• Title/Summary/Keyword: Turbo pump

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Ion Plating에 의한 알루미늄 산화막 형성

  • 김종민;권봉준;황도진;김명원
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.154-154
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    • 1999
  • 금속산화막은 전자부품 및 광학적 응용에 널리 사용되고 있다. 특히 알루미늄의 산화막은 유전체의 재료로 커패시터에 많이 사용되고 있다. 이러한 알루미늄 산화막을 plasma를 이용한 ion plating에 의해 형성하였다.Activated Reactive Evaporation은 화합물의 증착율을 높이는데 좋은 증착법이다. 이러한 증착법에는 reactive ion plating와 ion-assisted deposition 그리고 ion beam sputtering 등이 있다. 본 연구에서는 알루미늄 산화막을 증착시키기 위해 plasma를 이용한 electron-beam법을 사용하였다. Turbo molecular pump로 챔버 내의 진공을 약 10-7torr까지 낸린 후 5$\times$10-5torr까지 O2와 Ar을 주입시켰다. 각 기체의 분압은 RGA(residual gas analyzer)로 조사하여 일정하게 유지시켰다. plasma를 발생시키기 위해 filament에서 열전자를 방출시키고 1kV 정도의 electrode에 의해 가속시켜 이들 기체들과 반응시켜 plasma를 발생시켰다. 금속 알루미늄을 5kV정도의 고전압과 90mA의 전류로 electron beam에 의해 증발시켰다. 기판의 흡착율을 높ㅇ기 위해 기판에 500V로 bias 전압을 걸어 주었다. 증발된 금속 알루미늄 증기들이 plasmaso의 산소 이온들과 활성 반응을 이루어 알루미늄 기판 위에 Al2O3막을 형성하였다. 알루미늄 산화막을 분석하기 위해 XPS(X-ray Photoelectron Spectroscopy)로 화학적 조성을 조사하였는데, 알루미늄의 2p전자의 binding energy가 76.5eV로 측정되었다. 이는 대부분 증착된 알루미늄이 산소 이온과 반응하여 Al2O3로 형성된 것이다. SEM(Scanning electron Microscopy)과 AFM(Atomim Force microscopy)으로 증착박 표면의 topology와 roughness를 관찰하였다. grain의 크기는 10nm에서 150nm이었고 증착막의 roughness는 4.2nm이었다. 그리고 이 산화막에 전극을 형성하여 유전 상수와 손실률 등을 측정하였다. 이와 같이 plasma를 이용한 3-beam에 의한 증착은 금속의 산화막을 얻는데 유용한 기술로 광학 재료 및 유전 재료의 개발 및 연구에 많이 사용될 것으로 기대된다.

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분자류 영역에 따른 터보분자펌프(TMP) 배기속도 측정에 관한 연구

  • Gang, Sang-Baek;Sin, Jin-Hyeon;Cha, Deok-Jun;Jeong, Wan-Seop;Im, Jong-Yeon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.46-46
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    • 2010
  • 고진공펌프 중의 하나인 터보분자펌프(turbo-molecular pump: TMP)는 반도체/디스플레이 등 첨단 공정에서 진공 환경을 조성하는 핵심장비로서 현재 한국표준과학연구원 진공기술센터에서 개발 중인 고진공펌프 종합특성평가시스템을 구축 중이며, 1000 L/s 및 2500L/s 배기속도 용량을 가지는 터보분자펌프(TMP)의 database를 구축하고 있다. 이에 터보분자펌프(TMP)의 배기속도 측정 시 사용되는 가스의 분자류 영역에 따른 배기속도의 변화를 연구하고자 한다. 터보분자펌프(TMP)의 배기속도는 분자류 영역에 따라 상이한 배기속도를 가진다. 특히 가벼운 분자들은 터보분자펌프(TMP)로 배기시키기 어려우며, 분자량이 작은 가스들은 분자량이 큰가스 분자들에 비해 압축비(compression ratio)도 작아진다. 압축비가 큰 경우에는 실재 운전조건에 무관하게 배기속도가 최대값을 가지지만, 압축비가 작을 경우에는 운전 시 터보분자펌프(TMP)의 압축비에 따라 배기속도가 달라 질 수 있으며, 압축비는 펌프의 inlet에서의 압력과 exhaust에서의 압력의 비이다. 즉, 가벼운 기체 분자(H2, He 등)들은 무거운 기체 분자(N2, Ar 등)들에 비해 배기속력이 작아진다. 현재 개발 중인 한국표준과학연구원 진공기술센터의 고진공 종합특성평가시스템을 이용하여 분자류 영역에 따른 가벼운 기체 분자와 무거운 기체 분자의 배기속도를 측정하여 분자류 영역에 따라 상이한 배기속도의 변화를 연구하고자 한다. 본 논문에서는 터보분자펌프(TMP)의 분자류 영역에 따른 가벼운 기체 He과 무거운 기체 N2를 사용하여 압축비의 변화와 배기속도 측정에 관해 상관관계를 제시하며, 분자류 영역에 따른 터보분자펌프(TMP)의 배기속도 운전성능을 제시하고자 한다.

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Comparative Study of Tip Clearance Loss in Impulse and Reaction Turbine Cascades (충동터빈과 반동터빈 캐스케이드에서의 팁 간극 손실에 대한 비교 연구)

  • Park, Kyung-Wook;Jung, Eun-Hwan;Song, Seung-Jin
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2008.11a
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    • pp.145-148
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    • 2008
  • Korea Aeronautics Research Institute (KARI) is developing a turbo pump that has 1-stage impulse turbine and relatively high tip clearance for safety. The objective of this research is to investigate the effect of reaction on tip clearance loss in axial turbines. Both cascades were tested in a subsonic wind tunnel. In each cascade, total pressure was measured for tip clearance ranging from 1% to 20% of chord. In results, increasing tip clearance, total pressure loss in reaction turbines is continually increased but impulse turbines keep almost same level of mass averaged total pressure loss. When tip clearance becomes more than 10% of chord, mass-averaged total pressure loss in impulse turbines is less than in reaction. This means that when tip clearance is more than 10% of chord, impulse turbines have better efficiency than reaction turbines.

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Temperature Variation of Exhaust Gas in Diesel Generator for Low Pressure SCR (저압 SCR을 위한 디젤발전기 배기가스 온도 변화)

  • Hong, Chul Hyun;Lee, Chang Min;Lee, Sang Duk
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.27 no.2
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    • pp.355-362
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    • 2021
  • To facilitate low-pressure selective catalyst reduction (L.P SCR), a high exhaust-gas temperature of a four-stroke diesel engine for a ship's generator is required. This study aimed at reducing the exhaust-gas temperature by adjusting the valve open-close timing and fuel injection timing to satisfy the operating conditions of L.P SCR and prevent accidents associated with the generator engine due to high temperature. To lower exhaust-gas temperature, the angle of the camshaft was adjusted and the shim of the fuel injection pump was added. As a result, the maximum explosion pressure increased and the average of the turbocharger outlet temperature dropped. Considering the heat loss from the turbocharger outlet to the SCR inlet, the operation condition for L.P SCR was satisfied with 290 ℃. The study demonstrates that safe operation of a diesel generator can be achieved by lowering the exhaust-gas temperature.

A Study on Purge Gas Inflow according to Valve Operation Sequence during Staged Combustion Cycle Engine Reignition Test (다단연소 사이클 엔진 재점화 시험 시 밸브 작동순서에 따른 퍼지가스 유입에 대한 연구)

  • Hwang, Changhwan;Lee, Jungho;Kim, Chaehyeong;Jeon, Jun-Su;Park, Jae-Young;Lee, Kwang-Jin;Cho, Nam-Kyung;Kim, SeungHan;Han, Yeoungmin
    • Journal of the Korean Society of Propulsion Engineers
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    • v.26 no.4
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    • pp.64-71
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    • 2022
  • For the development of an improved upper-stage engine, research on a staged combustion cycle liquid rocket engine is in progress. A cold flow test, ignition test, and combustion test plans were established and performed to develop reignition combustion technology. In order to solve the problem of purge gas flowing into the fuel line, which may cause cavitation in the turbo pump during reignition, the test results of each stage were analyzed. Based on the analysis results, the purge gas inflow problem was solved by reducing the overlapping time between the operation of the bubble removal valve and the opening of the purge valve and the engine fuel valve. Based on this, the reignition combustion test was successfully performed.

Recent Progress in Air-Conditioning and Refrigeration Research : A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2015 (설비공학회 분야의 최근 연구 동향 : 2015년 학회지 논문에 대한 종합적 고찰)

  • Lee, Dae-Young;Kim, Sa Ryang;Kim, Hyun-Jung;Kim, Dong-Seon;Park, Jun-Seok;Ihm, Pyeong Chan
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.28 no.6
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    • pp.256-268
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    • 2016
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2015. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) The research works on the thermal and fluid engineering were carried out in the areas of flow, heat and mass transfer, cooling and heating, and air-conditioning, the renewable energy system and the flow inside building rooms. Research issues dealing with air-conditioning machines and fire and exhausting smoke were reduced. CFD seems to be spreading to more research areas. (2) Research works on heat transfer area were carried out in the categories of heat transfer characteristics, pool boiling and condensing heat transfer and industrial heat exchangers. Researches on heat transfer characteristics included the economic analysis of GHG emission, micro channel heat exchanger, effect of rib angle on thermal performance, the airside performance of fin-and-tube heat exchangers, theoretical analysis of a rotary heat exchanger, heat exchanger in a cryogenic environment, the performance of a cross-flow-type, indirect evaporative cooler made of paper/plastic film. In the area of pool boiling and condensing, the bubble jet loop heat pipe was studied. In the area of industrial heat exchangers, researches were performed on fin-tube heat exchanger, KSTAR PFC and vacuum vessel at baking phase, the performance of small-sized dehumidification rotor, design of gas-injection port of an asymmetric scroll compressor, effect of slot discharge-angle change on exhaust efficiency of range hood system with air curtain. (3) In the field of refrigeration, various studies were carried in the categories of refrigeration cycle, alternative refrigeration/energy system, system control. In the refrigeration cycle category, a cold-climate heat pump system, $CO_2$ cascade systems, ejector cycles and a PCM-based continuous heating system were investigated. In the alternative refrigeration/energy system category, a polymer adsorption heat pump, an alcohol absorption heat pump and a desiccant-based hybrid refrigeration system were investigated. In the system control category, turbo-refrigerator capacity controls and an absorption chiller fault diagnostics were investigated. (4) In building mechanical system research fields, eighteen studies were reported for achieving effective design of the mechanical systems, and also for maximizing the energy efficiency of buildings. The topics of the studies included energy performance, HVAC system, ventilation, and renewable energies, piping in the buildings. Proposed designs, performance tests using numerical methods and experiments provide useful information and key data which can improve the energy efficiency of the buildings. (5) The field of architectural environment was mostly focused on indoor environment and building energy. The main researches of indoor environment were related to the user and location awareness technology applied dimming lighting control system, the lighting performance evaluation for light-shelves, the improvement evaluation of air quality through analysis of ventilation efficiency and the evaluation of airtightness of sliding and LS window systems. The subjects of building energy were worked on the energy saving estimation of existing buildings, the developing model to predict heating energy usage in domestic city area and the performance evaluation of cooling applied with economizer control. The studies were also performed related to the experimental measurement of weight variation and thermal conductivity in polyurethane foam, the development of flame spread prevention system for sandwich panels, the utilization of heat from waste-incineration facility in large-scale horticultural facilities.

A Study on Properties of N-type ZnS Deposited at Various RF Power for Solar Cell Applications (RF Power에 따른 태양전지용 N-type ZnS 특성연구)

  • Yang, Hyeon-Hun;Kim, Han-Wool;Jeong, Woon-Jo;Lee, Suk-Ho;So, Soon-Youl;Park, Gye-Choon;Lee, Jin;Chung, Hea-Duck
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.7
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    • pp.574-577
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    • 2011
  • In this study, we use the $2.5cm{\times}7.5cm$ soda lime glass as the substrate. We used the ultrasonicator. Glass was dipped in the acetone, methanol and DI water respectively for 10 minutes. Ar(99.99%)gas was used as the sputtering gas. We varied the RF power between 100~175 W with 25 W steps. Base pressure was kept by turbo molecular pump at $3.0{\times}10^{-6}$ torr. Working pressure was kept by injection of Ar gas. ZnS thin films were deposited with the radio frequency magnetron sputtering technique at various temperatures and sputtering powers. It is also clearly observed that, the intensity of the (111) XRD peak increases with increasing the RF power. Electrical properties were measured by hall effect methods at room temperature. The resistivity, carrier concentration, and hall mobility of ZnS deposited on glass substrate as a function of sputtering power. It can be seen that as the sputtering power increase from 100 to 175 W, the resistivity of the films on glass decreased significantly from $8.1{\times}10^{-2}$ to $1.2{\times}10^{-3}\;{\Omega}{\cdot}cm$. This behavior could be explained by the effect of the sputtering power on the mobility and carrier concentration. When the RF power increases, the carrier concentration increases slightly while the resistivity decreases significantly. These variation originate from improved crystallinity and enhanced substitutional doping as the sputtering power increases.

Characteristics of CuGa precursor deposited by sputter as Electron beam irradiation (Sputtering 방법을 이용하여 증착된 CuGa precursor의 전자빔조사에 따른 특성분석)

  • Park, Insun;Kim, Chaewoong;Jung, Seungchul;Kim, Dongjin;Kwon, Hyuk;Kim, Jinhyeok;Jung, Chae Hwan
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.11a
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    • pp.52.1-52.1
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    • 2011
  • 최근에 에너지 자원의 고갈이 다가오는 상황에서 태양전지 분야가 주목받고 있으며 이에 대한 시장이 급격하게 확대되고 있다. 그러나 현재의 태양전지는 주를 이루고있는 실리콘태양전지의 경우 원재료 수급이 불안정하여 가격 변동이 심하다. 따라서 이를 대체할 2세대 태양전지인 박막형 태양전지의 연구가 활발히 이루어지고 있다. 박막형 태양전지 중에서도 주목받고 있는 것은 Cu(In,Ga)$Se_2$(CIGS)박막 태양전지이다. CIGS는 Ga의 농도에 따라 1.02~1.68eV의 다양한 에너지 밴드갭을 갖는 직접천이형 반도체 물질이다. 또한 $1{\times}10^5cm^{-1}$의 높은 광흡수계수를 가지고 있으며, $450{\sim}590^{\circ}C$의 고온공정에서도 매우 안정하여 열화현상이 거의 보이지 않아 박막형 광흡수층 재료로서 적합하다. 흡수층을 제조하는 방법은 여러 가지가 있지만, 본 연구에서는 균일성이 뛰어나고 원료사용효율이 높은 sputtering 방법을 사용하였다. 그리고 결정화하기위해서 유독기체를 사용하는 셀.렌.화. (selenization) 방법 대신 전자빔을 조사하는 방법을 채택하였다. sputtering을 통한 CIGS precursor을 제조하기위해 2~3개의 화합물target을 사용하는데, 대표적인 방법으로 동시에 sputtering하는 co-sputtering 방법과 각각의 단일 층을 쌓아 제조하는 stack형으로 분류된다. 본 연구는 CIGS precursor를 제조하기 앞서 CuGa 단일 층만을 제조하여 공정조건에 따른 박막을 제조하였다. 제조된 CuGa 단일층은 전자빔 처리에 따른 영향을 알아보기 위해 전자빔의 세기와 공정시간을 달리하여 특성을 알아보았다. 실험에서는 Cu:75wt%,Ga:25wt% 조성의 target을 사용하여 공정 압력을 각각 10~1mTorr로 변화시키며 실험을 실시하였으며 공정 power는 50W, 70W, 100W로 변화 시키며 실험을 실시하였다. 이때 실험의 초기진공은 turbo-molecular pump를 이용하여 $1{\times}10^{-6}torr$ 이하로 하였으며, Target과 기판사이의 거리는 모두 같은 조건으로 고정하여 실험을 실시하였다. 박막의 균일성을 증가시키기 위하여 5 rpm의 속도로 기판을 회전하였으며 기판 온도는 가열하지 않고 상온에서 전구체를 증착하였다. 그 후 전자빔의 세기를 고정 시킨 후 전자빔 조사 시간을 조절하여 전자빔 조사 전후의 특성을 각각 분석하였다. 전기적특성은 Hall effect, 4-point probe, 구조적 특성은 SEM,EDS, XRD, XRF 를 이용하여 분석하였다.

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Numerical Simulation of Cavitating Flows on a Foil by Using Bubble Size Distribution Model

  • Ito, Yutaka;Nagasaki, Takao
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2004.03a
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    • pp.216-227
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    • 2004
  • A new cavitating model by using bubble size distribution based on bubbles-mass has been proposed. Both liquid and vapor phases are treated with Eulerian framework as a mixture containing minute cavitating bubbles. In addition vapor phase consists of various sizes of vapor bubbles, which are distributed to classes based on their mass. The bubble number-density for each class was solved by considering the change of the bubble-mass due to phase change as well as generation of new bubbles due to heterogeneous nucleation. In this method, the bubble-mass is treated as an independent variable, and the other dependent variables are solved in spatial coordinates and bubble-mass coordinate. Firstly, we employed this method to calculate bubble nucleation and growth in stationary super-heated liquid nitrogen, and bubble collapse in stationary sub-cooled one. In the case of bubble growth in super-heated liquid, bubble number-density of the smallest class based on its mass is increased due to the nucleation. These new bubbles grow with time, and the bubbles shift to larger class. Therefore void fraction of each class is increased due to the growth in the whole class. On the other hand, in the case of bubble collapse in sub-cooled liquid, the existing bubbles are contracted, and then they shift to smaller class. It finally becomes extinct at the smallest one. Secondly, the present method is applied to a cavitating flow around NACA00l5 foil. Liquid nitrogen and liquid oxygen are employed as working fluids. Cavitation number, $\sigma$, is fixed at 0.15, inlet velocities are changed at 5, 10, 20 and 50m/s. Inlet temperatures are 90K in case of liquid nitrogen, and 90K and 1l0K in case of liquid oxygen. 110K of oxygen is corresponding to the 90K of nitrogen because of the same relative temperature to the critical one, $T_{r}$=$T/T_c^{+}$. Cavitating flow around the NACA0015 foils was properly analyzed by using bubble size distribution. Finally, the method is applied to a cavitating flow in an inducer of the LE-7A hydrogen turbo-pump. This inducer has 3 spiral foils. However, for simplicity, 2D calculation was carried out in an unrolled channel at 0.9R cross-section. The channel moves against the fluid at a peripheral velocity corresponding to the inducer revolutions. Total inlet pressure, $Pt_{in}$, is set at l00KPa, because cavitation is not generated at a design point, $Pt_{in}$=260KPa. The bubbles occur upstream of the foils and collapse between them. Cavitating flow in the inducer was successfully predicted by using the bubble size distribution.

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Study on the Measurement of TMP Pumping Speed (터보분자펌프(TMP) 배기속도 측정에 관한 고찰)

  • Kang, S.B.;Shin, J.H.;Cha, D.J.;Koh, D.Y.;Cheung, W.S.;Lim, J.Y.
    • Journal of the Korean Vacuum Society
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    • v.19 no.4
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    • pp.249-255
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    • 2010
  • Methods of the characteristics evaluation of turbo-molecular pumps (TMP) are well-defined in the international measurement standards such as ISO, PNEUROP, DIN, JIS, and AVS. The Vacuum Center in the Korea Research Institute of Standards and Science (KRISS) has recently designed, constructed, and established the integrated characteristics evaluation system of TMPs based on the international documents by continuously pursuing and acquiring the reliable international credibility through measurement perfection. The measurement of TMP pumping speed is normally performed with the throughput and orifice methods dependent on the mass flow regions. However, in the UHV range of the molecular flow region, the high uncertainties of the gauges, mass flow rates, and conductance are too critical to precisely accumulate reliable data. In order to solve the uncertainty problems of pumping speeds in the UHV range, we introduced a SRG with 1% accuracy and a constant volume flow meter (CVFM) to measure the finite mass flow rates down to $10^{-1}$ Pa-L/s with 3% uncertainty for the throughput method. In this way we have performed the measurement of pumping speed down to $10^{-4}$ Pa with an uncertainty of less than 6% for a 1000 L/s TMP. In this article we suggest that the CVFM has an ability to measure the conductance of the orifice experimentally with flowing the known mass through the orifice chambers, so that we may overcome the discontinuity problem encountering during introducing two measurement methods in one pumping speed evaluation sequence.