• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
• /
• pp.215-215
• /
• 2011

The bonding configuration and adsorption stability of alanine and leucine adsorbed on Ge(100)-2${\times}$1 surface were investigated and compared using core-level photoemission spectroscopy (CLPES) and density functional theory (DFT) calculations. The bonding configuration, stability, and adsorption energies were evaluated for two different coverage levels. In both cases, the C 1s, N 1s, and O 1s core-level spectra at a low coverage (0.30 ML) indicated that the carboxyl and amine groups participated in bonding with the Ge(100) surface in an "O-H dissociated-N dative bonded structure". At high coverage levels (0.60 ML), both this structure and an "O-H dissociation bonded structure" were present. As a result, we found that alanine adsorbs more easily (lower adsorption energy) than leucine on Ge(100) surfaces due to less steric hindrance of side chain.

• 마이크로전자및패키징학회지
• /
• 제9권3호
• /
• pp.1-6
• /
• 2002

A low temperature process technology of copper thin films has been developed by a chemical vapor deposition technology for multi-level metallzations in ULSI fabrication. The copper films were deposited on TiN/Si substrates in helium atmosphere with the substrate temperature between $130^{\circ}C$ and $250^{\circ}C$. In order to get more reliable metallizations, effects on the post-annealing treatment to the electrical properties of the copper films have been investigated. The Cu films were annealed at the $5 \times10^{-6}$ Torr vacuum condition and the electrical resistivity and the nano-structures were measured for the Cu films. The electrical resistivity of Cu films shown to be reduced by the post-annealing. The electrical resistivity of 2.0 $\mu \Omega \cdot \textrm{cm}$ was obtained for the sample deposited at the substrate temperature of $180^{\circ}C$ after vacuum annealed at $300^{\circ}C$. The resistivity variations of the films was not exactly matched with the size of the nano-structures of the copper grains, but more depended on the contamination of the copper films.

• 진공이야기
• /
• 제2권2호
• /
• pp.12-16
• /
• 2015

Organic photovoltaics (OPVs) have attracted significant interest in an interdisciplinary research field for the decades as a next-generation photovoltaic device due to their unique advantages. One of requirements for OPVs having high power conversion efficiency is the favorable energy level alignment between the electrode/organic and organic/organic interfaces to manage the exciton dissociation and improve the charge transport. In this review, strategies to enhance the OPV performance by controlling the energy level alignment are discussed. The insertion of an exciton blocking layer leads to the efficient dissociation of photogenerated excitons at the donor/acceptor interface enhancing the short-circuit current density. The choice of a donor having a high ionization energy and an acceptor having a low electron affinity increases the open-circuit voltage. The insertion of an appropriate work function modifier which reduces the charge injection barrier removes the S-kink in current density-voltage characteristics of OPVs and improves the fill factor. This review would give a valuable guide to design the efficient OPV structure.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
• /
• pp.149.1-149.1
• /
• 2013

Noble metal silicides are widely used in silicon based microelectronic and optoelectronic devices. Among them, as compared to other silicides, structural and electronic properties of platinum silicide (PtSi) are found to be less sensitive to change in its dimensions. PtSi is known to overcome the junction spiking problems of Al-Si contacts. Present study is regarding the spatial evolution of platinum silicide in Pt/SiOx/Si. Scanning photoelectron emission microscopy (SPEM) was used for this purpose. SPEM images were obtained for pristine samples and after an annealing at $500^{\circ}C$ for 1 hr. Core-level spectra were recorded at different points in SPEM images contrasted by the intensity of Pt 4f7/2. Both Pt 4f and Si 2p spectra reveal the formation of PtSi after annealing. However, in contrast to earlier reports, PtSi formation is found to be non-uniform confirmed by the SPEM images and from the core level spectra taken at different intensity points.

• 마이크로전자및패키징학회지
• /
• 제10권3호
• /
• pp.57-65
• /
• 2003

본 연구에서는 웨이퍼 레벨 진공 패키징된 MEMS자이로스코프 소자의 신뢰성 시험 및 분석을 통하여 웨이퍼 레벨 진공 패키징의 파괴 메카니즘을 연구하였다. 진공 패키징의 주된 파괴 모드는 누설, 가스투과, 그리고 outgassing이다. 누설은 접합 계면이나 재질의 결함을 통하여 주로 발생되며, 접합폭을 증가시키거나 단결정 실리콘을 사용하면 누설이 감소한다. Outgassing은 실리콘 및 유리기판의 표면 및 내부에서 발생하며 주로 $H_2O$와, $CO_2$, $C_3H_5$ 및 유기 오염물질이었다. Epi-poly의 경우 SOI 웨이퍼보다 약 10배의 outgassing을 발생시킨다. 또한 유리기판을 샌드블라스트 공정을 사용하여 가공한 경우, 약 2.5배의 outgassing 양이 증가한다. Outgassing 제거를 위해서는 접합 전에 웨이퍼를 pre-baking하는 과정이 필수적이며, outgassing의 발생을 최대로 하기 위한 최적의 pre-baking조건은 실리콘과 유리 웨이퍼를 $400^{\circ}C$와 $500^{\circ}C$ 사이에서 pre-baking하는 것이다.

• 한국공작기계학회논문집
• /
• 제13권4호
• /
• pp.56-63
• /
• 2004

Recently technology resulted in highly efficient and multiple-functional electric appliances considering environmental problems. One of the environmental problems is noise of a product in respect to its function. A vacuum cleaner is an essential electric appliance in our daily lives. However, severe noise resulted from high motor speed for improving the function of the appliance is a nuisance for the user. This noise is caused by vibration from various parts of the appliance and fluid noise during a series of intake and exhaust processes while rotating the impeller connected to the axle at a high speed of the fan motor inside the vacuum cleaner rotating around 30,000-35,000rpm. Despite the fact that many researchers conducted studies on reducing the noise level of the fan motor in a vacuum cleaner, only few studies have been conducted considering both the theoretical and experimental aspects using fluid analysis by measuring vibration and noise. Moreover, there has not been a study that accurately compared major noise data obtained considering both of the aspects. In this study, both aspects were considered by considering the following experimental and theoretical methods to verify the major causes of noise from the fan motor in a vacuum cleaner.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2004년도 추계학술대회 논문집
• /
• pp.399-405
• /
• 2004

Recently technology resulted in highly efficient and multiple-functional electric appliances considering environmental problems. One of the environmental problems is noise of a product in respect to its function. A vacuum cleaner is an essential electric appliance in our daily lives. However, severe noise resulted from high motor speed for improving the function of the appliance is a nuisance for the user. This noise is caused by vibration from various parts of the appliance and fluid noise during a series of intake and exhaust processes while rotating the impeller connected to the axle at a high speed of the fan motor inside the vacuum cleaner rotating around 30,000-35,000 rpm. Despite the fact that many researchers conducted studies on reducing the noise level of the fan motor in a vacuum cleaner, only few studies have been conducted considering both the theoretical and experimental aspects using fluid analysis by measuring vibration and noise. Moreover, there has not been a study that accurately compared major noise data obtained considering both of the aspects. In this study, both aspects were considered by considering the following experimental and theoretical methods to verify the major causes of noise from the fan motor in a vacuum cleaner.

• 한국소음진동공학회논문집
• /
• 제20권12호
• /
• pp.1223-1228
• /
• 2010

The conventional noise control attempts to simply reduce the level of product noise. But it is very straight forward way that we have considered human perception on noise. Since human listening is very sensitive to sound. Evaluation of the sound quality of a vacuum cleaner is studied base on human sensibility engineering. In this paper, we choose six vacuum cleaners that are sold in Korea and reduced noise control. The sound quality of vacuum cleaner noise is analyzed by employing the subjective evaluation and by representing them in terms of the objective quantities. Semantic differential method is used to study sound quality Evaluation. To analyze the sound quality of vacuum cleaner noise, consider the coefficients of correlation between sound metrics and subjective rating. The linear regression models were obtained for the subjective evaluation and sound quality metrics.

• Tribology and Lubricants
• /
• 제23권5호
• /
• pp.234-239
• /
• 2007

Recently one of the automobile customer's greatest concerns is quietness in a vehicle along with various functional requirements such as comfort, stability, mobility etc. Therefore car makers place more weight on vehicle noise. Especially, in the case of diesel engine, as the noise level of engine becomes more silent by the development of engineering technology. The noise of alternator with vacuum pump has been able to be noticed enough becoming an issue on vehicles. In this study vacuum pump noise on alternator was identified andclassified into five types. DOE was applied to induce the statistical analysis result to reduce the vacuum pump noise. It was done by subjective listening. Design and statistical analysis are done with Minitab software. This work provides dominant elements of vacuum pump noise on alternator and can be the basis of furture studies.

• 반도체디스플레이기술학회지
• /
• 제12권2호
• /
• pp.45-50
• /
• 2013

This paper focuses on the fundamental issues for improving the efficiency and throughput of the AC PDP (Plasma Display Panel) manufacturing. The properties of the MgO protective layer affect the PDP efficiency. Especially, the secondary electron emission efficiency was affected on the deposition rate of MgO during the evaporation. In this study, the deposition rate of 5 $\AA$/s has given the maximum efficiency value of 0.05 It is demonstrated that the impurity gases such as $H_2O$, $CO_2$, CO or $N_2$, and $O_2$ can be remained inside the PDP panel before sealing and the amount of the impurity gases decreased rapidly as the base vacuum level increased, especially near $10^{-5}$ torr. The fundamental solution in order to overcome these problems is the vacuum in-line sealing process from the MgO evaporation to the final sealing of the panel without breaking the vacuum. We have demonstrated this fundamental process technology and shown the feasibility. The firing voltage was reduced down to 285 V at the base vacuum value of $10^{-6}$ torr, whreras it was about 328 V at the base vacuum value of $10^{-3}$ torr.