• 제목/요약/키워드: Vacuum characteristics

검색결과 2,157건 처리시간 0.028초

탄소나노튜브 전극으로부터 전자방출에 의한 진공도 측정 (Measurement of Vacuum Pressure by Electron Emission from Carbon Nanotube Emitters)

  • 김성진;조규환;김성엽;전재옥;이상훈;최복길
    • 한국전기전자재료학회논문지
    • /
    • 제18권5호
    • /
    • pp.396-400
    • /
    • 2005

  • Carbon nanotubes (CNTs) have been well known as electron emitters for field emission applications like FEDs. In this work, we propose as new application a vacuum sensor using CNTs and discuss its current-voltage characteristics as a function of vacuum pressure. The proposed sensor, based on electrical discharge theories in air gap well-known as Townsend theory and as Paschen's law, works by figuring out the variation of the dark current and the initial breakdown voltage depending on the vacuum pressure of air which can ionize through collisions with the electrons accelerated by high electric field.

  • https://doi.org/10.4313/JKEM.2005.18.5.396 인용 PDF KSCI

MOS 형태 전자 턴넬링 전극의 특성 (Emission Characteristics of MOS Electron Tunneling Cathode)

  • Yokoo, Kuniyoshi
    • 한국진공학회지
    • /
    • 제2권3호
    • /
    • pp.325-330
    • /
    • 1993

  • 실리콘 gate의 MOS 전자 턴넬링 전극을 구성하여 그 특성을 조사하였다. 전자 방출은 전 gate 영역에서 MOS diode의 전위차를 지나는 턴넬링에 의하여 일어나고 안정하였다. 측정된 전류에서 산화막과 gate에서의 열전자의 충돌을 연구하였다. 방출된 전류는 압력에 관계없이 일정하였다.

  • PDF

박막의 전기적 특성평가를 위한 측정 시스템의 구성 및 자동화 (Composition and Automation of Electrical Property Measurement System for Thin Films)

  • 구경완;황문수;천희곤
    • 한국진공학회지
    • /
    • 제1권3호
    • /
    • pp.371-375
    • /
    • 1992

  • Low cost, PC controlled electrical property measurement systems were constructed to study thin film characteristics such as ; I-V, C-V, C-t, and low current. In addition, a GPIB card and C language program for data control and analysis were made for this study.

  • PDF