• 한국기계가공학회지
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• 제11권3호
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• pp.19-23
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• 2012

Glassy carbon is widely used for high temperature melting process such as quartz due to its thermal stability. For utilizing Classy Carbon to glass mold press(GMP) optical lens, brittleness of Glassy Carbon is main obstacle of ultraprecision machining. Thus authors investigated ductile machining of Glassy Carbon adopting turning and grinding process respectively. From the experiments, ultraprecision turning surfaces resulted brittle crack in all machining conditions and ultraprecision grinding surfaces showed semi-ductile mode in small undeformed chip thickness conditions.

• 한국정밀공학회지
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• 제19권7호
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• pp.64-70
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• 2002

The positioning system fur the ultraprecision machine tool should have nanometer order of positioning resolution. For the purpose of achieving that resolution, various feed drive devices have been proposed and currently hydrostatic lead screw and friction drive are paid attention. It is reported that an angstrom resolution can be achieved by using twist-roller friction drive. So we have manufactured ultraprecision feeding system driven by the twist-roller friction drive and perform performance assessment for problem definition and solution finding. As a result, we found that the twist-roller friction drive is mechanically suitable for ultraprecision positioning but some considerations are needed to get higher resolution.

• 한국정밀공학회지
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• 제27권6호
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• pp.7-16
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• 2010

Physical fundamentals of ultrashort femtosecond lasers are addressed along with emerging applications for precision manufacturing and metrology. Femtosecond lasers emit short pulses whose temporal width is in the range of less than a picosecond to a few femtoseconds, thereby enabling extremely high peak-power machining with less thermal damages. Besides, the broad spectral bandwidth of femtosecond lasers constructed in the form of frequency comb permits absolute distance measurements leading to ultraprecision positioning control and dimensional metrology.

• 한국정밀공학회지
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• 제30권12호
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• pp.1313-1320
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• 2013

An ultraprecision multi-axis machine tool has been designed and developed in our laboratory. The machine tool has four moving axes which are composed of three linear axes and one rotational axis. It has a gantry type structure and the Z-axis is on the X-axis and the C-axis, on which a workpiece is located, is inside the Y-axis. This paper shows control performance improving method and procedure for the ultra-precision positioning control of a hydrostatic bearing guided linear axis. Through improvements of electrical and mechanical components for the control system such as control electronics and oil pumping systems, the control disturbing noise is decreased. Also by the frequency domain analysis of control system those problem-making system components are identified and modified with analytical methods. The controller is analyzed and designed from frequency domain data and system information. In the experimental control results the nanometer order control result is successfully presented.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.123-124
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.567-568
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• 2012

• 한국정밀공학회지
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• 제17권12호
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• pp.9-15
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• 2000

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.85-86
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• 2008

• 한국정밀공학회지
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• 제19권12호
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• pp.134-141
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• 2002

The ER fluid can be one of efficient materials in ultraprecision polishing for optics, ceramics and semiconductors because of electrically controllable apparent viscosity. To finish small 3 dimensional structures such as the aspherical surface in optical elements, the possible arrangement of a tool, workpiece and auxiliary electrode is described. We examined the influence of the addition of a few abrasive particles on the performance of the ER fluid by measuring yield stress, and observed the behavior of abrasive particles in the ER fluid by a CCD camera, which is also theoretically predicted from the electromechanical principles of particles. On the basis of the above results, the steady flow analysis around the rotating micro tool is worked out considering the non-uniform electric field. Finally, Pyrex glass is polished using the mixture of the ER fluid and abrasive particles, and the effect of the electric field strength is evaluated.

• 한국정밀공학회지
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• 제12권1호
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• pp.104-111
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• 1995

The needs of ultraprecision machine tools, which manufacture and machine the high precision parts used in computers, semiconductors and othe rprecise machines, have been increased recentrly. So it is important to design the driving parts of the ultraprecision machine tools which affect significantly on the performance of them. In this paper, the dynamic analyses on the belt-drive system were studied. The correlational equations between the acoustic natural frequency and the tension of belt were derived by experiments. The dynamic delections while the dynamic loads on the motor system changed were analyzed by the finite element analysis. The nonlinear characteristics of the bearings on the dynamic performance was studied and the belt connecting the motor to the spindle of a machine tool was modeled by the truss element and the beam element.