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기체의 유량 및 온도 변화에 따른 진공 펌프의 성능 특성 연구

  • Heo, Jung-Sik;Im, Jong-Yeon;In, Sang-Ryeol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.16-16
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    • 2010
  • 반도체 및 LCD 공정이 진행되는 진공 챔버는 유량계, 진공 펌프 및 밸브 등을 이용하여 적절한 공정용 기체와 압력을 제어하게 된다. 공정에 따라 매우 높은 온도를 유지해야 하는 경우도 있다. 챔버 내부의 압력은 유입되는 기체의 시간에 따른 유량 변화에 의하여 주기적으로 변화하게 된다. 이러한 유량 변화는 장기적으로는 결국 펌프의 신뢰성(내구수명)에 영향을 주게 되며, 특히 고유량 및 저유량을 반복하게 되는 공정에 있어서는 더욱 큰 영향을 미치게 된다. 또한 챔버 내부는 다양한 화학적 반응이 일어나며 이러한 공정 기체들의 높은 온도는 결국 챔버에 연결된 펌프의 성능 및 신뢰성에도 영향을 주게 된다. 대부분의 반도체 및 LCD 공정이 이루어지는 압력에서는 전도 및 대류의 열전달 형태보다는 열복사에 의한 영향을 받게 되어 챔버를 적절히 설계한다면 펌프에 직접적으로 전달되는 복사량은 상대적으로 낮고, 펌프에 미치는 영향도 크지 않게 된다. 그러나 압력의 변화에 따라 전도 및 대류의 영향이 커지게 되는 경우에는 펌프 자체 및 성능에 큰 영향을 주게 될 것이다. 터보형 펌프의 국내(KS) 및 국제규격(ISO)의 성능시험방법에는 이러한 온도에 따른 펌프의 성능 특성 변화를 다루고 있지 않으며, 크라이오 펌프인 경우 열복사의 영향에 대한 시험방법이 일부 공개되어 있다[J. Vac. Sci. Technol. A 17(5)]. 본 연구에서는 기체의 유량 및 온도 변화에 따른 진공 펌프의 성능 특성 변화를 고찰하고자 하며, 향후 이러한 시험방법에 대한 표준 절차를 확립하고자 한다.

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Preparation of Poly(vinyl acetate)/Silver Hollow Microspheres via Suspension Polymerization (현탁중합에 의한 폴리(비닐 아세테이트)/은 중공 미세입자의 제조)

  • Yeum, Jeong-Hyun
    • Polymer(Korea)
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    • v.35 no.5
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    • pp.390-394
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    • 2011
  • Effects of silver nanoparticles on the polymerization rate and morphology of poly(vinyl acetate) (PVAc)/silver microspheres prepared by suspension polymerization of VAc were investigated. Scanning electron microscopy, transmission electron microscopy, X-ray diffraction and atomic absorption spectrometry were used to characterize the morphology and properties of the PVAc/silver microspheres. Due to the change of hydrophilicity of silver nanoparticles, appearance of the microspheres having golf ball-like convave surfaces was observed. Under controlled concentration of surfactant, PVAc/silver microspheres with various hollow structures were synthesized. In the case of silver nanoparticles modified by surfactant, the polymerization rate increased slightly. PVAc/silver microspheres with a conversion up to 80% were prepared via suspension polymerization.

기체의 유량 및 온도 변화에 따른 진공 펌프의 성능 특성 연구

  • Heo, Jung-Sik;Im, Jong-Yeon;In, Sang-Ryeol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.328-328
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    • 2010
  • 반도체 및 LCD 공정이 진행되는 진공 챔버는 유량계, 진공 펌프 및 밸브 등을 이용하여 적절한 공정용 기체와 압력을 제어하게 된다. 공정에 따라 매우 높은 온도를 유지해야 하는 경우도 있다. 챔버 내부의 압력은 유입되는 기체의 시간에 따른 유량 변화에 의하여 주기적으로 변화하게 된다. 이러한 유량 변화는 장기적으로는 결국 펌프의 신뢰성(내구수명)에 영향을 주게 되며, 특히 고유량 및 저유량을 반복하게 되는 공정에 있어서는 더욱 큰 영향을 미치게 된다. 또한 챔버 내부는 다양한 화학적 반응이 일어나며 이러한 공정 기체들의 높은 온도는 결국 챔버에 연결된 펌프의 성능 및 신뢰성에도 영향을 주게 된다. 대부분의 반도체 및 LCD 공정이 이루어지는 압력에서는 전도 및 대류의 열전달 형태 보다는 열복사에 의한 영향을 받게 되어 챔버를 적절히 설계한다면 펌프에 직접적으로 전달되는 복사량은 상대적으로 낮고, 펌프에 미치는 영향도 크지 않게 된다. 그러나 압력의 변화에 따라 전도 및 대류의 영향이 커지게 되는 경우에는 펌프 자체 및 성능에 큰 영향을 주게 될 것이다. 터보형 펌프의 국내(KS) 및 국제규격(ISO)의 성능시험방법에는 이러한 온도에 따른 펌프의 성능 특성 변화를 다루고 있지 않으며, 크라이오 펌프인 경우 열복사의 영향에 대한 시험방법이 일부 공개되어 있다[J. Vac. Sci. Technol. A17(5)]. 본 연구에서는 기체의 유량 및 온도 변화에 따른 진공 펌프의 성능 특성 변화를 고찰하고자 하며, 향후 이러한 시험방법에 대한 표준 절차를 확립하고자 한다.

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Performance Improvement on Similar Texts Searching System for Massive Document Repository (대용량 문서 집합에서 유사문서 탐색 시스템의 성능 개선)

  • Park, Sun-Young;Cho, Hwan-Gue
    • Proceedings of the Korea Information Processing Society Conference
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    • 2010.04a
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    • pp.413-416
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    • 2010
  • 최근 발생한 수많은 표절 논란으로 인해 많은 유사 문서 탐색 시스템이 개발되어 사용되고 있다. 많은 시스템 중 내용기반 유사문서 탐색 시스템인 DeVAC은 대용량 문서 1:1간의 비교에서 빠른 성능을 보여주지만 수천~수만 개의 문서 집합에 대해서는 적절한 성능을 보여주지 못한다. 이를 해결하기 위해 전역 사전(Global Dictionary)을 이용한 전처리 방법이 고안되어 적용되었다. 이 전처리 방법을 통해 비교해야 할 문서쌍이 줄어들고 전체 시스템의 성능을 향상시킬 수 있다는 것은 밝혀졌으나, 전처리를 위해 발생하는 추가 비용에 대한 계측이 이루어지지 않았을 뿐 아니라 문서 쌍이 얼마나 감소하는지 측정한 실험에서도 언어 처리용 실험적 데이터(말뭉치)에 대한 실험이 대부분을 차지하였기 때문에 실제 데이터에 대해 어떤 성능을 보일지 정확히 예측할 수 없었다. 본 논문에서는 전체 시스템에서 전처리를 위해 필요한 모든 추가 비용을 측정하고, 데이터를 1.5Gb, 6263개의 문서로 이루어진 실존하는 문서 집합으로 구성하여 성능 향상 정도를 측정함으로써 실제 데이터에 대한 전처리 신뢰도를 예측하였다. 실험 결과 전처리 후 찾아낸 유사한 문서 쌍을 전처리를 하지 않을 경우의 80~89.3% 정도로 유지하면서 검사 시간을 기존의 10.8%~15.4% 수준으로 대폭 감소시킬 수 있었다.

Preparation and Surface-Active Properties of Vinyl Acetate Cotelomers (I) (비닐아세테이트 코텔로머의 제조 및 계면활성(I))

  • Lee, Eon-Pil;Kang, Se-Mi;Hwang, Dae-Youn;Jung, Young-Jin;Choi, Hae-Wook;Choi, Young-Ho;Lee, Jae-Ho
    • Fashion & Textile Research Journal
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    • v.14 no.4
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    • pp.677-683
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    • 2012
  • 1-octanethiol and vinyl acetate telomers ($R_8S$-nVAc) were synthesized and hydrolyzed with sodium hydroxide subsequently, 1.2-epoxyhexane was then introduced to the telomers. In addition, we prepared cotelomers of multi-alkylated nonionic surfactants with a molecular structure of xRnMA-yVA (x; hydrophobic group, y; hydrophilic group, MA; methacrylic ester, VA; vinyl alcohol, R; and alkyl group) and cross-linked with sodium tetraborate decahydrate. Their active surface properties were investigated by several techniques such as surface tension, foaming property, and emulsification power measurements. The surface tension of $R_8S$-8.8VA decreased without the introduction of 1.2-Epoxy hexane, and the degree of emulsification and foaming abilities of $R_8S$-8.8VA increased without the introduction of 1.2-Epoxy hexane. However, the differences were insignificant. The epoxy groups were attached to a $R_8S$-8.8VA cotelomer with a limited variation of the active surface properties. The surface tension of $1.1R_6MA$-8.8VA decreased after cross-linking subsequently, the degree of emulsification and foaming abilities of $1.1R_6MA$-8.8VA increased after cross-linking. However, there was no clear difference between them. The B-O bonds were attached to a $1.1R_6MA$-8.8VA cotelomer with a limited variation of the active surface properties.

A Simple, Reliable, and Inexpensive Intraoperative External Expansion System for Enhanced Autologous Structural Fat Grafting

  • Oranges, Carlo M.;Tremp, Mathias;Ling, Barbara;Wettstein, Reto;Largo, Rene D.;Schaefer, Dirk J.
    • Archives of Plastic Surgery
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    • v.43 no.5
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    • pp.466-469
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    • 2016
  • External volume expansion of the recipient site by suction has been proposed as a way of improving fat graft survival. The objective of this study was to present an innovative and simple intraoperative external expansion system to enhance small-volume autologous fat grafting (40-80 mL) and to discuss its background and its mechanism of action. In this system, expansion is performed using a complete vacuum delivery system known as the Kiwi VAC-6000M with a PalmPump (Clinical Innovations). The recipient site is rapidly expanded intraoperatively 10 times for 30 seconds each with a negative pressure of up to 550 mm Hg before autologous fat injection. During this repetitive stimulation, the tissues become grossly expanded, developing macroscopic swelling that regresses slowly over the course of hours following the cessation of the stimulus. The system sets various mechanisms in motion, including scar release, mechanical stimulation, edema, ischemia, and inflammation, which provide an environment conducive for cell proliferation and angiogenesis. In order to maintain the graft construct in its expansive state, all patients are encouraged postoperatively to use the Kiwi three times daily for one minute per session over the course of three days. The handling of this system is simple for both the patients and the surgeon. Satisfactory clinical outcomes have been achieved without significant complications.

Pilot Plant Scale Extraction and Concentration of Purple-Fleshed Sweet Potato Anthocyanin Pigment (자색고구마 anthocynin 색소의 대량추출 및 농축)

  • Rhim, Jong-Whan;Lee, Jang-Wook;Jo, Jae-Sun;Yeo, Kyeong-Mok
    • Korean Journal of Food Science and Technology
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    • v.33 no.6
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    • pp.808-811
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    • 2001
  • Performance of pilot plant scale extraction and concentration of purple-fleshed sweet potato anthocyanin pigment was tested and the characteristics of pigment extracts and concentrates were investigated. Fifty kilograms of purple-fleshed sweet potato was extracted with 500 L of 1% citric acid in 20% ethanol. As a whole, extraction pattern of the large scale extraction was similar to that of the laboratory scale extraction. The extracted pigment solution was filtered twice with a bag filter and a winding type microfilter and the filtrate was concentrated by a large scale vacuum evaporator at $40^{\circ}C$ and 600 mmHg vac. The mean values of total optical density (TOD) of the extract and the concentrate were 6.53 and 120.45, respectively. Browning index (BI) and Degradation index (DI) of extract were 5.86 and 1.55 and those of concentrate were 5.89 and 1.56, respectively, which indicated that the pigments were not changed or degraded through the extraction and concentration process.

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CT Simulation Technique for Craniospinal Irradiation in Supine Position (전산화단층촬영모의치료장치를 이용한 배와위 두개척수 방사선치료 계획)

  • Lee, Suk;Kim, Yong-Bae;Kwon, Soo-Il;Chu, Sung-Sil;Suh, Chang-Ok
    • Radiation Oncology Journal
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    • v.20 no.2
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    • pp.165-171
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    • 2002
  • Purpose : In order to perform craniospinal irradiation (CSI) in the supine position on patients who are unable to lie in the prone position, a new simulation technique using a CT simulator was developed and its availability was evaluated. Materials and Method : A CT simulator and a 3-D conformal treatment planning system were used to develop CSI in the supine position. The head and neck were immobilized with a thermoplastic mask in the supine position and the entire body was immobilized with a Vac-Loc. A volumetrie image was then obtained using the CT simulator. In order to improve the reproducibility of the patients' setup, datum lines and points were marked on the head and the body. Virtual fluoroscopy was peformed with the removal of visual obstacles such as the treatment table or the immobilization devices. After the virtual simulation, the treatment isocenters of each field were marked on the body and the immobilization devices at the conventional simulation room. Each treatment field was confirmed by comparing the fluoroscopy images with the digitally reconstructed radiography (DRR)/digitally composite radiography (DCR) images from the virtual simulation. The port verification films from the first treatment were also compared with the DRR/DCR images for a geometrical verification. Results : CSI in the supine position was successfully peformed in 9 patients. It required less than 20 minutes to construct the immobilization device and to obtain the whole body volumetric images. This made it possible to not only reduce the patients' inconvenience, but also to eliminate the position change variables during the long conventional simulation process. In addition, by obtaining the CT volumetric image, critical organs, such as the eyeballs and spinal cord, were better defined, and the accuracy of the port designs and shielding was improved. The differences between the DRRs and the portal films were less than 3 mm in the vertebral contour. Conclusion : CSI in the supine position is feasible in patients who cannot lie on prone position, such as pediatric patienta under the age of 4 years, patients with a poor general condition, or patients with a tracheostomy.

Potential and Significance of Ammonium Production from Helicobacter pylori

  • KI, Mi-Ran;Yun, Soon-Kyu;Choi, Kyung-Min;Hwang, Se-Young
    • Journal of Microbiology and Biotechnology
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    • v.13 no.5
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    • pp.673-679
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    • 2003
  • Glutamine and urea, abundant in body fluids or plasma, yield net ammonium ions upon hydrolysis by ${\gamma}-glutamyl$ transpeptidase (${\gamma}-GTP$) and urease, respectively, and these two enzymes are largely produced from Helicobacter pylori. To investigate bacterial potential of ammonium production, we first quantified those in whole-cell systems and found that the relative ratio of their amounts varied greatly, especially with pH values and the cell's aging. During the H. pylori cultivation, the ratio appeared to be inversely proportional to each other, showing a progressive increase of the ${\gamma}-GTP$ with decreasing of the urease. Under the urease-defective conditions due to low pH or coccoids, the bacterial cells still possessed a considerable amount of ${\gamma}-GTP$, which was found exclusively in the external compartment, therefore, the cell's ammonium production was found to be solely dependent upon glutamine, and the external ammonium concentration was constant without any contribution of urea concentration. Such ammonium constancy would definitely have an adverse effect on the host, because of its absolute requirement for vacuolar degeneration by H. pylori VacA, maximized at approximately 10 mM $NH_4Cl$. It was also found that, by using the metal-saturated membrane vesicles, ammonium ions were likely to be involved in the pH-dependent cation-flux across the H. pylori membrane, where the role of ${\gamma}-GTP$ in ammonium homeostasis around cells was suggested, especially under the hostile conditions against H. pylori.

Nitric Oxide Dependency in Inflammatory Response-related Gene Transcripts Expressed in Lipopolysaccharide-treated RAW 264.7 Cells

  • Pie, Jae-Eun;Yi, Hyeon-Gyu
    • Molecular & Cellular Toxicology
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    • v.5 no.4
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    • pp.354-363
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    • 2009
  • Cytotoxic Nitric oxide (NO) overproduced by inducible NO Synthase (iNOS or NOS2), which was induced in inflammatory reactions and immune responses directly or indirectly affects the functions as host defense and can cause normal tissue damage. Microarray analysis was performed to identify gene profiles of both NO-dependent and -independent transcripts in RAW 264.7 macrophages that use selective NOS2 inhibitors aminoguanidine ($100\;{\mu}M$) and L-canavanine (1 mM). A total of 3,297 genes were identified that were up- or down-regulated significantly over 2-fold in lipopolysaccharide (LPS)-treated macrophages. NO-dependency was determined in the expressed total gene profiles and also within inflammatory conditions-related functional categories. Out of all the gene profiles, 1711 genes affected NO-dependently and -independently in 567 genes. In the categories of inflammatory conditions, transcripts of 16 genes (Pomp, C8a, Ifih1, Irak1, Txnrd1, Ptafr, Scube1, Cd8a, Gpx4, Ltb, Fasl, Igk-V21-9, Vac14, Mbl1, C1r and Tlr6) and 29 geneas (IL-1beta, Mpa2l, IFN activated genes and Chemokine ligands) affected NO-dependently and -independently, respectively. This NO dependency can be applied to inflammatory reaction-related functional classifications, such as cell migration, chemotaxis, cytokine, Jak/STAT signaling pathway, and MAPK signaling pathway. Our results suggest that LPS-induced gene transcripts in inflammation or infection can be classified into physiological and toxic effects by their dependency on the NOS2-mediated NO release.