• 한국수소및신에너지학회논문집
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• 제17권2호
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• pp.204-211
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• 2006

The electrolyte in the solid oxide fuel cell must be dense enough to avoid gas leakage and thin enough to reduce the ohmic resistance. In order to manufacture the thin and dense electrolyte layer, 8 mol% $Y_2O_3$ stabilized-$ZrO_2$ (8YSZ) electrolyte layers were coated on the porous tubular substrate by the novel vacuum slurry dip-coating process. The effects of the slurry concentration, presintering temperature, and vacuum pressure on the thickness and the gas permeability of the coated electrolyte layers have been examined in the vacuum slurry coating process. The vacuum-coated electrolyte layers showed very low gas permeabilities and had thin thicknesses. The single cell with the vacuum-coated electrolyte layer indicated a good performance of $495\;mW/cm^2$, 0.7 V at $700^{\circ}C$. The experimental results show that the vacuum dip-coating process is an effective method to fabricate dense thin film on the porous tubular substrate.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.434-437
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• 2005

Chemical Mechanical Polishing (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. In general, CMP is a surface planarization method in which a silicon wafer is rotated against a polishing pad in the presence of slurry under pressure. The polishing pad, generally a polyurethane-based material, consists of polymeric foam cell walls, which aid in removal of the reaction products at the wafer interface. It has been found that the material removal rate of any polishing pad decreases due to the so-called 'pad glazing' after several wafer lots have been processed. Therefore, the pad restoration and conditioning has become essential in CMP processes to keep the urethane polishing pad at the proper friction coefficient and to allow effective slurry transport to the wafer surface. Diamond pad conditioner employs a single layer of brazed bonded diamond crystals. Due to the corrosive nature of the polishing slurry required in low pH metal CMP such as copper, it is essential to minimize the possibility of chemical interaction between very low pH slurry (pH <2) and the bond alloy. In this paper, we report an exceptional protective coated conditioner for in-situ pad conditioning in low pH Cu CMP process. The protective Cr-coated conditioner has been tested in slurry with pH levels as low as 1.5 without bond degradation.

• Korean Chemical Engineering Research
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• 제49권6호
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• pp.786-789
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• 2011

본 연구에서는 고체산화물연료전지에서 사용되고 있는 전해질의 직접탄소연료전지로의 적용가능성을 평가하기 위해 YSZ 전해질의 특성을 평가하였다. 전해질 층은 진공 슬러리 코팅 법을 사용하여 연료극 지지체위에 형성하였으며, 코팅 후 $1,400^{\circ}C$에서 5시간 동안 열처리하여 미세조직, 가스투과도 및 이온 전도도 측정을 통해 직접탄소연료전지로의 적용가능성을 확인하였다. YSZ 전해질은 얇고 치밀한 층을 형성하였으며 낮은 가스 투과도 값을 나타내었다. 이와같은 결과를 바탕으로 직접탄소 연료전지에 YSZ 전해질을 적용하였으며, 단위전지를 제작하여 $800^{\circ}C$에서 성능평가를 수행하였다.

• 한국주조공학회지
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• 제22권3호
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• pp.114-120
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• 2002

A new titanium based alloy, Ti-10Ta-10Nb, has designed to examine the improved mechanical properties and biocompatibility. A specimen of titanium alloy was melted in a consumable vacuum arc furnace and homogenized at $1050^{\circ}C$ for 24 h. The effect of hot rolling on microstructure was estimated after rolling at $400^{\circ}C$ and $800^{\circ}C$ respectively. Surface of melted alloy by consumable vacuum arc melting was consisted of rough surface and it was changed to sound surface by coating of $ZrO_2$ slurry on copper mold surface. The hardness of Ti-10Ta-10Nb alloy increased with the amount of${\alpha}+{\beta}$ phase. Ti-10Ta-10Nb alloy showed $Widmanst{\"{a}}ten$ structure by hot rolling at $800^{\circ}C$ and in the rolling ${\beta}-region$ was negligible effects on microstructure refining.

• 한국산학기술학회논문지
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• 제19권3호
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• pp.14-20
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• 2018

전기자동차는 가솔린 자동차와는 달리 배출가스가 없어 친환경 차량을 대표하지만, 장착된 축전지에 충전된 전기로 구동되기 때문에, 1회 충전으로 갈 수 있는 거리가 전지의 에너지 밀도에 의해 좌우된다. 따라서 높은 에너지 밀도를 갖는 리튬이온 전지가 전기자동차용 전지로 유력한 후보이다. 리튬이온 전지의 효율을 지배하는 중요한 구성품은 전극이므로 전극 제조공정은 리튬이온 전지 전체 생산 공정에서 중요한 역할을 한다. 특히 전극의 제조 공정 중 코팅 공정은 성능에 큰 영향을 미치는 매우 중요한 공정이다. 본 논문에서는 전극 제조에서 코팅 공법의 효율성 및 생산성 증대를 위한 혁신적인 공정을 제안하고, 장비 설계 방법 및 개발 결과에 대하여 기술하였다. 구체적으로, 극판 핵심 코팅 품질 25% Upgrade 기술, 제품 고출력/고용량화 에 따른 조립 마진 감소 대응 가능 기술, 그리고 제품 용량 품질 및 조립 공정 수율 향상 기술들에 대한 설계 절차 및 개발방법을 제시하였다. 결과로 리튬이온 배터리의 셀의 제품 수명 개선 효과를 확보 하였다. 기존의 코팅 공정과 비교할 때 양극 용량 유지 위해 Target Loading Level 유지, 산포를 향상시켰다(${\pm}0.4{\rightarrow}{\pm}0.3mg/cm^2r$감소).

• 한국정밀공학회지
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• 제16권6호
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• pp.52-57
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• 1999

Funtional metal prototypes are often required in numerous industrial applications. These components are typically needed in the early stage of a project to determine form, fit and function. Recent R/P(Rapid Prototyping) part are made of soft materials such as plastics, wax, paper, these master models cannot be employed durable test in real harsh working environment. Parts by direct metal rapid tooling method, such as laser sintering, by now are hard to get net shape, pores of the green parts of powder casting method must be infiltrated to get proper strength as tool, and new type of 3D direct tooling system combining fabrication welding arc and cutting process is reported by song etc. But a system which can build directly 3D parts of high performance functional material as metal part would need long period of system development, massive investment and other serious obstacles, such as patent. In this paper, through the rapid tooling process as silicon rubber molding using R/P master model, and fabricate wax pattern in that silicon rubber mold using vacuum casting method, then we tranlsated the wax patterns to numerous metal prototypes by new investment casting process combined conventional investment casting with rapid pototyping & rapid tooling process. with this wax-injection-mold-free investment casting, we developed new investment casting process of fabricating numerous functional metal prototypes from one master model, combined 3-D CAD, R/P and conventional investment casting and tried to expect net shape measuring total dimension shrinkage from R/P part to metal part.