• Title/Summary/Keyword: UV-emission

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Oxygen Ion Beam Deposition 법을 이용한 저온 ITO film에 Oxygen radical(O)이 미치는 영향에 대한 연구

  • 김정식;배정운;김형종;정창현;이내응;염근영
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.117-117
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    • 2000
  • 높은 광학적 투과성과 전기전도성을 갖는 ITO film은 solar cell같은 optoelectronic device나 휴대용 소형 TV, flat panel display 등의 투명전극으로 그 응용 분야가 광범위하여 많은 연구가 수행되어져 왔다. 기판으로서 유리를 사용할 때 생기는 활용범위 제한을 극복하고자 최근 유기물 위에 증착이 가능한 저온 증착방법에 대한 연구가 활발히 이루어지고 있다. 그 가운데 이온빔과 같은 energetic한 beam을 이용한 박막의 제조는 기판을 플라즈마 발생지역으로부터 분리시켜 이온빔의 flux 및 에너지, 입사각 등의 자유로운 조절을 통해 상온에서도 우수한 성질의 박막형성 가능성이 제시되어 지고 있다. ITO박막을 형성하는 방법 중 스프레이법이나 CVD법과 같은 화학적 증착방법은 증착시 350-50$0^{\circ}C$의 고온이 필요하고 현재 가장 많이 응용되어 지고 있는 sputter법은 15$0^{\circ}C$정도의 가열이 필요하므로 앞으로 응용가능성이 매우 커서 많은 연구가 진행중인 플라스틱과 아크릴 같은 flexible 한 기판위 증착에 적용이 불가능하다. 본 실험에서는 IBAD(Ion Beam Assisted Deposition)법을 이용하여 저온 ITO film을 유리와 유기막위에 증착하는 연구를 수행하였다. 유기막위에 증착된 ITO는 보다 가볍고 충격에 강하고 유리에 못지 않은 투과성을 가지고 있으나 현재 film의 quality 향상에 대한 요구가 증대되어 지고 있는 실정이다. 따라서, 본 실험에서는 dual oxygen ion gun의 조건변화에 따른 ITO film의 특성변화를 관찰하였다. 고정된 증?율에 한 개 ion gun에 ion flux를 고정시킨 후 또 다른 ion gun에서 발생하는 oxygen radical의 영향을 조사하였으며 oxygen radical의 rf power에 따른 변화는 OES(Optical emission spectroscopy)를 사용하였다. 너무 적은 oxygen ion beam flux나 oxygen radical은 film의 전도도 및 투과도를 저하시켰고 반면 너무 과도한 flux의 증가 시는 전도도는 감소하였고 투과도는 증가하는 경향을 보였다. 기판에 도달하는 oxygen ion flux는 faraday cup을 이용하여 측정하였으며 증착된 ITO film은 XPS, UV-spectrometer, 4-point probe를 이용하여 분석하였다.

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TFT 채널층으로 사용하기 위한 IGZO박막의 산소분압에 따른 특성변화

  • Sin, Ju-Hong;Kim, Ji-Hong;No, Ji-Hyeong;Lee, Gyeong-Ju;Kim, Jae-Won;Do, Gang-Min;Park, Jae-Ho;Jo, Seul-Gi;Yeo, In-Hyeong;Mun, Byeong-Mu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.260-260
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    • 2011
  • 투명 비정질 산화물반도체는 디스플레이의 구동소자인 박막 트랜지스터에 채널층으로 사용된다. 또한 투명하면서 유연성이 있는 소자를 저비용으로 제작할 수 있는 장점을 가진다. 투명 산화물반도체 재료 중 IGZO는 Si 또는 GaAs와 같은 공유결합성 반도체와는 다른 전자 배치로 전도대가 금속이온의 ns 궤도에서 형성되며, 가전도대가 산소 음이온의 2p 궤도에서 형성된다. 특히 큰 반경의 금속 양이온은 인접한 양이온과 궤도 겹침이 크게 발생하게 되며 캐리어의 효과적인 이동 경로를 제공해줌으로써 다른 비정질 반도체와는 다르게 높은 전하이동도(~10 $cm^2$/Vs)를 가진다. 따라서 저온공정에서 우수한 성능의 TFT소자를 제작할 수 있는 장점이 있다. 본 연구에서는 TFT 채널층으로 사용하기 위한 a-IGZO박막의 산소분압에 따른 특성변화를 분석 하였다. a-IGZO박막은 Pulsed Laser Deposition (PLD)를 이용하여 산소분압(20~200 mTorr) 변화에 따라 Glass기판에 증착하였다. 증착된 a-IGZO 박막의 구조적 특성으로는 X-ray diffraction (XRD), Field emission scanning electron microscopy (FE-SEM), 광학적 특성은 UV-vis spectroscopy 분석을 통해서 알아보았다. TFT 채널층의 조건으로는 낮은 off-current, 높은 on-off ratio를 위해 고저항 ($10^3\;{\Omega}cm$)의 진성반도체 성질과 source/drain금속과의 낮은 접촉저항(ohmic contact) 등의 전기적 성질이 필요하다. 따라서 이러한 전기적 특성확인을 위해 transmission line method (TLM)을 사용하여 접촉저항과 비저항을 측정하였고, 채널층으로 적합한 분압조건을 확인해볼 수 있었다.

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Study of the Nitrogen-Beam Irradiation Effects on ALD-ZnO Films (ALD로 성장된 ZnO박막에 대한 질소이온 조사효과)

  • Kim, H.S.
    • Journal of the Korean Vacuum Society
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    • v.18 no.5
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    • pp.384-389
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    • 2009
  • ZnO, a wurtzite lattice structure, has attracted much attention as a promising material for light-emitting diodes (LEDs) due to highly efficient UV emission resulting from its large band gap of 3.37 eV, large exciton binding energy of 60 meV, and low power threshold for optical pumping at room temperature. For the realization of LEDs, both n-type ZnO and p-type ZnO are required. Now, n-type ZnO for practical applications is available; however, p-type ZnO still has many drawbacks. In this study, ZnO films were grown on glass substrates by using atomic layer deposition (ALD) and the ZnO films were irradiated by nitrogen ion beams (20 keV, $10^{13}{\sim}10^{15}ions/cm^2$). The effects of nitrogen-beam irradiation on the ZnO structure as well as the electrical property were investigated by using fieldemission scanning electron microscopy (FESEM) and Hall-effect measurement.

유연성 기판위에 전기화학증착법으로 성장된 ZnO 나노로드의 광학적 특성연구

  • Kim, Myeong-Seop;Go, Yeong-Hwan;Yu, Jae-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.439-439
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    • 2012
  • ZnO 나노로드는 큰 밴드갭 에너지(~3.37 eV)와 60 meV의 높은 엑시톤 결합 에너지(exciton binding energy)를 갖고 있으며, 우수한 전기적, 광학적 특성을 지닌 1차원 나노구조의 금속산화물로서 태양전지 및 광전소자 널리 응용되고 있다. 이러한 ZnO 나노로드를 성장하는 방법 중에 전기화학증착법(electrochemical deposition method)은 전도성 물질위에 증착된 시드층(seed layer)을 성장용액에 담그어 전압을 인가하여 만들기 때문에 기존의 수열합성법(hydrothermal method), 졸-겔 법(sol-gel method)보다 비교적 간단한 공정과정으로 저온에서 빠르게 물질을 성장시킬 수 있는 장점이 있다. 한편, 디스플레이 산업에서 ITO (indium tin oxide)는 투명 전도성 산화물(transparent conductive oxide)로써 가시광 파장영역에서 높은 투과율과 전도성을 가지며, 액정디스플레이, LED (Light emitting diode), 태양전지 등의 다양한 소자에 투명전극 재료로 쓰이고 있다. 또한 최근 ITO를 유연한 PET (polyethylene terephthalate) 기판 위에 증착은 얇고, 가볍고, 휘어지기 쉬워 휴대하기 편하기 때문에 차세대 광전자소자 응용에 가능성이 크다. 본 연구에서는 ZnO 나노로드를 ITO/PET 기판위에 전기화학증착법으로 성장하여, 구조적 및 광학적 특성을 분석하였다. 시드층을 형성하기 위해 RF 마그네트론 스퍼터를 이용하여 ~20 nm 두께의 ZnO 박막을 증착시킨 후, zinc nitrate와 hexamethylenetetramine이 포함된 수용액에 시료를 담그어 전압을 인가하였다. 용액의 농도와 인가전압을 조절하여 여러 가지 성장조건에 대한 ZnO 나노로드의 구조적, 광학적 특성을 비교하였다. 성장된 시료의 형태와 결정성을 조사하기 위해, field-emission scanning electron microscope (FE-SEM), X-ray diffraction (XRD)을 사용하였으며, UV-vis-NIS spectrophotometer, photoluminescence (PL) 측정장비를 사용하여 광학적 특성을 분석하였다.

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Study on Poisonous Gas Emission Characteristic of Taxidermied Specimen for Conservation Environment (박제 표본의 보존환경에 따른 유해가스 방출 특성 연구)

  • Lee, Hee Jung;Kang, Dai Ill
    • Journal of Conservation Science
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    • v.29 no.4
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    • pp.389-394
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    • 2013
  • Taxidermied specimen is the art of preparing, stuffing, and mounting the skins of animals (all vertebrate species of animals including mammals, birds, reptiles, and fishes) for display or for other sources of study. But, as these studies are weighted toward ecologic study, related studies on management and conservation environment are short. Also, the analysis of poisonous gas has not yet been studied. Therefore, this study will be suggested proper preservation methods through the analysis of deterioration on taxidermied specimen by poisonous gas. As a result, 4 types of major chemicals were detected in UV deterioration test, 7 types in RH and formaldehyde deterioration test. As a result of SPME, Naphthalene to be used as antiseptic were detected in all of the test conditions. Acetic acid that is VOCs were detected for factor. Moreover as the higher humidity it was, the concentration of chemicals were decreased.

Distributions of Formaldehyde in Seoul in June, 2005 (2005년 6월의 서울시 대기의 포름알데히드 농도분포 특징)

  • Hwang Jung hoon;Lee Mee hye;Lee Gang woong;Han Jin seock
    • Journal of Korean Society for Atmospheric Environment
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    • v.22 no.1
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    • pp.63-71
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    • 2006
  • An automated carbonyl measurement system was constructed. Atmospheric carbonyl compounds were extracted onto DNPH containing collection solution while flowing through a glass coil. Each carbonyl species was separated on a HPLC column and quantified by UV absorption detector. Using this system, carbonyl compounds were continuously measured at the campus of Korea University in Seoul, Korea during June, 2005. Sampling resolution was 30 minutes and the detection limit of HCHO was 0.19 ppbv. Also, $\O_{3}$, it's precursors, and meteorological parameters were measured. The maximum, minimum, average, and median concentrations of HCHO during the whole experiment was 35.8 ppbv, 1.4 ppbv, 11.7 ppbv, and 9.3 ppbv respectively. Formaldehyde showed a distinct diurnal variation with a broad maximum around 13 $\sim$ 15, which was 1 $\sim$ 3 hours ahead of an ozone maximum. During a couple of days, however, HCHO concentrations were kept high through the night or increased concomitantly with NOx in the morning. These results imply that HCHO was mainly produced from the photochemical oxidation of VOCs, but local emission sources couldn't be ruled out. The differences between daily maximum and minimum of $O_{3}$ and HCHO were calculated for 11 days of June, when typical diurnal variations were observed for the two species. A strong positive correlation was found between $\Delta O_{3}$ and $\Delta HCHO$ and the average mole ratio of $\Delta HCHO$ to $\Delta O_{3}$ was 2.6. It indicates that formaldehyde played a key role in $\Delta O_{3}$ production as an indicator species in Metropolitan Seoul during June, 2005.

PHYSICAL PROPERTIES OF THE GIANT H II REGION G353.2+0.9 IN NGC 6357

  • BOHIGAS JOAQUIN;TAPIA MAURICIO;ROTH MIGUEL;RUlZ MARIA TERESA
    • Journal of The Korean Astronomical Society
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    • v.37 no.4
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    • pp.281-284
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    • 2004
  • Optical imaging and spectroscopy of G353.2+0.9, the brightest part of the giant H II region NGC 6357, shows that this H II region is optically thin, contains ${\~}300\;M_{\bigodot}$ of ionized gas and is probably expanding into the surrounding medium. Its chemical composition is similar to that found in other H II regions at similar galactocentric distances if temperature fluctuations are significant. The inner regions are probably made of thin shells and filaments, whereas extended slabs of material, maybe shells seen edge-on, are found in the periphery. The radio continuum and H$\alpha$ emission maps are very similar, indicating that most of the optical nebula is not embedded in the denser regions traced by molecular gas and the presence of IR sources. About $10^{50}$ UV photons per second are required to produce the H$\beta$ flux from the 1l.3'${\times}$10' region surrounding the Pis 24 cluster that is south of G353.2+0.9. Most of the energy powering this region is produced by the 03-7 stars in Pis 24. Most of the 2MASS sources in the field with large infrared excesses are within G353.2+0.9, indicating that the most recent star forming process occured within it. The formation of Pis 24 preceded and caused the formation of this new generation of stars and may be responsible for the present-day morphology of the entire NGC 6357 region.

ZnO Hierarchical Nanostructures Fabricated by Electrospinning and Hydrothermal Methods for Photoelectrochemical Cell Electrodes (전기방사와 수열합성법으로 제작한 광전화학셀 전극용 나노 계층형 아연산화물 구조 연구)

  • Yi, Hwanpyo;Jung, Hyuck;Kim, Okkil;Kim, Hyojin;Kim, Dojin
    • Korean Journal of Materials Research
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    • v.23 no.11
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    • pp.655-660
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    • 2013
  • Photoelectrochemical cells have been used in photolysis of water to generate hydrogen as a clean energy source. A high efficiency electrode for photoelectrochemical cell systems was realized using a ZnO hierarchical nanostructure. A ZnO nanofiber mat structure was fabricated by electrospinning of Zn solution on the substrate, followed by oxidation; on this substrate, hydrothermal synthesis of ZnO nanorods on the ZnO nanofibers was carried out to form a ZnO hierarchical structure. The thickness of the nanofiber mat and the thermal annealing temperature were determined as the parameters for optimization. The morphology of the structures was examined by field-emission scanning electron microscopy, transmission electron microscopy, and X-ray diffraction. The performance of the ZnO nanofiber mat and the potential of the ZnO hierarchical structures as photoelectrochemical cell electrodes were evaluated by measurement of the photoelectron conversion efficiencies under UV light. The highest photoconversion efficiency observed was 63 % with a ZnO hierarchical structure annealed at $400^{\circ}C$ in air. The morphology and the crystalline quality of the electrode materials greatly influenced the electrode performance. Therefore, the combination of the two fabrication methods, electrospinning and hydrothermal synthesis, was successfully applied to fabricate a high performance photoelectrochemical cell electrode.

Influence of Crystal Structure on the Chemical Bonding Nature and Photocatalytic Activity of Hexagonal and Cubic Perovskite Compounds

  • Lee, Sun-Hee;Kim, In-Young;Kim, Tae-Woo;Hwang, Seong-Ju
    • Bulletin of the Korean Chemical Society
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    • v.29 no.4
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    • pp.817-821
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    • 2008
  • We have investigated the influence of the crystal structure on the chemical bonding nature and photocatalytic activity of cubic and hexagonal perovskite A[$Cr_{1/2}Ta_{1/2}$]O3 (A = Sr, Ba) compounds. According to neutron diffraction and field emission-scanning electron microscopy, the crystal structure and particle size of these compounds are strongly dependent on the nature of A-site cations. Also, it was found that the face-shared octahedra in the hexagonal phase are exclusively occupied by chromium ions, suggesting the presence of metallic (Cr-Cr) bonds. X-ray absorption and diffuse UV-vis spectroscopic analyses clearly demonstrated that, in comparison with cubic Sr[$Cr_{1/2}Ta_{1/2}$]$O_3$ phase, hexagonal Ba[$Cr_{1/2}Ta_{1/2}$]$O_3$ phase shows a decrease of Cr oxidation state as well as remarkable changes in interband Cr d-d transitions, which can be interpreted as a result of metallic (Cr-Cr) interactions. According to the test of photocatalytic activity, the present semiconducting materials have a distinct activity against the photodegradation of 4-chlorophenol. Also the Srbased compound was found to show a higher photocatalytic activity than the Ba-based one, which is attributable to its smaller particle size and its stronger absorption in visible light region.

Temperature-dependent Photoluminescence of Boron-doped ZnO Nanorods

  • Kim, Soaram;Park, Hyunggil;Nam, Giwoong;Yoon, Hyunsik;Kim, Jong Su;Kim, Jin Soo;Son, Jeong-Sik;Lee, Sang-Heon;Leem, Jae-Young
    • Bulletin of the Korean Chemical Society
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    • v.34 no.11
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    • pp.3335-3339
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    • 2013
  • Boron-doped ZnO (BZO) nanorods were grown on quartz substrates using hydrothermal synthesis, and the temperature-dependence of their photoluminescence (PL) was measured in order to investigate the origins of their PL properties. In the UV range, near-band-edge emission (NBE) was observed from 3.1 to 3.4 eV; this was attributed to various transitions including recombination of free excitons and their longitudinal optical (LO) phonon replicas, and donor-acceptor pair (DAP) recombination, depending on the local lattice configuration and the presence of defects. At a temperature of 12 K, the NBE produces seven peaks at 3.386, 3.368, 3.337, 3.296, 3.258, 3.184, and 3.106 eV. These peaks are, respectively, assigned to free excitons (FX), neutral-donor bound excitons ($D^{\circ}X$), and the first LO phonon replicas of $D^{\circ}X$, DAP, DAP-1LO, DAP-2LO, and DAP-3LO. The peak position of the FX and DAP were also fitted to Varshni's empirical formula for the variation in the band gap energy with temperature. The activation energy of FX was about ~70 meV, while that of DAP was about ~38 meV. We also discuss the low temperature PL near 2.251 eV, related to structural defects.