• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.472-477
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• 2004

Miniaturization is the central theme in modern fabrication technology. Many of the components used in modem products are becoming smaller and smaller. The direct write FIB technology has several advantages over contemporary micromachining technology, including better feature resolution with low lateral scattering and capability of mastless fabrication. Therefore, the application of focused ion beam(FIB) technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}{\textrm}{m}$. It is not unsuitable to the sputtering and the deposition to make the high-precision structure in micro or macro scale. Our research is the development of nano stage of 200mm strokes and l0nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about 1$\times$10$^{-5}$ pa. This paper presents the concept of nano stages and the discussion of the material treatment for ultra tush vacuum.

• 반도체디스플레이기술학회지
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• 제10권4호
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• pp.101-106
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• 2011

There are various methods in the flat panel display manufacture. The cost reduction effect is very big in case of using the screen printing method. The screen printing method is much used in the process of forming PDP barrier and can apply to the process of arranging the pillars for maintaining the vacuum gap of the vacuum glazing panel. The pillar which is one of the core elements for comprising vacuum glazing maintains the vacuum gap overcoming the vacuum pressure difference with the atmospheric pressure generated in vacuum glazing. At the same time, the deformation phenomenon by vacuum pressure is relived. In this paper, by using FEM about three considered in the pillar design and arrangement kinds of limiting factors, the simulation was performed. The pillar optimum arrangement method at within the maximum allowable tensile stress and heat transfer coefficients according to the arrangement try to be presented based upon the analyzed result data review and this validity tries to be verified by FEM.

• Journal of the Korean Wood Science and Technology
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• 제25권4호
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• pp.51-60
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• 1997

We investigated the characteristics of air-and vacuum-drying heated by hot plates for 8~14cm-diameter logs or 6~12cm-thick pillars of Pinus koraiensis. And we evaluated the effects of longitudinal kerf and vacuum drying heated by hot plates. The vacuum drying times from green to 10.9~18.6% MC were 15 days, and these times were one-fifth compared to the air-drying times. The longitudinal kerfing had no significant, effect on drying rates during both air-drying and vacuum drying. But drying defects such as surface checks and V-shaped cracks were effectively prevented during air-drying and vacuum drying by longitudinal kerfing. The vacuum drying was more advantageous than air-drying for preventing of surface checks, end checks and V-shaped cracks, and especially, the vacuum dried pillars with longitudinal kerf were almost free from drying defects. In accelerated weathering conditions the resin did not exude for all specimens.

• Structural Engineering and Mechanics
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• 제72권3호
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• pp.305-312
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• 2019

This paper investigates the effect of utilizing vacuum bagging process to enhance the bond behavior between fiber reinforced polymer (FRP) composites and concrete substrate. Sixty specimens were prepared and tested using double-shear bond test. The effect of various parameters such as vacuum, fiber type, and FRP sheet length and width on the bond strength were investigated. The experimental results revealed that utilizing vacuum leads to improve the bond behavior between FRP composites and concrete. Both the ultimate bond forces and the maximum displacements were enhanced when applying the vacuum which leads to reduction in the amount of FRP materials needed to achieve the required bond strength compared with the un-vacuumed specimens. The efficiency of the enhancement in bond behavior due to vacuum highly depends on the fiber type; using carbon fiber showed higher enhancement in the bond strength compared to the glass fiber when vacuum was applied. On the contrary, specimens with glass fiber showed higher enhancement in the maximum slippage compared to specimens with carbon fibers. Utilizing vacuum does not affect the debonding failure modes but lead to increase in the amount of attached concrete on the surface of the debonded FRP sheet.

• 한국진공학회지
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• 제19권1호
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• pp.1-9
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• 2010

진공게이지의 비교교정 방법으로 교정이 가능하고-비교교정은, 2차표준기라고 부르는 교정되어진 게이지와 교정할 다른 게이지의 지시값을 읽어 비교는 방법- 다른 진공관련 실험을 할 수 있는 기체 유량 시스템을 개발하였다. 교정시스템에의 진공용기는 터보분자펌프(TMP)에 의해서 배기하고, 후면에 스크롤펌프를 배치하여 배기시스템을 꾸몄다. 터보분자펌프의 최대허용가능 압력은 펌프의 주입구에서 0.1 Pa까지이며, 이보다 압력이 높아지면 배기속도가 감소하며 압력대 이하의 환경을 조절하기가 매우 어렵게 된다. 현재 133 Pa까지의 높은 압력을 발생시킬 수 있는 새롭게 개발된 기체유량조절시스템은 바이패스 라인에 맞도록 설계된 컨덕턴스-리듀서를 설치하여 터보분자펌프를 안전하게 운용할 수 있도록 하였다. 추가로 진공용기안에 전체압력 범위(0.1 Pa ~ 133 Pa)의 압력을 생성하며 기체 주입과 압력구배를 연구하였다. 압력의 최대 편차는 용기의 위쪽 방향에 위치한 가스 주입구에서 가까운 위치 C에서 1.6%로 나타났다.

• 한국진공학회지
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• 제18권6호
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• pp.403-410
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• 2009

진공챔버는 진공게이지 교정, 산업에서의 재료처리 등 여러 가지 다양한 용도에 맞게 적용이 가능하다. 이 진공챔버 내부에서 가스가 유입되는 과정에서의 진공도는 일정하게 유지하기가 힘들다. 산업체 응용에서뿐만 아니라 연구과정에서도 진공챔버 내부에 가스가 유입되는 동안의 내부압력분포와 최대도달 평형압력을 아는 것이 매우 중요하다. 이러한 진공챔버 내부의 압력 불균형을 감소시키기 위해서 가스 주입구 부분에 baffle을 이용하는 방법이 있다. 현재 지속적인 기체흐름이 있는 진공챔버 내부의 기체흐름의 작용에 관해 0.1 Pa~133 Pa 영역에서 불규칙한 압력을 최소화하기 위한 baffle plate의 효과에 대해 연구하였다. 최대편차는 가스 주입구 부분에서 나타나는 압력으로 baffle plate가 전환흐름영역에서 큰 영향을 미치는 것으로 나타났다.

• Geomechanics and Engineering
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• 제6권4호
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• pp.377-389
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• 2014

The vacuum consolidation method which was proposed by Kjellman in 1952 has been studied extensively and used successfully since early 1980 throughout the world, especially in East and Southeast Asia. Despite the increased successful use, different opinions still exist, especially in connection to distribution of vacuum with depth and time in vertical drains and in soil during preloading of soft ground. Porewater pressure measurements from actual cases of field vacuum and vacuum-fill preloading as well as laboratory studies have been examined. It is concluded that (a) a vacuum magnitude equal to that in the drainage blanket remains constant with depth and time within the vertical drains, (b) as expected, vacuum does not develop at the same rate within the soil at different depths; however, under ideal conditions vacuum is expected to become constant with depth in soil after the end of primary consolidation, and (c) there exists a possibility of internal leakage in vacuum intensity at some sublayers of a soft clay and silt deposit. A case history of vacuum loading with sufficient subsurface information is analyzed using the ILLICON procedure.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1997년도 제12회 학술발표회 논문개요집
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• pp.109-109
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• 1997

• 한국진공학회:학술대회논문집
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• 한국진공학회 1997년도 제12회 학술발표회 논문개요집
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• pp.180-180
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• 1997

• 한국진공학회:학술대회논문집
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• 한국진공학회 2004년도 제27회 학술발표회 초록집
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• pp.229-229
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• 2004