Effects of In-situ doping Concentration on the Characteristics of Porous 3C-SiC Thin Films (In-situ 도핑량이 다공성 3C-SiC 박막의 특성에 미치는 영향)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.23 no.6
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- pp.487-490
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- 2010