• 제목/요약/키워드: Vacuum Chamber

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곤충 모방 플래핑 날개의 공력 특성 (Aerodynamic Characteristics of an Insect-type Flapping Wings)

  • 한종섭;장조원;최해천;강인모;김선태
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2007년도 제29회 추계학술대회논문집
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    • pp.311-314
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    • 2007
  • 곤충의 날개짓을 모방한 공력특성 연구가 초소형 비행체의 설계 파라미터를 구하기 위하여 수행되었다. 한 쌍의 날개 모델은 초파리(rosophila) 날개짓을 모방하기 위하여 200배 확대하였으며, 두 쌍의 공간 4절 링크를 적용하였다. Weis-Fogh 메커니즘을 검증하기 위해 한 쌍의 날개모델은 후행회전(Delayed Rotation)의 움직임을 가지도록 설계되었다. 또한 양력 및 항력은 날개 끝 속도 기준 레이놀즈수 약 1200, 최대 받음각 $40^{\circ}$에서 측정되었다. 모델의 관성력은 99.98%의 진공 챔버로 측정되고 공기속에서 측정된 데이터에서 제거되었다. 본 연구에서 Weis-Fogh 메커니즘의 고양력 효과는 날개의 업스트로크 과정에서 나타났다.

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MEMS 기술을 이용하여 제작한 적외선 영상 투사용 에미터 단위 소자의 특성 분석 (The analysis on properties of IR emitter unit device fabricated by using MEMS technology for Infrared Scene Projector)

  • 박기원;신영봉;강인구;이희철
    • 전자공학회논문지
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    • 제54권3호
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    • pp.31-36
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    • 2017
  • 본 논문에서는 가상의 적외선 영상을 투사하여 적외선 검출기의 성능 평가를 위한 목적으로 사용되는 적외선 영상 투사장치 (Infrared scene projector, IRSP)의 내부에서 적외선을 방사하는 역할을 하는 적외선 에미터 소자에 대한 연구가 수행되었다. 적외선 에미터 소자의 구조를 설계한 후 설계된 소자의 특성 파라미터들을 추출하였으며 각 특성 파라미터에 근거한 소자의 성능을 유한 요소법을 통해 예측하였다. 또한 소자를 구성하는 각 부분의 특성에 따른 물질 선정 후 MEMS 기반 반도체 공정기술을 적용하여 에미터 단위소자를 제작하였고 중적외선 대역($3{\sim}5{\mu}m$)의 적외선을 관찰할 수 있는 적외선 영상 현미경을 사용하여 진공 환경을 갖춘 챔버 내부에서 소자의 성능을 측정한 결과 최대 423K의 유효온도 및 22msec의 응답 시간을 나타내는 것을 확인하였다.

유기 발광 소자 디스플레이를 위한 적외선 램프 소스를 활용한 열 전사 픽셀 패터닝 (Thermal Transfer Pixel Patterning by Using an Infrared Lamp Source for Organic LED Display)

  • 배형우;장영찬;안명찬;박경태;이동구
    • 센서학회지
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    • 제29권1호
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    • pp.27-32
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    • 2020
  • This study proposes a pixel-patterning method for organic light-emitting diodes (OLEDs) based on thermal transfer. An infrared lamp was introduced as a heat source, and glass type donor element, which absorbs infrared and generates heat and then transfers the organic layer to the substrate, was designed to selectively sublimate the organic material. A 200 nm-thick layer of molybdenum (Mo) was used as the lightto-heat conversion (LTHC) layer, and a 300 nm-thick layer of patterned silicon dioxide (SiO2), featuring a low heat-transfer coefficient, was formed on top of the LTHC layer to selectively block heat transfer. To prevent the thermal oxidation and diffusion of the LTHC material, a 100 nm-thick layer of silicon nitride (SiNx) was coated on the material. The fabricated donor glass exhibited appropriate temperature-increment property until 249 ℃, which is enough to evaporate the organic materials. The alpha-step thickness profiler and X-ray reflection (XRR) analysis revealed that the thickness of the transferred film decreased with increase in film density. In the patterning test, we achieved a 100 ㎛-long line and dot pattern with a high transfer accuracy and a mean deviation of ± 4.49 ㎛. By using the thermal-transfer process, we also fabricated a red phosphorescent device to confirm that the emissive layer was transferred well without the separation of the host and the dopant owing to a difference in their evaporation temperatures. Consequently, its efficiency suffered a minor decline owing to the oxidation of the material caused by the poor vacuum pressure of the process chamber; however, it exhibited an identical color property.

Negative ion beam sputter 법으로 증착한 DLC 박막의 특성 (I) (Properties of Diamond-like Carbon(DLC) Thin Films deposited by Negative Ion Beam Sputter (I))

  • 김대연;강계원;최병호
    • 한국재료학회지
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    • 제10권7호
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    • pp.459-463
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    • 2000
  • 순수한 동적 결합반응이고 전하 누적이 없는 이온 임플란테이션, 새로운 재료 개발 등에 음이온을 직접 사용하는 새로운 연구가 진행되고 있으며, 이러한 관점에서 새로운 고체상의 Cs이온 법이 실험실 규모로 연구되고 있다. 본 논문에서는 음이온 Cs gun으로 DLC 박막을 실리콘 위에 제조하였다. 이 시스템은 가스가 필요없으므로, 고 진공에서 증착이 일어난다. C(sup)-빔 에너지는 80~150eV 사이에서 조절이 우수하였다. Raman 분석결과 박막의 DLC 지수, 즉$sp^3$비율은 이온 에너지 증가에 따라 증가하였으며, 미소 경도값 또한 7에서 14GPa로 증가하였다. DLC박막의 표면 평균거칠기(Ra)는 ~1$\AA$정도로 아주 매끈하였으며, 불순물이 내재되지 않는 박막을 얻을 수 있었다.

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진공조의 잔류산소가 입방정질화붕소 박막 합성에 미치는 영향 (Effect of Residual Oxygen in a Vacuum Chamber on the Deposition of Cubic Boron Nitride Thin Film)

  • 오승근;김영만
    • 한국표면공학회지
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    • 제46권4호
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    • pp.139-144
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    • 2013
  • c-BN(cubic boron nitride) is known to have extremely high hardness next to diamond, as well as very high thermal and chemical stability. The c-BN in the form of film is useful for wear resistant coatings where the application of diamond film is restricted. However, there is less practical application because of difficult control of processing variables for synthesis of c-BN film as well as unclear mechanism on formation of c-BN. Therefore, in the present study, the structural characterization of c-BN thin film were investigated using $B_4C$ target in r.f. magnetron sputtering system as a function of processing variables. c-BN films were coated on Si(100) substrate using $B_4C$ (99.5% purity). The mixture of nitrogen and argon was used for carrier gas. The deposition processing conditions were changed with substrate bias voltage, substrate temperature and base pressure. Fourier transform infrared microscopy (FT-IR) and X-ray photoelectron spectroscopy (XPS) were used to analyze crystal structures and chemical binding energy of the films. In the case of the BN film deposited at room temperature, c-BN was formed in the substrate bias voltage range of -400 V~ -600 V. Less c-BN fraction was observed as deposition temperature increased and more c-BN fraction was observed as base pressure increased.

우주 자원 탐사를 위한 레이저 유도 플라즈마 분광분석법의 우주 환경에서의 특성 분석 (Characteristics of Laser-Induced Breakdown Spectroscopy (LIBS) at Space Environment for Space Resources Exploration)

  • 최수진;여재익
    • 한국항공우주학회지
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    • 제40권4호
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    • pp.346-353
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    • 2012
  • 레이저 조사 시 발생되는 플라즈마를 성분 분석에 이용하는 Laser-Induced Breakdown Spectroscopy(LIBS)는 우주 자원 탐사에 적합한 실시간 성분 분석 기술이다. LIBS 플라즈마의 특성은 주위 압력의 영향을 크게 받는다. 본 연구에서는 다양한 물성치를 갖는 일곱 가지 원소(C, Ti, Ni, Cu, Sn, Al, Zn)의 지속시간(lifetime)이 760 - $10^{-5}$ torr의 압력 범위에서 분석되었다. 압력이 낮아짐에 따라 탄소와 티타늄의 lifetime은 감소하였고, 그 밖의 원소들은 1 torr의 압력에서 가장 오랜 시간동안 검출되었다. 원소별 lifetime 결과를 통하여 낮은 압력 하에서 플라즈마의 특성과 원소별 끓는점 및 전기음성도의 관계를 규명하였다.

환상형상 전극구조를 갖는 저압 RF plasma를 이용한 CF4 제거 (Abatement of CF4 Using RF Plasma with Annular Shape Electrodes Operating at Low Pressure)

  • 이재옥;허민;김관태;이대훈;송영훈;이상윤;노명근
    • 한국대기환경학회지
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    • 제26권6호
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    • pp.690-696
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    • 2010
  • Abatement of perfluorocompounds (PFCs) used in semiconductor and display industries has received an attention due to the increasingly stricter regulation on their emission. In order to meet this circumstance, we have developed a radio frequency (RF) driven plasma reactor with multiple annular shaped electrodes, characterized by an easy installment between a processing chamber and a vacuum pump. Abatement experiment has been performed with respect to $CF_4$, a representative PFCs widely used in the plasma etching process, by varying the power, $CF_4$ and $O_2$ flow rates, $CF_4$ concentration, and pressure. The influence of these variables on the $CF_4$ abatement was analyzed and discussed in terms of the destruction & removal efficiency (DRE), measured with a Fourier transform infrared (FTIR) spectrometer. The results revealed that DRE was enhanced with the increase in the discharge power and pressure, but dropped with the $CF_4$ flow rate and concentration. The addition of small quantity of $O_2$ lead to the improvement of DRE, which, however, leveled off and then decreased with $O_2$ flow rate.

잔디밭과 나지에 산포된 주요 잔디밭용 제초제의 휘산 (Volatility of Herbicides Sprayed in Zoysia japonica Turf and Bare Soil)

  • 김석정;박진희;죽내안지;김길웅;신동현;허영조
    • 아시안잔디학회지
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    • 제10권3호
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    • pp.263-270
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    • 1996
  • This experiment was conducted to investigate the loss of various herbicides by means of vola-tility from the turfgrass field and the hare ground with the different soil moisture contents and temperatures. Different herbicides were applied at the rates of 375 g a.i. /l0a of pendimethalin,250 g a.i. /l0a of napropamide, and 96.4 g a.i. /l0a of dicamba with 200 \ulcorner/10a of spray volume in the turfgrass(Zoysia japonica cut off 5cm) grown in pots(265.8 $cm^2$) and bared soil. The pots were placed in the growth chamber with 10,000 lux of light intensity(12h per day) at 25 and 35˚C for 7days. Amberlite XAD polymeric resin(20/50 mesh) was used as sampling media for herbicide airborne residues. Air flow was maintained at 10 \ulcorner /min by vacuum pump regulated with a factory calibrated flow meter. Herbicide airborne residues were extracted from the XAD resin with 300 ml of 1:1 acetone and hexane. The extracts were concentrated by rotary evaporation at 35˚C and dissolved in 1 ml MeCN for HPLC analysis. The airborne losses of the herbicide applied in the turfgrass and bare soil increased as the temperature and soil moisture contents were increased, regardless of the kinds of herbicide. Higher airborne residues was observed in the turfgrass pots than the bare soil pots. Pendimethalin and dicamba with higher vapor pressure gave rise to the increased loss of airborne herbicides, showing that 6.26 and 6.4% of average airborne loss in pendimethalin and dicamba, respectively, compared to 0.56% in napropamide. The amount of airborne losses in turfgrass was highest at one day after application and then a declined trend was observed as the time was prolonged. Key words. Herbicides, Turfgrass field, Bare ground, Volatility.

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모델 시스템에서 동결속도에 따른 얼음 결정체의 크기 및 동결건조속도의 변화 (Influence of Freezing Process on the Change of Ice Crystal Size and Freeze-Drying Rate in a Model System)

  • 변명희;최미정;이성;민상기
    • 한국축산식품학회지
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    • 제18권2호
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    • pp.164-175
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    • 1998
  • The objective of this study was to investigate the effects of freezing rate on ice crystal size and freeze-drying rate. Our experiments were carried out with self-manufactured freeze-dryer. Gelatin gels (2% w / w, 80$\times$20mm) were frozen unidirectionally (Neumann's model) from the bottom at -45, -30, -20, and -15$^{\circ}C$ and followed with freeze-drying. Under the upper conditions we measured freezing rate and the change of temperature and pressure during freeze drying. Freeze-dried gelatins were cut horizontally into 5 mm thickness from the bottom and measured their pore sizes. Also freeze-drying rate(primary drying) is estimated by measuring the temperature of sample and pressure of vacuum chamber. During freeze-drying, profiles of pressure and temperature were shown constant tendency regardless of freezing temperature and we could expect the end-point of freeze drying by considering pressure and temperature together. In temperature profiles, the point which temperature increased significantly was observed during freeze-drying. There is no relationship between freeze temperature and drying rate of primary drying in our model system. As freezing temperature increased, ice crystal size(X*) which correspond to 63.2% of cumulative frequency was increased and at the same freezing temperature ice crystal size(X*) was decreased with distance from the bottom of the sample. Freezing conditions have a strong influence on the quality of the final freeze-dried products in freeze-drying system.

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한국형 인공월면토 생산 시스템 효율성 및 Fe(0) 모사를 위한 수소 환원반응에 관한 실험적 평가 (Experimental Assessment of Manufacturing System Efficiency and Hydrogen Reduction Reaction for Fe(0) Simulation for KLS-1)

  • 진현우;김영재;류병현;이장근
    • 한국지반공학회논문집
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    • 제36권8호
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    • pp.17-25
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    • 2020
  • 최근 한국건설기술연구원은 우주개발 및 심우주 탐사를 위한 전진기지로서 활용도가 높은 달에 관한 연구수행을 목적으로 달 행성 지상 환경 모사를 위한 대규모 지반 열 진공 챔버(DTVC)를 건설하였다. 유관연구 수행을 위해 대량의 한국형 인공월면토(KLS-1)가 요구되고 있음에도 불구하고 현실적으로 대량생산은 어려운 실정이다. 본 논문에서는 KLS-1의 대량 생산이 가능한 반자동화 시스템에 관해 상세하게 설명하고 있으며, 이것이 기존 생산 시스템보다 7배 이상 효율적임을 밝혀냈다. 뿐만 아니라, 월면토와의 유사성 증대를 위해 월면토 고유 특성인 nanophase Fe(0) (이하 np-Fe(0))을 모사하기 위한 실험적 연구를 진행하였다. 월면토를 이루는 광물 중 하나인 티탄철석(ilmenite)을 활용해 수소기체 환원반응을 진행한 결과, 700℃ 이상의 온도에서는 np-Fe(0)이 형성됨을 밝혀냈으며 900℃까지는 온도와 비례하여 np-Fe(0)이 증가함을 밝혀냈다.