• 한국전기전자재료학회논문지
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• 제11권6호
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• pp.481-485
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• 1998

We investigated the generation of high pretilt angle for nematic liquid crystal (NLC) in a cell with obilique non-polarized ultraviolet (UV) light irradiation on mixtured polyimide surface. It was found that the monodomain alignment of NLC is obtained with an angle of incidence of 75∼85 degrees on PI surface. We consider that the monodomain alignment of NLC is attributed to anisotropic dispersion force effect to photo-depolymerization of polymer. We successfully observed that the pretilt angle of NLC is generated above 5 degree with an angle of incidence of 75∼85 degrees. It is considered that the pretilt angle generation NLC is attributed to interaction between the LC molecules and the polymer surfaces.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권2호
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• pp.132-139
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• 2000

This paper reports a novel micromachining process based on UV-LIGA process and (110) silicon anisotropic etching for fabrication of a high-aspect-ratio comb actuator. The comb electrodes are fabricated by (110) SILICON comb structure considering the etch-rate-ratio between (110) and (111) planes and lateral etch rate of a beam-type structure. The fabricated structure was$ 400\mum \; thick\; and\; 18\mum$ wide comb electrodes separated by $7\mim$ so that the height-gap ratio was about 57. Also considering resonant frequency of the comb actuator and the frequency-matching between sensing and driving mode for gyroscope application, we designed the number, width, height and length of the spring structures. Electroplated gold springs on both sides of the seismic mass were $15\mum\; wide,\; 14\mum\; thick\; and \; 500\mum$ long. The fabricated comb actuator had resonant frequency ay 1430Hz, which was calculated to be 1441Hz. The proposed fabrication process can be applicable to the fabrication of a high-aspect-ratio comb actuator for a large displacement actuator and precision sensors. Moreover, this combined process enables to fabricate a more complex structure which cannot be fabricate only by surface or bulk micromachining.

• 응용화학
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• 제15권1호
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• pp.17-20
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• 2011

A disposable light exposure detector kit has been developed by UV curing of a hydrogel material. The devised light exposure detector kit consisted of light sensitive structures, bottom plate, character sheet and sticky back plate. A light exposure detector kit has a serial light sensitive structures that contain various light sensitive dyes such as rhodamine and fluorescein. The light sensitive structure composed of UV curable hydrogel polymer material as a supporing material and photosensitive dye in a certain concentration. The fabrication procedure of the ligh exposure detector kit is very simple and fast due to UV curing procedure of a photopolymerizable hydrogel material such as poly(ethylene glycol) methyl ether acrylate (PEGMEA) and poly(ethylene glycol) diacrylate (PEGDA) with a photosensitive dye. By the proposed fabrication method, various size and shape of a light exposure detector kit could be fabricated using a flexible elastomer mold. Due to a fast and inexpensive fabrication method, the light exposure detector kit could be use a single use for various industrial applications. According to light irradation, the light sensitive structure on a light exposure detector kit could be lose its color by decomposition of a photosensitive dye chemical in the structure. Thus the amount of the exposed light on a substrate could easily be recognised by changing color or transparency of the structure.