchically organized biocomposites of organic (collagen) and inorganic (hydroxyapatite) materials. The precise structural dependence between hydroxyapatite (HAp, $Ca_{10}(PO_4)_6(OH)_2)$ crystals and collagen fibril is critical to unique characteristics of bone. To meet those conditions and obtain optimal properties, it is essential to understand and control the initial growth mechanisms of hydroxyapatite at the molecular level, such as other nano-structured materials. In this study, collagen fibrils were prepared by adsorbing native type I collagen molecules onto hydrophobic surface. Hydrophobicity was introduced on the Si wafer surface by using PECVD (plasma enhanced chemical vapor deposition) method and cyclohexane as a precursor. Biomimetic nucleation and growth of HAp on the self-assembled collagen nanofibrils were occurred through incubation of the sample in SBF (simulated body fluid). Chemical and morphological evolution of HAp nanocrystals was investigated by surface-sensitive analytical techniques such as ToF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) and AFM (Atomic Force Microscopy) in the early growth stages (< 24 hrs). The very initial stages (< 12 hrs) of mineralization could be clearly demonstrated by ToF-SIMS chemical mapping of surface. In addition to ToF-SIMS and AFM measurement, scanning electron microscopy, energy dispersive spectroscopy and X-ray diffraction analysis were conducted to characterize the HAp layer in the late stages. This study is of great importance in the growth of real bone-like materials with a structure analogous to that of natural bones and the development of biomimetic nanomaterials.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.106.1-106.1
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• 2013

When strong static magnetic field is applied to the TMP, it is expected that the presence of the magnetic field might retard the velocity of the blades which results in the change of the pumping speed of the TMP. However, such effect of the magnetic field on the TMP has not been well characterized. Thus, under the strong magnetic field, monitoring pumping speed as well as generated heat, pressure, and vibration of the TMP may be an important issue to understand the magnetic field tolerance of the TMP and the development of magnetic shielding technique for the key components of the pump. For this purpose, magnetic field generation system to the vertical direction by a circular current source was firstly designed and suggested [K. Baik et al., 44th Annual Conf. KVS, 22(1), 153, (2012)]. In the current study, another magnetic field generation systems are presented to apply the magnetic field to the horizontal and radial directions by the rectangular current sources and the permanent magnets respectively. Such systems were made to generate at least 50 Gauss of magnetic field along the vertical direction and at least 25 Gauss of magnetic field along the horizontal or radial direction. Current study introduces the evaluation system of the magnetic field along the vertical, horizontal, and radial directions and presents the measured experimental results of the magnetic field when such systems are combined with the equipment where TMP will be installed.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.445-449
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• 1999

We studied the properties of the InAs epitaxial layers grown of (100)-oriented GaAs ($2^{\circ}$tilted toward[011]) by molecular beam epitaxy. From DCX (double-crystal x0ray), the better crystal quality was shown in InAs epitaxial layers on about 2500$\AA$ GaAs epitaxial layers on GaAs, we obtained the high mobility of InAs epitaxy in As/In BEP ratio (1.2~2.0) from Hall effect measurement. The electron mobility increased as electron concentration increases, until Si cell temperature $960^{\circ}C$$(N_D=2.21\times10^{-17}\textrm{cm}^{-3})$. The mobility decreases as the Si cell temperature increases, at the temperature over $960^{\circ}C$. We obtained the high mobility (1.10$\times$104cm2/V.s) at Si electron concentration of $N_D=2.21\times10^{-17}\textrm{cm}^{-3}$.

• Applied Microscopy
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• v.29 no.1
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• pp.75-81
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• 1999

Optimum conditions for making the Au and Al internal standards for TEM have been determined experimentally. The Au internal standard was produced by sputter coating at 9mA for 100 seconds in low vacuum $(\leq1\times10^{-3})$. The Al internal standard was produced by evaporation coating at 7kV for 10 minutes in high vacuum $(\leq1\times10^{-5})$. Measurements of the lattice parameters of andalusite and albite feldspars with this Au internal standard resulted in errors of (a) $ \leq1.2%$ in precion and $\leq0.3%$ in accuracy for andalusite: (b) $\leq0.5%$ in precision and $\leq1.1%$ in accuracy for albite feldspars. The most significant error occurred from the measuring processes of distances and angles of electron diffraction patterns. By employing systematic procedures of measurement with high precision devices, this lattice parameter determination method utilizing the internal standard should be a good alternative to the conventional powder XRD method or the sophisticated CBED method for special samples.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.185.2-185.2
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• 2016

The plasma density is an essential plasma parameter describing plasma physics. Furthermore, it affects the throughput and uniformity of plasma processing (etching, deposition, ashing, etc). Therefore, a novel technique for plasma density measurement has been attracting considerable attention. Microwave probe is a promising diagnostic technique. Various type of cutoff, hairpin, impedance, transmission, and absorption probes have been developed and investigated. Recently, based on the basic type of probes, modified flat probe (curling and multipole probes), have been developing for in situ processing plasma monitoring. There is a need for comparative study between the probes. It can give some hints on choosing the reliable probe and application of the probes. In this presentation, we make attempt of numerical study of different kinds of microwave probes. Characteristics of frequency spectrum from probes were analyzed by using three-dimensional electromagnetic simulation. The plasma density, obtained from the spectrum, was compared with simulation input plasma density. The different microwave probe behavior with changes of plasma density, sheath and pressure were found. To confirm the result experimentally, we performed the comparative experiment between cutoff and hairpin probes. The sheath and collision effects are corrected for each probe. The results were reasonably interpreted based on the above simulation.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.208-209
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• 2011

In this work, we developed self-assembled monolayers (SAMs) of alkanethiols on gold that can release amine groups, when an electrical potential was applied to the gold. The strategy was based on the introduction of the electroactive carbamate group, which underwent the two-electron oxidation with simultaneous release of the amine molecules, to alkanethiols. The synthesis of the designed thiol compounds was achieved by coupling isocyanate-containing compound with hydroquinone. The electroactive thiols were mixed with hydroxyl-containing alkanethiol [$HS(CH_2)_{11}OH$] to form mixed monolayers, and cyclic votammetry was used for the characterization of the release. The mixed SAMs showed a first oxidation peak at +540 mV (versus Ag/AgCl reference electrode), demonstrating irreversible conversion from carbamate to hydroqinone with simultaneous release of the amine groups. The second and third cycles showed typical reversible redox reaction of hydroquinone and quione: the oxidation and reduction occurred at +290 mV and -110 mV, respectively. The measurement of ToF-SIMS further indicates that electrochemical-assisted chemical reaction successfully released amine groups. This new SAM-based electrochemistry would be applicable for direct release of biologically active molecules that contain amine groups.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.328.2-328.2
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• 2014

Semiconductor nanowires (NWs) have attracted research interests due to the distinct physical properties that can lead to variousoptical and electrical applications. In this paper, we have grown InAs NWs viagold (Au)-assisted vapor-liquid-solid (VLS) and catalyst-free vapor-solid (VS) mechanisms and investigated on the p-type doping profile of the NWs. Metal-organic chemical vapor deposition (MOCVD) is used for the growth of the NWs. Trimethylindium (TMIn) and arsine (AsH3) were used for the precursor and diethyl zinc (DEZn) was used for the p-type doping source of the NWs. The effectiveness of p-type doping was confirmed by electrical measurement, showing an increase of the electron density with the DEZn flow. The structural properties of the InAs NWs were examined using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). In addition, we characterize atomic distribution of InAs NWs using energy-dispersive X-ray spectroscopy (EDX) analysis.