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Measurement of EUV (Extreme Ultraviolet) and electron temperature in a hypocycloidal pinch device for EUV lithography

  • Lee, Sung-Hee;Hong, Young-June;Choi, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.108-108
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    • 2010
  • We have generated Ne-Xe plasma in dense plasma focus device with hypocycloidal pinch for extreme ultraviolet (EUV) lithography and investigated an electron temperature. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ne-Xe(30%) gas in accordance with pressure. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature of the hypocycloidal pinch plasma focus could be obtained by the optical emission spectroscopy (OES). The electron temperature has been measured by Boltzmann plot. The light intensity is proportion to the Bolzman factor. We have been measured the electron temperature by observation of relative Ne-Xe intensity. The EUV emission signal whose wavelength is about 6~16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD) and the line intensity has been detected by using a HR4000CG Composite-grating Spectrometer.

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Production of solar grade silicon by using metallurgical refinement (야금학적 정련 통합 공정을 이용한 태양전지용 실리콘 제조 기술)

  • Jang, Eunsu;Park, Dongho;Moon, Byung Moon;Min, Dong Jun;Yu, Tae U
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.11a
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    • pp.54.2-54.2
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    • 2011
  • 야금학적 정련 공정 중 슬래그 처리, 일방향 응고, 플라즈마-전자기유도용해 공정을 적용한 태양전지용 실리콘 제조 기술에 관한 연구를 수행하였다. 원소재인 금속급 실리콘을 제조하기 위해원재료로 규석, 코크스(Cokes), 숯, 그리고 우드칩(Wood chip)을 사용하였으며, 150kW급 DC 아크로(Arc furnace)를 이용하여 순도 99.8% 금속급 실리콘을 제조하였다. 제조된 용융 상태의 금속급 실리콘은 슬래그와 반응시켜 불순물을 제거하였다. SiO2-CaO-CaF2 계의 슬래그를 이용하였으며, 금속급 실리콘과 슬래그의 질량비 및 반응 시간에 따른 실리콘 불순물 특성을 평가하였다. 이후 고액 계면이 제어 가능한 일방향 응고 장치를 이용하여 금속불순물을 제거하였다. 고액상태의 온도 조건 및 응고 시간에 따른 불순물 농도 변화를 평가하였으며, 순도 6N급의 실리콘을 제조하였다. 마지막 공정으로 스팀 플라즈마 토치와 냉도가니가 적용된 전자기 유도 용해장치를 이용하여 붕소와 인을 제거하였다. 플라즈마 토치 가스로는 아르곤, 스팀, 수소를 이용하였다. 붕소와 인의 제거율은 각각 94%와 96%를 달성하였으며, 최종 순도 6N급의 실리콘을 제조하였다.

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Activity Measurement of Zn in Liquid Zn-Cd Alloy Using EMF Method (기전력법을 이용한 용융 Zn-Cd 합금중 Zn의 활동도 측정)

  • Jeong, Seong-Yeop;Jeong, U-Gwang;Park, Jong-Jin
    • Korean Journal of Materials Research
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    • v.12 no.4
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    • pp.283-289
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    • 2002
  • The E.M.F of the galvanic cell with fused salt was measured to determine the activities of zinc at 700-820K over the entire composition range of liquid Zn-Cd alloys. The cell used was as follows: (-) W | Zn(pure) $Zn^{2+}(KCI-LiCl)$ | Zn(in Zn-Cd alloy) | W (+) The activities of zinc in the alloys showed positive deviation from Raoult's law over the entire composition range. The activity of cadmium and some thermodynamic functions such as Gibbs free energy, enthalpy, entropy were derived from the results by the thermodynamic relationship. The comparison of the results and the literature data was made. The liquid Zn-Cd alloy is found to be close to the regular solution. The concentration fluctuations in long wavelength limit, $S_{cc}(o)$, in the liquid alloy was calculated from the results.

A STUDY ON MEASUREMENT OF MINIMAL DISTANCE BETWEEN PULP CHAMBER AND CORONAL SURFACE (치수강(齒髓腔)과 치관외면(齒冠外面)과의 최단거리(最短距離)에 관(關)한 실측연구(實測硏究))

  • Kim, Yung-Hai
    • Restorative Dentistry and Endodontics
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    • v.14 no.2
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    • pp.1-4
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    • 1989
  • To determine the thickness of coronal hard structure the minimal distance between pupal surface and outer surface of crown was measured by means of Bowley gauge on extracted first molars. Upper(28 teeth) and lower(24 teeth) were carefully collected from 30-39 years of age and male. The teeth were split mesio-distally through central pit. On the split surface various part which are deeply related in cavity preparation were measured (schematic drawing). The results were as follows: A : Distance from mesio-cervical enamel to pulp chamber surface. upper $2.63{\pm}0.19$(mm) Lower $2.18{\pm}0.27$(um) B : Distance from mesial chamber ceiling to mesial surface upper $2.75{\pm}0.34$ Lower $2.62{\pm}0.31$ C : Distance from mesial chamber ceiling to occlusal surface upper $3.82{\pm}0.51$ Lower $3.49{\pm}0.50$ D : Distance from distal chamber ceiling to occlusal surface upper $4.28{\pm}0.69$ Lower $3.90{\pm}0.52$ E : Distance from distal chamber ceiling to distal surface upper $2.79{\pm}0.45$ Lower $2.41{\pm}0.40$ F : Distance from disto cervical enamel to pulp chamber surface upper $2.49{\pm}0.24$ Lower $2.39{\pm}0.25$.

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Studies on the Induction of Transformation in Cereal Plants.II. Expression of Gene Transferred into Rice Protoplasts by Electroporation (곡물류의 형질전환에 관한 연구.II. Electroporation에 의해 벼 원형질체로 도입된 유전자의 발현)

  • Hwang, Baik;Hwang, Sung-Jin;Im, Wook-Bin;Im, Hyong-Tak;Kang, Young-Hee
    • KSBB Journal
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    • v.5 no.4
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    • pp.323-327
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    • 1990
  • Protoplasts isolated from embryogenic cell suspensions were electroporated in buffered solutions containing plasmid DNA of pBI121. Transient GUS (beta-glucuronidase) activity measurement and selection for kanamycin resistent showed that expression of foreign genes and stable loransformation were achieved. GUS transient gene expression was increased by increasing DNA concentration of pBI121 plasmid and affected by the level of the applied voltage. An optimal level of GUS activity was obtained after electroporation with a pulse of 200 voltage/1180 uF. Protoplast viability was up to the 60% at the optimal voltage. Cell colonies resistent to 200$\mu\textrm{g}$/ml kanamycin were selected in agar medium and identified by histochemical GUS assay.

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마젤란 은하내 외계행성 탐색

  • Lee, Jae-U;Kim, Seung-Ri;Lee, Chung-Uk;Park, Byeong-Gon;Jeong, Seon-Ju;Ryu, Yun-Hyeon;Gu, Jae-Rim
    • The Bulletin of The Korean Astronomical Society
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    • v.36 no.2
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    • pp.120.1-120.1
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    • 2011
  • 현대 천문학의 주요한 이슈 중 하나인 외계행성은 570개 이상 발견되었는데, 이들 모두 우리 은하내 외계행성들이다. 우리는 KMTNet 광시야 관측시스템을 이용하여 마젤란 은하내 외계행성을 Transit 방법으로 탐색 관측하여 외부은하 최초의 외계행성을 발견하고자 한다. 이제까지 알려진 Transit 행성들의 별표면 통과시간(transit duration)은 대부분 100-300분 사이에 분포하기 때문에, 이 현상의 검출은 최대 10분의 시간분해능을 필요로 한다. 한편, KMTNet 망원경은 마젤란 은하내 21등급의 별을 I 필터에서 10분의 노출로 1%의 측정정밀도를 얻을 수 있고, 8-10미터급 대형망원경을 이용하면 태양질량의 21등급 별을 공전하는 목성형 행성들의 분광후속 관측이 가능하다. 우리는 KMTNet으로 마젤란 은하내 19-21등급에 있는 F-G형 주계열성들과 청색수평가지별들(blue horizontal branch star)을 I 필터(관측 시작, 중간, 끝 시간에는 V 필터도 사용)에서 10분의 노출로 시계열 측광 관측하면, 다수의 Transit 외계행성을 발견할 수 있을 것으로 기대한다. 이와 더불어, 수년의 장시간 관측자료로부터 RR Lyr, ${\delta}$ Sct 및 식변광성의 극대/극심시각을 정밀하게 측정하여 Timing 방법으로 항성계 주위를 공전하는 장주기 외계행성을 발견할 수 있을 뿐만 아니라, 중력렌즈(self-lensing) 현상을 보이는 외계행성도 검출가능하다.

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Assessment of RANS Models for 3-D Flow Analysis of SMART

  • Chun Kun Ho;Hwang Young Dong;Yoon Han Young;Kim Hee Chul;Zee Sung Quun
    • Nuclear Engineering and Technology
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    • v.36 no.3
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    • pp.248-262
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    • 2004
  • Turbulence models are separately assessed for a three dimensional thermal-hydraulic analysis of the integral reactor SMART. Seven models (mixing length, k-l, standard $k-{\epsilon},\;k-{\epsilon}-f{\mu},\;k-{\epsilon}-v2$, RRSM, and ERRSM) are investigated for flat plate channel flow, rotating channel flow, and square sectioned U-bend duct flow. The results of these models are compared to the DNS data and experiment data. The results are assessed in terms of many aspects such as economical efficiency, accuracy, theorization, and applicability. The standard $k-{\epsilon}$ model (high Reynolds model), the $k-{\epsilon}-v2$ model, and the ERRSM (low Reynolds models) are selected from the assessment results. The standard $k-{\epsilon}$ model using small grid numbers predicts the channel flow with higher accuracy in comparison with the other eddy viscosity models in the logarithmic layer. The elliptic-relaxation type models, $k-{\epsilon}-v2$, and ERRSM have the advantage of application to complex geometries and show good prediction for near wall flows.

Determination of Trace Uranium in Human Hair by Nuclear Track Detection Technique

  • Chung, Yong-Sam;Moon, Jong-Hwa;Zinaida En;Cho, Seung-Yeon;Kang, Sang-Hoon;Lee, Jae-Ki
    • Nuclear Engineering and Technology
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    • v.33 no.2
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    • pp.225-230
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    • 2001
  • The aim of this study is to describe a usefulness of nuclear analytical technique in assessing and comparing the concentration levels through the analysis of uranium using human hair sample in the field of environment. A fission track detection technique was applied to determine the uranium concentration in human hair. Hair samples were collected from two groups of people - a) workers not dealing with uranium directly, and b) workers possibly contaminated with uranium. The concentration of $^{235}$ U for the first group varied from <1 to 39 ng/g and the second group can be estimated up to the level of $\mu$g/g. Radiographs of heavy-duty work samples contained high dense “hot spots” along a single hair. After washing in acetone and distilled water, external contamination was not totally removed. Insoluble uranium compounds were not completely washed out. The (n, f)- radiography technique, having high sensitivity, and capable of getting information on uranium content at each point of a single hair, is an excellent tool for environmental monitoring.

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A Study on Development of a Ground-Source Heat Pump System Utilizing Pile Foundation of a Building (건물 기초를 이용한 지중열 공조시스템의 개발에 관한 연구 (1))

  • Ryozo, Ooka;Nam, Yu-Jin;Kentaro, Sekine;Mutsumi, Yokoi;Yoshiro, Shiba;Hwang, Suck-Ho
    • Proceedings of the SAREK Conference
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    • 2005.11a
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    • pp.148-154
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    • 2005
  • Ground-source (Geothermal) heat pump (GSHP) systems can achieve a higher coefficient of performance than conventional air-source heat pump (ASHP) systems. However, GSHP systems are not widespread in Japan because of their expensive boring costs. The authors have developed a GSHP system that employs the cast-in-place concrete pile foundations of a building as heat exchangers in order to reduce the initial boring cost. In this system, eight U-tubes are arranged around the surface of a cast-in-place concrete pile foundation. The heat exchange capability of this system, subterranean temperature changes and heat pump performance were investigated in a foil-scale experiment. As a result, the average values for heat rejection were 186${\sim}$201 W/m (for pile, 25 W/m per Pair of tubes) while cooling. The average COP of this system was 4.6 while cooling; rendering this system more effective in energy saving terms than the typical ASHP systems. The initial cost of construction per unit for heat extraction and rejection is ${\yen}$72/W for this system, whereas it is f300/W for existing standard borehole systems.

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MIRIS 적외선 우주관측 카메라 Passive cooling test

  • Park, Yeong-Sik;Jeong, Ung-Seop;Mun, Bong-Gon;Cha, Sang-Mok;Lee, Chang-Hui;Lee, Dae-Hui;Park, Seong-Jun;Nam, Uk-Won;Park, Jang-Hyeon;Yuk, In-Su;Ga, Neung-Hyeon;Lee, Mi-Hyeon;Mok, Min-Jeong;Lee, Deok-Haeng;Lee, Seung-U;Han, Won-Yong
    • Bulletin of the Korean Space Science Society
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    • 2009.10a
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    • pp.45.2-45.2
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    • 2009
  • 과학기술위성 3호의 주탑재체인 MIRIS (Multi-purpose InfraRed Imaging System)는 우주관측카메라, 지구관측카메라로 구성되어 있으며, 우주관측카메라는 구경 80mm(f/2)의 광시야 굴절식 광학계로 구성되어 있다. 지상과 우주에서 사용하는 적외선 망원경의 경우 열잡음을 줄이기 위해 광학계과 검출기를 냉각하게 되는데, MIRIS의 경우 공간과 무게를 줄이기 위해 복사 냉각을 위한 passive cooling 방법으로 설계를 하였다. 우주관측 카메라의 광학계를 200K 이하로 냉각하기 위하여, 관측시야 밖에서 입사하는 불필요한 photon 들을 반사시키기 위한 winston cone baffle, 위성체로부터 유입되는 열을 차단하기 위한 30층의 MLI(Multi Layer Insulation), 광학계와 구조물의 지지를 열전달율이 낮은 GFRP(Glass Fiber Reinforced Polymer)로 설계하여 제작하였다. 우주관측 카메라를 열진공 챔버 내부에 설치하고 우주공간과 비슷한 환경을 조성하여 광학계가 200K 이하로 냉각되는 것을 확인 하였으며 그 실험 결과에 대해 논의 하고자 한다.

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