• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.249-254
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• 1993

In order to respond to the increasing demands of ultraprecision positioning mechanism in the field of precision engineering, more accurate stages are needed whose positioning uncertainty should be in the unprecedented level of nanometers, while maintaining a long travek range. For this application, most conventional stage mechanisms are found not suitable, so the concept of dual servo, which uses two different servos, is one of the new design and control strategies being extensively investigated these days, This paper presents a fine motion mechanism as a part of research on the dual servo control. The stage is made of a single structure of elastic flexure, whose xy .theta. motions are induced in the form of elastic deformation activated by three piezoelectric actuators. Experimental results show that the translational and rotational motions of the stage can be controlled with resolutions of 5 nm and 0.1 arcsec, respectively.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.10a
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• pp.26-31
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• 2001

Recently, miniaturization and mass production are the main trends in manufacturing fields. Therefore, ultraprecision machining and MEMS technology have been taken more and more important position in machining of microparts. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from macro parts to micro products, such as PDP and IT components, in precision products manufacturing. However, the deburring is significant problem in making smooth and precise parts in micro endmilling. This paper shows removal characteristics of burr generated by micro endmilling process. Additionally, it is necessary to understand the formation mechanism of burr of micro barrier ribs to find proper deburring method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.446-449
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• 1995

In this paper, the accurate end position control method of ultraprecision machine tool post using piezoelectric material as an micro positonong devics is presented. This method employs the classical PID feedback and uses an additional notch filter which eliminates the resonance characteristics of controlled plant. And the simple predictor is added to make use of the future value of desired input for better tracking performance. To show the feasibilty of proposed method, the PC-based experimental apparacy can be obtained. Using method, Al specimen of diameter 100mm was cut under practical machining condition to test the practicability of proposed method.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.3
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• pp.122-129
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• 1997

Machining technology has emerged to the point of performing atomic-scale fabrication. In tail paper atomic-scale machining characteristics are investigated by using Molecular Statics simulation method. The cutting model used in this work simulates machining with tools such as an AFM. It is shown that built-up edge formation and cutting forces depend on tool tip geometry. Also, the material flow during cutting is shown for various cutting conditions such as depth of cut, rake angle, and edge radius of tool.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.3
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• pp.8-12
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• 2005

The positioning system for an ultra precision machine tool must be accurate to the order of a nanometer. Various feed drive devices have been proposed to achieve this resolution; currently, most attention is directed towards hydrostatic lead screws and friction drives. It has been reported that a positioning resolution accurate to an angstrom can be achieved using a twist-roller friction drive. Therefore, we manufactured an ultra precision positioning system driven by a twist-roller friction drive and assessed its performance when defining problems and finding solutions. Our study showed that the twist-roller friction drive is mechanically suitable for ultra precision positioning, but some considerations are required to obtain a higher resolution.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.2
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• pp.87-96
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• 1995

The cutting force is the most important variable to understand the mechanics of ultra-precision machining. Most dynamometers, however, monitor the static cutting force only. But it is necessary to measure the dynamic cutting force to clarify the machinability of the material, the formation of the chip, chatter and the wear of the tool. In this research, measurement of the dynamic cutting force in order to clarify the machin-ability of the material, the formation of the chip, chatter and the wear of the tool has been conducted. A combined-type dynamometer which could measure the static cutting force and the dynamic cutting force by use of strain gauges and a piezo-film accelerometer has been developed. An analysis of the dynamometer also has been carried out.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.3
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• pp.14-20
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• 2002

Recently, miniaturization and mass production are the main trends in manufacturing fields. Therefore, ultraprecision machining and MEMS technology have been taken more 7md more important position in machining of microparts. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from duo parts to micro products, such as PDP md IT components, in precision products manufacturing. However, decreasing of burr is significant problem in making smooth and precise parts in micro endmilling. This paper shows removal characteristics of burr generated by micro endmilling process. This results satisfies micro endmilling for micro barrier ribs of heights is $50{\mu}m$, $100{\mu}m$, $200{\mu}m$, $300{\mu}m$, and observation from of burr. Additionally, it is necessary to understand the formation mechanism of burr of micro barrier ribs to iud proper decreasing method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.658-661
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• 1996

For ultraprecision positioning, the use of the twist roller-type friction drive is proposed. In our study, it is difficult to decrease the resolution of positioning below 100 nm when we use general servo motors. Therefore we propose the feed hive with a small lead like a the cam-roller type traction drive leadscrew and modify it more accurately. By using the semi-loop control system, the positioning resolution of the drive can be 22.4 nm, where the pulse per revolution of the motor is 655360 and the the lead is 0.734 mm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.227-230
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• 2002

New polishing technique for small parts has been tried out using the principle of particle electromechanics. Common fine abrasives such as alumina, diamond, silicon carbide are dielectric materials which are polarized under an electric field, and a non-uniform electric field makes abrasive particles translate along the field line. Using this principle, We make abrasive particles aggregate in the vicinity of the micro tool which is fir the surface finishing of a small part without contact with it. The behavior of particles is optically measured, and the machined depth of glass is examined.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.12 no.5
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• pp.59-66
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• 2003

This study suggests the new ultraprecision finishing techniques for micro die and mold parts using magnetic field-assisted polishing. Conventional magnetic abrasives have several disadvantages, which are missing of abrasive particle and inequal mixture between magnetic particle and abrasive particle. Therefore, bonded magnetic abrasive particles are fabricated by several method. For example, plasma melting and direct bonding. Carbonyl iron powder is used as magnetic particle there silicon carbide and alumina are abrasive particles. Developed magnetic abrasives are analyzed using SEM. Feasibility of magnetic abrasive and polishing performance of this magnetic abrasive particles also have been investigated. After polishing, surface roughness of workpiece is reduced from 85.4 ㎚ Ra to 9 ㎚ RA.