• 제목/요약/키워드: Ultra Precision Polishing

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MR Fluid Polishing을 이용한 Co-Cr-Mo alloy의 초정밀 연마 방법 (A Study on The Ultra-precision Polishing Method of Co-Cr-Mo alloy Using MR Fluid Polishing)

  • 신봉철;김병찬;송기혁;조명우
    • Design & Manufacturing
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    • 제11권3호
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    • pp.8-12
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    • 2017
  • In general, metallic bio-materials is more widely used in solid tissue like bone or tooth than flexible tissue such as skin or muscle. Especially, Cobalt Chrome Molybdenum(Co-Cr-Mo), which is used in tooth surgery, has a great corrosion resistance. Because this bio-material is non-toxic in human body, and has a bio-compatibility that the vital reaction is not occurred with tissue in body. However the chemical reaction is occurred by fatal matter that deteriorate the property of material surface in conventional polishing, and it can affect to fatal disease in human body or decrease the material properties such as hardness, yield strength or bio-compatibility. This surface in poor condition can cause development of corrosion or bacteria. In this study, MR fluid polishing is used to minimize the scratch, pit or surface flaws generated in conventional polishing. Surface roughness is measured according to the polishing condition to obtain fine surface condition.

웨이퍼 폴리싱 공정의 회전속도와 진폭속도에 따른 가공특성 연구 (A Study on the Characteristics of a Wafer-Polishing Process at Various Machining and Oscillation Speed)

  • 이은상;이상균;김성현;원종구
    • 한국기계가공학회지
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    • 제11권1호
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    • pp.1-6
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    • 2012
  • The polishing of silicon wafers has an important role in semiconductor manufacturing. Generally, getting a flat surface such as a mirror is the purpose of the process. The wafer surface roughness is affected by many variables such as the characteristics of the carrier head unit, operation, speed, the pad and slurry temperature. Optimum process conditions for experimental temperature, pH value, down-force, slurry ratio are investigated, time is used as a fixed factor. This study carried out a series of experiments at varying platen, chuck rpm and oscillation cpm taking particular note of the difference between the rpm and the affect it has on the surface roughness. In this experiment determine the optimum conditions for polishing silicone wafers.

자기유변유체 연마공정을 응용한 미세부품의 형상가공 (Farbrication of Repeated 3D Shapes using Magnetorheological Fluid Polishing)

  • 김용재;민병권;이상조;석종원
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1265-1268
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    • 2005
  • Due to the increase of the need for reliable high density information storage devices, the demand for precise machining of the slider in HDD is rapidly growing. The present fabrication process of slider bears some serious problems such as low yield ratio in mass production, which is mainly caused by inefficient machining processes in shaping camber and crown on the slider. In order to increase slider yield ratio in HDD, a new systematic machining process is proposed and developed in this work. This new machining process includes the use of magnetorheological (MR) fluid, a smart polishing material generally used for ultra-fine surface finishing of micro structures. It is shown that the process proposed in this work enables to make camber and crown pattern in the scale of few tens of nanometers. Experiment results shows that the MR polishing can be also used for shaping process of micro structures.

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적외선 카메라용 반사경의 초정밀 절삭특성에 관한 연구 (A Study on the Characteristics on Ultra Precision Machining of IR Camera Mirror)

  • 김건희;김효식;신현수;원종호;양순철
    • 한국정밀공학회지
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    • 제23권5호
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    • pp.44-50
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    • 2006
  • This paper describs about the technique of ultra-precision machining for an infrared(IR) camera aspheric mirror. A 200 mm diameter aspheric mirror was fabricated by SPDTM(Single Point Diamond Turning Machine). Aluminum alloy as mirror substrates is known to be easily machined, but not polishable due to its ductility. Aspheric large reflector without a polishing process, the surface roughness of 5 nm Ra, and the form error of ${\lambda}/2\;({\lambda}=632.8\;nm)$ for reference curved surface 200 mm has been required. The purpose of this research is to find the optimum machining conditions for cutting reflector using Al6061-T651 and apply the SPDTM technique to the manufacturing of ultra precision optical components of Al-alloy aspheric reflector. The cutting force and the surface roughness are measured according to each cutting conditions feed rate, depth of cut and cutting speed, using diamond turning machine to perform cutting processing. As a result, the surface roughness is good when feed rate is 1mm/min, depth of cut $4{\mu}m$ and cutting speed is 220 m/min. We could machined the primary mirror for IR camera in diamond machine with a surface roughness within $0.483{\mu}m$ Rt on aspheric.

Head Mounted Display 광학계 초정밀 가공특성에 관한 연구 (A Study on the Characteristics on Ultra Precision Machining of HMD Optical System)

  • 양순철;김건희;김효식;신현수;김명상;원종호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.184-187
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    • 2005
  • This paper is described about the technique of ultra-precision machining for optical parts in HMD system. Machining technique for PMMA and BK7 with single point diamond turning machining is reported in this paper. The main factors influencing on the machined surface quality are discovered and regularities of machining process are drawn. The purpose of our research is to find the optimum machining conditions fur cutting of PMMA and grinding of BK7. Also, apply the SPDTM technique to the manufacturing of ultra precision optical components of HMD system. Aspheric PMMA lens without a polishing process, the surface roughness of 5 nm Ra, and the form error of ${\lambda}/2\;({\lambda}=632.8nm)$ for reference curved surface 30 mm has been required.

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다이아몬드 터닝머신을 이용한 금속 비구면 초정밀 절삭특성 (A study of metal aspheric reflector manufacturing in diamond turning machine)

  • 김건희;도철진;홍권희;유병주;원종호;김상석
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집C
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    • pp.83-87
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    • 2001
  • A 110 mm diameter aspheric metal secondary mirror for a test model of an earth observation satellite camera was fabricated by ultra-precision single point diamond turning (SPDT). Aluminum alloy for mirror substrates is known to be easily machinable, but not polishable due to its ductility. A harder material, Ni, is usually electrolessly coated on an Al substrate to increase the surface hardness for optical polishing. Aspheric metal secondary mirror without a conventional polishing process, the surface roughness of Ra=10nm, and the form error of $Ra={\lambda}/12({\lambda}=632nm)$ has been required. The purpose of this research is to find the optimum machining conditions for reflector cutting of electroless-Ni coated Al alloy and apply the SPDT technique to the manufacturing of ultra precision optical components of metal aspheric reflector.

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초정밀 단속 절삭을 이용한 다각형 미러의 절삭특성에 관한 연구 (A study of ultra-precision interrupt machining for an polygon mirror)

  • 박순섭;이기용;김형모;이재설
    • 한국기계가공학회지
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    • 제6권3호
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    • pp.65-70
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    • 2007
  • Generally, the core component of small precise optical device demands high accuracy of manufacturing processes. Although, the geometry of it is simple, the manufacturing technique to materialize is categorized as the ultra-precision machining and it must be done with the specialized machines and by the trained operator. Typical examples of small precise optical device are laser printer and phone camera. As a core part of laser printer, polygon mirror is used in laser scanning unit(LSU). It couldn't be fabricated with conventional machine but specified machine for polygon mirror machining. In this study, Polygon mirror with 16 surfaces was manufactured in the process of ultra-precision fly-cutting with Al material and investigated optimum machining conditions in terms of feedrate, pitch per cycle and depth of cut. Owing to process of polishing has bad influence on reflection angle, surface roughness, $R_{max}$=10nm, and form error, $Ra={\lambda}/10({\lambda}=632nm)$, are prerequisites for polygon mirror.

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Novel grinding control method for nanometric surface roughness for space optical surfaces

  • Han, Jeong-Yeol;Kim, Sug-Whan;Kim, Geon-Hee;Kim, Ju-Whan
    • 한국우주과학회:학술대회논문집(한국우주과학회보)
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    • 한국우주과학회 2004년도 한국우주과학회보 제13권1호
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    • pp.33-33
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    • 2004
  • Traditional bound abrasive grinding leaves the machine marks and subsurface damages ranging from 1 to few tens microns ms in height. These are removed typically by subsequent craftmen-based loose abrasive lapping, polishing and figuring. Using the multi-variable regression technique, we established a new automated grinding process control method for the removal of loose abrasive lapping from the traditional fabrication process. (omitted)

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적외선 광학소자의 초정밀 절삭특성에 관한 연구 (The characteristics of Ultra Precision Machine of Optical crystals for Infrared Ray)

  • 김건희;양순철;김효식;신현수;원종호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.414-417
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    • 2005
  • Single point diamond turning technique for optical crystals is studied in this paper. The main factors which are influential the machined surface quality are discovered and regularities of machining process are drawn. Optical crystals have found more and more important applications in the field of modern optics. Optical crystals are mostly brittle materials of poor machinability. The traditional machining method is polishing which has many shortcomings such as low production efficiency, poor ability to be automatically controlled and edge effect of the workpiece. The purpose of our research is to find the optimal machining conditions for ductile cutting of optical crystals and to apply the SPDT technique to the manufacturing of ultra precision optical components of brittle material(Ge). Many technical challenges are being tried for the large space infrared telescope, which is one of the major objectives of the National Strategic Technology Road Map (NSTRM).

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금형용 WC-Co의 초정밀 연삭 가공 조건에 관한 연구 (Study on Ultra-Precision Grinding Condition of WC-Co)

  • S.J. Heo;J.H. Kang;W.I. KIm
    • 한국정밀공학회지
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    • 제10권1호
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    • pp.42-51
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    • 1993
  • Recently, WC-Co have some excellent properities as the material for the mechanical component such as metallic moulding parts, ball dies parts, and punch parts. This paper describes the surface roughness and grinding force caused by experimental study on the surface grinding of WC-Co with ultra-precision like a mirror shape using diamond wheel. Also, some investigations are carried out using WA grinding wheel to increase improved ground surface roughness such as polishing, lapping effect. Some important results obtained here are summarized as follow. 1) Within this experimental grinding condition, we can be obtained $R_{max}.\;2\mu\textrm{m}\;R_a\;0.3\mu\textrm{m}$ whichare the most favourable ground surface roughness using #140 diamond wheel, and improved surface roughness values about 20 .approx. 25% throughout 5 times sparkout grinding 2) The value of surface roughness is Rmax. $0.49\mu\textrm{m},\;R_a\;0.06\mu\textrm{m}$ using #600 diamond wheel. 3) The area of no rack zone is less than $F_{n}$ 0.27N/mm, Ft 0.009N/mm

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