• Title/Summary/Keyword: UV etching

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Design, Fabricaiton and Testing of a Piezoresistive Cantilever-Beam Microaccelerometer for Automotive Airbag Applications (에어백용 압저항형 외팔보 미소 가속도계의 설계, 제작 및 시험)

  • Ko, Jong-Soo;Cho, Young-Ho;Kwak, Byung-Man;Park, Kwan-Hum
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.20 no.2
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    • pp.408-413
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    • 1996
  • A self-diagnostic, air-damped, piezoresitive, cantilever-beam microaccelerometer has been designed, fabricated and tested for applications to automotive electronic airbag systems. A skew-symmetric proof-mass has been designed for self-diagnostic capability and zero transverse sensitivity. Two kinds of multi-step anisotropic etching processes are developed for beam thickness control and fillet-rounding formation, UV-curing paste has been used for sillicon-to-glass bounding. The resonant frequency of 2.07kHz has been measured from the fabricated devices. The sensitivity of 195 $\mu{V}$/g is obtained with a nonlinearity of 4% over $\pm$50g ranges. Flat amplitude response and frequency-proportional phase response have been obserbed, It is shown that the design and fabricaiton methods developed in the present study yield a simple, practical and effective mean for improving the performance, reliability as well as the reproducibility of the accelerometers.

Fabrication of Non Viral Vector for Drug and Gene Delivery using Particle Replication In Non-Wetting Templates (PRINT) Technique (Particle Replication In Non-Wetting Templates (PRINT) 방법을 이용한 약물 및 유전자 전달체의 제작)

  • Park, Ji-Young;Gratton, Stephanie;Benjamin, Maynor;Lim, Jomg Sung;Desimone, Joseph
    • Korean Chemical Engineering Research
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    • v.45 no.5
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    • pp.493-499
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    • 2007
  • Polymeric hydrogel particles were fabricated to demonstrate the scale-up possibilities with the Particle Replication In Non-wetting Templates (PRINT) process. A permanently etched, specifically designed master was made on a silicon wafer using conventional photolithography, then reactive ion etching. The master and substrate were used repeatedly to make a large number of identical elastomeric perfluoropolyethers (PFPE) replica molds. The PFPE replica molds were used to fabricate and harvest individual, monodisperse micron-sized particles using the PRINT process. A water-soluble polymer adhesive was used as a sacrificial layer for harvesting particles. Particles were composed of biodegradable poly (ethylene glycol) diacrylate (PEG-diA), and aminoethylacrylate (AEM) and 2-acryloxyethyltrimethyl ammonium chloride (AETMAC) were added to them for improving the uptake of the cells. This study suggested PRINT used to produce the uniformed and shape specific biodegradable polymer is the effective technique for the non viral vector for the drug and the gene delivery.

Fabrication of a Nano-Wire Grid Polarizer for Brightness Enhancement in TFT-LCD Display (TFT-LCD용 휘도 성능을 향상시키는 나노 와이어 그리드 편광 필름의 제작)

  • Huh, Jong-Wook;Nam, Su-Yong
    • Journal of the Korean Graphic Arts Communication Society
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    • v.29 no.3
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    • pp.105-124
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    • 2011
  • TFT-LCD consists of LCD panel on the top, circuit unit on the side and BLU on the bottom. The recent development issues of BLU-dependent TFT-LCD have been power consumption minimization, slimmerization and size maximization. As a result of this trend, LED is adopted as BLU instead of CCFL to increase brightness and to reduce thickness. In liquid crystal displays, the light efficiency is below 10% due to the loss of light in the path from a light source to an LCD panel and presence of absorptive polarizer. This low efficiency results in low brightness and high power consumption. One way to circumvent this situation is to use a reflective polarizer between backlight units and LCD panels. Since a nano-wire grid polarizer has been known as a reflective polarizer, an idea was proposed that it can be used for the enhancement of the brightness of LCD. The use of reflective polarizing film is increasing as edge type LED TV and 3D TV markets are growing. This study has been carried out to fabrication of the nano-wire grid polarizer(NWGP) and investigated the brightness enhancement of LCD through polarization recycling by placing a NWGP between an c and a backlight unit. NWGPs with a pitch of 200nm were fabricated using laser interference lithography and aluminum sputtering and wet etching. And The NWGP fabrication process was using by the UV imprinting and was applied to plastic PET film. In this case, the brightness of an LCD with NWGPs was 1.21 times higher than that without NWGPs due to polarization recycling.

Sterilization of Scoria Powder by Corona Discharge Plasma (코로나 방전 플라즈마를 이용한 화산암재 분말 살균)

  • Jo, Jin Oh;Lee, Ho Won;Mok, Young Sun
    • Applied Chemistry for Engineering
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    • v.25 no.4
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    • pp.386-391
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    • 2014
  • Atmospheric-pressure nonthermal corona discharge plasma was applied to the sterilization of biologically contaminated scoria powder. Escherichia coli (E. coli) culture solution was uniformly sprayed throughout the scoria powder for artificial inoculation, which was well mixed to ensure uniformity of the batch. The effect of the key parameters such as discharge power, treatment time, type of gas and electrode distance on the sterilization efficiency was examined and discussed. The experimental results revealed that the plasma treatment was very effective for the sterilization of scoria powder; 5-min treatment at 15 W could sterilize more than 99.9% of E. coli inoculated into the scoria powder. Increasing the discharge power, treatment time or applied voltage led to an improvement in the sterilization efficiency. The effect of type of gas on the sterilization efficiency was in order of oxygen, synthetic air (20% oxygen) and nitrogen from high to low. The inactivation of E. coli under the influence of corona discharge plasma can be explained by cell membrane erosion or etching resulting from UV and reactive oxidizing species (oxygen radical, OH radical, ozone, etc.), and the destruction of E. coli cell membrane by the physical action of numerous corona streamers.

Self-patterning Technique of Photosensitive La0.5Sr0.5CoO3 Electrode on Ferroelectric Sr0.9Bi2.1Ta2O9 Thin Films

  • Lim, Jong-Chun;Lim, Tae-Young;Auh, Keun-Ho;Park, Won-Kyu;Kim, Byong-Ho
    • Journal of the Korean Ceramic Society
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    • v.41 no.1
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    • pp.13-18
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    • 2004
  • $La_{0.5}Sr_{0.5}CoO_3$ (LSCO) electrodes were prepared on ferroelectric $Sr_{0.9}Bi_{2.1}Ta_2O_9$(SBT) thin films by spin coating method using photosensitive sol-gel solution. Self-patterning technique of photosensitive sol-gel solution has advantages such as simple manufacturing process compared to photoresist/dry etching process. Lanthanum(III) 2-methoxyethoxide, Stronitium diethoxide. Cobalu(II)2-methoxyethoxide were used as starting materials for LSCO electrode. UV irradiation on LSCO thin films lead to decrease solubility by M-O-M bond formation and the solubility difference allows us to obtain self-patternine. There was little composition change of the LSCO thin films between before leaching and after leaching in 2-methoxyethanol. The lowest resistivity of LSCO thin films deposited on $SiO_2$/Si substrate was $1.1{\times}10^{-2}{\Omega}cm$ when the thin film was ennealed at $740^{\circ}C$. The values of Pr/Ps and 2Pr of LSCO/SBT/Pt capacitor on the applied voltage of 5V were 0.51, 8.89 ${\mu}C/cm^2$, respectively.

Micro-gap DBD Plasma and Its Applications

  • Zhang, Zhitao;Liu, Cheng;Bai, Mindi;Yang, Bo;Mao, Chengqi
    • Journal of the Speleological Society of Korea
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    • no.76
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    • pp.37-42
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    • 2006
  • The Dielectric Barrier Discharge (DBD) is a nonequilibrium gas discharge that is generated in the space between two electrodes, which are separated by an insulating dielectric layer. The dielectric layer can be put on either of the two electrodes or be inserted in the space between two electrodes. If an AC or pulse high voltage is applied to the electrodes that is operated at applied frequency from 50Hz to several MHz and applied voltages from a few to a few tens of kilovolts rms, the breakdown can occur in working gas, resulting in large numbers of micro-discharges across the gap, the gas discharge is the so called DBD. Compared with most other means for nonequilibrium discharges, the main advantage of the DBD is that active species for chemical reaction can be produced at low temperature and atmospheric pressure without the vacuum set up, it also presents many unique physical and chemical process including light, heat, sound and electricity. This has led to a number of important applications such as ozone synthesizing, UV lamp house, CO2 lasers, et al. In recent years, due to its potential applications in plasma chemistry, semiconductor etching, pollution control, nanometer material and large area flat plasma display panels, DBD has received intensive attention from many researchers and is becoming a hot topic in the field of non-thermal plasma.

Photolytic Characteristics of Ni-TiO2 Composite Coating from Electroless Plating (무전해 Ni-TiO2 복합도금을 이용한 광분해 특성 연구)

  • Choi, Chul-Young;Han, Gil-Soo;Jo, Il-Guk;Kim, Young-Seok;Kim, Yang-Do
    • Journal of the Korean institute of surface engineering
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    • v.42 no.4
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    • pp.157-160
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    • 2009
  • Many fundamental studies have been carried out regarding waste water and hazardous gas treatments technologies using the photolysis effect of $TiO_2$. However, a permanent use of $TiO_2$ particles immobilized using organic or organic-inorganic binders is impossible. In this study, Ni-$TiO_2$ composite coating was produced by electroless plating to trap $TiO_2$ particles in the Ni coating layer. The electroless plating was performed in the bath solutions with three different concentrations of $TiO_2$ particles : 10 g/l, 20 g/l, and 40 g/l. The surface and photolytic characteristics of the coating layer was investigated by the use of SEM, a scratch tester, and an UV-Visible spectrophotometer. The results showed that the amounts of immobilized $TiO_2$ particles and the photolytic rate of the coating increased with the initial content of $TiO_2$ particles in the electroless bath. In addition, the photolytic rate of the Ni-$TiO_2$ composite coating was remarkably promoted by etching process in 10% HCl solution.

A Study on Fabrication of $Sr_{0.9}Bi_{2.1}Ta_2O_9$ and $La_{0.5}Sr_{0.5}CoO_3$ Thin Films by Self-Patterning Technique (Self-Patterning을 이용한 강유전체 $Sr_{0.9}Bi_{2.1}Ta_2O_9$와 산화물 전극 $La_{0.5}Sr_{0.5}CoO_3$의 박막 제조에 관한 연구)

  • Lim, Jong-Chun;Cho, Tae-Jin;Kang, Dong-Kyun;Lim, Tae-Young;Kim, Byong-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05c
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    • pp.116-119
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    • 2003
  • Self-patterning of thin films using photosensitive sol solution has advantages such as simple manufacturing process compared to photoresist/dry etching process. In this study, ferroelectric $Sr_{0.9}Bi_{2.1}Ta_2O_9$(SBT) and $La_{0.5}Sr_{0.5}CoO_3$(LSCO)thin films have been prepared by spin coating method using photosensitive sol solution. $Sr(OC_2H5)_2$, $Bi(TMHD)_3$ and $Ta(OC_2H)_5)_5$ were used as starting materials for SBT solution and $La(OCH_2CH_2OCH_3)_3$, $Sr(OC_2H_5)_2$, $CO(OCH_2CH_2OCH_3)_2$ were used for LSCO solution. Solubility difference by UV irradiation on LSCO thin film allows to obtain a fine patterning due to M-O-M bond formation. The lowest resistivity($4{\times}10^{-3}{\Omega}cm$) of LSCO thin films was obtained by annealing at $740^{\circ}C$.

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Heat Shield Property of Nanostructural-regulated Fe2O3/TiO2 Composites Filled with Polyacrylate Paint (나노구조 변화에 의한 Fe2O3/TiO2 복합재료를 충전한 Poly Acrylate 도료의 열차단 특성)

  • Kim, Dae Won;Ma, Young Kil;Kim, Jong Seok
    • Applied Chemistry for Engineering
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    • v.31 no.1
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    • pp.43-48
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    • 2020
  • Fe2O3 nanoparticles with the mixed structure of cubic and nanorod were synthesized by precipitation, hydrothermal, sol-gel method, etching process and heat treatment. Fe2O3/TiO2 core-shell (CS) of type Fe2O3@TiO2 composite was fabricated on a 20 nm nanolayer of TiO2 coated on the surface of Fe2O3 nanoparticles. Fe2O3/TiO2 yolk-shell (YS) composite was prepared by chemical etching and heat treatment of Fe2O3/TiO2 CS nanoparticles. Physical properties of Fe2O3, Fe2O3@TiO2 CS and Fe2O3@TiO2 YS nanoparticles were characterized by FE-SEM, HR-TEM and X-ray diffraction. The solar reflectance, commission internationale de l'Elcairage (CIE) color coordinate and heat shield temperatures of Fe2O3, CS and YS type Fe2O3@TiO2 pigments filled with poly acrylate (PA) paints were investigated by UV-Vis-NIR spectrometer and homemade heat shield temperature measuring device. The Fe2O3@TiO2 YS red pigment filled PA composite exhibited excellent near infrared light reflecting performance and also reduced the heat shield temperature of 13 ℃ than that of Fe2O3 filled counterparts.

Effects of Pulsed Nd:YAG Laser Irradiation and Fluoride Compound Applicatin on Acid Resistance of Bovine Teeth (Pulsed Nd:YAG 레이저 조사와 불소화합물 도포가 치아 내산성에 미치는 영향)

  • An-Hee Lee;Woo-Cheon Kee
    • Journal of Oral Medicine and Pain
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    • v.20 no.2
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    • pp.429-447
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    • 1995
  • This study was designed to determine the most effective concentration of fluoride and levels of laser irradiation for the remineralization of decayed teeth. After irradiation with a pulsed Nd:YAG laser and the topical application of fluoride, phosphate and fluoride concentration in enamel were measured. And then the changes on surface enamel using an scanning electron microscope were observed. Samples by extraction healthy, permanent, mandibular bovine teeth with no caries were obtained. Among them 371 healthy samples were selected and artificial carious lesions were made. 20 samples were assigned to each experimental group. After irradiation with a pulsed Nd:YAG laser with total energy densities of 10J/$\textrm{cm}^2$, 20J/$\textrm{cm}^2$ for each group. On the teeth, 2% NaF, 1.9% NH4F, 1.6% TiF4 Elmex gel(amine fluoride) and 1.23% APF gel were applied. After pH circulatory procedures, concentrations of fluoride with and Ionalyzer (Orion Research, Model 901, USA) and phosphates with an Uv/V is spectrophotometer (Uvikon 860, Kontrom Co, Switzerland) were measured. By etching the teeth in layers and measuring fluoride concentrations, a profile of fluoride penetration according to depth could be developed. And also the changes on the surface of the enamel using an electron scanning microscope were observed. The comparative analysis yielded the following results : 1. Phosphate concentration was low in all groups compared with the control group except for teeth treated Elmex gel, irradiated with 10J/$\textrm{cm}^2$ and 30J/$\textrm{cm}^2$ energy densities. Teeth treated with APF gel and 30J/$\textrm{cm}^2$ irradiation gad the lowest phosphate concentration. 2. Among all groups, fluoride concentrations in tooth enamel were highest in APF gel and NaF groups irradiated at 30J/$\textrm{cm}^2$. The APF gel group had the highest fluoride concentrations across all energy densities. 3. In the APF gel group, and the NaF group, the greater the energy density of the laser, the higher the fluoride concentrations in the enamel. 4. In all groups, the concentration of fluoride in the enamel by depth tended to decrease with depth. 5. Under the scanning electron microscope, under the condition of irradiation with 20J/$\textrm{cm}^2$, enamel crack was detected for the first time. In the NH4F group, spherical deposits were found on the surface of the enamel, and in the TiF4 group the surface of enamel was covered with an irregular, thin membranous mass in places. In the APF gel and NaF groups irradiated with 10J/$\textrm{cm}^2$, spherical and irregular particles covered the teeth. When these groups were irradiated at 20J/cm2, they were covered with amorphous crystals. These results suggest that one could obtain more effective anticariogenic effects without damage to teeth when less than 20J/$\textrm{cm}^2$ energy densities and APF gel are used.

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