• Title/Summary/Keyword: Vacuum Control

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Design and Performance Test of Vacuum Control Valve for Electron Beam Lithography (전자빔 가공기의 진공제어 밸브설계 및 특성평가)

  • Lee Chan-Hong;Lee Hu-Sang
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.777-780
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    • 2005
  • The high vacuum in a electron beam lithography is basic condition, because electron beam vanish by collision with air molecules in generally atmosphere. To make high vacuum state, the vacuum control valve is essential. Most vacuum control valve are manual units. So, user of manual vacuum valve must have understanding vacuum process to change from low vacuum to high vacuum state. The user of electron beam lithography are troubled with operation of manual vacuum valve, in case the vacuum chamber is frequently open. In this paper, the design and performance test of auto vacuum control valve for electron beam lithography are described. With the auto vacuum control valve, the high vacuum level can reach 2.8E-5 Torr.

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Modeling and Control of an Electronic-Vacuum Booster for Vehicle Cruise Control

  • Lee, Chankyu;Kyongsu Yi
    • Journal of Mechanical Science and Technology
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    • v.16 no.10
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    • pp.1314-1319
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    • 2002
  • A mathematical model and control laws for an Electronic-Vacuum Booster (EVB) for application to vehicle cruise control will be presented. Also this paper includes performance test result of EVB and vehicle cruise control experiments. The pressure difference between the vacuum chamber and the apply chamber is controlled by a PWM-solenoid-valve. Since the pressure at the vacuum chamber is identical to that of the engine intake manifold, the output of the electronic-vacuum booster Is sensitive to engine speed. The performance characteristics of the electronic-vacuum booster have been investigated via computer simulations and vehicle tests. The mathematical model of the electronic-vacuum booster developed in this study and a two-state dynamic engine model have been used in the simulations. It has been shown by simulations and vehicle tests that the EVB-cruise control system can provide a vehicle with good distance control performance in both high speed and low speed stop and go driving situations.

Performance analysis of feedback controller for vibratory gyroscope at various vacuum levels

  • Sung, Woon-Tahk;Lee, Jang-Gyu;Kang, Tae-Sam
    • 제어로봇시스템학회:학술대회논문집
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    • 2003.10a
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    • pp.1537-1541
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    • 2003
  • In this paper, presented is a feedback control performance of vibratory gyroscope at various vacuum levels. Micro gyroscope, whose operation is based on the vibrating motion at the vacuum conditions, is highly influenced by the vacuum level of the operating circumstances. In general, we apply the feedback control scheme to the gyroscope in order to improve the performances of the sensor. And control performances of the gyroscope are related to those vacuum levels. So we need investigate the performances of the closed loop control at various vacuum conditions comparing with those of the open loop. The experimental results show that the sensitivity of the closed loop is less than that of the open loop especially in low vacuum conditions. Therefore, there should be trade-off between sensitivity and other sensor performances such as linearity, bandwidth when we apply feedback control to the gyroscope.

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EPICS Based Vacuum Chamber Temperature Control System for PAL Storage Ring (가속기 저장링 진공 챔버 온도측정용 제어시스템 개발 및 EPICS 적용)

  • Yoon, J.C.;Choi, J.Y.;Kang, H.S.
    • Proceedings of the KIEE Conference
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    • 2005.07d
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    • pp.2652-2654
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    • 2005
  • A vacuum chamber temperature control system of Pohang Accelerator Laboratory (PAL) storage ring is a subsystem upgraded PAL control system, which is based upon Experimental Physics and Industrial Control System (EPICS) [1]. There are two control components, data acquisition system (SA120 data logger), development control system IOC (Input/Output Controller) at the storage ring of PAL. There are 240 vacuum chamber at the storage ring. It was a very important problem to solve how to monitor such a large number of vacuum chamber temperature distributed around the ring. The IOC connect MODBUS/JBUS field network to asynchronous serial ports for communication with serial device. It can simultaneously control up to 4 data acquisition systems. Upon receiving a command from a IOC running under Windows2k through the network, the IOC communicate through the slave serial interface ports to SA120. We added some software components on the top of EPICS toolkit. The design of the vacuum control system is discussed. This paper describes the development vacuum chamber temperature control system and how the design of this system.

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Vacuum Gauge Control System Using MSCC for PLS (MSCC를 이용한 가속기 진공장치 감시 시스템 개발)

  • Yoon, J.C.;Lee, T.Y.;Hang, J.Y.;Nam, S.Y.
    • Proceedings of the KIEE Conference
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    • 2001.07d
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    • pp.2169-2171
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    • 2001
  • The vacuum gauge control system has been designed and implemented using multi-serial communication controllers (MSCC) for the 2.5 Gev storage ring at the Pohang Accelerator Laboratory (PAL). There are 20 Balzers vacuum gauges and 17 Granville-Phillips vacuum gauges at the storage ring. A MSCC have two RS485 (max speed 460.8Kbps) field network port, 8 channel serial communication ports (max speed 460.8Kbps) connected to gauge controller for serial communication control. 12 MSCCs are connected to a personal computer (PC) through the RS485 field network. The PC can automatically control the MSCCs by sending set of commands through the network. The commands specify the duration of the MODBUS protocol. Upon receiving a command from a PC running under Windows2000 through the network, the MSCC communicate through the serial output ports to gauge controller. In this paper, we describe control structure and scheme of the vacuum gauge control system.

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Effect of Modified Atmosphere Packaging on Quality Preservation of Rice Cake (Ddukgukdduk) (떡국 떡의 품질유지에 미치는 변형기체포장(MAP) 효과)

  • Jung, Soo Yeon;An, Duck Soon
    • KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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    • v.28 no.1
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    • pp.9-14
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    • 2022
  • Packages of different atmospheres (air (control), 100% CO2, vacuum, and vacuum + O2 absorber) were prepared for 0.4 kg rice cake (ddukgukdduk) using gas-barrier plastic film and stored at 10℃ for 11 days. The stored products were evaluated in their packages atmosphere, total aerobic bacteria, yeast and molds, texture and sensory quality during storage period. In the air package, the O2 concentration decreased from initial 21% to 16% on storage 4 days and the CO2 concentration increased to 23% on storage of 11 days, which resulted from the growth of microorganisms. CO2 concentration decreased from initial 98% to 36% on storage 11 days in the 100% CO2 package. It is reasoned that CO2 was dissolved into the product reducing the volume of the package. Vacuum and vacuum +O2 absorber package maintained shrunk vacuum condition until 11 days of storage. Total aerobic bacteria count increased significantly in the control package (6.41 log (cfu/g) after 11 days) compared to the 100% CO2 package (4.96 log (cfu/g) after 11 days). Yeast and molds were 6.66 in control package, 3.43 in 100% CO2 package, 4.66 in vacuum package, and 3.78 in vacuum + O2 absorber package after 11 days. There was no significant difference between control and the other treatments for the texture of the stored products. Sensory quality was the worst in control package on the storage of 8 days. All treatment groups except control improved the quality preservation, but vacuum and vacuum + O2 absorber packages suffered from cracking of the product. Thus 100% CO2 flushing is suggested as a desired packaging condition.

A Study on the Prediction of Welding Distortion of Vacuum Vessel during Fabrication Process (진공 용기 제작시 공정별 변형 예측에 관한 연구)

  • Lee, Dong-Ju;Kim, Ha-Geun;Shin, Sang-Beom
    • Proceedings of the KWS Conference
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    • 2009.11a
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    • pp.96-96
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    • 2009
  • The purpose of this study is to clarify the transitional behavior and main factor of excessive welding distortion caused by fabrication process of STS 304 vacuum vessel having double curvature for the efficient quality control of vacuum vessel. In order to do it, the predictive equations of the welding distortion in simple weldment of vacuum vessel were established by conventional finite element analysis. And the principal factor controlling the welding distortion was identified by evaluating the welding distortion of vacuum vessel in each fabrication process with FEA and simplified thermo elastic method. Based on the results, the principal factors of distortion of vacuum vessel were clarified as angular distortion and transverse shrinkage which are a source of excessive out-of plane distortion in the double curved vacuum vessel. It was expected that the FE analysis results of this study could contribute to establish the proper control method of welding distortion for double curved vacuum vessel.

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Vacuum Test of Cavity with Liquid Nitrogen

  • Choi, Suk;Park, Gunn-Tae;Kim, Heetae
    • Applied Science and Convergence Technology
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    • v.24 no.5
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    • pp.132-135
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    • 2015
  • Schematic of RAON vacuum system is introduced. Vacuum test for superconducting cavity with liquid nitrogen is performed. Schematic plan for RAON vacuum system is introduced and vacuum control system for superconducting cavity test is constructed. Vacuum pressure of cavity is shown as a function of pumping time. The temperature of cavity is shown as a function of cooling time. Outgassing species from cavity is also detected. Detailed experimental procedure is presented to test the cavity vacuum with liquid nitrogen.

A Study on the Suction Power Control of Vacuum Cleaner with a Dust Sensor (먼지센서에 의한 진공청소기의 흡입력 제어에 관한 연구)

  • 백승면;김성진;이만형
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.304-307
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    • 1995
  • In this paper, an optical sensing system has been developed to detect the dust in vacuum cleaner. The system works well through self-tuning mechanism, even though there are systemic variance and characteristic change which is caused by the pollution on the surface of the optical elements. Using the developed sensing system, a novel suction power control system has been proposed, which is able to be used for a long time.

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A Modeling and Control of Intelligent Cruise Control Systems (지능형 순항 제어 시스템 모델링 및 제어)

  • Lee, Se-Jin;Hong, Jin-Ho;Lee, Gyeong-Su
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.25 no.2
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    • pp.283-288
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    • 2001
  • A throttle/brake control law for the intelligent cruise control(ICC) systems has been proposed in this paper. The ICC system consists of a vehicle detection sensor, the control algorithm and a throttle/brake actuators. For the control of a throttle/brake system, we introduced a solenoid-valve-controlled electronic vacuum booster and a step-motor controlled throttle actuator. Nonlinear computer model for the electronic vacuum booster has been developed and the simulations were per formed using a complete nonlinear vehicle model. The results indicate the proposed throttle/brake control law can provide the ICC system with an optimized performance.