Browse > Article
http://dx.doi.org/10.5573/ieie.2017.54.3.31

The analysis on properties of IR emitter unit device fabricated by using MEMS technology for Infrared Scene Projector  

Park, Ki Won (The school electrical engineering, Korea Advanced Institute of Science and Technology)
Shin, Young Bong (The school electrical engineering, Korea Advanced Institute of Science and Technology)
Kang, In-Ku (The school electrical engineering, Korea Advanced Institute of Science and Technology)
Lee, Hee Chul (The school electrical engineering, Korea Advanced Institute of Science and Technology)
Publication Information
Journal of the Institute of Electronics and Information Engineers / v.54, no.3, 2017 , pp. 31-36 More about this Journal
Abstract
In this paper, designed infrared (IR) emitter device for infrared scene projector (IRSP) which is used for evaluating the performance of IR sensor systems was simulated by using finite element analysis (FEA) tool and fabricated by using MEMS (Micro Electro-Mechanical System) technology. The performance of the fabricated IR emitter unit device was characterized in the vacuum chamber by using IR image microscope for MWIR($3{\sim}5{\mu}m$), which showed 423K apparent temperature (Tapp) and 22msec time constant (${\tau}$).
Keywords
IRSP; IR emitter; MEMS; apparent temperature; radiance rise time;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Ronald G. Driggers et al, "Review of infrared scene projector technology-1993", Opt. Eng. 33(7), pp. 2408-2417 Jul 1994.   DOI
2 0. Williams et al, "Performance characteristics of thin film resistor arrays for infrared projector applications", in Characterization, Propagation, and Simulation of Sources and Backgrounds II, Proc. SPIE 1687, pp. 71-81, 1992.
3 P. Bryant, S. Solomon and J. James, "Bolometers Running Backward : The Synergy Between Uncooled IR Sensor & Dynamic IR Scene Projectors," Infrared Imaging Systems: Design, Analysis, Modeling, and Testing XVII, Proc. SPIE, Vol. 6207, pp. 62007J1-12, 2006.
4 B. E. Cole et al, "Monolithic 512x512 CMOSMicrobridge arrays for infrared scene projection" The 8th international Conference on Solid State Sensors and Actuators, Stockholm, Sweden, 1995.
5 S. Solomon and P. Bryant, "Adventures in High Temperature Resistive Emitter Physics", Proc. SPIE Vol. 5092, pp. 52-60, 2003.
6 S. Solomon, "Continuing Adventures in High Temperature Resistive Emitter Physics & Materials", SPIE Proc. Vol.5408, pp. 127-135, 2004.