• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• KIPS Transactions on Software and Data Engineering
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• v.6 no.11
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• pp.527-536
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• 2017

With the recent development of smart grid industry, the necessity for efficient EMS(Energy Management System) has been increased. In particular, in order to reduce electric load and energy cost, sophisticated electric load forecasting and efficient smart grid operation strategy are required. In this paper, for more accurate electric load forecasting, we extend the data collected at demand time into high time resolution and construct an artificial neural network-based forecasting model appropriate for the high time resolution data. Furthermore, to improve the accuracy of electric load forecasting, time series data of sequence form are transformed into continuous data of two-dimensional space to solve that problem that machine learning methods cannot reflect the periodicity of time series data. In addition, to consider external factors such as temperature and humidity in accordance with the time resolution, we estimate their value at the time resolution using linear interpolation method. Finally, we apply the PCA(Principal Component Analysis) algorithm to the feature vector composed of external factors to remove data which have little correlation with the power data. Finally, we perform the evaluation of our model through 5-fold cross-validation. The results show that forecasting based on higher time resolution improve the accuracy and the best error rate of 3.71% was achieved at the 3-min resolution.

• Nuclear Engineering and Technology
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• v.20 no.2
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• pp.88-104
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• 1988

The FUel Rod Analysis(FURA) code is developed using two-dimensional finite element methods for axisymmetric and plane stress analysis of fuel rod. It predicts the thermal and mechanical behavior of fuel rod during normal and load follow operations. To evaluate the exact temperature distribution and the inner gas pressure, the radial deformation of pellet and clad, the fission gas release are considered over the full-length of fuel rod. The thermal element equation is derived using Galerkin's techniques. The displacement element equation is derived using the principle of virtual works. The mechanical analysis can accommodate various components of strain: elastic, plastic, creep and thermal strain as well as strain due to swelling, relocation and densification. The 4-node quadratic isoparametric elements are adopted, and the geometric model is confined to a half-pellet-height region with the assumption that pellet-pellet interaction is symmetrical. The pellet cracking and crack healing, pellet-cladding interaction are modelled. The Newton-Raphson iteration with an implicit algorithm is applied to perform the analysis of non-linear material behavior accurately and stably. The pellet and cladding model has been compared with both analytical solutions and experimental results. The observed and predicted results are in good agreement. The general behavior of fuel rod is calculated by axisymmetric system and the cladding behavior against radial crack is used by plane stress system. The sensitivity of strain aging of PWR fuel cladding tube due to load following is evaluated in terms of linear power, load cycle frequency and amplitude.

• Korean Journal of Agricultural and Forest Meteorology
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• v.18 no.4
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• pp.298-306
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• 2016

Planting date shift is one of the means of adapting to climate change in Kimchi Cabbage growers in major production areas in Korea. This study suggests a method to estimate the potential yield of Kimchi Cabbage based on daily temperature accumulation during the growth period from planting to maturity which is determined by a plant phenology model tuned to Kimchi Cabbage. The phenology model converts any changes in the thermal condition caused by the planting date shift into the heat unit accumulation during the growth period, which can be calculated from daily temperatures. The physiological maturity is estimated by applying this model to a variable development rate function depending either on growth or heading stage. The cabbage yield prediction model (Ahn et al., 2014) calculates the potential yield of summer cabbage by accumulating daily heat units for the growth period. We combined these two models and applied to the 1km resolution climate scenario (2000-2100) based on RCP8.5 for South Korea. Potential yields in the current normal year (2001-2010) and the future normal year (2011-2040, 2041-2070, and 2071-2100) were estimated for each grid cell with the planting dates of July 1, August 1, September 1, and October 1. Based on the results, we divided the whole South Korea into 810 watersheds, and devised a three - dimensional evaluation chart of the time - space - yield that enables the user to easily find the optimal planting date for a given watershed. This method is expected to be useful not only for exploring future new cultivation sites but also for developing cropping systems capable of adaptation to climate change without changing varieties in existing production areas.

• Korean Chemical Engineering Research
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• v.45 no.3
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• pp.242-248
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• 2007

For an optimal design of automotive electric system, it is important to have a reliable modeling tool to predict the charge-discharge behaviors of the automotive battery. In this work, a two-dimensional modeling was carried out to predict the charge-discharge behaviors of a 12-V automotive lead-acid battery. The model accounted for electrochemical kinetics and ionic mass transfer in a battery cell. In order to validate the modeling, modeling results were compared with the experimental data of the charge-discharge behaviors of a lead-acid battery. The discharge behaviors were measured with three different discharge rates of C/5, C/10, and C/20 at operating temperature of $25^{\circ}C$. The batteries were charged with constant current of 30A until the charging voltage reached to a predetermined value of 14.24 V and then the charging voltage was kept constant. The discharge and charge curves from the measurements and modeling were in good agreement. Based on the modeling, the distributions of the electrical potentials of the solid and solution phases, the porosity of the electrodes, and the current density within the electrodes as well as the acid concentration can be predicted as a function of charge and discharge time.

• Journal of the Korean Institute of Gas
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• v.2 no.1
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• pp.28-39
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• 1998

This study investigated the natural convection and radiation in a rectangular enclosure with ceiling vent experimentally and numerically. A heat source is located on the center of the bottom surface. The analysis was peformed a pure convection and is combination of natural convection and radiation. The shape of the considered two dimensional model is a square whose center of ceiling($30\%$) is opened. The numerical simulations are carried out for the pure natural convection case and the combined heat transfer case by using the SIMPLE algorithm. For the turbulent flow, Reynolds stresses are closed by the standard $k-{\epsilon}$ model and the wall function is used to determine the wall boundary conditions. The experiment was performed on the same geometrical shape as the computations. The radiative heat transfer is analized by the S-N discrete ordinates method. The results of pure natural convection are compared with those of combined heat transfer by the velocity vectors, stream lines, isothermal lines. The results obtained are as follows 1. Comparing the results of pure convection with those of the combined convection-radiation through the shape of stream lines, isothermal lines are similar to each other. 2. The temperature fields obtained by numerical method are compared to those obtained by experimental one, and it is found that they are showed mean relative error $8.5\%$. 3. Visualization bt smoke is similar to computational results.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.19 no.1
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• pp.203-209
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• 2019

In this work, a new land-specific resistance measuring device (GM) and a measuring probe (Grounding Rod) are connected to the WENNER quadrant as power-line communication (PLC). In groups of two (P1,P2) probes, five to ten probes are installed in series on the ground at intervals of 1m, 2m, 4m, 8m, and 16m, respectively. If the PLC signal from the GMD is detected by the receiver of the Probe 1 (P1) for measurement, the minute voltage and current for measurement flow from the PSD (power supply) attached to the probe to the ground, and then, through the soil between P1 and P2, enters the Probe 1 (P2). The resistance value is then measured by the principle of voltage drop due to ground resistance. Measure the earth resistance every T seconds up to 1 trillion and store the measured data on the Arduino Server mounted on the main equipment. Stored measurement data can be derived from formulas by Ohm's Law and from inherent resistance (here,). Data obtained in real time will be linked to CDGES programs installed on Main PC, enabling data analysis and real-time monitoring of the ground environment on land. In addition, a three-dimensional display is possible with 3D graph support by identifying seasonal characteristics such as temperature and humidity of land (soils). The limitations of the study will require specific application measures of Test Bed for commercial access to a model that has been developed and operated experimentally.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.31 no.4
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• pp.149-153
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• 2021

ε-Ga₂O₃ thin films were grown on 4H-SiC substrates by metal organic chemical vapor deposition (MOCVD) and crystalline quality were evaluated depend on growth conditions. It was found that the best conditions of the ε-Ga₂O₃ were grown at a growth temperature of 665℃ and an oxygen flow rate of 200 sccm. Two-dimensional growth was completed after the merge of hexagonal nuclei, and the arrangement direction of hexagonal nuclei was closely related to the crystal direction of the substrate. However, it was confirmed that crystal structure of the ε-Ga₂O₃ had an orthorhombic rather than hexagonal. Crystal phase transformation was performed by thermal treatment. And a β-Ga₂O₃ thin film was grown directly on 4H-SiC for the comparison to the phase transformed β-Ga₂O₃ thin film. The phase transformed β-Ga₂O₃ film showed better crystal quality than directly grown one.

• Nuclear Engineering and Technology
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• v.54 no.12
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• pp.4571-4584
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• 2022

The analysis of rapid flow transients in Reactor Coolant Pumps (RCP) is essential for a reactor safety study. An accurate and precise analysis of the RCP coastdown is necessary for the reactor design. The coastdown of RCP affects the coolant temperature and the colloidal crud in the primary coolant. A realistic and kinetic model has been used to investigate the behavior of activated colloidal crud in the primary coolant and steam generator that solves the pump speed analytically. The analytic solution of the non-dimensional flow rate has been determined by the energy ratio β. The kinetic energy of the coolant fluid and the kinetic energy stored in the rotating parts of a pump are two essential parameters in the form of β. Under normal operation, the pump's speed and moment of inertia are constant. However, in a coastdown situation, kinetic damping in the interval has been implemented. A dynamic model ACCP-SMART has been developed for System Integrated Modular and Advanced Reactor (SMART) to investigate the corrosion due to activated colloidal crud. The Fickian diffusion model has been implemented as the reference corrosion model for the constituent component of the primary loop of the SMART reactor. The activated colloidal crud activity in the primary coolant and steam generator of the SMART reactor has been studied for different equilibrium corrosion rates, linear increase in corrosion rate, and dynamic RCP coastdown situation energy ratio b. The coolant specific activity of SMART reactor equilibrium corrosion (4.0 mg s^-1) has been found 9.63×10^-3 µCi cm^-3, 3.53×10^-3 µC cm^-3, 2.39×10^-2 µC cm^-3, 8.10×10^-3 µC cm^-3, 6.77× 10^-3 µC cm^-3, 4.95×10^-4 µC cm^-3, 1.19×10^-3 µC cm^-3, and 7.87×10^-4 µC cm^-3 for ²⁴Na, ⁵⁴Mn, ⁵⁶Mn, ⁵⁹Fe, ⁵⁸Co, ⁶⁰Co, ⁹⁹Mo, and ⁵¹Cr which are 14.95%, 5.48%, 37.08%, 12.57%, 10.51%, 0.77%, 18.50%, and 0.12% respectively. For linear and exponential coastdown with a constant corrosion rate, the total coolant and steam generator activity approaches a higher saturation value than the normal values. The coolant and steam generator activity changes considerably with kinetic corrosion rate, equilibrium corrosion, growth of corrosion rate (ΔC/Δt), and RCP coastdown situations. The effect of the RCP coastdown on the specific activity of the steam generators is smeared by linearly rising corrosion rates, equilibrium corrosion, and rapid coasting down of the RCP. However, the time taken to reach the saturation activity is also influenced by the slope of corrosion rate, coastdown situation, equilibrium corrosion rate, and energy ratio β.

• Journal of the Korean institute of surface engineering
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• v.56 no.3
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• pp.192-200
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• 2023

Graphene, a two-dimensional material, has shown great potential in a variety of applications including microelectronics, optoelectronics, and graphene-based batteries due to its excellent electronic conductivity. However, the production of large-area, high-quality graphene remains a challenge. In this study, we investigated graphene growth on electrolytic copper foil using thermochemical vapor deposition (TCVD) to achieve a similar level of quality to the cold-rolled copper substrate at a lower cost. The combined effects of pre-annealing time, graphenized temperature, and partial pressure of hydrogen on graphene coverage and domain size were analyzed and correlated with the roughness and crystallographic texture of the copper substrate. Our results show that controlling the crystallographic texture of copper substrates through annealing is an effective way to improve graphene growth properties, which will potentially lead to more efficient and cost-effective graphene production. At a hydrogen partial pressure that is disadvantageous in graphene growth, electrolytic copper had an average size of 8.039 ㎛², whereas rolled copper had a size of 19.092 ㎛², which was a large difference of 42.1% compared to rolled copper. However, at the proper hydrogen partial pressure, electrolytic copper had an average size of 30.279 ㎛² and rolled copper had a size of 32.378 ㎛², showing a much smaller difference of 93.5% than before. This observation suggests this potentially leads the way for more efficient and cost-effective graphene production.