• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.4
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• pp.44-48
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• 2006

Recently, demand the ultra precision product which is increasing rapidly is used extensively frontier industry field such as semi-conductor, computer, aerospace, precision machine. Ultra precision processing is the portion that is very needed to NT in the field of mechanical engineering. The latest date, together with radical advancement of electronic and photonics industry, necessity of ultra precision processing is on the increase for the manufacture of various kernel parts those are connected with these industrial fields. Specially, require motion accuracy of high resolution of nm order in stroke of hundreds millimeters according as diameter of processing object great and processing accuracy rises. In this case ,the response speed absolute delay because inertial mass of moving part is very large. Therefore, real time motion error compensation becomes very hardly. In this paper, we used ultra precision cutting unit(UPCU) to cope such problem. a UPCU is designed and tested to obtain sub-micrometer from accuracy in diamond turning of flat surfaces. The thermal growth spindle error is compensated for real time using a UPCU driven by piezoelectric actuator along with a laser encoder displacement sensor.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.993-998
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• 2002

Ultra precision processing technology is the field which is seriously protected its technology by advanced nations. Because of this reason, this technology is very difficult to supply for domestic companies, also domestic companies are revealed the limit of technology development by itself. And then, those are depend on the technology development of advanced nation, domestic companies are not conquer application step with already developed parts. Of course, some cases of its research are succeed. those are included element technology, system technology and so on, for development of ultra precision processing system. To conquer technology holding ultra precision processing accuracy of no level, active research are needed. In this paper, stability of ultra precision cutting unit is analyzed, this unit is the kernel unit in ultra precision processing machine. According to alteration of shape and material about hinge, stability investigation is performed Through this stability investigation, trial and error is reduced in design and manufacture, at the same time, we are accumulated foundation data for un it control.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.7
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• pp.233-240
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• 2003

Recently, the world are preparing for new revolution, called as If (Information Technology), NT (Nano-Technology), and BT (Bio-Technology). NT can be applied to various fields such as semiconductor-micro technology. Ultra precision processing is required for NT in the field of mechanical engineering. Recently, together with radical advancement of electronic and photonics industry, necessity of ultra precision processing is on the increase for the manufacture of various kernel parts. Therefore, in this paper, stability of ultra precision cutting unit is investigated, this unit is the kernel unit in ultra precision processing machine. According to alteration of shape and material about hinge, stability investigation is performed. In this paper, hinge shapes of micro stage in UPCU(Ultra Precision Cutting Unit) are designed as two types, where, hinge shapes are composed of round and rectangularity. Elasticity and strength are analyzed about micro stage, according to hinge shapes, by FE analysis. Micro stage in ultra precision processing machine has to keep hinge shape under cutting condition with 3-component force (cutting component, axial component, radial component) and to reduce modification against cutting force. Then we investigated its elasticity and its strength against these conditions. Material of micro stage is generally used to duralumin with small thermal deformation. But, stability of micro stage is investigated, according to elasticity and strength due to various materials, by FE analysis. Where, Used materials are composed of aluminum of low strength and cooper of medium strength and spring steel of high strength. Through this stability investigation, trial and error is reduced in design and manufacture, at the same time, we are accumulated foundation data for unit control.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.65-72
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.1
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• pp.86-95
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• 2011

Ultra-precision machining technology is the essential core technology in today's micro-electronics and electro-optical industries. The needs for processing systems to manufacture products to nanometer(nm) accuracy and sub-nanometer resolutions are increased recently. By using ion beam, it is possible to fabricate ultra-precision and ultra-fine products with nm accuracy and sub-nm resolution. In this paper, the basic research trends of ultra precision machining technology in domestic are surveyed, and the ways to reach to the world-leading level of basic research capabilities in the field of ultra-precision machining technology in domestic is suggested.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.103-104
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• 2006

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.6
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• pp.621-628
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• 2009

Because the Ultra-Precision Technology increase its competitiveness in the field of the design, precision of processing technology, confidence and fixation degree are major considerations. According to Pattern shapes using these processing technologies, Light Reflection has influence on the sense of sight about human being. Based on background of these studies, we draw a plan about a round workpiece using a 3D design program and analyze the effect on Light Reflection changing a pattern angle and a source of light through SPEOS program in this research. We make Pattern form as V-Shape, and compare the area distributed by Light Reflection by classifying angle into 4 and analyze changes according to a source of light. In order to measure and evaluate the data from simulation analysis we has manufactured Diamond Tool and has processed Pattern precision using a Ultra-Precision Machine. Based on the result of this study, we forecast that the field of design will achieve rapid growth due to Ultra-Precision Technology in the world market.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.178-178
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• 2009

High-density optical information storing equipment, which is using Blu-ray, is the next generation information storing equipment that has about form six times to thirty-five times capacities. and high-density optical information storing equipment uses high NA(Numerical Aperture) aspheric glass objective lens as optical pick-up equipment to record and recognize high-density date. Generally this objective lens is developed and produced through a way of GMP(Glass Molding Press) that uses molding core that is performde by Ultra precision grinding, but grinding performing that has high-accuracy is very difficult because objective lens form is high NA. In this research, we preformed Ultra precision turning, using single crystal diamond bite, about WC(Co 0.5%), sintering brittleness material that is used molding core's material for GMP. and we confirmed aspheric glass lens compression of deformities molding core's Ultra precision turning possibility by measuring surface roughness(Ra) and processing surface's condition.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.11
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• pp.893-898
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• 2016

Plastic array lens are cheap to manufacture; however, plastic is not resistant to high temperatures and moisture. Optical glass represents a better solution but is a more-expensive alternative. Glass array lens can be produced using lithography or precision-molding techniques. The lithography process is commonly used, for instance, in the semiconductor industry; however, the manufacturing costs are high, the processing time is quite long, and spherical aberration is a problem. To obtain high-order aspherical shapes, mold-core manufacturing is conducted through ultra-precision grinding machining. In this paper, a $4{\times}1$ mold core was manufactured using an ultra-precision machine with a jig for the injection molding of an aspherical array lens. The machined mold core was measured using the Form TalySurf PGI 2+ contact-stylus profilometer. The measurement data of the mold core are suitable for the design criterion of below 0.5 um.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.416-421
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• 2003

To obtain the surface roughness with range from l0nm to In n need a ultra-Precision machine, cutting condition and the study of materials. And n have to also consider the chip and vibration of diamond tool during processing. In this paper, the cutting conditions for getting mirror surface of aluminum alloy have been examined experimentally by using ultra-precision turning and single crystal diamond tool. In generally, the cutting conditions have effect on the surface roughness in ultra-precision turning. The result of surface roughness was measured by the ZYGO New View 200.