• 한국진공학회지
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• 제2권4호
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• pp.474-479
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• 1993

Submicron contact hole filling with aluminum alloys has been achieved with a multistep metallization method, which utilizes a metal " flow" or self-diffusion process at elevated temperatures after the metal was sputter-deposited. A multi-chamber, modular sputtering system was employed to deposit aluminum alloys and subsequently to anneal the deposited metal films under vacuum at high temperatures. The film were deposited on 200 mm wafers with planar, dc magnetron sputtering sources without anysubstrate bias. The basic process steps studied for the multistep metallization include an initial layer deposition at low temperatures less than $100^{\circ}C$, and an annealin gstep at elevated temperatures, between 450 and $550^{\circ}C$. The degree of planarization or step coverage was dependent strongly upon the temperature and time of the flow step and complete filling of the submicron contacts with aluminum alloys was achieved. Responsible mechanisms for the enhancement in step coverge and factros determining uniform and reproducible flow of aluminum alloys during the high temperauture step are discussed.discussed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.439-442
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• 2001

Chalcogenide glassy semiconductors(CGS) can be obtained by the melt quenching technique. We have investigated the thin film heterostructures : metal-chalcogenide glassy semiconductors, where metal is copper, and chalcogenide glassy semiconductors are glasses of the system As-Se. CU/CGS film heterostructure were produced in the vacuum evaporator by the method of vacuum thermal evaporation. Doped films are very sensitive to external actions, and this property allows developing supersensitive precision sensors of temperature, humidity, illumination, and etc. based on them. Cu/CGS film has shown that resistance strongly depend on the temperature. The ratio of resistance vs. temperature has shown over a 2 k$\Omega$/degree. The slop of temperature and resistance shows linear.

• Geomechanics and Engineering
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• 제1권3호
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• pp.179-191
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• 2009

For a two-way drainage deposit under a surcharge load, it is possible to leave a layer adjacent to the bottom drainage boundary without prefabricated vertical drain (PVD) improvement and achieve approximately the same degree of consolidation as a fully penetrated case. This depth is designated as an optimum PVD installation depth. Further, for a two-way drainage deposit under vacuum pressure, if the PVDs are fully penetrated through the deposit, the vacuum pressure will leak through the bottom drainage boundary. In this case, the PVDs have to be partially penetrated, and there is an optimum installation depth. The equations for calculating these optimum installation depths are presented, and the usefulness of the equations is studied by using finite element analysis as well as laboratory model test results.

• 반도체디스플레이기술학회지
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• 제11권1호
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• pp.49-54
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• 2012

There have been plenty of difficulties because properties of Alq3 are unable to acquire in a process of manufacture of OLED. In this paper it will predict a viscosity of Alq3 through DSMC technique and suggest the way regarding a study to estimate properties of material through the computer simulation. There could generate errors of a simulation process in a vacuum deposition process since the properties of material that is used in a high-degree vacuum environment are not secured. Therefore, we would like to propose the new methods that can not only predict properties of a molecular unit but also raise an accuracy of simulation process by forecasting properties of Alq3.

• 한국자원식물학회지
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• 제19권3호
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• pp.436-439
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• 2006

This study was carried out to obtain basic information for optimum storage method of leaf, stem and root of Angelica acutiloba Radix, which is being utilized as major cultivated herbal medicine materials, root of Angelica acutiloba was stored for 3 months in different packing materials and sealing methods, such as punched packing, sealing and vacuum packing. The results are summarized as follows. The loss in weight as influenced by packing materials and sealing degree was the lowest at vacuum packing and complete sealing condition with transparent polyethylene film. The ratio of root rot during the storage period was not significantly different between polyethylene films, but it was significantly different between sealing conditions. Therefore, vacuum packing and complete sealing with polyethylene film are desirable storage condition for Angelica acutiloba Radix.

• Journal of Advanced Marine Engineering and Technology
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• 제18권4호
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• pp.13-24
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• 1994

The demand of clean energy, like liquefied gas(LNG), increase suddenly because it generates few polluting substances when burned and from the point of view with caloric value it generates ralatively less $CO_2$ gas than the other energy sources. LNG transpotion method of our country is marine transportion by ships because the LNG producing district is far away from Korea. Main engines for most LNG ships are steam turbines, and the efficiency of steam turbine is influenced by the degree of vacuum of main steam condenser. This paper introduce the design method of the vacuum system for high efficiency marine steam turbine. Especially, it is developed the CAD program for the large steam condenser and steam ejector. Also, it is designed the pilot plant including high pressure boiler for the performance test and maked a part of this plant.

• 한국식품과학회지
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• 제28권1호
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• pp.190-196
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• 1996

고차단성 포장재를 이용하여 김치를 각기 다르게 진공포장한 후 $10^{\circ}C$와 $0^{\circ}C$의 저온조건에 저장하면서 진공도 차이에 따른 pH, 산도, 색상, 젖산균수 등의 변화를 측정하고 관능검사를 병행하여 진공포장이 김치 품질에 미치는 영향을 살펴보았다. 전체적으로 진공도 차이는 저장중 김치의 pH와 적정 산도, 색상, Leuconostoc과 Lactobacilli를 포함한 젖산균수, 관능검사 결과 등에 거의 영향을 미치지 않았다. 이로부터 저온 유통되는 소포장 김치의 품질보존을 위해서는 고도의 진공포장이 아닌 포장재 내부의 head space를 제거하는 수준으로도 충분히 효과적임을 확인할 수 있었다.

• 자원리싸이클링
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• 제21권5호
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• pp.58-64
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• 2012

본 연구는 타이타늄 선삭 스크랩을 진공 아크 용해에 의해 건전한 버튼형 잉곳으로 제조하여 아크 발생용 소모성 전극으로의 재활용을 위해 타이타늄 내 불순물의 거동 및 특성을 평가하였다. 먼저 가스불순물인 산소는 진공 아크 용해에 의해 초기 표면의 산화층에 의해 제거되지만 이후 타이타늄에 고용된 산소는 제거되지 않는 것으로 확인되었다. 타이타늄 스크랩의 대표 금속불순물인 철의 경우 타이타늄과의 증기압 차이로 인해 진공 아크 용해에 의해 최종 20분간 용해시 약 43%의 제거율을 보이며, 최종 제조된 타이타늄 버튼형 잉곳은 ASTM 규격의 순 타이타늄 등급 3에 해당하는 순도를 보여 VAR(Vacuum Arc Remelting)용 소모성 전극의 제조에 가능한 것으로 확인하였다.

• 한국정밀공학회지
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• 제17권8호
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• pp.180-188
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• 2000

Fine multi-hole sheet metal product(FMSMP) is a specific metal plate which is used in color TV and computer monitor. Processes of manufacturing FMSMP are generally composed of coating cleaning exposure and etching processes. After a thin metal plate is made by rolling photosensitive liquid is coated on the metal plate in coating process. Then the coated thin metal plate consecutively passes through exposure process in which upper and lower glasses are compressed by vacuuming the space between glasses and metal plate. In this lowered glasses are compressed by vacuuming the space between glasses and metal plate. In this lowered vacuum state certain part of metal plate is desirably exposed to light and will be etched into forming lots of well-arranged holes with a specific diameter, nowadays to manufacture FMSMP of 17 inch braun tube 80 second is required for complete vacuum but 35 second is applied to manufacture FMSMP in reality. In the present study vacuuming time is tried to reduce for improvement of productivity by analyzing vacuum system and proposing several solutions, for faster vacuuming speed degree of vacuum state between glasses and metal plate is improved by the proposed method and experiments using the proposed method are performed for verification. In addition microstructure of FMSMP is investigated to prevent stain phenomena and to improve quality of the product.

• Membrane and Water Treatment
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• 제9권6호
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• pp.435-445
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• 2018

In this work, desalination experiments were performed on vacuum membrane distillation (VMD). Process parameters such as feed flow rate, vacuum degree on permeate side, feed bulk temperature and feed salt concentration were optimized using sensitivity analysis and Taguchi method. The optimum values of process parameters were found to be 2 lpm of feed flow rate, $60^{\circ}C$ of feed bulk temperature, 5.5 kPa of permeate-side pressure and 5000 ppm of salt concentration. The permeate flux at these conditions was obtained as $26.6kg/m^2{\cdot}hr$. The rejection of salt in permeate was found to be 99.7%. The percent contribution of various process parameters using ANOVA results indicated that the most important parameter is feed bulk temperature with its contribution of 95%. The ANOVA results indicate that the percent contribution of permeate pressure gets increased to 5.384% in the range of 2 to 7 kPa as compared to 0.045% in the range of 5.5 to 7 kPa.