• 제목/요약/키워드: Uniformity of current distribution

검색결과 78건 처리시간 0.127초

GaAs 집적회로 제조를 위한 에피 성장 연구 (Epitaxial Growth for GaAs IC)

  • 김무성;엄경숙;박용주;김용;김성일;조훈영;민석기
    • 한국재료학회지
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    • 제3권6호
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    • pp.645-651
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    • 1993
  • Bulk반절연 기판 웨이퍼에 이온 주입법에 의한 기존의 GaAs집적회로 제작시 발생하는 문제점을 보완하고자 반절연 기판 위에 반절연성의 고저항 GaAs 에피층을 성장하는 연구를 수행하였다. 먼저 반절연 기판의 EPD분포를 조사하고, MOCVD와 MBE법을 이용하여 undeped GaAs반절연성 에피층을 성장시켜 실제 집적회로의 제작에 적합한지를 평가하였다. 평가방법은 반절연성 에피\ulcorner을 buffer층으로 성장시킨 에피 기판에 ungated FET를 제작하여, 이 반절연성 에피\ulcorner을 통한 누설전류를 측정하고, 또한 반절연 기판의 EP분호의 영향을 조사하였다. 누설 전류의 측정결과 비교적 주설 전류가 큰 1$\mu\textrm{m}$ 두께의 MOCVD시료에서도 270nA/mm로 FET의 pinch-off에는 영향을 주지 못하는 매우 작은 누설 전류 값을 나타내었다. 또한 누설전류의 분포가 반절연 기판의 EPD분포와 일치하는 것을 발견하여, 에피층의 quality에 기판의 결함이 미치는 영향을 확인하였다. MBE법으로 성장한 2$\mu\textrm{m}$ 두께의 undoped burrer층 시료는 휠씬 좋은 특성을 나타내었으며, 매우 균일하고 낮은 누설전류(40nA/mm)가 측정되었다.

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SUS304N 코일 웨지 인발 공정의 설계, 제조 및 평가 (Process Design, Fabrication, and Evaluation of Cold Drawn SUS304N Coil Wedge)

  • 정중은;김세종;배성준;남궁정;김성민;김성인;이광석
    • 소성∙가공
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    • 제28권4호
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    • pp.212-218
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    • 2019
  • In this study, the first drawing die for the production of coil wedge is redesigned in order to enhance properties such as dimensional accuracy, dimensional uniformity, non-magnetism, and residual stress. The equivalent strain distribution is observed to be asymmetric at certain corners of the product and un-filling of material is also observed at the same location, based on the results of FEM simulation for the current drawing process. Additionally, a relatively huge amount of deformation is concentrated on the surface of the reference product leading to an increase in magnetic component and surface residual stress. After re-designing the cross-section of the first drawing step process conformed to relatively higher amount of reduction ratio, reduction of both surface residual stress and the volume fraction of magnetic component could be achieved for the finally-drawn coil wedge product.

Vignetting Dimensional Geometric Models and a Downhill Simplex Search

  • Kim, Hyung Tae;Lee, Duk Yeon;Choi, Dongwoon;Kang, Jaehyeon;Lee, Dong-Wook
    • Current Optics and Photonics
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    • 제6권2호
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    • pp.161-170
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    • 2022
  • Three-dimensional (3D) geometric models are introduced to correct vignetting, and a downhill simplex search is applied to determine the coefficients of a 3D model used in digital microscopy. Vignetting is nonuniform illuminance with a geometric regularity on a two-dimensional (2D) image plane, which allows the illuminance distribution to be estimated using 3D models. The 3D models are defined using generalized polynomials and arbitrary coefficients. Because the 3D models are nonlinear, their coefficients are determined using a simplex search. The cost function of the simplex search is defined to minimize the error between the 3D model and the reference image of a standard white board. The conventional and proposed methods for correcting the vignetting are used in experiments on four inspection systems based on machine vision and microscopy. The methods are investigated using various performance indices, including the coefficient of determination, the mean absolute error, and the uniformity after correction. The proposed method is intuitive and shows performance similar to the conventional approach, using a smaller number of coefficients.

ECR 용 최적 마그네트에 관한 연구 (A Study on the Optimal Magnet for ECR)

  • 김윤택;김용주;김교순;이용직;손명호
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1992년도 하계학술대회 논문집 B
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    • pp.649-652
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    • 1992
  • ECR(Electron Cyclotron Resonance) occure at ${\omega}_c$=${\omega}$, ${\omega}_c$:electron cycltron frequency, ${\omega}$:electromagnetic wave frequency. ECR system have several merit, 1) power transefer efficiency 2) low neutral gas pressure (below 1 mTorr) 3) high plasma density($10^{12}$ $cm^{-3}$). It is applicated variously in the field of semiconductor and new materials as the manufacturing equipment. Magnetic field in ECR system contruct resonance layer (${\omega}$=2.45GHz, $B_z$=875 Gauss) and control plasma. Plasma is almost generated at resonance layer. If the distance between substrate and resonance layer is short, uniformity of plasma is related with profile of resonance layer. Plasma have the property "Cold in Field", so directonality of magnetic field is one of the control factors of anisotropic etching. In this study, we calculate B field and flux line distribution, optimize geometry and submagnet current and improve of magnetic field directionality (99.9%) near substrate. For the purpose of calculation, vector potential A(r,z) and magnetic field B(r,z), green function and numerical integration is used. Object function for submagnet optimization is magnetic field directionality on the substrate and Powell method is used as optimization skim.

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과산화수소 혼합냉각기 내의 노즐배치 및 가스분사 방식 변화에 따른 혼합율 개선에 대한 전산해석적 연구 (CFD Analysis on the Effect of the Nozzle Arrays and Spray Types in the Hydrogen Peroxide Mixing Quencher to Improve the Mixing Efficiency)

  • 구성모;장혁상
    • 청정기술
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    • 제23권1호
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    • pp.42-53
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    • 2017
  • 탈질과 탈황을 동시에 수행하는 과산화수소($H_2O_2$) 수용액 세정탑의 반응효율을 증가시키기 위해 예혼합이 이루어지는 혼합 냉각기(mixing quencher) 영역 내부의 유체유동에 대한 수치해석이 수행되었다. 산업공정에서 상용화되고 있는 세정탑 전단부의 혼합냉각기에서 과산화수소 수용액이 주입되는 노즐의 분사방식은 배기가스와 과산화수소 수용액의 혼합에 중요한 역할을 하며, 혼합냉각기에서의 혼합도는 세정탑 의 효율을 결정하는 중요 요소가 된다. 본 연구에서는 혼합냉각기 내부유체의 농도분포 개선을 목적으로 하여 혼합냉각기 내의 노즐 관의 배열을 조절하거나 노즐 팁 각도를 변경하며 유체혼합을 최적화하였다. 전산해석은 이 냉각기영역의 내부유동 및 각 유체 농도에 대한 RMS (root mean square) 값을 계산하여 내부유체의 혼합도의 개선을 확인하였다. 세부적으로는 노즐 관의 위치를 조절할 때 변경되는 냉각기 영역 후단의 농도 RMS 값을 확인하여 난류형성위치에 따른 최적화된 혼합도를 확인하였으며 기본형상 대비 난류형성방향을 조절하는 목적의 노즐 팁 각도를 증감하여 농도분포의 균질화를 비교하였다. 노즐 관의 배열에 따라 난류형성위치와 그에 따른 유체혼합이 해석되었다. 또한 노즐 팁 각도를 조절하는 경우에는 유동방향과의 각도에 따라, 흐름이 병류와 향류에 따라 혼합도의 최적화를 확인할 수 있었다. 노즐 관의 위치는 0.3 m, 노즐 팁은 병류의 $15^{\circ}$일 때 최적의 조건을 가지며 가장 낮은 RMS 값인 12.4%를 가졌다.

폐쇄형 묘생산 시스템에서 감자 플러그묘의 생장에 미치는 광합성유효광양자속의 영향 (Growth of Potato Plug Seedlings as Affected by Photosynthetic Photon Flux in a Closed Transplants Production System)

  • 김용현;김현준;이지원;김정만
    • Journal of Biosystems Engineering
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    • 제33권2호
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    • pp.106-114
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    • 2008
  • This study was performed to analyze the distribution of air current speed, $CO_2$ concentration, and photosynthetic photon flux (PPF) in a closed transplants production system (CTPS) for producing quality transplants. And the effect of PPF on the growth of potato (Solanum tuberosum L. cv. Dejima) plug seedlings was analyzed. Uniformity of the air current speed in CTPS was improved by installing perforated floors in duct for air circulating and by adjusting of air flow rate of the fan connected to air conditioning unit used in this study, Measured $CO_2$ concentrations were measured $409{\pm}13$, $950{\pm}25$, and $1,550{\pm}35\;{\mu}mol{\cdot}mol^{-1}$ for setting values of 400, 950, and $1,550\;{\mu}mol{\cdot}mol^{-1}$, respectively. Uniformity of PPF by adding each one the single fluorescent lamp of 20 W at both ends of the single fluorescent lamps of 40 W was highly improved. While the average PPF measured under the twin fluorescent lamps of 55 W installed at regular intervals of 10 cm was decreased by increasing the vertical distance from the lighting sources, the ratio of average PPF measured at both ends to PPF measured in the center was 74-79%. Five levels ($100{\pm}9$, $150{\pm}14$, $200{\pm}17$, $250{\pm}24$ and $300{\pm}31{\mu}mol{\cdot}m^{-2}{\cdot}s^{-1}$) of PPF were provided to investigate the effect of PPF on plant height, fresh weight and dry weight of potato plug seedlings produced in CTPS. Plant height was decreased by increasing PPF. Maximum fresh weight and dry weight were shown under PPF of $250{\mu}mol{\cdot}m^{-2}{\cdot}s^{-1}$. Thus PPF of $250\;{\mu}mol{\cdot}m^{-2}{\cdot}s^{-1}$ was enough to produce quality potato transplants under air temperature, photoperiod, and relative humidity of $20^{\circ}C$, 16/8 h, and 70%, respectively. It was concluded that quality indices such as plant height, fresh weight and dry weight could be improved by illuminating of adequate PPF from artificial lighting sources.

진열장 조명의 이론적 기준과 시설에 대한 고찰 (An Approach to the Theoretical Design Standard and Effective Practice of Museum Showcase Lighting)

  • 김홍범
    • 보존과학연구
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    • 통권17호
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    • pp.123-160
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    • 1996
  • There have been many studies and experiments regarding exhibition lighting. Many experiments on photochemical damaging effect and visibility resulted in a practice limited to assigning light levels and adjusting annual exposure time. The three damaging factors to the artifacts are intrinsicsusceptibility to absorb radiant energy, spectral distribution of light source and intensity of illumination and time of exposure. Dividing all the artfacts into three categories to suggest a recommended illuminance level causes some problems. Blue wool, for example, used as the reference material for susceptibility, is not a standard material representing museum artifacts. In the most light sensitive category, ISO class I or anything below have been excluded. The exposure time of one soure can be three times more than another sourece. The spectral distribution of the light source and the relative spectral responsibility of the artifact are not considered in the practice. So in case of very light sensitive material, the recommended illuminance is only the referring value and it is indispensable to check the characteristic of susceptibility of each artifacts. Daylighting is prevailing method to solve the psychological need of the visitors. However, it sould transparent, and should not diffused, and the green-house effect must be considered. llluminance uniformity should based on the maximum illuminance to handle the limitation of exposure for the conservation of a large sensitive object such as a painting. Damage index is not absolute reference for selecting the lighting source because it is experimented from the paper of low grade then calculated. Visibility should be increased by reducing the visual noiseand by planning of appropriate luminance contrast. This paper reviews the problems with the previous studies and experiment sand the current exhibition lighting design practice. The plan for museum showcase lighting is to check the susceptibility and to raise the visibility simultaneously.

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R2R XRD를 이용한 초전도박막선재용 기판의 이축배향 특성 분석 (Bi-axial texture analysis of Ni substrate for superconducting coated conductor using R2R XRD)

  • 하홍수;양주생;김호섭;고락길;송규정;하동우;오상수;주진호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.22-23
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    • 2005
  • In order to increase the critical current of coated conductor, highly Bi-axially textured substrates are required. Texture uniformity of substrate is also important to fabricate high quality superconducting coated conductor because the amount of current flow along the coated conductor is limited by the defects such as bad textured area. Therefore, we need to evaluate the distribution of texture of Ni substrate along the length before buffer layer deposition on Ni tape. R2R(reel-to-reel) XRD system was used to measure the texture of long Ni substrate continuously. $\theta-2\theta$ scan of 10 m long Ni tape was measured and indicates that some of Ni(111) planes equally remain on Ni(002) textured substrate. The results of continuous Ni(220) $\Phi$-scan indicate that average FWHM is 9$^{\circ}$ within $\pm$1.

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실 규모 터널 주행실험을 통한 터널 경계부 휘도 기준의 적정성 검증 (Verification of the Appropriateness of the Standard for Tunnel Luminance in the Threshold Zone Through a Full-scale Tunnel Driving Test)

  • 박원일;조원범;정준화
    • 한국도로학회논문집
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    • 제17권6호
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    • pp.105-115
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    • 2015
  • PURPOSES : This study aimed to evaluate the appropriateness of safety with the standard for threshold zone luminance as specified in the Recommendation for Lighting of Traffic Tunnel, which has been widely adopted worldwide. METHODS : A driving test of the subject in a full-scale road tunnel was conducted. The adaptation luminance and threshold zone luminance, which should be known for the driver to perceive an object within stopping sight distance, were obtained. These values were compared with the adaptation luminance and threshold zone luminance obtained by the existing reduced model test and tunnel lighting standard that has served as a guideline for the current threshold zone luminance standard. RESULTS : According to this study, threshold zone luminance should be increased to at least 1.8 times the value proposed in the existing studies and to twice the domestic tunnel lighting standard (KS C 3703: 2014). CONCLUSIONS : The threshold zone luminance proposed in this study differs largely from that obtained from indoor tests and from the current tunnel lighting standard used worldwide; this difference may be attributed to the fact that the indoor tests did not incorporate driving workload, non-uniformity of luminance distribution in terms of sight, and factors that reduce the visibility of the driver, such as the light reflected into the driver's eyes. Hence, it is necessary to further review the factors that reduce the visibility of drivers approaching tunnels in order to determine the rational tunnel threshold zone luminance.

Investigation of field emission mechanism of undoped polyucrystalline diamond films

  • Shim, Jae-Yeob;Chi, Eung-Joon;Song, Kie-Moon;Baik, Hong-Koo
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.62-62
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    • 1999
  • Carbon based materials have many attractive properties such as a wide band gap, a low electron affinity, and a high chemical and mechanical stability. Therefore, researches on the carbon-based materials as field emitters have been drawn extensively to enhance the field emission properties. Especially, diamond gives high current density, high current stability high thermal conductivity durable for high temperature operation, and low field emission behaviors, Among these properties understanding the origin of low field emission is a key factor for the application of diamond to a filed emitter and the verification of the emission site and its distribution of diamond is helpful to clarify the origin of low field emission from diamond There have been many investigations on the origin of low field emission behavior of diamond crystal or chemical vapor deposition (CVD) diamond films that is intentionally doped or not. However, the origin of the low field emission behavior and the consequent field emission mechanism is still not converged and those may be different between diamond crystal and CVD diamond films as well as the diamond that is doped or not. In addition, there have been no systematic studies on the dependence of nondiamond carbon on the spatial distribution of emission sites and its uniformity. Thus, clarifying a possible mechanism for the low field emission covering the diamond with various properties might be indeed a difficult work. On the other hand, it is believed that electron emission mechanisms of diamond are closely related to the emission sites and its distributions. In this context, it will be helpful to compare the spatial distribution of emission sites and field emission properties of the diamond films prepared by systematic variations of structural property. In this study, we have focused on an understanding of the field emission variations of structural property. In this study, we have focused on an understanding of the field emission mechanism for the CVD grown undoped polycrystalline diamond films with significantly different structural properties. The structural properties of the films were systematically modified by varying the CH4/H2 ratio and/or applying positive substrate bias examined. It was confirmed from the present study that the field emission characteristics are strongly dependent on the nondiamond carbon contents of the undoped polycrystalline diamond films, and a possible field emission mechanism for the undoped polycrystalline diamond films is suggested.

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