• Title/Summary/Keyword: Vacuum Baking

Search Result 41, Processing Time 0.029 seconds

Improvement of Device Characteristic on Solution-Processed Al-Zn-Sn-O Junctionless Thin-Film-Transistor Using Microwave Annealing

  • Mun, Seong-Wan;Im, Cheol-Min;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2014.02a
    • /
    • pp.347.2-347.2
    • /
    • 2014
  • 최근, 비정질 산화물 반도체 thin film transistor (TFT)는 수소화된 비정질 실리콘 TFT와 비교하여 높은 이동도와 큰 on/off 전류비, 낮은 구동 전압을 가짐으로써 빠른 속도가 요구되는 차세대 투명 디스플레이의 TFT로 많은 연구가 진행되고 있다. 한편, 기존의 Thin-Film-Transistor 제작 시 우수한 박막을 얻기 위해서는 $500^{\circ}C$ 이상의 높은 열처리 온도가 필수적이며 이는 유리 기판과 플라스틱 기판에 적용하는 것이 적합하지 않고 높은 온도에서 수 시간 동안 열처리를 수행해야 하므로 공정 시간 및 비용이 증가하게 된다는 단점이 있다. 이러한 점을 극복하기 위해 본 연구에서는 간단하고, 낮은 제조비용과 대면적의 박막 증착이 가능한 용액공정을 통하여 박막 트랜지스터를 제작하였으며 thermal 열처리와 microwave 열처리 방식에 따른 전기적 특성을 비교 및 분석하고 각 열처리 방식의 열처리 온도 및 조건을 최적화하였다. P-type bulk silicon 위에 산화막이 100 nm 형성된 기판에 spin coater을 이용하여 Al-Zn-Sn-O 박막을 형성하였다. 그리고, baking 과정으로 $180^{\circ}C$의 온도에서 10분 동안의 열처리를 실시하였다. 연속해서 Photolithography 공정과 BOE (30:1) 습식 식각 과정을 이용해 활성화 영역을 형성하여 소자를 제작하였다. 제작 된 소자는 Junctionless TFT 구조이며, 프로브 탐침을 증착 된 채널층 표면에 직접 접촉시켜 소스와 드레인 역할을 대체하여 동작시킬 수 있어 전기적 특성을 간단하고 간략화 된 공정과정으로 분석할 수 있는 장점이 있다. 열처리 조건으로는 thermal 열처리의 경우, furnace를 이용하여 $500^{\circ}C$에서 30분 동안 N2 가스 분위기에서 열처리를 실시하였고, microwave 열처리는 microwave 장비를 이용하여 각각 400 W, 600 W, 800 W, 1000 W로 15분 동안 실시하였다. 그 결과, furnace를 이용하여 열처리한 소자와 비교하여 microwave를 통해 열처리한 소자에서 subthreshold swing (SS), threshold voltage (Vth), mobility 등이 비슷한 특성을 내는 것을 확인하였다. 따라서, microwave 열처리 공정은 향후 저온 공정을 요구하는 MOSFET 제작 시의 훌륭한 대안으로 사용 될 것으로 기대된다.

  • PDF

Resistive Switching Effect of the $In_2O_3$ Nanoparticles on Monolayered Graphene for Flexible Hybrid Memory Device

  • Lee, Dong Uk;Kim, Dongwook;Oh, Gyujin;Kim, Eun Kyu
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2013.02a
    • /
    • pp.396-396
    • /
    • 2013
  • The resistive random access memory (ReRAM) has several advantages to apply next generation non-volatile memory device, because of fast switching time, long retentions, and large memory windows. The high mobility of monolayered graphene showed several possibilities for scale down and electrical property enhancement of memory device. In this study, the monolayered graphene grown by chemical vapor deposition was transferred to $SiO_2$ (100 nm)/Si substrate and glass by using PMMA coating method. For formation of metal-oxide nanoparticles, we used a chemical reaction between metal films and polyamic acid layer. The 50-nm thick BPDA-PDA polyamic acid layer was coated on the graphene layer. Through soft baking at $125^{\circ}C$ or 30 min, solvent in polyimide layer was removed. Then, 5-nm-thick indium layer was deposited by using thermal evaporator at room temperature. And then, the second polyimide layer was coated on the indium thin film. After remove solvent and open bottom graphene layer, the samples were annealed at $400^{\circ}C$ or 1 hr by using furnace in $N_2$ ambient. The average diameter and density of nanoparticle were depending on annealing temperature and times. During annealing process, the metal and oxygen ions combined to create $In_2O_3$ nanoparticle in the polyimide layer. The electrical properties of $In_2O_3$ nanoparticle ReRAM such as current-voltage curve, operation speed and retention discussed for applictions of transparent and flexible hybrid ReRAM device.

  • PDF

Processing and Characteristics of Canned Roasted Oyster Crassostrea gigas Added with Tomato Sauce and Tomato Paste Sauce (토마토소스 및 토마토페이스트소스 첨가 구운굴(Crassostrea gigas)통조림의 제조 및 품질특성)

  • Park, Jun-Seok;Park, Du-Hyun;Kong, Cheong-Sik;Lee, Yeong-Man;Lee, Jae-Dong;Park, Jin-Hyo;Kim, Jeong-Gyun
    • Korean Journal of Fisheries and Aquatic Sciences
    • /
    • v.51 no.6
    • /
    • pp.647-655
    • /
    • 2018
  • This study collected basic data on two types of canned roasted oyster Crassostrea gigas. Oysters Crassostrea gigas were immersed at $105^{\circ}C$ for 6 min and then washed and dehydrated before pre-drying. Roasted oysters were prepared by baking boiled oysters at $140^{\circ}C$ for 20 min. The canned roasted oyster added with tomato sauce was prepared as follows. An aluminum can was filled with 50 g of roasted oyster and 40 g of mixed seasoning sauce, degassed at $90^{\circ}C$ for 3 min and vacuum-sealed using a double seamer under a 20 cmHg vacuum. The canned roasted oyster added with tomato paste sauce was prepared similarly by adding the same amount of tomato paste sauce instead of tomato sauce. Microbial growth, appearance, proximate composition, pH, volatile basic nitrogen (VBN), thiobarbituric acid (TBA) value, amino-N, salinity, color value, texture, free and total amino acids, and minerals were measured in the two products. A sensory evaluation indicated that the canned roasted oyster added with tomato paste sauce had preferable characteristics over the canned roasted oyster sauce added with tomato sauce.

Enhanced Field Electron Emission from Dielectric Coated Highly Emissive Carbon Fibers

  • Almarsi, Ayman M.;Hagmann, Mark J.;Mousa, Marwan S.
    • Applied Microscopy
    • /
    • v.47 no.1
    • /
    • pp.55-62
    • /
    • 2017
  • This paper describes experiments aimed at characterizing the behavior of field electron emitters fabricated by coating carbon fibers with epoxylite resin. Polyacrylonitrile carbon fibers of type VPR-19, thermally treated at $2,800^{\circ}C$, were used. Each was initially prepared in a "uncoated" state, by standard electro polishing and cleaning techniques, and was then examined in a scanning electron microscope. The fiber was then baked overnight in a field electron microscope (FEM) vacuum chamber. Current-voltage characteristics and FEM images were recorded on the following day or later. The fiber was then removed from the FEM, coated with resin, "cured" by baking, and replaced in the FEM. After another overnight bake, the FEM characterization measurements were repeated. The coated fibers had significantly better performance than uncoated fibers. This confirms the results of earlier experiments, and is thought to be due in part to the formation of a conducting channel in the resin over layer. For the coated fiber, lower voltages were needed to obtain the same emission current. The coated fibers have current-voltage characteristics that show smoother trends, with greater stability and repeatability. No switch-on phenomena were observed. In addition, the emission images on the phosphor-coated FEM screen were more concentrated, and hence brighter.

Deep Space Maneuver by Microwave Discharge Ion Engines onboard "HAYABUSA" Asteroid Explorer

  • Kuninaka, Hitoshi;Nishiyama, Kazutaka;Shimizu, Yukio;Toki, Kyoichiro
    • Proceedings of the Korean Society of Propulsion Engineers Conference
    • /
    • 2004.03a
    • /
    • pp.306-313
    • /
    • 2004
  • The microwave discharge ion engine generates plasmas of both the main ion source and the neutralizer using 4㎓ microwave without discharge electrodes and hollow cathodes, so that long life and durability against oxygen and air are expected. The MUSES-C “HAYABUSA” asteroid explorer installing four microwave discharge ion engines “$\mu$10s” was launched into deep space by M-V rocket No.5 on May 9, 2003. After vacuum exposure and several runs of baking for reduction of residual gas the ion engine system established the continuous acceleration of the spacecraft toward the asteroid “ITOKAWA”. The Doppler shift measurement of the communication microwave revealed the performance of ion engines, which is 8mN thrust force for a single unit with 3,200sec specific impulse at 23mN/㎾ thrust power ratio. At the end of 2003 the accumulated operational time exceeded 8,000 hour and unit. HAYABUSA will execute the Earth swing-by on June 2004 and arrive at the asteroid in 2005 and return to Earth in 2007.

  • PDF

Processing and Characteristics of Canned Seasoned Boiled Oyster Crassostrea gigas and Canned Seasoned Roasted Oyster Crassostrea gigas (조미 자숙굴(Crassostrea gigas) 통조림 및 조미 구운굴(Crassostrea gigas) 통조림의 제조 및 품질특성)

  • Park, Jun-Seok;Park, Du-Hyun;Kong, Cheong-Sik;Lee, Yeong-Man;Lee, Jae-Dong;Park, Jin-Hyo;Kim, Jeong-Gyun
    • Korean Journal of Fisheries and Aquatic Sciences
    • /
    • v.51 no.5
    • /
    • pp.469-476
    • /
    • 2018
  • The purpose of this study was to collect basic data that could be used in the manufacture of two kinds of canned oyster Crassostrea gigas. The steamed oyster was prepared by shucking after boiling for 6 min at $105^{\circ}C$ and then washing and dewatering. The roasted oyster was prepared by baking steamed oyster at $140^{\circ}C$ for 20 min. The manufacturing methods of canned seasoned boiled oyster and canned seasoned roasted oyster were as follows. The boiled or roasted oyster (50 g) was added to a can (RR-90) along with a mixture of seasoning sauce 40 and then seamed using a vacuum seamer under 20 cm Hg after pre-exhausting at $90^{\circ}C$ for 20 min. The two kinds of canned oyster products produced under sterilization of Fo 12 min were tested for cultured bacteria, external appearance, proximate composition, pH, VBN (Volatile basic nitrogen), TBA (Thiobarbiuric aicd) value, amino-N, salinity, color value sensory evaluation, etc. Results showed that the canned seasoned roasted oyster had higher overall acceptability than the canned seasoned boiled oyster. The reason for this was judged to be that the process of roasting at $140^{\circ}C$ for 20 min influenced the sensory evaluation.

Characteristics of Hardness and Elastic Modulus of PMMA Film using Nano-Tribology (Nanotribology를 이용한 PMMA 박막의 Hardness와 Elastic Modulus 특성 연구)

  • Kim, Soo-In;Kim, Hyun-Woo;Noh, Seong-Cheol;Yoon, Duk-Jin;Chang, Hong-Jun;Lee, Jong-Rim;Lee, Chang-Woo
    • Journal of the Korean Vacuum Society
    • /
    • v.18 no.5
    • /
    • pp.372-376
    • /
    • 2009
  • In the modern semiconductor industry, lithography process is used to construct specific patterns. However, due to the decreasing of line width, these days, more and more researchers are interested in PMMA(Poly Methyl Methacrylate) lithography by using e-beam instead of the prior method, PR(Photoresist) lithography by using UV(Ultra-Violet). Additionally, the patterns constructed by lithography are collapsed during the process of cleansing remnants and the resistance against the breakdown of the patterns is known to be proportional to the elastic modulus of pattern-constructing materials. In this research, we measured the change of hardness and elastic modulus of PMMA film surface according to the change of time spent to soft-bake the PMMA film. During the measurement, we controlled the tip pressure from $25{\mu}N$ to $8,500{\mu}N$ having intervals that are $134.52{\mu}N$. For these measurements, we used the Triboindenter from Hysitron to gauge the hardness and elastic modulus and the tip we used was Berkovich diamond Tip.

Effect of commercial wheat flour addition on retrogradation-retardation of rice cake (garaetteok) (시판 밀가루를 첨가한 가래떡의 노화 지연효과)

  • Kwon, Soon-Sung;Oh, Seon-Min;Kim, Hui-yun;Bae, Ji-Eun;Ye, Sang-Jin;Kim, Byung-Yong;Hur, Nam-Yoon;Choi, Sung-Won;Kim, Chang-Nam;Baik, Moo-Yeol
    • Korean Journal of Food Science and Technology
    • /
    • v.51 no.1
    • /
    • pp.48-51
    • /
    • 2019
  • The purpose of this study was to investigate the retardation effect of commercial wheat flours on starch retrogradation using a model system, the rice cake (garaetteok). Rice cakes were prepared with four different commercial wheat flours in various concentrations (0.1-0.7%). The rice cakes were vacuum-packed and stored for 4 days at room temperature. The rice cakes containing > 0.3% wheat flour were not able to maintain their original appearance due to enzymatic decomposition, whereas the rice cakes containing 0.1% wheat flour did not reveal any retrogradation-retardation effect. Garaetteok containing 0.2% wheat flour maintained its shape well and showed considerably lower hardness than that of the control, thereby demonstrating a retrogradation-retardation effect. The commercial wheat flours clearly showed the retardation effect on starch retrogradation, and thus, it is important to use a proper amount. On the other hand, the retrogradation-retardation effect of the different wheat flours was not significantly altered possibly due to the same origin of wheat grain.

Recent Progress in Air-Conditioning and Refrigeration Research : A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2015 (설비공학회 분야의 최근 연구 동향 : 2015년 학회지 논문에 대한 종합적 고찰)

  • Lee, Dae-Young;Kim, Sa Ryang;Kim, Hyun-Jung;Kim, Dong-Seon;Park, Jun-Seok;Ihm, Pyeong Chan
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
    • /
    • v.28 no.6
    • /
    • pp.256-268
    • /
    • 2016
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2015. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) The research works on the thermal and fluid engineering were carried out in the areas of flow, heat and mass transfer, cooling and heating, and air-conditioning, the renewable energy system and the flow inside building rooms. Research issues dealing with air-conditioning machines and fire and exhausting smoke were reduced. CFD seems to be spreading to more research areas. (2) Research works on heat transfer area were carried out in the categories of heat transfer characteristics, pool boiling and condensing heat transfer and industrial heat exchangers. Researches on heat transfer characteristics included the economic analysis of GHG emission, micro channel heat exchanger, effect of rib angle on thermal performance, the airside performance of fin-and-tube heat exchangers, theoretical analysis of a rotary heat exchanger, heat exchanger in a cryogenic environment, the performance of a cross-flow-type, indirect evaporative cooler made of paper/plastic film. In the area of pool boiling and condensing, the bubble jet loop heat pipe was studied. In the area of industrial heat exchangers, researches were performed on fin-tube heat exchanger, KSTAR PFC and vacuum vessel at baking phase, the performance of small-sized dehumidification rotor, design of gas-injection port of an asymmetric scroll compressor, effect of slot discharge-angle change on exhaust efficiency of range hood system with air curtain. (3) In the field of refrigeration, various studies were carried in the categories of refrigeration cycle, alternative refrigeration/energy system, system control. In the refrigeration cycle category, a cold-climate heat pump system, $CO_2$ cascade systems, ejector cycles and a PCM-based continuous heating system were investigated. In the alternative refrigeration/energy system category, a polymer adsorption heat pump, an alcohol absorption heat pump and a desiccant-based hybrid refrigeration system were investigated. In the system control category, turbo-refrigerator capacity controls and an absorption chiller fault diagnostics were investigated. (4) In building mechanical system research fields, eighteen studies were reported for achieving effective design of the mechanical systems, and also for maximizing the energy efficiency of buildings. The topics of the studies included energy performance, HVAC system, ventilation, and renewable energies, piping in the buildings. Proposed designs, performance tests using numerical methods and experiments provide useful information and key data which can improve the energy efficiency of the buildings. (5) The field of architectural environment was mostly focused on indoor environment and building energy. The main researches of indoor environment were related to the user and location awareness technology applied dimming lighting control system, the lighting performance evaluation for light-shelves, the improvement evaluation of air quality through analysis of ventilation efficiency and the evaluation of airtightness of sliding and LS window systems. The subjects of building energy were worked on the energy saving estimation of existing buildings, the developing model to predict heating energy usage in domestic city area and the performance evaluation of cooling applied with economizer control. The studies were also performed related to the experimental measurement of weight variation and thermal conductivity in polyurethane foam, the development of flame spread prevention system for sandwich panels, the utilization of heat from waste-incineration facility in large-scale horticultural facilities.

Background effect on the measurement of trace amount of uranium by thermal ionization mass spectrometry (열이온화 질량분석에 의한 극미량 우라늄 정량에 미치는 바탕값 영향)

  • Jeon, Young-Shin;Park, Yong-Joon;Joe, Kih-Soo;Han, Sun-Ho;Song, Kyu-Seok
    • Analytical Science and Technology
    • /
    • v.21 no.6
    • /
    • pp.487-494
    • /
    • 2008
  • An experiment was performed for zone refined Re-filament and normal (nonzone refined) Re-filament to reduce the background effect on the measurement of low level uranium samples. From both filaments, the signals which seemed to come from a cluster of light alkali elements, $(^{39}K_6)^+$, $(^{39}K_5+^{41}K)^+$ and $PbO_2$ were identified as the isobaric effect of the uranium isotopes. The isobaric effect signal was completely disappeared by heating the filament about $2000^{\circ}C$ at < $10^{-7}$ torr of vacuum for more than 1.5 hour in zone refined Refilaments, while that from the normal Re-filaments was not disappeared completely and was still remained as 3 pg. of uranium as the impurities after the degassing treatment was performed for more than 5 hours at the same condition of zone refined filaments. A threshold condition eliminating impurities were proved to be at 5 A and 30 minutes of degassing time. The uranium content as an impurity in rhenium filament was checked with a filament degassing treatment using the U-233 spike by isotope dilution mass spectrometry. A 0.31 ng of U was detected in rhenium filament without degassing, while only 3 pg of U was detected with baking treatment at a current of 5.5 A for 1 hr. Using normal Re-filaments for the ultra trace of uranium sample analysis had something problem because uranium remains to be 3 pg on the filament even though degassed for long hours. If the 1 ng uranium were measured, 0.3% error occurred basically. It was also conformed that ionization filament current was recommended not to be increased over 5.5 A to reduce the background. Finally, the contents of uranium isotopes in uranium standard materials (KRISS standard material and NIST standard materials, U-005 and U-030) were measured and compared with certified values. The differences between them showed 0.04% for U-235, 2% for U-234 and 2% for U-236, respectively.