• 한국정밀공학회지
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• 제16권3호통권96호
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Carbon letters
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• 제10권3호
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• pp.198-201
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• 2009

Among other filters such as light filter, wave filter, air filter, ultra filter and filter paper, a novel adsorption filter from thermostable polyester nonwoven fabrics immobilized with functional super activated carbon by means of quinoline soluble, activateable isotropic pitch binder were developed in this study. The activated carbon precursor is available in the market branded as coconut shell based activated carbon(CCS-AC) produced by Dongyang Carbon Co. Ltd. BET-surface area of this precursor was $1,355\;m^2/g$, after KOH-activation it increased over $2,970\;m^2/g$ and was named as super activated carbon. In the preliminary research, this precursor was impregnated with $PdCl_2$(0.188 wt%) $KMnO_4$(3 wt%) and redox-agent(CuCl2, 0.577 wt%) in order to promote TOF up to 100/h and Selectivity up 99% and patented as a functional AC for the ethylene adsorption. The enhancement of the isotropic pitch binder to the AC-immobilized adsorption filter was BET-surface area upgraded by $266\;m^2/g$ and promoted the Iodine- and MB-adsorption by 1.4 times, respectively and also micro pore wide ranges < $5{\AA}{\sim}30\;{\AA}$ >.

• 설비공학논문집
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• 제22권1호
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• pp.13-20
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• 2010

Airborne particulate matters have two modes of size distributions of coarse mode and fine mode. The coarse mode which is formed by break down mechanism of large particles has a peak around the $100\;{\mu}m$, and the fine mode formed by condensation and build up mechanism of evaporated vapors has a peak at several ${\mu}m$. The coarse mode particles can be removed easily by conventional collecting equipments such as a cyclone, an electrostatic precipitator, and a filter, however the fine mode particles can not be collected easily. Usually the fine mode particles are generated in the high temperature conditions especially through boilers and incinerators, so the high efficient and temperature filter is essential for the filtration. In this study, a nano ceramic filter for the removal of fine particles in the high temperature is developed and tested for several characteristics. The nano ceramic filter has double layer of micro and nano structure and the pressure drop and the filtration efficiency for $0.31\;{\mu}m$ at 3 cm/s are 15.45 mmAq, and 96.75%, respectively. The thermal conductivity is $0.038\;W/m{\cdot}K$, and the coefficient of water vapor permeability is $3.63\;g/m^2{\cdot}h{\cdot}mmHg$. It is considered that the sensible heat exchange rate is very poor because the low thermal conductivity but it has high potential to exchange latent heat.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.446-449
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• 1995

In this paper, the accurate end position control method of ultraprecision machine tool post using piezoelectric material as an micro positonong devics is presented. This method employs the classical PID feedback and uses an additional notch filter which eliminates the resonance characteristics of controlled plant. And the simple predictor is added to make use of the future value of desired input for better tracking performance. To show the feasibilty of proposed method, the PC-based experimental apparacy can be obtained. Using method, Al specimen of diameter 100mm was cut under practical machining condition to test the practicability of proposed method.

• 한국막학회:학술대회논문집
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• 한국막학회 1997년도 제5회 하계 Workshop (97 한,카 국제공동 Workshop, 고도 수처리를 위한 막분리 공정)
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• pp.207-231
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• 1997

The use household water purifier is continuously increasing due to the distrust of the piped, rap water, which may be caused by the deterioration of water quality and water supply facilities in Korea. The water purifier distributing in the domestic market is the membrane type that composes of membrane as a basic filter, sediment filter as a prefilter and activated carbon filter instead of one purifying water system. The membrane type using as a water cleaning system is mainly the method of micro filtration(NIF) as well as ultra filtration(UF) and reverse osmosis(RO). The types of MF and UF are using to remove suspended solids and virus, and RO is using to remove ionic compound in chemical organic compounds. At the beginning the household water purifier was imported as end-product or assembled by only importing module from small businesses in Korea. Therefore, people was hard to confide in the product quality because the sales policy and management of water purifier by small business were not effectively organized. However, the defects of water purifier having up to now ate improving by the efforts of special branches of water purifier and large enterprises, and new great products are developing and producing. To develop the best quality product of water purifier in Korea, it should be considered seasonal water characteristrics rather than any other condition. For example, the water purifier can be affected by the water temperature change, increase of suspended solids in the rainy season and inflow of raw water having concentration in a dry season. The subject we have to investigate in the future is to develop the water purifying system adaptable in Korea which can treat the water quality using close analyses of local and seasonal water characteristics.

• 한국세라믹학회지
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• 제42권3호
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• pp.165-170
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• 2005

Sol-gel 공정에 의해 제조된 세라믹 분리 막은 보다 순수한 재료를 이용할 수 있고, 균일성을 향상시킬 수 있을 뿐 아니라 다양한 복합체도 넓은 범위에서 반응을 유도할 수 있다는 장점을 가지고 있어 많은 연구가 진행되고 있다. 본 연구에서는 sc,1-gel 공정을 이용하여 Tetraethyl ortho-silicate(TEOS)-Polyethylene glycol(PEG)계 organically modified silicate(ORMOSt)sol을 합성하였다. Polymer분자량을 변수로 하여 sol 합성 후 특성 변화를 점도와 겔화 시간을 측정함으로써 관찰하였다. 합성된 sol을 다공성 담체 위에 dip-coating법을 이용하여 막을 제조하였으며, SEM관찰을 통해 분리 막의 미세구조를 확인하였다. 합성 복합 막의 Oil/water 에멀젼의 처리효율을 cross-flow 타입의 막 분리 장치를 이용하여 확인하였다. Ormosilsol은 유기물의 분자량이 증가될수록 보다 쉽게 코팅 층을 형성 시킬 수 있었고, 담체를 용매에 담지 시켜 코팅 물질이 담체의 기공내로 침투될 때의 모세관력을 줄임으로써 크랙이 방지된 얇은 막을 얻을 수 있었다. Colloidal sol 코팅 막에 비해 ormosil sol코팅 막은 분리효율 뿐 아니라 flux 특설이 시험 5분경과 시점에서 약 $200\;l/m^2h$이상 향상되었음을 확인 할 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.409-409
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• 2014

Recently hexagonal boron nitride (h-BN), III-V compound of boron and nitrogen with strong covalent $sp^2$ bond, is a 2 dimensional insulating material with a large direct band gap up to 6 eV. Its outstanding properties such as strong mechanical strength, high thermal conductivity, and chemical stability have been reported to be similar or superior to graphene. Because of these excellent properties, h-BN can potentially be used for variety of applications such as dielectric layer, deep UV optoelectronic device, and protective transparent substrate. Ultra flat and charge impurity-free surface of h-BN is also an ideal substrate to maintain electrical properties of 2 dimensional materials such as graphene. To synthesize a single or a few layered h-BN, chemical vapor deposition method (CVD) has been widely used by using an ammonia borane as a precursor. Ammonia borane decomposes into hydrogen (gas), monomeric aminoborane (solid), and borazine (gas) that is used for growing h-BN layer. However, very active monomeric aminoborane forms polymeric aminoborane nanoparticles that are white non-crystalline BN nanoparticles of 50~100 nm in diameter. The presence of these BN nanoparticles following the synthesis has been hampering the implementation of h-BN to various applications. Therefore, it is quite important to grow a clean and high quality h-BN layer free of BN particles without having to introduce complicated process steps. We have demonstrated a synthesis of a high quality h-BN monolayer free of BN nanoparticles in wafer-scale size of $7{\times}7cm^2$ by using CVD method incorporating a simple filter system. The measured results have shown that the filter can effectively remove BN nanoparticles by restricting them from reaching to Cu substrate. Layer thickness of about 0.48 nm measured by AFM, a Raman shift of $1,371{\sim}1,372cm^{-1}$ measured by micro Raman spectroscopy along with optical band gap of 6.06 eV estimated from UV-Vis Spectrophotometer confirm the formation of monolayer h-BN. Quantitative XPS analysis for the ratio of boron and nitrogen and CS-corrected HRTEM image of atomic resolution hexagonal lattices indicate a high quality stoichiometric h-BN. The method presented here provides a promising technique for the synthesis of high quality monolayer h-BN free of BN nanoparticles.