• Journal of the Korean Society for Nondestructive Testing
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• v.29 no.4
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• pp.293-298
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• 2009

The ultrasonic atomic force microscope(UAFM) has been developed in order to enhance the characterization technology for nano-scale surface combining ultrasonic property to atomic force microscope. This UAFM technique enables elasticity imaging due to the physical properties on the heterogeneous surface in addition to the novel topography of surface height in the nano-surface layer. In this study, the prototype UAFM system was constructed and applied to several materials, silicon deposited wafer, spherodized cold heading steel, and carbon fiber reinforced plastic specimen. Clear elastic contrast was successfully obtained using this developed prototype UAFM.

• Journal of the Korean Society for Nondestructive Testing
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• v.32 no.2
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• pp.142-148
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• 2012

This study presents the assessment results of adhesive properties on the interface between a silicon wafer and nano-scale polymer thin film pattern through UAFM images by using the contact resonance frequency of the cantilever. For the experiment, we varied surface treatment processes for the silicon wafer and fabricated a 300nm polymer thin film pattern through lithography. Images from the optical microscope were used to compare the produced test specimens for adhesive condition and the critical load value from the nano scratch test was used to verify the adhesive condition of the nano pattern. Each test specimen resulted in a $1{\mu}m{\times}1{\mu}m$ surface image and subsurface adhesive image. Adhesive condition was evaluated by image contrast differences on the interface according to the changing amplitudes and phases of contact resonance frequency.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.2
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• pp.132-138
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• 2010

Vibro-contact of cantilever tip is studied with respect to contact mechanics and an elastic characteristic of nanoscale surface is imaged. The contact resonance frequency is calculated theoretically using the spring-mass and Herzian models, and the variation of resonance frequency of cantilever was analyzed when the cantilever was free and contact. The elasticity imaging was also achieved successfully using phase and amplitude signals obtained from the spheroidized steel specimens by prototype ultrasonic AFM.

• Journal of the Korean Society for Nondestructive Testing
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• v.31 no.2
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• pp.174-180
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• 2011

Nondestructive surface imaging of elastic characteristic and mechanical property has been studied on nanoscale surface with ultrasonic AFM. Resonance frequency variation of cantilever is theoretically analyzed with respect to contact mechanics as well as experimentally measured. The contact resonance frequency is calculated theoretically using the spring-mass and Herzian model in accordance with the resonance frequency of UAFM cantilever measured experimentally. Consequently, the topography and amplitude images could be obtained successfully and the elastic characteristic at the nanoscale surface was evaluated qualitatively by amplitude signals.

• Journal of the Korean Society for Nondestructive Testing
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• v.32 no.4
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• pp.418-430
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• 2012

The present paper reviews the micro and nano nondestructive evaluation(NDE) technique that is possible to investigate the surface and measure the acoustic properties. The technical theory, features and applications of the ultrasonic atomic force microscopy(UAFM) and scanning acoustic microscopy(SAM) are illustrated. Especially, these technologies are possible to evaluate the mechanical properties in micro/nano structure and surface through the measurement of acoustic properties in addition to the observation of surface and subsurface. Consequently, it is thought that technique developments and applications of these micro/nano NDE in advanced industrial parts together with present nondestructive industry are widely possible hereafter.