• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.06a
• /
• pp.482-483
• /
• 2009

In chemical mechanical planarization (CMP) process, the uniformity of stress acting on wafer surface is a key factor for uniform material removal of thin film especially in the oxide CMP. In this paper, we analyze the stress on the contact region between wafer and pad with finite-element analysis (FEA). The setting pressure acting on wafer back side was $500g/cm^2$ and the retainer pressure was changed from 300 to $700g/cm^2$. The polishing test is also done with the same conditions. The material removal rate profiles well-matched with stress distribution.

• Transactions of the Korean Society of Mechanical Engineers
• /
• v.5 no.2
• /
• pp.131-138
• /
• 1981

The effect of axial stress on the plastic deformation of rigid-perfectly plastic cylindrical tube under the impulsive band pressure is investigated. It is assumed that the tube is constructed with the material of Tresca's yield criterion. A closed from sloution is obtained for a rectangular pulse shape of uniform band pressure by using the circumscribed yield surface. The analysis shows that the effect ot exial stress is negligible when the dimensionless axial stress(n$\sub$x/= N$\sub$x/.delta.$\sub$y/H) is less than 0.2 or the dimensionless whdth of band pressure(.xi.=C/.root.RH) is greater than 2, but the effect of axial stress is of considerable importance when the axial stress is greater than 0.3 and the width of band pressure is less than 1.

• Transactions of the Korean Society of Mechanical Engineers
• /
• v.16 no.6
• /
• pp.1216-1220
• /
• 1992

In case that a general cusp-crack shaped inclusion expressed in a polynominal form of conformal mapping function exists in a two dimensional elastic body under uniform heat flow, the complex potential and thermal stress intensity factors are derived. Two thermal boundary conditions are considered, one an insulated rigid inclusion and the other a rigid inclusion with fixed boundary temperature. The previous solutions of the thermal stress intensity factors for symmetrical airfoil and lip type rigid inclusions are obtained from the general solution of the thermal stress intensity factors.

• Tribology and Lubricants
• /
• v.12 no.3
• /
• pp.79-84
• /
• 1996

One of the greatest dangers in mechanical face seals is the formation of heat checking and thermal stress cracks on the sliding surfaces. These thermal distortions due to non-uniform heating lead to increase the leakage of the sealed fluids and wear, and with balance of the seal can cause the seal faces to part. In this study heat checking and thermal stress cracks are investigated experimentally. These thermal distortions are explained using the thermal models of the conatct geometries between the seal ring and the seal seat. To overcome these thermal problems, the thermohydrodynamic seal is presented. The newly developed mechanical seal may substantially reduce the friction torque, frictional heating which causes heat checking and thermal stress cracks, and wear.

• Corrosion Science and Technology
• /
• v.14 no.4
• /
• pp.161-165
• /
• 2015

This paper presents an analysis of thermal stress induced along the interface between a polymeric coating layer and a steel substrate as a result of uniform temperature change. The epoxy layer is assumed to be a linear viscoelastic material and to be theromorheologically simple. The viscoelastic boundary element method is employed to investigate the behavior of interface stresses. The numerical results exhibit relaxation of interface stresses and large stress gradients, which are observed in the vicinity of the free surface. Since the exceedingly large stresses cannot be borne by the polymeric coating layer, local cracking or delamination can occur at the interface corner.

• Structural Engineering and Mechanics
• /
• v.4 no.4
• /
• pp.397-413
• /
• 1996

In this paper the elastic post-buckling behaviour of plates under non-uniform compressive edge stress is investigated. The compatibility differential equations is first solved analytically and then an approximate solution of the equilibrium equation is obtained using the Galerkin method. Explicit expressions are derived for the load-deflection, ultimate strength and membrane stress distributions. Analytical effective width formulations, based on the characteristics of the stress field of the buckled plate, are proposed for this general loading condition. The predicted load-deflection expression is compared with independent test results. Results are also presented detailing the load-deflection behaviour and stress distribution for various aspect ratios.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2004.05a
• /
• pp.405-408
• /
• 2004

The forming load and the stress applied to dies during cold forming of automotive part using microalloyed forging steel are examined with finite element analysis. The forming load and the stress applied to dies at each process step are investigated for two types of forming process. The changes in forming process significantly affect the variation of firming load and the stress at each process step, thus it is considered that the die lift will be remarkably changed with the type of forming process, therefore optimal process design is necessary to obtain an increased the die life and to make the die life uniform at each process step.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.24 no.3 s.174
• /
• pp.560-566
• /
• 2000

Many researchers have dealt with the problems of fracture mechanics. Generally, these researches are concerned with crack in isotropic material without other micro defects. Actual structure, however, may contain micro defects as well as crack in manufacture processing or operation. If it contains mi defects near a crack, some different characteristics will be appear in fracture behaviors of the crack. This study examines the effect of the micro defect on stress intensity factor of center slant crack rectangular plate subjected to uniform uniaxial tensile stress. In this study, boundary element method(BEM) is used for analysis in stress intensity factor(SIF).

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.9 no.3
• /
• pp.76-82
• /
• 2000

It is well known that during the oxygen cutting process residual thermal stresses are produced in weldment. The local non-uniform heating and subsequent cooling which takes place during any welding process causes complex thermal strains and stresses to finally lead to residual stresses exceed to the yield stress. High tensile stresses combined with applied structural load in the region near the welded joint can given rise to distortion brittle fracture change of the fatigue strength and stress corrosion cracking. The appropriate treatment of the welded component which reduces the peak of he welding residual stresses is believed to lower risk of the fracture during the service of the structure. In this study the impact loading in oxygen cutting frame was applied to reduce the residual stress. After applying the impact loading redistribution of resid-ual stress was measured by cutting method and the effect of fatigue was tested.

• Journal of the Korean Society for Railway
• /
• v.7 no.2
• /
• pp.125-129
• /
• 2004

This study investigates the fatigue lift estimation of butt weld specimen for the railway vehicle by examining butt weld bead profiles. The butt weld beads, which are welded by semi-robot method, have non-uniform bead profiles described by $\theta$, p and h. The stress concentration factors, K$\_$t/, are changed by different $\theta$, p and h from 1.395 to 2.863. Hence, the sensitivity of K$\_$k/ is changed by each $\theta$, p and h. As $\theta$ becomes lower and p and h become higher, K$\_$t/ increases. The fatigue life can be estimated very closely for the AAY specimens without residual stress using only butt weld bead profiles. But, for the AAN specimens with residual stress, the fatigue life must be estimated by considering both the weld bead profiles and the residual stress data.