• 산업기술연구
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• 제14권
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• pp.119-125
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• 1994

Ultra-precision machine tool equipped with the diamond bite tip is used to machine optical products, drums of VTR or computer hard disk. It needs nano technology in the surface roughness of workpiece. To perform the nano scale machining, ultra-precision machine tool must be designed and manufactured in consideration of the vibration characteristics. In this paper, using the finite element analysis, we investigate the modal parameters of the ultra-precision machine tool structures, which use cast iron, granite and alumina ceramic for the bed materials. To verify the numerical results, we manufacture a model of ultra-precision machine tool using granite bed and perform impulse test. Through the theoretical and experimental analyses, we could compare and estimate the vibration characteristics of the three models for the ultra-precision machine tools.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.541-542
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• 2013

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.97-100
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• 2004

In recent years, a demand for micro-structure machining is increasing by the development of information and optics industries. Micro machining technology is in general well known in the field of lithograghy. However, the requirement of producing micro machine and/or micro mechanism with metal materials will be increased since a variety of workpiece configurations can be easily made. In this paper, ultra precision machine is developed to obtain micro groove and mirror surface using single crystal diamond tool. According to the cutting experiment, no burr was found at the edge of V-grooves, and the surface roughness of copper is about 1～3nm Ra. It is verified that ultra precision machine is effective to high precision machining.

• 한국정밀공학회지
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• 제17권4호
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• pp.129-134
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• 2000

This paper presents the development of ultra-precision machining process of large aspheric aluminum mirrors with a maximum diameter of 620 mm. An ultra-precision machine, "Nanoturn60", developed by Daewoo Heavy Industries Ltd. is used for machining and motion errors of the machine are compensated by using the FTS developed by IAE(Institue for Advanced Engineering) during the machining process. To check the form accuracy of machined aspheric surfaces, on-machine form measurement system is developed. This measurement system consists of air bearing touch probe, straight edge, and laser sensor. With in-process error compensation by FTS(Fast Tool Servo), aspheric mirrors with the from accuracy of submicron order are obtained. obtained.

• 한국공작기계학회논문집
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• 제12권6호
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• pp.44-49
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• 2003

To obtain the surface roughness with range from 10nm to 1nm we need the study of ultra-precision machine, cutting condition, and materials. In this paper, the optimal cutting conditions for getting mirror surface of aluminum alloy have been examined experimentally by using ultra-precision turning machine and sing1e crystal diamond tool. In generally, the cutting conditions such as feed rate and depth of cut have effect on the surface roughness in ultra-precision turning. The result of surface roughness was measured by the ZYGO New View 200. Therefore, The surface roughness and cutting conditions has been clarified. The smooth surface of aluminum alloy less than 1nm RMS, 1nm Rmax can be obtained by the ultra-precision cutting.

• 한국정밀공학회지
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• 제27권7호
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• pp.94-100
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• 2010

This paper describes the design and evaluation procedure of an ultra-precision rotary table for freeform generating machined tools. Design of the thrust and journal hydrostatic bearings and experimental evaluation of the table were performed. To get the compact size and less lost motion direct drive servomotor with ultra precision encoder. From the considered design, following performance were confirmed by experiment. The total stiffness of the prototype rotary table was 483.6 $N/{\mu}m$ and 97.6 $N/{\mu}m$ for axial and radial direction, respectively. Rotational accuracy of the table was investigated by capacitive sensor and reversal measurement technique, and 0.10 ${\mu}m$ radial direction and 0.05 ${\mu}m$ axial direction of the rotational accuracy were confirmed. The micro resolution of the table was also investigated with displacement of capacitive sensor, and $0.5/10000^{\circ}$ of micro resolution was confirmed. Index accuracy of the table was evaluated by the autocollimator and polygon mirror, and the $\pm0.39$ arcsec accuracy and $\pm0.16$ arcsec repeatability of the table were confirmed. Those are under the general requirements of ultra precision rotary tables for freeform generating machined tools.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.283-286
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• 2002

This paper presents the straightness compensation system which is a device for improving the machining accuracy of ultra-precision machines by synchronizing the position of diamond tool tip with machine error motion. Sine it is actuated by piezoelectric actuator with highly nonlinear hysteresis characteristics, the feedback control schemes such as Proportional Integral(PI), are required and realized by measuring the displacements of diamond tool tip. for the better tracking performance, the controller was implemented using TMS320C32 32bit floating-point DSP which is fast so that the real-time control is possible. In addition, stand alone type DSP board was chosen fur the easy assembly into the ultra-precision machines. The experimental results show good command tracking performance and the motion error of the machine is satisfactorily compensated during the machining process.

• 한국정밀공학회지
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• 제28권3호
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• pp.259-264
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• 2011

Authors are carrying out a national project which develops an accuracy simulation technology of mechanical machines to predict the stiffness and accuracy of machine components or entire machine in the design stage. Analysis methods in this technology are generalized to achieve the wide applicability and to be utilized as a web based platform type. In this paper, outline of the project such as concept, aim and configuration is introduced. Contents of the research are also introduced, which are composed of four main research fields; structural dynamics, linear motion analysis, rotary motion analysis and control and vibration analysis. Finally, a future plan is presented which is made up with three stages for the advance toward an ultimate manufacturing tools.

• 한국정밀공학회지
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• 제28권3호
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• pp.265-274
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• 2011

This paper presents current state of the prediction simulator of structural characteristics of machinery equipment accuracy. Developed accuracy prediction simulator proceeds and estimates the structural analysis between the designer and simulator through the internet for convenience of designer. 3D CAD model which is input to the accuracy prediction simulator would simplified by the process of removing the small hole, fillet and chamfer. And the structural surface joints would be presented as the spring elements and damping elements for the structural analysis. The structural analysis of machinery equipment joints, containing rotary motion unit, linear motion unit, mounting device and bolted joint, are presented using Finite Element Method and their experiment. Finally, a general method is presented to tune the static stiffness at a rotation joint considering the whole machinery equipment system by interactive use of Finite Element Method and static load experiment.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 추계학술대회
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• pp.83-88
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• 2003

In this study, experiments were conducted with an ultra-precision machine, developed In domestic, to find the characteristics and the most suitable cutting conditions of ultra-precision machining. To maximize the performance of the machine, the machine was installed in a room that is protected from vibration and is maintained constant temperature and constant humidity. Selected work pieces are an aluminum-alloyed material, which has excellent corrosion resistance and has low deformation. The used tool is synthetic poly crystal diamond which has excellent abrasion resistance and has low affinity. Four types of tool nose radius were used such as 0, 0.1, 0.2 and 0.4mm. Machining is performed with cutting speed of 500, 800 and 1000m/min., feed rate of 0.005, 0.008, 0.010mm/rev. and cutting depth of 0.0005, 0.0025 and 0.005mm respectively which can generally be used in the field as a cutting condition. As a method of evaluation surface roughness was measured for each cutting condition and reciprocal characteristics are computed for each tool nose radius, cutting speed, feed rate and cutting depth. As a result the most suitable cutting condition and characteristics of ultra-precision machining were identified which can usefully be applied in the industrial field.