• JSTS:Journal of Semiconductor Technology and Science
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• v.7 no.3
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• pp.183-195
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• 2007

MEMS technology is proven to be an enabling technology to realize many components for optical networking applications. Due to its widespread applications, VOA has been one of the most attractive MEMS based key devices in optical communication market. Micromachined shutters and refractive mirrors on top of silicon substrate or on the device layer of SOI (Silicon-on-insulator) substrate are the approaches trapped tremendous research activities, because such approaches enable easier alignment and assembly works. These groups of devices are known as the planar VOAs, or two-dimensional (2-D) VOAs. In this review article, we conduct the comprehensively literature survey with respect to MEMS based planar VOA devices. Apparently MEMS VOA technology is still evolving into a mature technology. MEMS VOA technology is not only the cornerstone to support the future optical communication technology, but the best example for understanding the evolution of optical MEMS technology.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.4
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• pp.448-452
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• 2004

The micromachined variable optical attenuator(VOA) was presented in the paper. The VOA has two single mode fiber(SMF) aligned with free space and symmetric parallel plate actuator with microshutter, which can control a amount of light by driving the actuator. In the paper, analysis on driving performances of the VOA was performed and can be reduced threshold voltage through the decreasing displacement actuating range. This paper presents a VOA that is fabricated using bosch deep silicon etching process with silicon on insulator(SOD wafer. The VOA consists of driving electrode, ground electrode, actuating microshutter, and mechanical stopper. In this VOA, actuating shutter is driven by electrostatic force and the threshold voltage is close to 28V, 46V come along with the spring width of 5${\mu}{\textrm}{m}$, 7${\mu}{\textrm}{m}$ respectively. Attenuation range is measured from 2.4㏈ to 16.7㏈.

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.306-308
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• 2003

본 논문은 variable optical attenuator(VOA)에 응용하기 위한 comb actuator를 설정하기 위해, 요구되는 조건에 가장 적합한 comb actuator를 설계하기 위한 방법을 제시한다. VOA 응용을 위한 comb actuator 설계에서 고려되어야 하는 조건들은 comb actuator의 performance(변위, 공진 주파수), 구동 전압 그리고 공정의 한계(최소 선폭, 최소 간격, 두께) 등이다. 이러한 조건들이 정해지면, 이 조건들을 comb actuator의 구동력과 지지빔 스프링에 의한 복원력에 대입하여 두 힘이 평형일 때의 조건으로부터 comb finger의 수와 구동부의 질량 및 지지빔의 길이 등의 선계 변수들을 정할 수 있다. 그리고 comb actuator의 질량으로 부터 구동부의 면적을 구할 수 있고, 이러한 조건에서 구한 지지빔의 면적과 비교하여 적절한 구동부의 면적을 설정한다. 이상의 내용을 조합해서 요구된 조건이 comb actuator 설계에 적합한지의 여부를 확인했고, VOA 응용을 위한 요구 조건에 맞는 comb actuator 설계를 했다.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1912-1913
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• 2003

This paper presents a variable optical attenuator (VOA) that is fabricated using bosch deep silicon etching process [1] with silicon-on- insulator (SOI) wafer. The VOA consists of driving electrode, ground electrode, actuating mirror, and mechanical slower. In this VOA, actuating mirror is driven by electrostatic force [2] and the pull-in voltage is close to 13V, 28 V, 46V come along with the spring width of $3{\mu}m,\;5{\mu}m,\;7{\mu}m$ respectively.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.10 no.2
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• pp.220-223
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• 2006

In this paper, we studied about the level controller of optical signal with 40 channels by 4 VOA(Variable Optical Attenuator) with 12 channels. Total 8 microprocessors control 40 chamois for control of optical signal level so that a microprocessor controls 5 channels each. Moreover a microprocessor was added to communicate with outside and transfer instruction to each microprocessor. The output optical signal is measured and VOA is controlled as a result of it. The VOA outputs is inputted into PD(Photo Detector) at once. We could control multi-channel optical signals simply like this.

• ETRI Journal
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• v.27 no.1
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• pp.122-125
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• 2005

A polymer-based planar-lightwave-circuit-type variable optical attenuator (VOA) was fabricated using a hot embossing process. With an optimized one-step embossing process, forty micro-channels for the guidance of light were defined on a polymer thin film with an accuracy of ${\pm}0.5{\mu}m$. The fabricated polymeric thermo-optic VOA shows 30 dB attenuation with 110 mW electrical input power at $1.55{\mu}m$. The rise and fall times are less than 5 ms.

• ETRI Journal
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• v.31 no.6
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• pp.770-777
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• 2009

We have developed a fully functional reconfigurable optical add-drop multiplexer (ROADM) switch module using a polymer integrated photonic lightwave circuit technology. The polymer variable optical attenuator (VOA) array and digital optical switch array are integrated into one polymer PLC chip and packaged to form a 10-channel VOA integrated optical switch module. Four of these optical switch modules are used in the ROADM switch module to execute 40-channel switching and power equalization. As a wavelength division multiplexer (WDM) filter device, two C-band 40-channel athermal arrayed waveguide grating WDMs are used in the ROADM module. Optical power monitoring of each channel is carried out using a 5% tap PD. A controller and firmware having the functions of a 40-channel switch and VOA control, optical power monitoring, as well as TEC temperature control, and data communication interfaces are also developed in this study.

• Korean Journal of Optics and Photonics
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• v.16 no.3
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• pp.254-260
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• 2005

By incorporating large core polymer waveguides, which have been developed for increased alignment tolerance in passive fiber attachment, highly efficient variable optical attenuators are proposed. In order to find optimum device structures, 3-dimensional beam propagation method (BPM) simulations are performed. Heat distribution over the polymer film is calculated to find the 3-dimensional index profile data for the BPM simulation. Due to the small index contrast between the core and cladding materials in the large core waveguide, heat-induced radiation occurs for small heating power. While the ordinary VOA needs the temperature to change over $150^{\circ}C$ for 20 dB attenuation, the large core VOA requires only $70^{\circ}C$. In addition to the merit of passive fiber attachment, the proposed VOA has enhanced attenuation efficiency for the lower temperature change.

• Proceedings of the IEEK Conference
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• 2004.06a
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• pp.321-324
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• 2004

In this paper, attenuation characteristics of silica-based variable optical attenuator (VOA) with heat insulating structures are investigated by variations of structural parameters and heating power at wavelength 1.55${\mu}m$. The characteristics of power dissipation and attenuation at this VOA was optimized in terms of heating insulating width, under-cladding height and over-cladding height. The optimized maximum attenuation of this VOA was achieved about 31dB at heating power 150mW.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2004.05b
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• pp.655-657
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• 2004

채널 레벨 컨트롤러는 DWDM(Dense Wavelength Division Multiplexing) 방식의 OXC(Optical Cross Connect), OADM(Optical Add/Drop Multiplexer), 광 증폭기(EDFA : Erbium Doped Fiber Amplifier) 둥의 시스템에서 채널별 광신호의 세기를 조절하여 시스템의 신뢰성을 높이는 중요한 제어기다. 본 논문에서는 12채널 VOA(Variable Optical Attenuator) 4개를 사용하여 40채널의 광 신호 레벨을 제어할 수 있는 컨트롤러를 구현하였다. 각 채널의 광 신호 레벨을 제어하는데 하나의 마이크로 프로세서가 5개의 채널을 제어하고 총 8개의 마이크로프로세서로 40채널을 분산 제어하도록 구성하였다. 또한 외부와 통신을 하고 사용자로부터의 명령을 각각의 마이크로프로세서에 전달하기 위한 마이크로프로세서를 추가하였으며, 출력되는 광 신호의 세기를 측정하여 VOA를 제어하는데 있어서 VOA 출력에서 바로 PD(Photo Detector)로 입력하여 AWC(Arrayed Waveguide Grating) 출력에서 광 신호를 다시 분파하여 PD에 입력하는 번거로움을 개선하였다.